JPWO2020246133A1 - - Google Patents

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Publication number
JPWO2020246133A1
JPWO2020246133A1 JP2021524684A JP2021524684A JPWO2020246133A1 JP WO2020246133 A1 JPWO2020246133 A1 JP WO2020246133A1 JP 2021524684 A JP2021524684 A JP 2021524684A JP 2021524684 A JP2021524684 A JP 2021524684A JP WO2020246133 A1 JPWO2020246133 A1 JP WO2020246133A1
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
JP2021524684A
Other languages
Japanese (ja)
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Filing date
Publication date
Application filed filed Critical
Publication of JPWO2020246133A1 publication Critical patent/JPWO2020246133A1/ja
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/807Pixel isolation structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/802Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H10F39/8027Geometry of the photosensitive area
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8057Optical shielding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8067Reflectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
JP2021524684A 2019-06-07 2020-04-09 Ceased JPWO2020246133A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019106639 2019-06-07
PCT/JP2020/015949 WO2020246133A1 (ja) 2019-06-07 2020-04-09 撮像素子および撮像装置

Publications (1)

Publication Number Publication Date
JPWO2020246133A1 true JPWO2020246133A1 (https=) 2020-12-10

Family

ID=73653175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021524684A Ceased JPWO2020246133A1 (https=) 2019-06-07 2020-04-09

Country Status (6)

Country Link
US (1) US20220246666A1 (https=)
EP (1) EP3982411A4 (https=)
JP (1) JPWO2020246133A1 (https=)
CN (1) CN113811999B9 (https=)
TW (1) TWI872068B (https=)
WO (1) WO2020246133A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3100926A1 (fr) * 2019-09-18 2021-03-19 Commissariat A L'energie Atomique Et Aux Energies Alternatives Capteur d'images réalisé en technologie 3D séquentielle
JP7624825B2 (ja) * 2020-11-27 2025-01-31 シャープセミコンダクターイノベーション株式会社 固体撮像装置
WO2023105929A1 (ja) * 2021-12-10 2023-06-15 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置
WO2023112465A1 (ja) * 2021-12-13 2023-06-22 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子及び電子機器
WO2023119840A1 (ja) * 2021-12-20 2023-06-29 ソニーセミコンダクタソリューションズ株式会社 撮像素子、撮像素子の製造方法、電子機器
TWI799057B (zh) * 2022-01-04 2023-04-11 力晶積成電子製造股份有限公司 影像感測器積體晶片及其形成方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05299594A (ja) * 1992-04-17 1993-11-12 Nippondenso Co Ltd 相補型misトランジスタ装置
JP2009016826A (ja) * 2007-06-29 2009-01-22 Magnachip Semiconductor Ltd 裏面照射イメージセンサ
JP2013065688A (ja) * 2011-09-16 2013-04-11 Sony Corp 固体撮像素子および製造方法、並びに電子機器
JP2013069718A (ja) * 2011-09-20 2013-04-18 Toshiba Corp 固体撮像装置
JP2014096540A (ja) * 2012-11-12 2014-05-22 Canon Inc 固体撮像装置およびその製造方法ならびにカメラ
WO2019093149A1 (ja) * 2017-11-09 2019-05-16 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置、および電子機器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4449298B2 (ja) * 2002-03-06 2010-04-14 ソニー株式会社 固体撮像素子の製造方法および固体撮像素子
JP2009129931A (ja) * 2007-11-19 2009-06-11 Sharp Corp 固体撮像素子およびその製造方法、電子情報機器
JP2009238985A (ja) * 2008-03-27 2009-10-15 Kyushu Institute Of Technology 半導体撮像素子およびその製造方法
JP2010118412A (ja) * 2008-11-11 2010-05-27 Panasonic Corp 固体撮像装置及びその製造方法
JP5659707B2 (ja) * 2010-11-08 2015-01-28 ソニー株式会社 固体撮像装置とその製造方法、及び電子機器
JP2015082510A (ja) * 2013-10-21 2015-04-27 ソニー株式会社 固体撮像素子および製造方法、並びに電子機器
JP2016082133A (ja) * 2014-10-20 2016-05-16 ソニー株式会社 固体撮像素子及び電子機器
JP2018186211A (ja) * 2017-04-27 2018-11-22 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
CN117177592A (zh) * 2017-09-20 2023-12-05 索尼公司 光电转换器件和成像装置
KR102776683B1 (ko) * 2017-10-03 2025-03-07 소니 세미컨덕터 솔루션즈 가부시키가이샤 고체 촬상 소자, 고체 촬상 소자의 제조 방법 및 전자 기기

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05299594A (ja) * 1992-04-17 1993-11-12 Nippondenso Co Ltd 相補型misトランジスタ装置
JP2009016826A (ja) * 2007-06-29 2009-01-22 Magnachip Semiconductor Ltd 裏面照射イメージセンサ
JP2013065688A (ja) * 2011-09-16 2013-04-11 Sony Corp 固体撮像素子および製造方法、並びに電子機器
JP2013069718A (ja) * 2011-09-20 2013-04-18 Toshiba Corp 固体撮像装置
JP2014096540A (ja) * 2012-11-12 2014-05-22 Canon Inc 固体撮像装置およびその製造方法ならびにカメラ
WO2019093149A1 (ja) * 2017-11-09 2019-05-16 ソニーセミコンダクタソリューションズ株式会社 固体撮像装置、および電子機器

Also Published As

Publication number Publication date
CN113811999B (zh) 2025-08-19
EP3982411A1 (en) 2022-04-13
TW202101743A (zh) 2021-01-01
CN113811999B9 (zh) 2025-10-14
CN113811999A (zh) 2021-12-17
US20220246666A1 (en) 2022-08-04
EP3982411A4 (en) 2022-08-17
TWI872068B (zh) 2025-02-11
WO2020246133A1 (ja) 2020-12-10

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