JPWO2021261285A5 - - Google Patents

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Publication number
JPWO2021261285A5
JPWO2021261285A5 JP2022531760A JP2022531760A JPWO2021261285A5 JP WO2021261285 A5 JPWO2021261285 A5 JP WO2021261285A5 JP 2022531760 A JP2022531760 A JP 2022531760A JP 2022531760 A JP2022531760 A JP 2022531760A JP WO2021261285 A5 JPWO2021261285 A5 JP WO2021261285A5
Authority
JP
Japan
Prior art keywords
elastomer
plunger
opening
inspection device
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022531760A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021261285A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2021/022238 external-priority patent/WO2021261285A1/ja
Publication of JPWO2021261285A1 publication Critical patent/JPWO2021261285A1/ja
Publication of JPWO2021261285A5 publication Critical patent/JPWO2021261285A5/ja
Pending legal-status Critical Current

Links

JP2022531760A 2020-06-22 2021-06-11 Pending JPWO2021261285A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020106765 2020-06-22
PCT/JP2021/022238 WO2021261285A1 (ja) 2020-06-22 2021-06-11 検査装置

Publications (2)

Publication Number Publication Date
JPWO2021261285A1 JPWO2021261285A1 (https=) 2021-12-30
JPWO2021261285A5 true JPWO2021261285A5 (https=) 2023-03-03

Family

ID=79187482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022531760A Pending JPWO2021261285A1 (https=) 2020-06-22 2021-06-11

Country Status (5)

Country Link
US (1) US20230221350A1 (https=)
JP (1) JPWO2021261285A1 (https=)
CN (2) CN215768872U (https=)
TW (1) TW202201014A (https=)
WO (1) WO2021261285A1 (https=)

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4199209A (en) * 1978-08-18 1980-04-22 Amp Incorporated Electrical interconnecting device
US5427535A (en) * 1993-09-24 1995-06-27 Aries Electronics, Inc. Resilient electrically conductive terminal assemblies
US6264476B1 (en) * 1999-12-09 2001-07-24 High Connection Density, Inc. Wire segment based interposer for high frequency electrical connection
JP3427086B2 (ja) * 2000-02-23 2003-07-14 Ｎｅｃエレクトロニクス株式会社 Ｉｃソケット
JP2001332323A (ja) * 2000-05-24 2001-11-30 Anritsu Corp シリコン電極及び高周波接点シート並びにシリコン電極製造方法
JP3921163B2 (ja) * 2000-09-26 2007-05-30 株式会社アドバンストシステムズジャパン スパイラルコンタクタ及びその製造方法、並びにそれを用いた半導体検査装置、及び電子部品
JP3440243B2 (ja) * 2000-09-26 2003-08-25 株式会社アドバンストシステムズジャパン スパイラルコンタクタ
US6909056B2 (en) * 2002-01-17 2005-06-21 Ardent Concepts, Inc. Compliant electrical contact assembly
US7446545B2 (en) * 2003-05-08 2008-11-04 Unitechno Inc. Anisotropically conductive sheet
JP2007256060A (ja) * 2006-03-23 2007-10-04 Jsr Corp シート状プローブの製造方法
JP2009115579A (ja) * 2007-11-06 2009-05-28 Jsr Corp プローブ部材およびこのプローブ部材を用いたプローブカードならびにこれを用いたウエハ検査装置
US7816932B2 (en) * 2008-02-21 2010-10-19 Teradyne, Inc. Test system with high frequency interposer
JP5107431B2 (ja) * 2008-09-05 2012-12-26 日本発條株式会社 プローブカード
MY155882A (en) * 2009-03-10 2015-12-15 Johnstech Int Corp Electrically conductive pins for microcircuit tester
JP4482707B1 (ja) * 2009-07-13 2010-06-16 株式会社アドバンテスト 試験装置
US8487304B2 (en) * 2010-04-30 2013-07-16 International Business Machines Corporation High performance compliant wafer test probe
JP2013206707A (ja) * 2012-03-28 2013-10-07 Fujitsu Ltd 実装用アダプタ、プリント基板及びその製造方法
KR101266124B1 (ko) * 2012-04-03 2013-05-27 주식회사 아이에스시 고밀도 도전부를 가지는 테스트용 소켓 및 그 제조방법
MY188012A (en) * 2013-12-18 2021-11-09 Jf Microtechnology Sdn Bhd Compressible layer with integrated bridge in ic testing apparatus
JP6436711B2 (ja) * 2014-10-01 2018-12-12 日本発條株式会社 プローブユニット
JP6610322B2 (ja) * 2016-02-15 2019-11-27 オムロン株式会社 プローブピンおよびそれを用いた検査装置
JP2017194322A (ja) * 2016-04-19 2017-10-26 株式会社ヨコオ コンタクタ
JP2018194411A (ja) * 2017-05-17 2018-12-06 株式会社ヨコオ コンタクトプローブ及び検査用治具

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