TWI843895B - 表面電漿共振光電陰極發射器及半導體檢測之方法 - Google Patents
表面電漿共振光電陰極發射器及半導體檢測之方法 Download PDFInfo
- Publication number
- TWI843895B TWI843895B TW109133510A TW109133510A TWI843895B TW I843895 B TWI843895 B TW I843895B TW 109133510 A TW109133510 A TW 109133510A TW 109133510 A TW109133510 A TW 109133510A TW I843895 B TWI843895 B TW I843895B
- Authority
- TW
- Taiwan
- Prior art keywords
- photocathode
- surface plasmon
- plasmon resonance
- resonance structure
- structure array
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 238000000034 method Methods 0.000 title claims description 21
- 238000007689 inspection Methods 0.000 title description 18
- 238000010894 electron beam technology Methods 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 claims description 60
- 239000011148 porous material Substances 0.000 claims description 37
- LYQFWZFBNBDLEO-UHFFFAOYSA-M caesium bromide Chemical compound [Br-].[Cs+] LYQFWZFBNBDLEO-UHFFFAOYSA-M 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 244000309464 bull Species 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 9
- 229910002704 AlGaN Inorganic materials 0.000 claims description 7
- 229910002601 GaN Inorganic materials 0.000 claims description 7
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 7
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Inorganic materials [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 239000005350 fused silica glass Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 6
- 239000010980 sapphire Substances 0.000 claims description 6
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims description 4
- 229910001634 calcium fluoride Inorganic materials 0.000 claims description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims description 4
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 229910004261 CaF 2 Inorganic materials 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 31
- 238000004519 manufacturing process Methods 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 238000013500 data storage Methods 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 241001522301 Apogonichthyoides nigripinnis Species 0.000 description 1
- 229910000929 Ru alloy Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000012885 constant function Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001803 electron scattering Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/34—Photo-emissive cathodes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/34—Photoemissive electrodes
- H01J2201/342—Cathodes
- H01J2201/3421—Composition of the emitting surface
- H01J2201/3423—Semiconductors, e.g. GaAs, NEA emitters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962907502P | 2019-09-27 | 2019-09-27 | |
| US62/907,502 | 2019-09-27 | ||
| US17/029,501 US11217416B2 (en) | 2019-09-27 | 2020-09-23 | Plasmonic photocathode emitters |
| US17/029,501 | 2020-09-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202119448A TW202119448A (zh) | 2021-05-16 |
| TWI843895B true TWI843895B (zh) | 2024-06-01 |
Family
ID=75162180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109133510A TWI843895B (zh) | 2019-09-27 | 2020-09-26 | 表面電漿共振光電陰極發射器及半導體檢測之方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11217416B2 (https=) |
| JP (1) | JP7498771B2 (https=) |
| KR (1) | KR102662487B1 (https=) |
| IL (1) | IL291259B2 (https=) |
| TW (1) | TWI843895B (https=) |
