JPWO2021044505A5 - - Google Patents

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Publication number
JPWO2021044505A5
JPWO2021044505A5 JP2021543829A JP2021543829A JPWO2021044505A5 JP WO2021044505 A5 JPWO2021044505 A5 JP WO2021044505A5 JP 2021543829 A JP2021543829 A JP 2021543829A JP 2021543829 A JP2021543829 A JP 2021543829A JP WO2021044505 A5 JPWO2021044505 A5 JP WO2021044505A5
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JP
Japan
Prior art keywords
moving
mobile device
levitation
processing system
processing
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JP2021543829A
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English (en)
Japanese (ja)
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JP7435613B2 (ja
JPWO2021044505A1 (https=
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Priority claimed from PCT/JP2019/034507 external-priority patent/WO2021044505A1/ja
Publication of JPWO2021044505A1 publication Critical patent/JPWO2021044505A1/ja
Publication of JPWO2021044505A5 publication Critical patent/JPWO2021044505A5/ja
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Publication of JP7435613B2 publication Critical patent/JP7435613B2/ja
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JP2021543829A 2019-09-03 2019-09-03 移動体装置及び加工システム Active JP7435613B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/034507 WO2021044505A1 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Publications (3)

Publication Number Publication Date
JPWO2021044505A1 JPWO2021044505A1 (https=) 2021-03-11
JPWO2021044505A5 true JPWO2021044505A5 (https=) 2022-05-10
JP7435613B2 JP7435613B2 (ja) 2024-02-21

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ID=74851984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021543829A Active JP7435613B2 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Country Status (2)

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JP (1) JP7435613B2 (https=)
WO (1) WO2021044505A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7582028B2 (ja) * 2021-03-31 2024-11-13 日本精工株式会社 テーブル装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4782710B2 (ja) * 2006-03-02 2011-09-28 住友重機械工業株式会社 ステージ装置
US20110042874A1 (en) * 2009-08-20 2011-02-24 Nikon Corporation Object processing apparatus, exposure apparatus and exposure method, and device manufacturing method
JP5776812B1 (ja) * 2014-04-01 2015-09-09 日本精工株式会社 テーブル装置、及び搬送装置
JP6379612B2 (ja) * 2014-04-11 2018-08-29 株式会社ニコン 移動体装置及び露光装置、並びにデバイス製造方法
JP6340933B2 (ja) * 2014-06-16 2018-06-13 トヨタ自動車株式会社 ステージ装置
JP6218770B2 (ja) * 2014-06-23 2017-10-25 三菱電機株式会社 レーザ加工装置
JP2016166924A (ja) * 2015-03-09 2016-09-15 株式会社ニューフレアテクノロジー ステージ装置
WO2017099087A1 (ja) * 2015-12-07 2017-06-15 株式会社ニコン 露光装置及び露光装置の制御方法、並びにデバイス製造方法

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