CN115428336A - 谐振器以及谐振装置 - Google Patents

谐振器以及谐振装置 Download PDF

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Publication number
CN115428336A
CN115428336A CN202080099972.4A CN202080099972A CN115428336A CN 115428336 A CN115428336 A CN 115428336A CN 202080099972 A CN202080099972 A CN 202080099972A CN 115428336 A CN115428336 A CN 115428336A
Authority
CN
China
Prior art keywords
resonator
base
vibrating
arm
length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080099972.4A
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English (en)
Chinese (zh)
Inventor
河合良太
井上义久
樋口敬之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115428336A publication Critical patent/CN115428336A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2478—Single-Ended Tuning Fork resonators
    • H03H9/2489—Single-Ended Tuning Fork resonators with more than two fork tines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
CN202080099972.4A 2020-04-27 2020-11-11 谐振器以及谐振装置 Pending CN115428336A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-078321 2020-04-27
JP2020078321 2020-04-27
PCT/JP2020/042004 WO2021220536A1 (ja) 2020-04-27 2020-11-11 共振子及び共振装置

Publications (1)

Publication Number Publication Date
CN115428336A true CN115428336A (zh) 2022-12-02

Family

ID=78331909

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080099972.4A Pending CN115428336A (zh) 2020-04-27 2020-11-11 谐振器以及谐振装置

Country Status (4)

Country Link
US (1) US11804820B2 (https=)
JP (1) JP7482402B2 (https=)
CN (1) CN115428336A (https=)
WO (1) WO2021220536A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112567629B (zh) * 2018-09-03 2024-10-01 株式会社村田制作所 谐振子以及具备该谐振子的谐振装置
EP4696645A1 (en) * 2023-08-01 2026-02-18 Murata Manufacturing Co., Ltd. Mems device and method for manufacturing mems device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102111118A (zh) * 2009-12-29 2011-06-29 精工爱普生株式会社 振动片、振子、振荡器、电子设备以及频率调整方法
CN105281705A (zh) * 2014-07-25 2016-01-27 精工爱普生株式会社 振动元件及其制造方法、振子、电子设备和移动体
CN108141197A (zh) * 2015-12-21 2018-06-08 株式会社村田制作所 谐振子和谐振装置
US20190052246A1 (en) * 2016-05-10 2019-02-14 Murata Manufacturing Co., Ltd. Resonator and resonance device
CN110663176A (zh) * 2017-05-25 2020-01-07 株式会社村田制作所 谐振器以及谐振装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012151639A (ja) 2011-01-19 2012-08-09 Seiko Epson Corp 振動片、圧電デバイス、電子機器
JP2014165910A (ja) 2013-02-28 2014-09-08 Seiko Epson Corp 振動片、振動子、発振器、電子機器及び移動体
JP2015002549A (ja) 2013-06-18 2015-01-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2015002548A (ja) 2013-06-18 2015-01-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2016149599A (ja) 2015-02-10 2016-08-18 セイコーエプソン株式会社 振動子、発振器、リアルタイムクロック、電子機器、および移動体
JP6491900B2 (ja) 2015-02-12 2019-03-27 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
WO2016175218A1 (ja) 2015-04-28 2016-11-03 株式会社村田製作所 共振子及び共振装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102111118A (zh) * 2009-12-29 2011-06-29 精工爱普生株式会社 振动片、振子、振荡器、电子设备以及频率调整方法
CN105281705A (zh) * 2014-07-25 2016-01-27 精工爱普生株式会社 振动元件及其制造方法、振子、电子设备和移动体
CN108141197A (zh) * 2015-12-21 2018-06-08 株式会社村田制作所 谐振子和谐振装置
US20190052246A1 (en) * 2016-05-10 2019-02-14 Murata Manufacturing Co., Ltd. Resonator and resonance device
CN110663176A (zh) * 2017-05-25 2020-01-07 株式会社村田制作所 谐振器以及谐振装置

Also Published As

Publication number Publication date
US11804820B2 (en) 2023-10-31
WO2021220536A1 (ja) 2021-11-04
US20230015447A1 (en) 2023-01-19
JPWO2021220536A1 (https=) 2021-11-04
JP7482402B2 (ja) 2024-05-14

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