JP2022551419A5 - - Google Patents

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Publication number
JP2022551419A5
JP2022551419A5 JP2022518945A JP2022518945A JP2022551419A5 JP 2022551419 A5 JP2022551419 A5 JP 2022551419A5 JP 2022518945 A JP2022518945 A JP 2022518945A JP 2022518945 A JP2022518945 A JP 2022518945A JP 2022551419 A5 JP2022551419 A5 JP 2022551419A5
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JP
Japan
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JP2022518945A
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Japanese (ja)
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JP7498771B2 (ja
JP2022551419A (ja
JPWO2021062071A5 (https=
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Priority claimed from US17/029,501 external-priority patent/US11217416B2/en
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Publication of JPWO2021062071A5 publication Critical patent/JPWO2021062071A5/ja
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JP2022518945A 2019-09-27 2020-09-25 プラズモニック光電陰極放出器 Active JP7498771B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962907502P 2019-09-27 2019-09-27
US62/907,502 2019-09-27
US17/029,501 US11217416B2 (en) 2019-09-27 2020-09-23 Plasmonic photocathode emitters
US17/029,501 2020-09-23
PCT/US2020/052598 WO2021062071A1 (en) 2019-09-27 2020-09-25 Plasmonic photocathode emitters

Publications (4)

Publication Number Publication Date
JP2022551419A JP2022551419A (ja) 2022-12-09
JP2022551419A5 true JP2022551419A5 (https=) 2023-09-14
JPWO2021062071A5 JPWO2021062071A5 (https=) 2023-09-14
JP7498771B2 JP7498771B2 (ja) 2024-06-12

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ID=75162180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518945A Active JP7498771B2 (ja) 2019-09-27 2020-09-25 プラズモニック光電陰極放出器

Country Status (6)

Country Link
US (1) US11217416B2 (https=)
JP (1) JP7498771B2 (https=)
KR (1) KR102662487B1 (https=)
IL (1) IL291259B2 (https=)
TW (1) TWI843895B (https=)
WO (1) WO2021062071A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11495428B2 (en) * 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7015467B2 (en) 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
US20050285128A1 (en) 2004-02-10 2005-12-29 California Institute Of Technology Surface plasmon light emitter structure and method of manufacture
US7301263B2 (en) * 2004-05-28 2007-11-27 Applied Materials, Inc. Multiple electron beam system with electron transmission gates
US8482197B2 (en) * 2006-07-05 2013-07-09 Hamamatsu Photonics K.K. Photocathode, electron tube, field assist type photocathode, field assist type photocathode array, and field assist type electron tube
JP4805043B2 (ja) 2006-07-05 2011-11-02 浜松ホトニクス株式会社 光電陰極、光電陰極アレイ、および電子管
JP5000216B2 (ja) 2006-07-05 2012-08-15 浜松ホトニクス株式会社 光電陰極および電子管
JP2009032620A (ja) 2007-07-30 2009-02-12 Hamamatsu Photonics Kk 光電陰極
JP5291378B2 (ja) 2008-05-15 2013-09-18 スタンレー電気株式会社 フォトカソード装置
CN102187425B (zh) * 2008-10-16 2013-11-06 小利兰·斯坦福大学托管委员会 光子增强型热离子发射
KR101625261B1 (ko) 2009-08-31 2016-05-27 고쿠리츠 다이가쿠 호진 교토 다이가쿠 자외선 조사장치
KR101182359B1 (ko) 2010-12-13 2012-09-20 한국과학기술원 메탈 나노 입자의 표면 플라즈몬 공명 특성을 적용하여 강화된 음극선 발광 형광체의 구조
US9966216B2 (en) 2011-11-04 2018-05-08 Princeton University Photo-electron source assembly with scaled nanostructures and nanoscale metallic photonic resonant cavity, and method of making same
US9287057B2 (en) * 2013-06-05 2016-03-15 City University Of Hong Kong Plasmonic enhanced tandem dye-sensitized solar cell with metallic nanostructures
KR102320646B1 (ko) 2014-07-24 2021-11-04 유니버셜 디스플레이 코포레이션 향상층(들)을 갖는 oled 디바이스
JP2017053823A (ja) * 2015-09-11 2017-03-16 株式会社東芝 電子線照射装置
US10141155B2 (en) * 2016-12-20 2018-11-27 Kla-Tencor Corporation Electron beam emitters with ruthenium coating
US10395884B2 (en) 2017-10-10 2019-08-27 Kla-Tencor Corporation Ruthenium encapsulated photocathode electron emitter
JP2019113604A (ja) 2017-12-21 2019-07-11 ソニーセミコンダクタソリューションズ株式会社 電磁波処理装置
US10741354B1 (en) * 2018-02-14 2020-08-11 Kla-Tencor Corporation Photocathode emitter system that generates multiple electron beams
US11495428B2 (en) 2019-02-17 2022-11-08 Kla Corporation Plasmonic photocathode emitters at ultraviolet and visible wavelengths

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