JPWO2019093465A1 - 炭化珪素半導体装置、および、炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置、および、炭化珪素半導体装置の製造方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 129
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 129
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- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 19
- 230000007423 decrease Effects 0.000 description 17
- 238000000206 photolithography Methods 0.000 description 17
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- 238000001312 dry etching Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000004645 scanning capacitance microscopy Methods 0.000 description 2
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- 229910045601 alloy Inorganic materials 0.000 description 1
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- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 210000000746 body region Anatomy 0.000 description 1
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- 229910002804 graphite Inorganic materials 0.000 description 1
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Abstract
Description
以下、本実施の形態に関する炭化珪素半導体装置、および、炭化珪素半導体装置の製造方法について説明する。なお、以下の説明においては、第1の導電型がN型であり、第2の導電型がP型であるとする。
図1は、本実施の形態に関するMOSFETおよびマークの配置形態を例示する平面図である。図1においては、MOSFETが配置される領域であるMOSFET領域801と、MOSFET領域801の間に設けられる領域であるスクライブ領域802と、マークが配置される領域であるマーク領域803とが例示される。
次に、以上に記載された実施の形態によって生じる効果を例示する。なお、以下の説明においては、以上に記載された実施の形態に例示された具体的な構成に基づいて当該効果が記載されるが、同様の効果が生じる範囲で、本願明細書に例示される他の具体的な構成と置き換えられてもよい。
以上に記載された実施の形態では、それぞれの構成要素の材質、材料、寸法、形状、相対的配置関係または実施の条件などについても記載する場合があるが、これらはすべての局面において例示であって、本願明細書に記載されたものに限られることはないものとする。
Claims (15)
- 第1の導電型の炭化珪素半導体層(2、3、7)と、
前記炭化珪素半導体層(2、3、7)の表層に部分的に形成される、第2の導電型の第2の拡散層(9)と、
少なくとも前記第2の拡散層(9)の表層の一部に形成される、第2の導電型の第3の拡散層(19)と、
前記第3の拡散層(19)の表層に部分的に形成される、第1の導電型の第4の拡散層(11)とを備え、
前記第3の拡散層(19)は、前記第2の拡散層(9)よりも浅く形成され、
断面視において、前記第4の拡散層(11)は前記第3の拡散層(19)内に形成され、
断面視において、前記第3の拡散層(19)は前記第2の拡散層(9)に対して非対称となる位置に形成される、
炭化珪素半導体装置。 - 前記第3の拡散層(19)は、前記炭化珪素半導体層(2、3、7)および前記第2の拡散層(9)に接触する位置に形成される、
請求項1に記載の炭化珪素半導体装置。 - 前記第2の拡散層(9)の表面の一部、および、前記第3の拡散層(19)の表面の一部にそれぞれ接触して形成される第1のゲート絶縁膜(12)と、
前記第2の拡散層(9)の表面の他の一部、および、前記第3の拡散層(19)の表面の他の一部にそれぞれ接触して形成される第2のゲート絶縁膜(12)と、
