JPWO2021100297A1 - - Google Patents

Info

Publication number
JPWO2021100297A1
JPWO2021100297A1 JP2021558185A JP2021558185A JPWO2021100297A1 JP WO2021100297 A1 JPWO2021100297 A1 JP WO2021100297A1 JP 2021558185 A JP2021558185 A JP 2021558185A JP 2021558185 A JP2021558185 A JP 2021558185A JP WO2021100297 A1 JPWO2021100297 A1 JP WO2021100297A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021558185A
Other languages
Japanese (ja)
Other versions
JP7248147B2 (ja
JPWO2021100297A5 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021100297A1 publication Critical patent/JPWO2021100297A1/ja
Publication of JPWO2021100297A5 publication Critical patent/JPWO2021100297A5/ja
Application granted granted Critical
Publication of JP7248147B2 publication Critical patent/JP7248147B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C11/00—Trolleys or crabs, e.g. operating above runways
    • B66C11/02—Trolleys or crabs, e.g. operating above runways with operating gear or operator's cabin suspended, or laterally offset, from runway or track
    • B66C11/04—Underhung trolleys
    • B66C11/06—Underhung trolleys running on monorails
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
    • B66C13/085—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions electrical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021558185A 2019-11-20 2020-09-15 天井搬送車 Active JP7248147B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019209950 2019-11-20
JP2019209950 2019-11-20
PCT/JP2020/034895 WO2021100297A1 (fr) 2019-11-20 2020-09-15 Support de plafond

Publications (3)

Publication Number Publication Date
JPWO2021100297A1 true JPWO2021100297A1 (fr) 2021-05-27
JPWO2021100297A5 JPWO2021100297A5 (fr) 2023-01-23
JP7248147B2 JP7248147B2 (ja) 2023-03-29

Family

ID=75981636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021558185A Active JP7248147B2 (ja) 2019-11-20 2020-09-15 天井搬送車

Country Status (8)

Country Link
US (1) US12106992B2 (fr)
EP (1) EP4063297A4 (fr)
JP (1) JP7248147B2 (fr)
KR (1) KR20220100670A (fr)
CN (1) CN114728743B (fr)
IL (1) IL293002B1 (fr)
TW (1) TWI830966B (fr)
WO (1) WO2021100297A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL302848A (en) * 2020-11-18 2023-07-01 Murata Machinery Ltd Transport vehicle system
WO2023281827A1 (fr) * 2021-07-08 2023-01-12 村田機械株式会社 Support à déplacement aérien
WO2023079882A1 (fr) * 2021-11-05 2023-05-11 村田機械株式会社 Véhicule de transport aérien
CN118366904B (zh) * 2024-06-19 2024-08-30 华芯智上半导体设备(上海)有限公司 空中搬运系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5693686A (en) * 1979-12-24 1981-07-29 Mitsui Shipbuilding Eng Brake gear for swing of hung load of crane and its method
JPH10194410A (ja) * 1997-01-09 1998-07-28 Toyota Autom Loom Works Ltd 搬送台車における昇降ベルトの巻取構造及び搬送台車
WO2018179369A1 (fr) * 2017-03-31 2018-10-04 平田機工株式会社 Dispositif de transport

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7101224A (fr) * 1971-01-29 1972-08-01
US5819962A (en) * 1993-03-05 1998-10-13 Mitsubishi Jukogyo Kabushiki Kaisha Apparatus for stopping the oscillation of hoisted cargo
KR100314143B1 (ko) * 1995-08-30 2001-12-28 튜보 린타마키, 타피오 하카카리 크레인의 로드와 로딩부 제어 장치 및 제어 방법
AU4275497A (en) * 1996-11-07 1998-05-14 Ishikawajima-Harima Jukogyo Kabushiki Kaisha Container crane
US7152895B1 (en) * 1999-07-15 2006-12-26 Kci Konecranes Plc System and method for controlling the movements of container handling device
JP2006008355A (ja) * 2004-06-28 2006-01-12 Murata Mach Ltd 天井走行車
JP2013035657A (ja) * 2011-08-08 2013-02-21 Murata Machinery Ltd 移動装置
JP5693686B2 (ja) 2013-09-09 2015-04-01 三菱電機株式会社 回転電機
JP6641926B2 (ja) * 2015-11-26 2020-02-05 株式会社ダイフク 物品搬送設備
JP6344410B2 (ja) * 2016-02-19 2018-06-20 村田機械株式会社 天井搬送車
JP2017154840A (ja) 2016-02-29 2017-09-07 株式会社ダイフク 物品搬送設備
WO2017199593A1 (fr) * 2016-05-20 2017-11-23 村田機械株式会社 Véhicule de transport et procédé de transport
EP3533728B1 (fr) 2016-10-25 2022-02-09 Murata Machinery, Ltd. Véhicule de transport aérien
JP6777166B2 (ja) * 2017-02-06 2020-10-28 村田機械株式会社 天井搬送車
JP6844715B2 (ja) * 2017-11-02 2021-03-17 村田機械株式会社 天井搬送車システム及び天井搬送車システムでの物品の一時保管方法
KR102580660B1 (ko) 2018-10-05 2023-09-21 세메스 주식회사 비히클 및 비히클의 수평도 조절 방법
WO2022107449A1 (fr) * 2020-11-18 2022-05-27 村田機械株式会社 Véhicule de transport aérien et système de véhicule de transport

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5693686A (en) * 1979-12-24 1981-07-29 Mitsui Shipbuilding Eng Brake gear for swing of hung load of crane and its method
JPH10194410A (ja) * 1997-01-09 1998-07-28 Toyota Autom Loom Works Ltd 搬送台車における昇降ベルトの巻取構造及び搬送台車
WO2018179369A1 (fr) * 2017-03-31 2018-10-04 平田機工株式会社 Dispositif de transport

Also Published As

Publication number Publication date
WO2021100297A1 (fr) 2021-05-27
TWI830966B (zh) 2024-02-01
IL293002B1 (en) 2024-10-01
IL293002A (en) 2022-07-01
KR20220100670A (ko) 2022-07-15
JP7248147B2 (ja) 2023-03-29
EP4063297A1 (fr) 2022-09-28
CN114728743A (zh) 2022-07-08
EP4063297A4 (fr) 2023-12-20
TW202128528A (zh) 2021-08-01
CN114728743B (zh) 2024-03-19
US12106992B2 (en) 2024-10-01
US20220402731A1 (en) 2022-12-22

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