| WO (1) | WO2021062071A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11495428B2 (en) * | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080042563A1 (en) * | 2006-07-05 | 2008-02-21 | Hamamatsu Photonics K.K. | Photocathode, electron tube, field assist type photocathode, field asist type photocathode array, and field asist type electron tube |
| TW201937522A (zh) * | 2018-02-14 | 2019-09-16 | 美商克萊譚克公司 | 產生多電子束之光電陰極發射器系統 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7015467B2 (en) | 2002-10-10 | 2006-03-21 | Applied Materials, Inc. | Generating electrons with an activated photocathode |
| US20050285128A1 (en) | 2004-02-10 | 2005-12-29 | California Institute Of Technology | Surface plasmon light emitter structure and method of manufacture |
| US7301263B2 (en) * | 2004-05-28 | 2007-11-27 | Applied Materials, Inc. | Multiple electron beam system with electron transmission gates |
| JP4805043B2 (ja) | 2006-07-05 | 2011-11-02 | 浜松ホトニクス株式会社 | 光電陰極、光電陰極アレイ、および電子管 |
| JP5000216B2 (ja) | 2006-07-05 | 2012-08-15 | 浜松ホトニクス株式会社 | 光電陰極および電子管 |
| JP2009032620A (ja) | 2007-07-30 | 2009-02-12 | Hamamatsu Photonics Kk | 光電陰極 |
| JP5291378B2 (ja) | 2008-05-15 | 2013-09-18 | スタンレー電気株式会社 | フォトカソード装置 |
| CN102187425B (zh) * | 2008-10-16 | 2013-11-06 | 小利兰·斯坦福大学托管委员会 | 光子增强型热离子发射 |
| KR101625261B1 (ko) | 2009-08-31 | 2016-05-27 | 고쿠리츠 다이가쿠 호진 교토 다이가쿠 | 자외선 조사장치 |
| KR101182359B1 (ko) | 2010-12-13 | 2012-09-20 | 한국과학기술원 | 메탈 나노 입자의 표면 플라즈몬 공명 특성을 적용하여 강화된 음극선 발광 형광체의 구조 |
| US9966216B2 (en) | 2011-11-04 | 2018-05-08 | Princeton University | Photo-electron source assembly with scaled nanostructures and nanoscale metallic photonic resonant cavity, and method of making same |
| US9287057B2 (en) * | 2013-06-05 | 2016-03-15 | City University Of Hong Kong | Plasmonic enhanced tandem dye-sensitized solar cell with metallic nanostructures |
| KR102320646B1 (ko) | 2014-07-24 | 2021-11-04 | 유니버셜 디스플레이 코포레이션 | 향상층(들)을 갖는 oled 디바이스 |
| JP2017053823A (ja) * | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 電子線照射装置 |
| US10141155B2 (en) * | 2016-12-20 | 2018-11-27 | Kla-Tencor Corporation | Electron beam emitters with ruthenium coating |
| US10395884B2 (en) | 2017-10-10 | 2019-08-27 | Kla-Tencor Corporation | Ruthenium encapsulated photocathode electron emitter |
| JP2019113604A (ja) | 2017-12-21 | 2019-07-11 | ソニーセミコンダクタソリューションズ株式会社 | 電磁波処理装置 |
| US11495428B2 (en) | 2019-02-17 | 2022-11-08 | Kla Corporation | Plasmonic photocathode emitters at ultraviolet and visible wavelengths |
-
2020
- 2020-09-23 US US17/029,501 patent/US11217416B2/en active Active
- 2020-09-25 WO PCT/US2020/052598 patent/WO2021062071A1/en not_active Ceased
- 2020-09-25 IL IL291259A patent/IL291259B2/en unknown
- 2020-09-25 KR KR1020227013312A patent/KR102662487B1/ko active Active
- 2020-09-25 JP JP2022518945A patent/JP7498771B2/ja active Active
- 2020-09-26 TW TW109133510A patent/TWI843895B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080042563A1 (en) * | 2006-07-05 | 2008-02-21 | Hamamatsu Photonics K.K. | Photocathode, electron tube, field assist type photocathode, field asist type photocathode array, and field asist type electron tube |
| TW201937522A (zh) * | 2018-02-14 | 2019-09-16 | 美商克萊譚克公司 | 產生多電子束之光電陰極發射器系統 |
Also Published As
| Publication number | Publication date |
|---|---|
| IL291259B1 (en) | 2024-09-01 |
| JP7498771B2 (ja) | 2024-06-12 |
| TW202119448A (zh) | 2021-05-16 |
| KR20220065858A (ko) | 2022-05-20 |
| IL291259A (en) | 2022-05-01 |
| US11217416B2 (en) | 2022-01-04 |
| JP2022551419A (ja) | 2022-12-09 |
| US20210098223A1 (en) | 2021-04-01 |
| IL291259B2 (en) | 2025-01-01 |
| KR102662487B1 (ko) | 2024-04-30 |
| WO2021062071A1 (en) | 2021-04-01 |
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