JP7435613B2 - 移動体装置及び加工システム - Google Patents

移動体装置及び加工システム Download PDF

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Publication number
JP7435613B2
JP7435613B2 JP2021543829A JP2021543829A JP7435613B2 JP 7435613 B2 JP7435613 B2 JP 7435613B2 JP 2021543829 A JP2021543829 A JP 2021543829A JP 2021543829 A JP2021543829 A JP 2021543829A JP 7435613 B2 JP7435613 B2 JP 7435613B2
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Japan
Prior art keywords
stage
moving
processing
workpiece
axis direction
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Active
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JP2021543829A
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English (en)
Japanese (ja)
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JPWO2021044505A5 (https=
JPWO2021044505A1 (https=
Inventor
陽介 立崎
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Nikon Corp
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Nikon Corp
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Publication of JPWO2021044505A5 publication Critical patent/JPWO2021044505A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Machine Tool Units (AREA)
JP2021543829A 2019-09-03 2019-09-03 移動体装置及び加工システム Active JP7435613B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/034507 WO2021044505A1 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Publications (3)

Publication Number Publication Date
JPWO2021044505A1 JPWO2021044505A1 (https=) 2021-03-11
JPWO2021044505A5 JPWO2021044505A5 (https=) 2022-05-10
JP7435613B2 true JP7435613B2 (ja) 2024-02-21

Family

ID=74851984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021543829A Active JP7435613B2 (ja) 2019-09-03 2019-09-03 移動体装置及び加工システム

Country Status (2)

Country Link
JP (1) JP7435613B2 (https=)
WO (1) WO2021044505A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022157861A (ja) * 2021-03-31 2022-10-14 日本精工株式会社 テーブル装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266585A (ja) 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
JP2015196222A (ja) 2014-04-01 2015-11-09 日本精工株式会社 テーブル装置、及び搬送装置
JP2015204317A (ja) 2014-04-11 2015-11-16 株式会社ニコン 移動体装置及び露光装置、並びにデバイス製造方法
JP2015232718A (ja) 2009-08-20 2015-12-24 株式会社ニコン 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法
JP2016002610A (ja) 2014-06-16 2016-01-12 トヨタ自動車株式会社 ステージ装置
JP2016026881A (ja) 2014-06-23 2016-02-18 三菱電機株式会社 レーザ加工装置
JP2016166924A (ja) 2015-03-09 2016-09-15 株式会社ニューフレアテクノロジー ステージ装置
WO2017099087A1 (ja) 2015-12-07 2017-06-15 株式会社ニコン 露光装置及び露光装置の制御方法、並びにデバイス製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007266585A (ja) 2006-03-02 2007-10-11 Sumitomo Heavy Ind Ltd ステージ装置
JP2015232718A (ja) 2009-08-20 2015-12-24 株式会社ニコン 物体処理装置、露光装置及び露光方法、並びにデバイス製造方法
JP2015196222A (ja) 2014-04-01 2015-11-09 日本精工株式会社 テーブル装置、及び搬送装置
JP2015204317A (ja) 2014-04-11 2015-11-16 株式会社ニコン 移動体装置及び露光装置、並びにデバイス製造方法
JP2016002610A (ja) 2014-06-16 2016-01-12 トヨタ自動車株式会社 ステージ装置
JP2016026881A (ja) 2014-06-23 2016-02-18 三菱電機株式会社 レーザ加工装置
JP2016166924A (ja) 2015-03-09 2016-09-15 株式会社ニューフレアテクノロジー ステージ装置
WO2017099087A1 (ja) 2015-12-07 2017-06-15 株式会社ニコン 露光装置及び露光装置の制御方法、並びにデバイス製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022157861A (ja) * 2021-03-31 2022-10-14 日本精工株式会社 テーブル装置
JP7582028B2 (ja) 2021-03-31 2024-11-13 日本精工株式会社 テーブル装置

Also Published As

Publication number Publication date
WO2021044505A1 (ja) 2021-03-11
JPWO2021044505A1 (https=) 2021-03-11

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