前記第1のゲート絶縁膜(12)に接触して形成される第1のゲート電極(13)と、
前記第2のゲート絶縁膜(12)に接触して形成される第2のゲート電極(13)とをさらに備える、
請求項1または請求項2に記載の炭化珪素半導体装置。 - 前記第3の拡散層(19)の前記第1のゲート絶縁膜(12)と平面視において重なる幅は、前記第3の拡散層(19)の前記第2のゲート絶縁膜(12)と平面視において重なる幅よりも大きい、
請求項3に記載の炭化珪素半導体装置。 - 前記第3の拡散層(19)の前記第1のゲート絶縁膜(12)と平面視において重なる幅は、前記第2の拡散層(9)の前記第1のゲート絶縁膜(12)と平面視において重なる幅よりも大きく、
前記第3の拡散層(19)の前記第2のゲート絶縁膜(12)と平面視において重なる幅は、前記第2の拡散層(9)の前記第2のゲート絶縁膜(12)と平面視において重なる幅以下である、
請求項4に記載の炭化珪素半導体装置。 - 前記第1のゲート絶縁膜(12)および前記第2のゲート絶縁膜(12)は、少なくとも、前記炭化珪素半導体層(2、3、7)と前記第4の拡散層(11)とに挟まれた前記第2の拡散層(9)の表面、および、前記炭化珪素半導体層(2、3、7)と前記第4の拡散層(11)とに挟まれた前記第3の拡散層(19)の表面にそれぞれ接触して形成される、
請求項4または請求項5に記載の炭化珪素半導体装置。 - 前記第1のゲート絶縁膜(12)は、前記第4の拡散層(11)の表面の一部に接触して形成され、
前記第2のゲート絶縁膜(12)は、前記第4の拡散層(11)の表面の他の一部に接触して形成され、
前記第4の拡散層(11)の前記第1のゲート絶縁膜(12)と平面視において重なる幅は、前記第4の拡散層(11)の前記第2のゲート絶縁膜(12)と平面視において重なる幅よりも大きい、
請求項6に記載の炭化珪素半導体装置。 - 前記第1のゲート絶縁膜(12)と平面視において重なる、前記炭化珪素半導体層(2、3、7)と前記第4の拡散層(11)とに挟まれた前記第3の拡散層(19)の幅は、1.0μm未満である、
請求項6または請求項7に記載の炭化珪素半導体装置。 - 前記第3の拡散層(19)は、前記炭化珪素半導体層(2、3、7)の表層および前記第2の拡散層(9)の表層に跨って形成される、
請求項4から請求項8のうちのいずれか1項に記載の炭化珪素半導体装置。 - 第1の導電型の炭化珪素半導体層(2、3、7)の表層に、イオンの注入によって第2の導電型の第2の拡散層(9)を部分的に形成し、
前記炭化珪素半導体層(2、3、7)の表面に、レジストパターン(10)を形成し、
前記レジストパターン(10)から露出した状態の少なくとも前記第2の拡散層(9)の表層の一部に、イオンの回転注入によって第2の導電型の第3の拡散層(19)を形成し、
前記レジストパターン(10)から露出した状態の第3の拡散層(19)の表層に、イオンの注入によって第1の導電型の第4の拡散層(11)を部分的に形成する、
炭化珪素半導体装置の製造方法。 - 0°よりも大きくかつ45°以下の角度でのイオンの回転注入によって第2の導電型の前記第3の拡散層(19)を形成する、
請求項10に記載の炭化珪素半導体装置の製造方法。 - 30°以上かつ45°以下の角度でのイオンの回転注入によって第2の導電型の前記第3の拡散層(19)を形成する、
請求項10または請求項11に記載の炭化珪素半導体装置の製造方法。 - 前記レジストパターン(10)の端部は、テーパ形状である、
請求項10から請求項12のうちのいずれか1項に記載の炭化珪素半導体装置の製造方法。 - 前記第3の拡散層(19)は、前記第2の拡散層(9)よりも浅く形成され、
前記第4の拡散層(11)は、前記第3の拡散層(19)の表層に部分的に形成される、
請求項10から請求項13のうちのいずれか1項に記載の炭化珪素半導体装置の製造方法。 - 少なくとも、前記炭化珪素半導体層(2、3、7)と前記第4の拡散層(11)とに挟まれた前記第2の拡散層(9)の表面、および、前記炭化珪素半導体層(2、3、7)と前記第4の拡散層(11)とに挟まれた前記第3の拡散層(19)の表面に、第1のゲート絶縁膜(12)および第2のゲート絶縁膜(12)を形成し、
前記第1のゲート絶縁膜(12)の表面および前記第2のゲート絶縁膜(12)の表面に、それぞれ第1のゲート電極(13)および第2のゲート電極(13)を形成し、
前記第3の拡散層(19)の前記第1のゲート絶縁膜(12)と平面視において重なる幅は、前記第3の拡散層(19)の前記第2のゲート絶縁膜(12)と平面視において重なる幅よりも大きい、
請求項10から請求項14のうちのいずれか1項に記載の炭化珪素半導体装置の製造方法。
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