JPWO2021220536A1 - - Google Patents

Info

Publication number
JPWO2021220536A1
JPWO2021220536A1 JP2022518595A JP2022518595A JPWO2021220536A1 JP WO2021220536 A1 JPWO2021220536 A1 JP WO2021220536A1 JP 2022518595 A JP2022518595 A JP 2022518595A JP 2022518595 A JP2022518595 A JP 2022518595A JP WO2021220536 A1 JPWO2021220536 A1 JP WO2021220536A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022518595A
Other languages
Japanese (ja)
Other versions
JPWO2021220536A5 (https=
JP7482402B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021220536A1 publication Critical patent/JPWO2021220536A1/ja
Publication of JPWO2021220536A5 publication Critical patent/JPWO2021220536A5/ja
Application granted granted Critical
Publication of JP7482402B2 publication Critical patent/JP7482402B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
JP2022518595A 2020-04-27 2020-11-11 共振子及び共振装置 Active JP7482402B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078321 2020-04-27
JP2020078321 2020-04-27
PCT/JP2020/042004 WO2021220536A1 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Publications (3)

Publication Number Publication Date
JPWO2021220536A1 true JPWO2021220536A1 (https=) 2021-11-04
JPWO2021220536A5 JPWO2021220536A5 (https=) 2023-01-10
JP7482402B2 JP7482402B2 (ja) 2024-05-14

Family

ID=78331909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518595A Active JP7482402B2 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Country Status (4)

Country Link
US (1) US11804820B2 (https=)
JP (1) JP7482402B2 (https=)
CN (1) CN115428336A (https=)
WO (1) WO2021220536A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112567629B (zh) * 2018-09-03 2024-10-01 株式会社村田制作所 谐振子以及具备该谐振子的谐振装置
EP4696645A1 (en) * 2023-08-01 2026-02-18 Murata Manufacturing Co., Ltd. Mems device and method for manufacturing mems device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165910A (ja) * 2013-02-28 2014-09-08 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP2016149599A (ja) * 2015-02-10 2016-08-18 セイコーエプソン株式会社 振動子、発振器、リアルタイムクロック、電子機器、および移動体
WO2016175218A1 (ja) * 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017195416A1 (ja) * 2016-05-10 2017-11-16 株式会社村田製作所 共振子及び共振装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011155629A (ja) * 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2012151639A (ja) 2011-01-19 2012-08-09 Seiko Epson Corp 振動片、圧電デバイス、電子機器
JP2015002549A (ja) 2013-06-18 2015-01-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2015002548A (ja) 2013-06-18 2015-01-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6432190B2 (ja) * 2014-07-25 2018-12-05 セイコーエプソン株式会社 振動素子、振動素子の製造方法、振動子、電子機器および移動体
JP6491900B2 (ja) 2015-02-12 2019-03-27 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
WO2017110126A1 (ja) * 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
WO2018216264A1 (ja) * 2017-05-25 2018-11-29 株式会社村田製作所 共振子及び共振装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014165910A (ja) * 2013-02-28 2014-09-08 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP2016149599A (ja) * 2015-02-10 2016-08-18 セイコーエプソン株式会社 振動子、発振器、リアルタイムクロック、電子機器、および移動体
WO2016175218A1 (ja) * 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017195416A1 (ja) * 2016-05-10 2017-11-16 株式会社村田製作所 共振子及び共振装置

Also Published As

Publication number Publication date
US11804820B2 (en) 2023-10-31
WO2021220536A1 (ja) 2021-11-04
US20230015447A1 (en) 2023-01-19
JP7482402B2 (ja) 2024-05-14
CN115428336A (zh) 2022-12-02

Similar Documents

Publication Publication Date Title
BR112023012656A2 (https=)
BR112021014123A2 (https=)
BR112023009656A2 (https=)
BR112022009896A2 (https=)
BR112021017747A2 (https=)
BR112022024743A2 (https=)
BR112022026905A2 (https=)
BR112023011738A2 (https=)
BR112023004146A2 (https=)
BR112023006729A2 (https=)
BR102021018859A2 (https=)
BR102021015500A2 (https=)
BR102021007058A2 (https=)
BR102020022030A2 (https=)
BR112023016292A2 (https=)
BR112023011610A2 (https=)
BR112023011539A2 (https=)
BR112023008976A2 (https=)
BR102021020147A2 (https=)
BR102021018926A2 (https=)
BR102021018167A2 (https=)
BR102021017576A2 (https=)
BR102021016837A2 (https=)
BR102021016551A2 (https=)
BR102021016375A2 (https=)

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221018

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20221018

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231128

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240329

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240411

R150 Certificate of patent or registration of utility model

Ref document number: 7482402

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150