JPWO2021062071A5 - - Google Patents
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- Publication number
- JPWO2021062071A5 JPWO2021062071A5 JP2022518945A JP2022518945A JPWO2021062071A5 JP WO2021062071 A5 JPWO2021062071 A5 JP WO2021062071A5 JP 2022518945 A JP2022518945 A JP 2022518945A JP 2022518945 A JP2022518945 A JP 2022518945A JP WO2021062071 A5 JPWO2021062071 A5 JP WO2021062071A5
- Authority
- JP
- Japan
- Prior art keywords
- photocathode
- emitter
- array
- plasmonic
- photocathode emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 16
- 239000000758 substrate Substances 0.000 claims 6
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910002704 AlGaN Inorganic materials 0.000 claims 2
- 229910002601 GaN Inorganic materials 0.000 claims 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 244000309464 bull Species 0.000 claims 2
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Inorganic materials [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 2
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 2
- 239000005350 fused silica glass Substances 0.000 claims 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962907502P | 2019-09-27 | 2019-09-27 | |
| US62/907,502 | 2019-09-27 | ||
| US17/029,501 US11217416B2 (en) | 2019-09-27 | 2020-09-23 | Plasmonic photocathode emitters |
| US17/029,501 | 2020-09-23 | ||
| PCT/US2020/052598 WO2021062071A1 (en) | 2019-09-27 | 2020-09-25 | Plasmonic photocathode emitters |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2022551419A JP2022551419A (ja) | 2022-12-09 |
| JP2022551419A5 JP2022551419A5 (https=) | 2023-09-14 |
| JPWO2021062071A5 true JPWO2021062071A5 (https=) | 2023-09-14 |
| JP7498771B2 JP7498771B2 (ja) | 2024-06-12 |
Family
ID=75162180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022518945A Active JP7498771B2 (ja) | 2019-09-27 | 2020-09-25 | プラズモニック光電陰極放出器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11217416B2 (https=) |
| JP (1) | JP7498771B2 (https=) |
| KR (1) | KR102662487B1 (https=) |
| IL (1) | IL291259B2 (https=) |
| TW (1) | TWI843895B (https=) |
| WO (1) | WO2021062071A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11495428B2 (en) * | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7015467B2 (en) | 2002-10-10 | 2006-03-21 | Applied Materials, Inc. | Generating electrons with an activated photocathode |
| US20050285128A1 (en) | 2004-02-10 | 2005-12-29 | California Institute Of Technology | Surface plasmon light emitter structure and method of manufacture |
| US7301263B2 (en) * | 2004-05-28 | 2007-11-27 | Applied Materials, Inc. | Multiple electron beam system with electron transmission gates |
| US8482197B2 (en) * | 2006-07-05 | 2013-07-09 | Hamamatsu Photonics K.K. | Photocathode, electron tube, field assist type photocathode, field assist type photocathode array, and field assist type electron tube |
| JP4805043B2 (ja) | 2006-07-05 | 2011-11-02 | 浜松ホトニクス株式会社 | 光電陰極、光電陰極アレイ、および電子管 |
| JP5000216B2 (ja) | 2006-07-05 | 2012-08-15 | 浜松ホトニクス株式会社 | 光電陰極および電子管 |
| JP2009032620A (ja) | 2007-07-30 | 2009-02-12 | Hamamatsu Photonics Kk | 光電陰極 |
| JP5291378B2 (ja) | 2008-05-15 | 2013-09-18 | スタンレー電気株式会社 | フォトカソード装置 |
| CN102187425B (zh) * | 2008-10-16 | 2013-11-06 | 小利兰·斯坦福大学托管委员会 | 光子增强型热离子发射 |
| KR101625261B1 (ko) | 2009-08-31 | 2016-05-27 | 고쿠리츠 다이가쿠 호진 교토 다이가쿠 | 자외선 조사장치 |
| KR101182359B1 (ko) | 2010-12-13 | 2012-09-20 | 한국과학기술원 | 메탈 나노 입자의 표면 플라즈몬 공명 특성을 적용하여 강화된 음극선 발광 형광체의 구조 |
| US9966216B2 (en) | 2011-11-04 | 2018-05-08 | Princeton University | Photo-electron source assembly with scaled nanostructures and nanoscale metallic photonic resonant cavity, and method of making same |
| US9287057B2 (en) * | 2013-06-05 | 2016-03-15 | City University Of Hong Kong | Plasmonic enhanced tandem dye-sensitized solar cell with metallic nanostructures |
| KR102320646B1 (ko) | 2014-07-24 | 2021-11-04 | 유니버셜 디스플레이 코포레이션 | 향상층(들)을 갖는 oled 디바이스 |
| JP2017053823A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 電子線照射装置 |
| US10141155B2 (en) * | 2016-12-20 | 2018-11-27 | Kla-Tencor Corporation | Electron beam emitters with ruthenium coating |
| US10395884B2 (en) | 2017-10-10 | 2019-08-27 | Kla-Tencor Corporation | Ruthenium encapsulated photocathode electron emitter |
| JP2019113604A (ja) | 2017-12-21 | 2019-07-11 | ソニーセミコンダクタソリューションズ株式会社 | 電磁波処理装置 |
| US10741354B1 (en) * | 2018-02-14 | 2020-08-11 | Kla-Tencor Corporation | Photocathode emitter system that generates multiple electron beams |
| US11495428B2 (en) | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
-
2020
- 2020-09-23 US US17/029,501 patent/US11217416B2/en active Active
- 2020-09-25 WO PCT/US2020/052598 patent/WO2021062071A1/en not_active Ceased
- 2020-09-25 IL IL291259A patent/IL291259B2/en unknown
- 2020-09-25 KR KR1020227013312A patent/KR102662487B1/ko active Active
- 2020-09-25 JP JP2022518945A patent/JP7498771B2/ja active Active
- 2020-09-26 TW TW109133510A patent/TWI843895B/zh active
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