JPWO2020217353A5 - - Google Patents
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- Publication number
- JPWO2020217353A5 JPWO2020217353A5 JP2021515384A JP2021515384A JPWO2020217353A5 JP WO2020217353 A5 JPWO2020217353 A5 JP WO2020217353A5 JP 2021515384 A JP2021515384 A JP 2021515384A JP 2021515384 A JP2021515384 A JP 2021515384A JP WO2020217353 A5 JPWO2020217353 A5 JP WO2020217353A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- light
- processing
- irradiation
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 40
- 238000006073 displacement reaction Methods 0.000 claims 9
- 230000001678 irradiating effect Effects 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 238000003672 processing method Methods 0.000 claims 2
- 230000000737 periodic effect Effects 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023144342A JP7639863B2 (ja) | 2019-04-24 | 2023-09-06 | 加工装置、加工方法及び加工システム |
| JP2025025235A JP2025071210A (ja) | 2019-04-24 | 2025-02-19 | 加工装置、加工方法及び加工システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/017483 WO2020217353A1 (ja) | 2019-04-24 | 2019-04-24 | 加工装置、加工方法及び加工システム |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023144342A Division JP7639863B2 (ja) | 2019-04-24 | 2023-09-06 | 加工装置、加工方法及び加工システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020217353A1 JPWO2020217353A1 (https=) | 2020-10-29 |
| JPWO2020217353A5 true JPWO2020217353A5 (https=) | 2022-03-29 |
| JP7355103B2 JP7355103B2 (ja) | 2023-10-03 |
Family
ID=72940641
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021515384A Active JP7355103B2 (ja) | 2019-04-24 | 2019-04-24 | 加工装置、加工方法及び加工システム |
| JP2023144342A Active JP7639863B2 (ja) | 2019-04-24 | 2023-09-06 | 加工装置、加工方法及び加工システム |
| JP2025025235A Pending JP2025071210A (ja) | 2019-04-24 | 2025-02-19 | 加工装置、加工方法及び加工システム |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023144342A Active JP7639863B2 (ja) | 2019-04-24 | 2023-09-06 | 加工装置、加工方法及び加工システム |
| JP2025025235A Pending JP2025071210A (ja) | 2019-04-24 | 2025-02-19 | 加工装置、加工方法及び加工システム |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US12539561B2 (https=) |
| EP (2) | EP4491321A3 (https=) |
| JP (3) | JP7355103B2 (https=) |
| TW (1) | TW202045288A (https=) |
| WO (1) | WO2020217353A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023020932A (ja) * | 2021-07-30 | 2023-02-09 | キヤノン株式会社 | 表面処理方法、物品の製造方法、表面処理装置、物品 |
| WO2024105851A1 (ja) * | 2022-11-17 | 2024-05-23 | 株式会社ニコン | 加工システム |
| CN117336911B (zh) * | 2023-11-08 | 2025-10-31 | 广东万聚照明科技有限公司 | 一种Mini LED的环境适配灯具系统 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2226970B (en) | 1989-01-11 | 1992-10-21 | British Aerospace | Methods of manufacture and surface treatment using laser radiation |
| US4958900A (en) * | 1989-03-27 | 1990-09-25 | General Electric Company | Multi-fiber holder for output coupler and methods using same |
| DE19634190C2 (de) | 1996-08-23 | 2002-01-31 | Baasel Carl Lasertech | Mehrkopf-Lasergravuranlage |
| DE19636458C1 (de) * | 1996-09-07 | 1998-04-02 | Schweistechnische Lehr Und Ver | Manuell zu positionierende und zu betätigende Einrichtung zum Laserstrahlschweißen |
| JP2003080388A (ja) | 2001-09-07 | 2003-03-18 | Komatsu Ltd | レーザ加工装置 |
| JP2005230872A (ja) * | 2004-02-20 | 2005-09-02 | Mitsubishi Electric Corp | レーザ加工機および加工方法 |
| JP5518612B2 (ja) * | 2010-07-20 | 2014-06-11 | 株式会社ディスコ | 光学装置およびこれを備えるレーザー加工装置 |
| JP5255714B2 (ja) * | 2011-05-16 | 2013-08-07 | 住友ゴム工業株式会社 | 三次元の流体シミュレーション方法 |
| JP5967913B2 (ja) | 2011-12-08 | 2016-08-10 | キヤノン株式会社 | レーザ加工装置、レーザ加工方法及びインクジェットヘッド基板 |
| EP2884823B3 (en) | 2012-08-08 | 2019-03-06 | National Institute of Advanced Industrial Science and Technology | Surface plasma actuator |
| JP2015532455A (ja) * | 2012-10-04 | 2015-11-09 | レモオプティクス エスエー | ビームスプリッタを用いたスペックルリデューサ |
| US10258982B2 (en) | 2014-04-23 | 2019-04-16 | Japan Science And Technology Agency | Combined-blade open flow path device and joined body thereof |
| US10569365B2 (en) * | 2015-11-23 | 2020-02-25 | The Boeing Company | Method for preparing a fluid flow surface |
| US20170248793A1 (en) | 2016-02-29 | 2017-08-31 | Universal Laser Systems, Inc. | Laser processing system with modified beam energy distribution |
| DE112017006296B4 (de) | 2017-01-24 | 2023-02-02 | Hitachi, Ltd. | Fluidvorrichtung |
| DE102017206968B4 (de) * | 2017-04-26 | 2019-10-10 | 4Jet Microtech Gmbh & Co. Kg | Verfahren und Vorrichtung zum Herstellen von Riblets |
| EP3954493B1 (en) | 2019-04-12 | 2024-12-04 | Nikon Corporation | Processing device for and processing method of processing an object by processing light |
-
2019
- 2019-04-24 EP EP24216416.8A patent/EP4491321A3/en active Pending
- 2019-04-24 EP EP19926011.8A patent/EP3960359B1/en active Active
- 2019-04-24 US US17/604,252 patent/US12539561B2/en active Active
- 2019-04-24 JP JP2021515384A patent/JP7355103B2/ja active Active
- 2019-04-24 WO PCT/JP2019/017483 patent/WO2020217353A1/ja not_active Ceased
-
2020
- 2020-04-21 TW TW109113237A patent/TW202045288A/zh unknown
-
2023
- 2023-09-06 JP JP2023144342A patent/JP7639863B2/ja active Active
-
2025
- 2025-02-19 JP JP2025025235A patent/JP2025071210A/ja active Pending
- 2025-12-12 US US19/417,838 patent/US20260097451A1/en active Pending
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