JPWO2020130005A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2020130005A5 JPWO2020130005A5 JP2020561476A JP2020561476A JPWO2020130005A5 JP WO2020130005 A5 JPWO2020130005 A5 JP WO2020130005A5 JP 2020561476 A JP2020561476 A JP 2020561476A JP 2020561476 A JP2020561476 A JP 2020561476A JP WO2020130005 A5 JPWO2020130005 A5 JP WO2020130005A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- formula
- carbon atoms
- groups
- polymer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000004432 carbon atom Chemical group C* 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000004745 nonwoven fabric Substances 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 238000010559 graft polymerization reaction Methods 0.000 description 6
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical group OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 5
- 230000001588 bifunctional effect Effects 0.000 description 5
- 125000002947 alkylene group Chemical group 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 239000000178 monomer Substances 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- MBBZMMPHUWSWHV-BDVNFPICSA-N N-methylglucamine Chemical group CNC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO MBBZMMPHUWSWHV-BDVNFPICSA-N 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical group OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 125000000542 sulfonic acid group Chemical group 0.000 description 3
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical group OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 125000003545 alkoxy group Chemical group 0.000 description 2
- 125000004414 alkyl thio group Chemical group 0.000 description 2
- 125000003277 amino group Chemical group 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- 125000002843 carboxylic acid group Chemical group 0.000 description 2
- SFZULDYEOVSIKM-UHFFFAOYSA-N chembl321317 Chemical group C1=CC(C(=N)NO)=CC=C1C1=CC=C(C=2C=CC(=CC=2)C(=N)NO)O1 SFZULDYEOVSIKM-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 125000004093 cyano group Chemical group *C#N 0.000 description 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- OUDSFQBUEBFSPS-UHFFFAOYSA-N ethylenediaminetriacetic acid Chemical group OC(=O)CNCCN(CC(O)=O)CC(O)=O OUDSFQBUEBFSPS-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023063316A JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018238751 | 2018-12-20 | ||
| JP2018238751 | 2018-12-20 | ||
| PCT/JP2019/049504 WO2020130005A1 (ja) | 2018-12-20 | 2019-12-18 | リソグラフィー用塗布膜形成組成物の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023063316A Division JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020130005A1 JPWO2020130005A1 (ja) | 2021-11-04 |
| JPWO2020130005A5 true JPWO2020130005A5 (https=) | 2022-08-22 |
Family
ID=71100813
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020561476A Pending JPWO2020130005A1 (ja) | 2018-12-20 | 2019-12-18 | リソグラフィー用塗布膜形成組成物の製造方法 |
| JP2023063316A Active JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023063316A Active JP7652210B2 (ja) | 2018-12-20 | 2023-04-10 | リソグラフィー用塗布膜形成組成物の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12153348B2 (https=) |
| JP (2) | JPWO2020130005A1 (https=) |
| CN (1) | CN113226511A (https=) |
| FI (1) | FI130725B1 (https=) |
| TW (1) | TWI859174B (https=) |
| WO (1) | WO2020130005A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114225496B (zh) * | 2021-12-07 | 2023-04-11 | 明士(北京)新材料开发有限公司 | 一种高性能聚合物树脂的纯化方法及纯化装置 |
| JP7498530B1 (ja) | 2023-09-21 | 2024-06-12 | 室町ケミカル株式会社 | 有機溶媒の精製方法及び精製有機溶媒の製造方法、並びに有機溶媒の精製システム |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050218068A1 (en) * | 2002-02-27 | 2005-10-06 | Makoto Komatsu | Filter cartridge |
