JPWO2020121898A5 - - Google Patents

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Publication number
JPWO2020121898A5
JPWO2020121898A5 JP2020559932A JP2020559932A JPWO2020121898A5 JP WO2020121898 A5 JPWO2020121898 A5 JP WO2020121898A5 JP 2020559932 A JP2020559932 A JP 2020559932A JP 2020559932 A JP2020559932 A JP 2020559932A JP WO2020121898 A5 JPWO2020121898 A5 JP WO2020121898A5
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Japan
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JP2020559932A
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English (en)
Japanese (ja)
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JPWO2020121898A1 (ja
JP7324230B2 (ja
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Priority claimed from PCT/JP2019/047274 external-priority patent/WO2020121898A1/ja
Publication of JPWO2020121898A1 publication Critical patent/JPWO2020121898A1/ja
Publication of JPWO2020121898A5 publication Critical patent/JPWO2020121898A5/ja
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Publication of JP7324230B2 publication Critical patent/JP7324230B2/ja
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JP2020559932A 2018-12-14 2019-12-03 流路付きプレート Active JP7324230B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018234929 2018-12-14
JP2018234929 2018-12-14
JP2019184146 2019-10-04
JP2019184146 2019-10-04
PCT/JP2019/047274 WO2020121898A1 (ja) 2018-12-14 2019-12-03 流路付きプレート

Publications (3)

Publication Number Publication Date
JPWO2020121898A1 JPWO2020121898A1 (ja) 2021-11-25
JPWO2020121898A5 true JPWO2020121898A5 (enExample) 2022-06-22
JP7324230B2 JP7324230B2 (ja) 2023-08-09

Family

ID=71075302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020559932A Active JP7324230B2 (ja) 2018-12-14 2019-12-03 流路付きプレート

Country Status (7)

Country Link
US (1) US20220026151A1 (enExample)
EP (1) EP3896722A4 (enExample)
JP (1) JP7324230B2 (enExample)
KR (1) KR102590641B1 (enExample)
CN (1) CN113169112B (enExample)
TW (1) TWI747100B (enExample)
WO (1) WO2020121898A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230036346A (ko) 2021-09-07 2023-03-14 선문대학교 산학협력단 Cyp125a13 효소를 이용한 스테로이드의 히드록시화 생물전환 방법
KR20230036348A (ko) 2021-09-07 2023-03-14 선문대학교 산학협력단 7α-히드록시스테로이드 탈수소 효소를 이용한 스테로이드의 탈수소화 생물전환 방법
KR102823387B1 (ko) 2021-09-07 2025-06-23 선문대학교 산학협력단 CYP154C3s 효소를 이용한 스테로이드의 하이드록시화 생물전환 방법
KR102638205B1 (ko) 2021-09-13 2024-02-20 선문대학교 산학협력단 Cyp105d18 효소를 이용한 이소퀴놀린 알칼로이드 화합물의 n-산화 생물전환 방법
KR102902633B1 (ko) * 2021-09-29 2025-12-22 삼성전자주식회사 복수의 전극을 포함하는 기판 처리 장치
US12567567B2 (en) 2021-10-20 2026-03-03 Niterra Co., Ltd. Holding device
CN118280801A (zh) * 2022-12-29 2024-07-02 中微半导体设备(上海)股份有限公司 一种多孔塞组件、静电吸盘及等离子体刻蚀装置
JP7657310B2 (ja) * 2023-02-27 2025-04-04 日本碍子株式会社 ウエハ載置台
KR102685150B1 (ko) * 2023-10-12 2024-07-16 주식회사 미코세라믹스 세라믹 서셉터 및 그 제조 방법
JP7784470B2 (ja) * 2024-04-08 2025-12-11 日本特殊陶業株式会社 保持装置
KR102823869B1 (ko) 2024-08-26 2025-06-23 주식회사 리더티앤디 Mdf용 분체 도장 자동화 시스템

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2559123Y2 (ja) * 1992-03-31 1998-01-14 株式会社神戸製鋼所 真空アーク蒸着装置
US6108189A (en) * 1996-04-26 2000-08-22 Applied Materials, Inc. Electrostatic chuck having improved gas conduits
JP3965258B2 (ja) * 1999-04-30 2007-08-29 日本碍子株式会社 半導体製造装置用のセラミックス製ガス供給構造
US6490145B1 (en) * 2001-07-18 2002-12-03 Applied Materials, Inc. Substrate support pedestal
JP2003338492A (ja) * 2002-05-21 2003-11-28 Tokyo Electron Ltd プラズマ処理装置
JP4557814B2 (ja) * 2005-06-09 2010-10-06 パナソニック株式会社 プラズマ処理装置
JP5331519B2 (ja) * 2008-03-11 2013-10-30 日本碍子株式会社 静電チャック
JP4590597B2 (ja) 2008-03-12 2010-12-01 国立大学法人東北大学 シャワープレートの製造方法
JP5449750B2 (ja) * 2008-11-19 2014-03-19 株式会社日本セラテック 静電チャックおよびその製造方法
KR101248114B1 (ko) * 2008-11-26 2013-03-27 니혼 하츠쵸 가부시키가이샤 프로브 유닛용 베이스 부재 및 프로브 유닛
JP3154629U (ja) 2009-08-04 2009-10-22 日本碍子株式会社 静電チャック
JP5633766B2 (ja) 2013-03-29 2014-12-03 Toto株式会社 静電チャック
JP6263484B2 (ja) * 2015-01-30 2018-01-17 日本特殊陶業株式会社 静電チャックおよびその製造方法
JP6257540B2 (ja) * 2015-01-30 2018-01-10 日本特殊陶業株式会社 静電チャックおよびその製造方法
JP6509139B2 (ja) * 2016-01-29 2019-05-08 日本特殊陶業株式会社 基板支持装置及びその製造方法
CN108649012B (zh) * 2018-05-11 2021-10-01 北京华卓精科科技股份有限公司 新型陶瓷塞及具有该新型陶瓷塞的静电卡盘装置

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