JPWO2020110747A1 - 駆動装置 - Google Patents
駆動装置 Download PDFInfo
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- JPWO2020110747A1 JPWO2020110747A1 JP2020558330A JP2020558330A JPWO2020110747A1 JP WO2020110747 A1 JPWO2020110747 A1 JP WO2020110747A1 JP 2020558330 A JP2020558330 A JP 2020558330A JP 2020558330 A JP2020558330 A JP 2020558330A JP WO2020110747 A1 JPWO2020110747 A1 JP WO2020110747A1
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 60
- 230000002093 peripheral effect Effects 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
- H02N2/006—Elastic elements, e.g. springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/22—Auxiliary parts of casings not covered by groups H02K5/06-H02K5/20, e.g. shaped to form connection boxes or terminal boxes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
本実施例の駆動装置1Aは、図1〜4に示すように、ミラー2と、中間フレーム3と、ベース部材4と、内側トーションバー5と、外側トーションバー6と、台座7と、駆動手段と、を備えた光偏向器である。駆動装置1Aは、例えば車両に搭載されて赤外線等の光を送受信することで他車両や設置物等との距離を検出する検出装置に用いられる。
本実施例の駆動装置1Bは、図5〜8に示すように、ミラー2と、中間フレーム3と、ベース部材4Bと、内側トーションバー5と、外側トーションバー6と、台座7と、駆動手段と、を備えた光偏向器である。即ち、駆動装置1Bは、第1実施例の駆動装置1Aのベース部材4をベース部材4Bに置換したものである。
4、4B ベース部材
41 枠状部
42、43 弾性構造部
422 先端部(接合部)
423 基端部(非接合部)
431 直交部
432 平行部
7 台座
8 接合部材
Claims (6)
- 可動部と、
枠状部を有し、前記枠状部の内周側に設けられた軸部によって前記可動部を回動可能に支持するベース部材と、
前記可動部を駆動する駆動手段と、
前記ベース部材が固定される台座と、を備え、
前記ベース部材は、前記枠状部の外周側に延びる弾性構造部を有し、
前記弾性構造部が前記台座に対して接合されることを特徴とする駆動装置。 - 前記弾性構造部は、前記枠状部に直交するように延びる直交部を有することを特徴とする請求項1に記載の駆動装置。
- 前記弾性構造部は、前記枠状部に沿って延びる平行部を有することを特徴とする請求項1又は2に記載の駆動装置。
- 前記枠状部が、前記台座に対して接合されていないことを特徴とする請求項1〜3のいずれか1項に記載の駆動装置。
- 前記弾性構造部を前記台座に接合する接合部材が、複数の前記弾性構造部のそれぞれに対応するように、複数箇所に配置されていることを特徴とする請求項1〜4のいずれか1項に記載の駆動装置。
- 前記弾性構造部は、前記枠状部に連続し且つ前記台座に接合されない非接合部と、前記非接合部に連続し且つ前記台座に接合される接合部と、を有することを特徴とする請求項1〜5のいずれか1項に記載の駆動装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022136890A JP2022179481A (ja) | 2018-11-30 | 2022-08-30 | 駆動装置 |
JP2024035574A JP2024056073A (ja) | 2018-11-30 | 2024-03-08 | 駆動装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018225146 | 2018-11-30 | ||
JP2018225146 | 2018-11-30 | ||
PCT/JP2019/044655 WO2020110747A1 (ja) | 2018-11-30 | 2019-11-14 | 駆動装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022136890A Division JP2022179481A (ja) | 2018-11-30 | 2022-08-30 | 駆動装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPWO2020110747A1 true JPWO2020110747A1 (ja) | 2021-09-27 |
Family
ID=70854267
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020558330A Ceased JPWO2020110747A1 (ja) | 2018-11-30 | 2019-11-14 | 駆動装置 |
JP2022136890A Pending JP2022179481A (ja) | 2018-11-30 | 2022-08-30 | 駆動装置 |
JP2024035574A Pending JP2024056073A (ja) | 2018-11-30 | 2024-03-08 | 駆動装置 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022136890A Pending JP2022179481A (ja) | 2018-11-30 | 2022-08-30 | 駆動装置 |
