JPWO2021220536A1 - - Google Patents
Info
- Publication number
- JPWO2021220536A1 JPWO2021220536A1 JP2022518595A JP2022518595A JPWO2021220536A1 JP WO2021220536 A1 JPWO2021220536 A1 JP WO2021220536A1 JP 2022518595 A JP2022518595 A JP 2022518595A JP 2022518595 A JP2022518595 A JP 2022518595A JP WO2021220536 A1 JPWO2021220536 A1 JP WO2021220536A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2468—Tuning fork resonators
- H03H9/2478—Single-Ended Tuning Fork resonators
- H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020078321 | 2020-04-27 | ||
JP2020078321 | 2020-04-27 | ||
PCT/JP2020/042004 WO2021220536A1 (ja) | 2020-04-27 | 2020-11-11 | 共振子及び共振装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2021220536A1 true JPWO2021220536A1 (ja) | 2021-11-04 |
JPWO2021220536A5 JPWO2021220536A5 (ja) | 2023-01-10 |
JP7482402B2 JP7482402B2 (ja) | 2024-05-14 |
Family
ID=78331909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022518595A Active JP7482402B2 (ja) | 2020-04-27 | 2020-11-11 | 共振子及び共振装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11804820B2 (ja) |
JP (1) | JP7482402B2 (ja) |
CN (1) | CN115428336A (ja) |
WO (1) | WO2021220536A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112567629A (zh) * | 2018-09-03 | 2021-03-26 | 株式会社村田制作所 | 谐振子以及具备该谐振子的谐振装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012151639A (ja) | 2011-01-19 | 2012-08-09 | Seiko Epson Corp | 振動片、圧電デバイス、電子機器 |
JP2014165910A (ja) * | 2013-02-28 | 2014-09-08 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
JP2015002548A (ja) | 2013-06-18 | 2015-01-05 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP2015002549A (ja) | 2013-06-18 | 2015-01-05 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP2016149599A (ja) * | 2015-02-10 | 2016-08-18 | セイコーエプソン株式会社 | 振動子、発振器、リアルタイムクロック、電子機器、および移動体 |
JP6491900B2 (ja) | 2015-02-12 | 2019-03-27 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
CN107534432B (zh) | 2015-04-28 | 2020-06-05 | 株式会社村田制作所 | 谐振子以及谐振装置 |
WO2017195416A1 (ja) * | 2016-05-10 | 2017-11-16 | 株式会社村田製作所 | 共振子及び共振装置 |
-
2020
- 2020-11-11 CN CN202080099972.4A patent/CN115428336A/zh active Pending
- 2020-11-11 WO PCT/JP2020/042004 patent/WO2021220536A1/ja active Application Filing
- 2020-11-11 JP JP2022518595A patent/JP7482402B2/ja active Active
-
2022
- 2022-09-15 US US17/945,277 patent/US11804820B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2021220536A1 (ja) | 2021-11-04 |
US11804820B2 (en) | 2023-10-31 |
JP7482402B2 (ja) | 2024-05-14 |
CN115428336A (zh) | 2022-12-02 |
US20230015447A1 (en) | 2023-01-19 |
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