JP7074946B1 - 加熱装置 - Google Patents

加熱装置 Download PDF

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Publication number
JP7074946B1
JP7074946B1 JP2022513236A JP2022513236A JP7074946B1 JP 7074946 B1 JP7074946 B1 JP 7074946B1 JP 2022513236 A JP2022513236 A JP 2022513236A JP 2022513236 A JP2022513236 A JP 2022513236A JP 7074946 B1 JP7074946 B1 JP 7074946B1
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Japan
Prior art keywords
plate
heating
heating device
recesses
heaters
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JP2022513236A
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English (en)
Japanese (ja)
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JPWO2022137769A1 (https=
JPWO2022137769A5 (https=
Inventor
一平 鈴木
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Kyocera Corp
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Kyocera Corp
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Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority claimed from PCT/JP2021/039094 external-priority patent/WO2022137769A1/ja
Priority to JP2022079098A priority Critical patent/JP7799553B2/ja
Application granted granted Critical
Publication of JP7074946B1 publication Critical patent/JP7074946B1/ja
Publication of JPWO2022137769A1 publication Critical patent/JPWO2022137769A1/ja
Publication of JPWO2022137769A5 publication Critical patent/JPWO2022137769A5/ja
Active legal-status Critical Current
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  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
JP2022513236A 2020-12-25 2021-10-22 加熱装置 Active JP7074946B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022079098A JP7799553B2 (ja) 2020-12-25 2022-05-12 加熱装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2020218024 2020-12-25
JP2020218024 2020-12-25
JP2021126008 2021-07-30
JP2021126008 2021-07-30
PCT/JP2021/039094 WO2022137769A1 (ja) 2020-12-25 2021-10-22 加熱装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022079098A Division JP7799553B2 (ja) 2020-12-25 2022-05-12 加熱装置

Publications (3)

Publication Number Publication Date
JP7074946B1 true JP7074946B1 (ja) 2022-05-24
JPWO2022137769A1 JPWO2022137769A1 (https=) 2022-06-30
JPWO2022137769A5 JPWO2022137769A5 (https=) 2022-12-05

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ID=81731730

Family Applications (2)

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JP2022513236A Active JP7074946B1 (ja) 2020-12-25 2021-10-22 加熱装置
JP2022079098A Active JP7799553B2 (ja) 2020-12-25 2022-05-12 加熱装置

Family Applications After (1)

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JP2022079098A Active JP7799553B2 (ja) 2020-12-25 2022-05-12 加熱装置

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JP (2) JP7074946B1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592991U (ja) * 1991-09-18 1993-12-17 株式会社八光電機製作所 カートリッジヒータ群
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置
CN210381340U (zh) * 2019-06-28 2020-04-21 郑州祥泰电子科技有限公司 一种模具用陶瓷加热片

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0646076Y2 (ja) * 1989-10-12 1994-11-24 坂口電熱株式会社 加熱ヒータ
JP2001332525A (ja) 2000-05-25 2001-11-30 Sumitomo Osaka Cement Co Ltd セラミックスヒータ
EP1463097A1 (en) 2000-06-02 2004-09-29 Ibiden Co., Ltd. Hot plate unit
JP2005166368A (ja) 2003-12-01 2005-06-23 Ngk Insulators Ltd 加熱装置
JP5562086B2 (ja) 2010-03-25 2014-07-30 京セラ株式会社 加熱用部材およびこれを用いた加熱装置
JP5541068B2 (ja) 2010-10-14 2014-07-09 豊田合成株式会社 Ｃｖｄ装置用加熱ユニット、加熱ユニットを備えたｃｖｄ装置及び半導体素子の製造方法
JP7149786B2 (ja) 2018-09-20 2022-10-07 東京エレクトロン株式会社 載置ユニット及び処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592991U (ja) * 1991-09-18 1993-12-17 株式会社八光電機製作所 カートリッジヒータ群
JP2016207595A (ja) * 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置
CN210381340U (zh) * 2019-06-28 2020-04-21 郑州祥泰电子科技有限公司 一种模具用陶瓷加热片

Also Published As

Publication number Publication date
JP7799553B2 (ja) 2026-01-15
JPWO2022137769A1 (https=) 2022-06-30
JP2022106994A (ja) 2022-07-20

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