JPWO2020111086A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2020111086A5 JPWO2020111086A5 JP2020557753A JP2020557753A JPWO2020111086A5 JP WO2020111086 A5 JPWO2020111086 A5 JP WO2020111086A5 JP 2020557753 A JP2020557753 A JP 2020557753A JP 2020557753 A JP2020557753 A JP 2020557753A JP WO2020111086 A5 JPWO2020111086 A5 JP WO2020111086A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- formula
- carbon atoms
- photosensitive resin
- relief pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000004432 carbon atom Chemical group C* 0.000 claims 10
- 239000011347 resin Substances 0.000 claims 7
- 229920005989 resin Polymers 0.000 claims 7
- -1 acrylic compound Chemical class 0.000 claims 5
- 125000000962 organic group Chemical group 0.000 claims 5
- 239000011342 resin composition Substances 0.000 claims 5
- 125000000217 alkyl group Chemical group 0.000 claims 4
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 125000002947 alkylene group Chemical group 0.000 claims 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 125000005704 oxymethylene group Chemical group [H]C([H])([*:2])O[*:1] 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000002243 precursor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023116700A JP7533717B2 (ja) | 2018-11-29 | 2023-07-18 | 感光性絶縁膜組成物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018223424 | 2018-11-29 | ||
| JP2018223424 | 2018-11-29 | ||
| PCT/JP2019/046257 WO2020111086A1 (ja) | 2018-11-29 | 2019-11-27 | （メタ）アクリル化合物および感光性絶縁膜組成物 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023116700A Division JP7533717B2 (ja) | 2018-11-29 | 2023-07-18 | 感光性絶縁膜組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2020111086A1 JPWO2020111086A1 (ja) | 2021-10-21 |
| JPWO2020111086A5 true JPWO2020111086A5 (enrdf_load_stackoverflow) | 2022-07-13 |
| JP7327412B2 JP7327412B2 (ja) | 2023-08-16 |
Family
ID=70852287
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020557753A Active JP7327412B2 (ja) | 2018-11-29 | 2019-11-27 | （メタ）アクリル化合物および感光性絶縁膜組成物 |
| JP2023116700A Active JP7533717B2 (ja) | 2018-11-29 | 2023-07-18 | 感光性絶縁膜組成物 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023116700A Active JP7533717B2 (ja) | 2018-11-29 | 2023-07-18 | 感光性絶縁膜組成物 |
Country Status (3)
| Country | Link |
|---|---|
| JP (2) | JP7327412B2 (enrdf_load_stackoverflow) |
| TW (1) | TW202028257A (enrdf_load_stackoverflow) |
| WO (1) | WO2020111086A1 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114401978A (zh) * | 2019-09-25 | 2022-04-26 | 日产化学株式会社 | 肽化合物的制造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06301209A (ja) * | 1993-04-16 | 1994-10-28 | Toray Ind Inc | 感光性ポリイミド前駆体組成物 |
| JP4165473B2 (ja) | 2004-08-17 | 2008-10-15 | 東洋紡績株式会社 | ネガ型感光性ポリイミド前駆体組成物 |
| JP2009229499A (ja) * | 2008-03-19 | 2009-10-08 | Konica Minolta Medical & Graphic Inc | 感光性平版印刷版材料および平版印刷版材料の製版方法 |
| WO2013099224A1 (ja) * | 2011-12-27 | 2013-07-04 | 国立大学法人山口大学 | ネットワークポリマー及びポリマーゲル電解質 |
| KR101552559B1 (ko) * | 2013-12-24 | 2015-09-30 | 금호석유화학 주식회사 | 레지스트용 중합체 및 이를 포함하는 레지스트 조성물 |
| JP6320255B2 (ja) * | 2014-09-12 | 2018-05-09 | 日本化薬株式会社 | 樹脂組成物 |
-
2019
- 2019-11-27 TW TW108143164A patent/TW202028257A/zh unknown
- 2019-11-27 JP JP2020557753A patent/JP7327412B2/ja active Active
- 2019-11-27 WO PCT/JP2019/046257 patent/WO2020111086A1/ja active Application Filing
-
2023
- 2023-07-18 JP JP2023116700A patent/JP7533717B2/ja active Active