JPWO2019135362A1 - 透明材料加工方法、透明材料加工装置及び透明材料 - Google Patents
透明材料加工方法、透明材料加工装置及び透明材料 Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00055—Grooves
- B81C1/00071—Channels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0838—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2101/00—Use of unspecified macromolecular compounds as moulding material
- B29K2101/10—Thermosetting resins
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/0143—Focussed beam, i.e. laser, ion or e-beam
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0037—Production of three-dimensional images
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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Abstract
Description
Claims (8)
- 熱に応じて硬化する透明材料を加工する透明材料加工方法であって、
硬化前の透明材料を配置する配置工程と、
前記配置工程において配置された前記硬化前の透明材料にレーザー光を照射して、当該硬化前の透明材料にキャビテーションバブルを発生させるレーザー光照射工程と、
前記レーザー光照射工程においてキャビテーションバブルが発生した硬化前の透明材料に対して硬化処理を行う硬化処理工程と、
を含む透明材料加工方法。 - 前記配置工程において、前記硬化前の透明材料をレーザー光吸収体に接触させて配置し、
前記レーザー光照射工程において、前記配置工程において配置されたレーザー光吸収体に対して、前記硬化前の透明材料を介してレーザー光を照射して、当該硬化前の透明材料にキャビテーションバブルを発生させる、請求項1に記載の透明材料加工方法。 - 前記レーザー光吸収体は、金属であり、
前記硬化処理工程において硬化処理が行われた透明材料に対してメッキ処理を行うメッキ処理工程を更に含む請求項2に記載の透明材料加工方法。 - 前記レーザー光照射工程において、前記レーザー光吸収体に対して、レーザー光を集光して照射する請求項2又は3に記載の透明材料加工方法。
- 前記配置工程において、前記レーザー光照射工程において前記硬化前の透明材料に照射されるレーザー光の出射位置から当該硬化前の透明材料にかけて、固体及び液体の少なくとも何れかから構成される透明な物質を配置する請求項1〜4の何れか一項に記載の透明材料加工方法。
- 熱に応じて硬化する透明材料を加工する透明材料加工装置であって、
硬化前の透明材料を収容する容器と、
前記容器に収容された前記硬化前の透明材料にレーザー光を照射するレーザー光照射装置と、
前記容器に収容された前記硬化前の透明材料における、前記レーザー光照射装置によってレーザー光が照射される位置が移動するように、前記容器及び前記レーザー光照射装置の少なくとも何れか一方を移動させる移動手段と、
を備える透明材料加工装置。 - 前記レーザー光照射装置によって前記硬化前の透明材料に照射されるレーザー光の出射位置から当該硬化前の透明材料にかけて配置される固体及び液体の少なくとも何れかから構成される透明な物質を更に備える請求項6に記載の透明材料加工装置。
- 請求項1〜5の何れか一項に記載の透明材料加工方法によって加工された熱に応じて硬化する透明材料。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2018000508 | 2018-01-05 | ||
JP2018000508 | 2018-01-05 | ||
PCT/JP2018/047072 WO2019135362A1 (ja) | 2018-01-05 | 2018-12-20 | 透明材料加工方法、透明材料加工装置及び透明材料 |
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JPWO2019135362A1 true JPWO2019135362A1 (ja) | 2020-12-24 |
JP7197176B2 JP7197176B2 (ja) | 2022-12-27 |
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JP2019563963A Active JP7197176B2 (ja) | 2018-01-05 | 2018-12-20 | 透明材料加工方法 |
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US (1) | US11471981B2 (ja) |
JP (1) | JP7197176B2 (ja) |
CN (1) | CN111542411B (ja) |
WO (1) | WO2019135362A1 (ja) |
Citations (2)
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JPH0897513A (ja) * | 1994-09-27 | 1996-04-12 | Kubota Corp | 微小光学部品の作製方法 |
WO2013132819A1 (ja) * | 2012-03-06 | 2013-09-12 | 富士フイルム株式会社 | ハニカム構造フィルムの製造方法 |
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JP2838663B2 (ja) * | 1994-11-29 | 1998-12-16 | デンケンエンジニアリング株式会社 | 光造形法 |
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DE10053078A1 (de) | 1999-12-15 | 2001-06-28 | Werner Hermann Wera Werke | Handwerkzeug, insbesondere Schraubwerkzeug |
US7304005B2 (en) | 2003-03-17 | 2007-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device |
JP4231924B2 (ja) * | 2003-03-27 | 2009-03-04 | 独立行政法人産業技術総合研究所 | 透明材料の微細加工装置 |
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JP4235945B2 (ja) | 2003-08-29 | 2009-03-11 | 独立行政法人理化学研究所 | 金属配線形成方法および金属配線形成装置 |
JP2007245460A (ja) | 2006-03-15 | 2007-09-27 | Alps Electric Co Ltd | 積層成形品及びその製造方法 |
WO2008080893A1 (de) | 2007-01-05 | 2008-07-10 | Basf Se | Verfahren zur herstellung von elektrisch leitfähigen oberflächen |
JP2009136912A (ja) | 2007-12-10 | 2009-06-25 | Konica Minolta Holdings Inc | 透明材料加工法及び透明材料加工装置 |
CN101508056B (zh) | 2008-12-15 | 2012-07-04 | 吴敏锋 | 在透明材料内实现内雕的方法及装置 |
WO2017057723A1 (ja) | 2015-10-02 | 2017-04-06 | 凸版印刷株式会社 | 偽造防止構造体 |
CN107068291B (zh) | 2017-04-10 | 2019-04-30 | 武汉理工大学 | 一种转移银纳米线透明导电薄膜到柔性衬底的方法 |
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- 2018-12-20 WO PCT/JP2018/047072 patent/WO2019135362A1/ja active Application Filing
- 2018-12-20 US US16/958,099 patent/US11471981B2/en active Active
- 2018-12-20 CN CN201880085209.9A patent/CN111542411B/zh active Active
- 2018-12-20 JP JP2019563963A patent/JP7197176B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0897513A (ja) * | 1994-09-27 | 1996-04-12 | Kubota Corp | 微小光学部品の作製方法 |
WO2013132819A1 (ja) * | 2012-03-06 | 2013-09-12 | 富士フイルム株式会社 | ハニカム構造フィルムの製造方法 |
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WO2019135362A1 (ja) | 2019-07-11 |
US20210061650A1 (en) | 2021-03-04 |
CN111542411B (zh) | 2021-12-28 |
JP7197176B2 (ja) | 2022-12-27 |
US11471981B2 (en) | 2022-10-18 |
CN111542411A (zh) | 2020-08-14 |
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