KR102662487B1 - 플라즈몬 포토캐소드 이미터 - Google Patents

플라즈몬 포토캐소드 이미터 Download PDF

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Publication number
KR102662487B1
KR102662487B1 KR1020227013312A KR20227013312A KR102662487B1 KR 102662487 B1 KR102662487 B1 KR 102662487B1 KR 1020227013312 A KR1020227013312 A KR 1020227013312A KR 20227013312 A KR20227013312 A KR 20227013312A KR 102662487 B1 KR102662487 B1 KR 102662487B1
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South Korea
Prior art keywords
photocathode
plasmonic
array
aperture
emitter
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KR1020227013312A
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Korean (ko)
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KR20220065858A (ko
Inventor
세르게이 벨루소프
안드레이 크니즈니크
인나 엠 이스칸다로바
보리스 포탑킨
카테리나 이오아케이미디
질다르도 델가도
프랑세스 힐
개리 로페즈
페드라자 미구엘 에이 곤자레스
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케이엘에이 코포레이션
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/34—Photo-emissive cathodes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/34—Photoemissive electrodes
    • H01J2201/342—Cathodes
    • H01J2201/3421—Composition of the emitting surface
    • H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
KR1020227013312A 2019-09-27 2020-09-25 플라즈몬 포토캐소드 이미터 Active KR102662487B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962907502P 2019-09-27 2019-09-27
US62/907,502 2019-09-27
US17/029,501 US11217416B2 (en) 2019-09-27 2020-09-23 Plasmonic photocathode emitters
US17/029,501 2020-09-23
PCT/US2020/052598 WO2021062071A1 (en) 2019-09-27 2020-09-25 Plasmonic photocathode emitters

Publications (2)

Publication Number Publication Date
KR20220065858A KR20220065858A (ko) 2022-05-20
KR102662487B1 true KR102662487B1 (ko) 2024-04-30

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ID=75162180

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227013312A Active KR102662487B1 (ko) 2019-09-27 2020-09-25 플라즈몬 포토캐소드 이미터

Country Status (6)

Country Link
US (1) US11217416B2 (https=)
JP (1) JP7498771B2 (https=)
KR (1) KR102662487B1 (https=)
IL (1) IL291259B2 (https=)
TW (1) TWI843895B (https=)
WO (1) WO2021062071A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11495428B2 (en) * 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170076907A1 (en) * 2015-09-11 2017-03-16 Kabushiki Kaisha Toshiba Electron beam irradiation device
US20180174794A1 (en) * 2016-12-20 2018-06-21 Kla-Tencor Corporation Electron Beam Emitters with Ruthenium Coating
WO2019124114A1 (ja) * 2017-12-21 2019-06-27 ソニーセミコンダクタソリューションズ株式会社 電磁波処理装置

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Publication number Priority date Publication date Assignee Title
US7015467B2 (en) 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
US20050285128A1 (en) 2004-02-10 2005-12-29 California Institute Of Technology Surface plasmon light emitter structure and method of manufacture
US7301263B2 (en) * 2004-05-28 2007-11-27 Applied Materials, Inc. Multiple electron beam system with electron transmission gates
US8482197B2 (en) * 2006-07-05 2013-07-09 Hamamatsu Photonics K.K. Photocathode, electron tube, field assist type photocathode, field assist type photocathode array, and field assist type electron tube
JP4805043B2 (ja) 2006-07-05 2011-11-02 浜松ホトニクス株式会社 光電陰極、光電陰極アレイ、および電子管
JP5000216B2 (ja) 2006-07-05 2012-08-15 浜松ホトニクス株式会社 光電陰極および電子管
JP2009032620A (ja) 2007-07-30 2009-02-12 Hamamatsu Photonics Kk 光電陰極
JP5291378B2 (ja) 2008-05-15 2013-09-18 スタンレー電気株式会社 フォトカソード装置
CN102187425B (zh) * 2008-10-16 2013-11-06 小利兰·斯坦福大学托管委员会 光子增强型热离子发射
KR101625261B1 (ko) 2009-08-31 2016-05-27 고쿠리츠 다이가쿠 호진 교토 다이가쿠 자외선 조사장치
KR101182359B1 (ko) 2010-12-13 2012-09-20 한국과학기술원 메탈 나노 입자의 표면 플라즈몬 공명 특성을 적용하여 강화된 음극선 발광 형광체의 구조
US9966216B2 (en) 2011-11-04 2018-05-08 Princeton University Photo-electron source assembly with scaled nanostructures and nanoscale metallic photonic resonant cavity, and method of making same
US9287057B2 (en) * 2013-06-05 2016-03-15 City University Of Hong Kong Plasmonic enhanced tandem dye-sensitized solar cell with metallic nanostructures
KR102320646B1 (ko) 2014-07-24 2021-11-04 유니버셜 디스플레이 코포레이션 향상층(들)을 갖는 oled 디바이스
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter
US10741354B1 (en) * 2018-02-14 2020-08-11 Kla-Tencor Corporation Photocathode emitter system that generates multiple electron beams
US11495428B2 (en) 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170076907A1 (en) * 2015-09-11 2017-03-16 Kabushiki Kaisha Toshiba Electron beam irradiation device
US20180174794A1 (en) * 2016-12-20 2018-06-21 Kla-Tencor Corporation Electron Beam Emitters with Ruthenium Coating
WO2019124114A1 (ja) * 2017-12-21 2019-06-27 ソニーセミコンダクタソリューションズ株式会社 電磁波処理装置

Also Published As

Publication number Publication date
TWI843895B (zh) 2024-06-01
IL291259B1 (en) 2024-09-01
JP7498771B2 (ja) 2024-06-12
TW202119448A (zh) 2021-05-16
KR20220065858A (ko) 2022-05-20
IL291259A (en) 2022-05-01
US11217416B2 (en) 2022-01-04
JP2022551419A (ja) 2022-12-09
US20210098223A1 (en) 2021-04-01
IL291259B2 (en) 2025-01-01
WO2021062071A1 (en) 2021-04-01

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