JP2024035574A Pending JP2024056073A (ja) | 2018-11-30 | 2024-03-08 | 駆動装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11757380B2 (ja) |
EP (1) | EP3889101A4 (ja) |
JP (3) | JPWO2020110747A1 (ja) |
WO (1) | WO2020110747A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050024701A1 (en) * | 2003-07-29 | 2005-02-03 | Cannon Roger S. | Resonant oscillating scanning device with multiple light sources |
WO2011152215A1 (ja) * | 2010-06-02 | 2011-12-08 | 日本電気株式会社 | 光走査素子およびそれを用いた画像表示装置 |
WO2014103803A1 (ja) * | 2012-12-28 | 2014-07-03 | 株式会社Jvcケンウッド | Mems光スキャナ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7442918B2 (en) * | 2004-05-14 | 2008-10-28 | Microvision, Inc. | MEMS device having simplified drive |
JP4790802B2 (ja) * | 2006-06-23 | 2011-10-12 | アルプス電気株式会社 | アクチュエータ |
JP5191939B2 (ja) * | 2009-03-31 | 2013-05-08 | スタンレー電気株式会社 | 光偏向器用アクチュエータ装置 |
US9158108B2 (en) * | 2010-07-29 | 2015-10-13 | Nec Corporation | Optical scanning device and image display device |
JP6044943B2 (ja) | 2011-10-25 | 2016-12-14 | インテル・コーポレーション | アクチュエータ |
JP2013246362A (ja) | 2012-05-28 | 2013-12-09 | Jvc Kenwood Corp | 2軸偏向電磁駆動型光偏向器 |
WO2014109170A1 (ja) * | 2013-01-11 | 2014-07-17 | 浜松ホトニクス株式会社 | ミラー駆動装置 |
WO2015051820A1 (en) * | 2013-10-07 | 2015-04-16 | Lemoptix Sa | A method for controlling the position of a mems mirror |
DE102014207891A1 (de) * | 2014-02-17 | 2015-08-20 | Robert Bosch Gmbh | Spiegelanordnung und Projektionseinrichtung |
-
2019
- 2019-11-14 EP EP19891330.3A patent/EP3889101A4/en active Pending
- 2019-11-14 US US17/272,274 patent/US11757380B2/en active Active
- 2019-11-14 WO PCT/JP2019/044655 patent/WO2020110747A1/ja unknown
- 2019-11-14 JP JP2020558330A patent/JPWO2020110747A1/ja not_active Ceased
-
2022
- 2022-08-30 JP JP2022136890A patent/JP2022179481A/ja active Pending
-
2024
- 2024-03-08 JP JP2024035574A patent/JP2024056073A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050024701A1 (en) * | 2003-07-29 | 2005-02-03 | Cannon Roger S. | Resonant oscillating scanning device with multiple light sources |
WO2011152215A1 (ja) * | 2010-06-02 | 2011-12-08 | 日本電気株式会社 | 光走査素子およびそれを用いた画像表示装置 |
WO2014103803A1 (ja) * | 2012-12-28 | 2014-07-03 | 株式会社Jvcケンウッド | Mems光スキャナ |
Also Published As
Publication number | Publication date |
---|---|
EP3889101A1 (en) | 2021-10-06 |
JP2022179481A (ja) | 2022-12-02 |
EP3889101A4 (en) | 2022-09-14 |
WO2020110747A1 (ja) | 2020-06-04 |
US11757380B2 (en) | 2023-09-12 |
US20210257934A1 (en) | 2021-08-19 |
JP2024056073A (ja) | 2024-04-19 |
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