JPWO2020130005A5 - - Google Patents
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- JPWO2020130005A5 JPWO2020130005A5 JP2020561476A JP2020561476A JPWO2020130005A5 JP WO2020130005 A5 JPWO2020130005 A5 JP WO2020130005A5 JP 2020561476 A JP2020561476 A JP 2020561476A JP 2020561476 A JP2020561476 A JP 2020561476A JP WO2020130005 A5 JPWO2020130005 A5 JP WO2020130005A5
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- JP
- Japan
- Prior art keywords
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- formula
- carbon atoms
- groups
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 125000004432 carbon atom Chemical group C* 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000004745 nonwoven fabric Substances 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 238000010559 graft polymerization reaction Methods 0.000 description 6
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical group OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 5
- 230000001588 bifunctional effect Effects 0.000 description 5
- 125000002947 alkylene group Chemical group 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- MBBZMMPHUWSWHV-BDVNFPICSA-N N-methylglucamine Chemical group CNC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO MBBZMMPHUWSWHV-BDVNFPICSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical group OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 125000000542 sulfonic acid group Chemical group 0.000 description 3
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000004414 alkyl thio group Chemical group 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- SFZULDYEOVSIKM-UHFFFAOYSA-N chembl321317 Chemical group C1=CC(C(=N)NO)=CC=C1C1=CC=C(C=2C=CC(=CC=2)C(=N)NO)O1 SFZULDYEOVSIKM-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 125000004093 cyano group Chemical group *C#N 0.000 description 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- OUDSFQBUEBFSPS-UHFFFAOYSA-N ethylenediaminetriacetic acid Chemical group OC(=O)CNCCN(CC(O)=O)CC(O)=O OUDSFQBUEBFSPS-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023063316A JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018238751 | 2018-12-20 | ||
| JP2018238751 | 2018-12-20 | ||
| PCT/JP2019/049504 WO2020130005A1 (ja) | 2018-12-20 | 2019-12-18 | リソグラフィー用塗布膜形成組成物の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023063316A Division JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020130005A1 JPWO2020130005A1 (ja) | 2021-11-04 |
| JPWO2020130005A5 true JPWO2020130005A5 (https=) | 2022-08-22 |
Family
ID=71100813
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020561476A Pending JPWO2020130005A1 (ja) | 2018-12-20 | 2019-12-18 | リソグラフィー用塗布膜形成組成物の製造方法 |
| JP2023063316A Active JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023063316A Active JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12153348B2 (https=) |
| JP (2) | JPWO2020130005A1 (https=) |
| CN (1) | CN113226511A (https=) |
| FI (1) | FI130725B1 (https=) |
| TW (1) | TWI859174B (https=) |
| WO (1) | WO2020130005A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114225496B (zh) * | 2021-12-07 | 2023-04-11 | 明士(北京)新材料开发有限公司 | 一种高性能聚合物树脂的纯化方法及纯化装置 |
| JP7498530B1 (ja) | 2023-09-21 | 2024-06-12 | 室町ケミカル株式会社 | 有機溶媒の精製方法及び精製有機溶媒の製造方法、並びに有機溶媒の精製システム |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI248829B (en) * | 2002-02-27 | 2006-02-11 | Ebara Corp | Filter cartridge |
| JP2004330056A (ja) * | 2003-05-07 | 2004-11-25 | Ebara Corp | 電子素子基板表面処理液用フィルターカートリッジ |
| WO2008047638A1 (en) * | 2006-10-12 | 2008-04-24 | Nissan Chemical Industries, Ltd. | Process for semiconductor device production using under-resist film cured by photocrosslinking |
| JP5182793B2 (ja) | 2007-10-12 | 2013-04-17 | 独立行政法人日本原子力研究開発機構 | 液体濾過用カートリッジフィルタ |
| KR101423061B1 (ko) * | 2008-01-30 | 2014-07-25 | 닛산 가가쿠 고교 가부시키 가이샤 | 유황원자를 함유하는 레지스트 하층막 형성용 조성물 및 레지스트패턴의 형성방법 |
| JP2013061426A (ja) * | 2011-09-12 | 2013-04-04 | Nomura Micro Sci Co Ltd | フォトレジスト膜形成用樹脂溶液の不純物除去方法、不純物除去用濾過部材及び不純物除去用濾過装置 |
| JP5727350B2 (ja) | 2011-10-26 | 2015-06-03 | 信越化学工業株式会社 | リソグラフィー用レジスト組成物の製造方法、レジスト保護膜形成用組成物の製造方法、ケイ素含有レジスト下層膜形成用組成物の製造方法、及び有機レジスト下層膜形成用組成物の製造方法 |
| WO2016136596A1 (ja) | 2015-02-26 | 2016-09-01 | 富士フイルム株式会社 | 上層膜形成用組成物、並びに、それを用いたパターン形成方法及び電子デバイスの製造方法 |
| JP6522739B2 (ja) | 2015-03-31 | 2019-05-29 | 富士フイルム株式会社 | 上層膜形成用組成物、パターン形成方法、レジストパターン、及び、電子デバイスの製造方法 |
| CN107430335B (zh) | 2015-04-01 | 2021-04-02 | 东丽株式会社 | 感光性着色树脂组合物 |
| JP6445382B2 (ja) * | 2015-04-24 | 2018-12-26 | 信越化学工業株式会社 | リソグラフィー用塗布膜形成用組成物の製造方法及びパターン形成方法 |
| KR102409417B1 (ko) | 2016-05-02 | 2022-06-15 | 닛산 가가쿠 가부시키가이샤 | 특정 가교제를 포함하는 보호막 형성 조성물 및 이것을 이용한 패턴 형성 방법 |
| JP6737891B2 (ja) * | 2016-09-15 | 2020-08-12 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
| JP6886592B2 (ja) * | 2016-12-15 | 2021-06-16 | Dic株式会社 | レジスト用感光性樹脂組成物の製造方法 |
| JP6912244B2 (ja) * | 2017-03-30 | 2021-08-04 | 倉敷繊維加工株式会社 | フィルターカートリッジ及びフィルター |
| JPWO2020184306A1 (https=) * | 2019-03-11 | 2020-09-17 |
-
2019
- 2019-12-18 WO PCT/JP2019/049504 patent/WO2020130005A1/ja not_active Ceased
- 2019-12-18 FI FI20215644A patent/FI130725B1/en active
- 2019-12-18 JP JP2020561476A patent/JPWO2020130005A1/ja active Pending
- 2019-12-18 CN CN201980082879.XA patent/CN113226511A/zh active Pending
- 2019-12-18 US US17/296,408 patent/US12153348B2/en active Active
- 2019-12-20 TW TW108146835A patent/TWI859174B/zh active
-
2023
- 2023-04-10 JP JP2023063316A patent/JP7652210B2/ja active Active
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