| JP2004330056A (ja) | 2003-05-07 | 2004-11-25 | Ebara Corp | 電子素子基板表面処理液用フィルターカートリッジ |
| US8227172B2 (en) * | 2006-10-12 | 2012-07-24 | Nissan Chemical Industries, Ltd. | Method of producing semiconductor device using resist underlayer film by photo-crosslinking curing |
| JP5182793B2 (ja) | 2007-10-12 | 2013-04-17 | 独立行政法人日本原子力研究開発機構 | 液体濾過用カートリッジフィルタ |
| KR101404141B1 (ko) | 2008-01-30 | 2014-06-10 | 닛산 가가쿠 고교 가부시키 가이샤 | 유황원자를 함유하는 레지스트 하층막 형성용 조성물 및 레지스트패턴의 형성방법 |
| JP2013061426A (ja) | 2011-09-12 | 2013-04-04 | Nomura Micro Sci Co Ltd | フォトレジスト膜形成用樹脂溶液の不純物除去方法、不純物除去用濾過部材及び不純物除去用濾過装置 |
| JP5727350B2 (ja) | 2011-10-26 | 2015-06-03 | 信越化学工業株式会社 | リソグラフィー用レジスト組成物の製造方法、レジスト保護膜形成用組成物の製造方法、ケイ素含有レジスト下層膜形成用組成物の製造方法、及び有機レジスト下層膜形成用組成物の製造方法 |
| CN107250914A (zh) | 2015-02-26 | 2017-10-13 | 富士胶片株式会社 | 上层膜形成用组合物以及使用了该上层膜形成用组合物的图案形成方法及电子器件的制造方法 |
| WO2016157988A1 (ja) | 2015-03-31 | 2016-10-06 | 富士フイルム株式会社 | 上層膜形成用組成物、パターン形成方法、レジストパターン、及び、電子デバイスの製造方法 |
| SG11201707976RA (en) | 2015-04-01 | 2017-10-30 | Toray Industries | Photosensitive colored resin composition |
| JP6445382B2 (ja) * | 2015-04-24 | 2018-12-26 | 信越化学工業株式会社 | リソグラフィー用塗布膜形成用組成物の製造方法及びパターン形成方法 |
| JP7486919B2 (ja) | 2016-05-02 | 2024-05-20 | 日産化学株式会社 | 特定の架橋剤を含む保護膜形成組成物及びそれを用いたパターン形成方法 |
| JP6737891B2 (ja) * | 2016-09-15 | 2020-08-12 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
| JP6886592B2 (ja) * | 2016-12-15 | 2021-06-16 | Dic株式会社 | レジスト用感光性樹脂組成物の製造方法 |
| JP6912244B2 (ja) * | 2017-03-30 | 2021-08-04 | 倉敷繊維加工株式会社 | フィルターカートリッジ及びフィルター |
| WO2020184306A1 (ja) * | 2019-03-11 | 2020-09-17 | 日産化学株式会社 | 有機溶媒の製造方法 |
-
2019
- 2019-12-18 JP JP2020561476A patent/JPWO2020130005A1/ja active Pending
- 2019-12-18 CN CN201980082879.XA patent/CN113226511A/zh active Pending
- 2019-12-18 FI FI20215644A patent/FI130725B1/en active
- 2019-12-18 WO PCT/JP2019/049504 patent/WO2020130005A1/ja not_active Ceased
- 2019-12-18 US US17/296,408 patent/US12153348B2/en active Active
- 2019-12-20 TW TW108146835A patent/TWI859174B/zh active
-
2023
- 2023-04-10 JP JP2023063316A patent/JP7652210B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI325888B (en) | A surface-treating agent comprising a fluorine-containing polymer | |
| RU2226535C2 (ru) | Компоненты катализаторов полимеризации олефинов | |
| Xu et al. | Tertiary amine functionalized polyacrylonitrile fiber catalyst for the synthesis of tetrahydrothiophenes | |
| CN1116308C (zh) | 聚合物分子量和端基官能度的控制 | |
| JP2021008618A5 (https=) | ||
| JPWO2020130005A5 (https=) | ||
| CA2494826A1 (fr) | Alcoxyamines issues de nitroxydes beta-phosphores, leur utilisation en polymerisation radicalaire | |
| US10391472B2 (en) | Surface-functionalized polyolefin fibers and their use in methods for extracting metal ions from liquid solutions | |
| TWI312343B (en) | Process for the preparation of a nickel/phosphorous ligand catalyst for olefin hydrocyanation | |
| TWI704160B (zh) | 聚合物之製造方法 | |
| CN108017670B (zh) | 一种化合物、钯化合物、镍化合物及其制备方法 | |
| RU2007123599A (ru) | Покрытие на основе полисилазана и его применение для покрытия полимерных пленок | |
| SK3112003A3 (en) | Method for block polymer synthesis by controlled radical polymerisation in the presence of a disulphide compound | |
| JPH02115190A (ja) | 含フッ素有機ケイ素化合物 | |
| JP2007534479A5 (https=) | ||
| JPH0288586A (ja) | 有機官能性ベタイン変性シロキサン及びその調製方法 | |
| JP2011502745A5 (https=) | ||
| EP3825456B1 (en) | Water repellent oil repellent agent for fibers and fiber product | |
| JP2021524456A5 (https=) | ||
| EP3199559B1 (en) | Vinyl monomer having diglycolamidic-acid-type ligand | |
| CN109180943A (zh) | 一种多羟基功能poss杂化材料的制备方法 | |
| JP2015528759A (ja) | 物品の表面のエピラム化のための作用剤 | |
| KR102133884B1 (ko) | 섬유 원료 상에 촉매를 고정화하는 방법, 수득한 섬유 원료 및 이 원료의 용도 | |
| JP2021530441A5 (https=) | ||
| JP2020511471A5 (https=) |