JPWO2018225682A1 - フルオロエラストマー組成物及びその成形品 - Google Patents
フルオロエラストマー組成物及びその成形品 Download PDFInfo
- Publication number
- JPWO2018225682A1 JPWO2018225682A1 JP2019523524A JP2019523524A JPWO2018225682A1 JP WO2018225682 A1 JPWO2018225682 A1 JP WO2018225682A1 JP 2019523524 A JP2019523524 A JP 2019523524A JP 2019523524 A JP2019523524 A JP 2019523524A JP WO2018225682 A1 JPWO2018225682 A1 JP WO2018225682A1
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- JP
- Japan
- Prior art keywords
- group
- fluoroelastomer
- graphene
- crosslinking
- crosslinking agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920001973 fluoroelastomer Polymers 0.000 title claims abstract description 108
- 239000000203 mixture Substances 0.000 title claims abstract description 43
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 64
- 239000000178 monomer Substances 0.000 claims abstract description 64
- 229910021389 graphene Inorganic materials 0.000 claims abstract description 59
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 45
- 239000003431 cross linking reagent Substances 0.000 claims description 44
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 15
- 229920006169 Perfluoroelastomer Polymers 0.000 claims description 13
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 11
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 11
- 239000003054 catalyst Substances 0.000 claims description 9
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 claims description 6
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 238000005299 abrasion Methods 0.000 abstract description 4
- 238000004132 cross linking Methods 0.000 description 55
- 229920001971 elastomer Polymers 0.000 description 34
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 29
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 29
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- 125000004432 carbon atom Chemical group C* 0.000 description 23
- -1 perfluoro Chemical group 0.000 description 20
- 125000001153 fluoro group Chemical group F* 0.000 description 19
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- 125000000524 functional group Chemical group 0.000 description 7
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- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 6
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- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 4
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 4
- KOMNUTZXSVSERR-UHFFFAOYSA-N 1,3,5-tris(prop-2-enyl)-1,3,5-triazinane-2,4,6-trione Chemical compound C=CCN1C(=O)N(CC=C)C(=O)N(CC=C)C1=O KOMNUTZXSVSERR-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 3
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- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 125000002883 imidazolyl group Chemical group 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 3
- 235000011007 phosphoric acid Nutrition 0.000 description 3
- 229920000768 polyamine Polymers 0.000 description 3
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- 125000001424 substituent group Chemical group 0.000 description 3
- 238000000967 suction filtration Methods 0.000 description 3
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- 238000009210 therapy by ultrasound Methods 0.000 description 3
- 150000003672 ureas Chemical class 0.000 description 3
- SONQUBLFXUMJKL-UHFFFAOYSA-N 2,3-diaminobenzenethiol Chemical compound NC1=CC=CC(S)=C1N SONQUBLFXUMJKL-UHFFFAOYSA-N 0.000 description 2
- 239000004254 Ammonium phosphate Substances 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical class [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000005481 NMR spectroscopy Methods 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
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- 229910000148 ammonium phosphate Inorganic materials 0.000 description 2
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- 238000004458 analytical method Methods 0.000 description 2
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- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 2
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- VKYKSIONXSXAKP-UHFFFAOYSA-N hexamethylenetetramine Chemical compound C1N(C2)CN3CN1CN2C3 VKYKSIONXSXAKP-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 2
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Classifications
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
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- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/0001—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor characterised by the choice of material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
- B29C48/022—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the choice of material
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- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
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- C08K5/0025—Crosslinking or vulcanising agents; including accelerators
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3442—Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
- C08K5/3445—Five-membered rings
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- C08K5/35—Heterocyclic compounds having nitrogen in the ring having also oxygen in the ring
- C08K5/353—Five-membered rings
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- C08K5/36—Sulfur-, selenium-, or tellurium-containing compounds
- C08K5/45—Heterocyclic compounds having sulfur in the ring
- C08K5/46—Heterocyclic compounds having sulfur in the ring with oxygen or nitrogen in the ring
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
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- C08K5/46—Heterocyclic compounds having sulfur in the ring with oxygen or nitrogen in the ring
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
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Abstract
Description
一般式(1):CX1 2=CX1−Rf 1CHR1X2
(式中、X1は、水素原子、フッ素原子又はCH3、Rf 1は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロ(ポリ)オキシアルキレン基又はパーフルオロ(ポリ)オキシアルキレン基、R1は、水素原子又はCH3、X2は、ヨウ素原子又は臭素原子である)で表されるフルオロモノマー、
一般式(2):CX1 2=CX1−Rf 1X2
(式中、X1は、水素原子、フッ素原子又はCH3、Rf 1は、フルオロアルキレン基、パーフルオロアルキレン基、フルオロ(ポリ)オキシアルキレン基又はパーフルオロ(ポリ)オキシアルキレン基、X2は、ヨウ素原子又は臭素原子である)で表されるフルオロモノマー、
一般式(3):CF2=CFO(CF2CF(CF3)O)m(CF2)n−X3
(式中、mは0〜5の整数、nは1〜3の整数、X3は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、又は、−CH2Iである)で表されるフルオロモノマー、及び、
一般式(4):CH2=CFCF2O(CF(CF3)CF2O)m(CF(CF3))n−X4
(式中、mは0〜5の整数、nは1〜3の整数、X4は、シアノ基、カルボキシル基、アルコキシカルボニル基、ヨウ素原子、臭素原子、又は、−CH2OHである)で表されるフルオロモノマー、及び、
一般式(5):CR2R3=CR4−Z−CR5=CR6R7
(式中、R2〜R7は、同一又は異なって、水素原子又は炭素数1〜5のアルキル基である。Zは、直鎖又は分岐状で酸素原子を有していてもよい、炭素数1〜18のアルキレン基、炭素数3〜18のシクロアルキレン基、少なくとも部分的にフッ素化している炭素数1〜10のアルキレン基若しくはオキシアルキレン基、又は、
−(Q)p−CF2O−(CF2CF2O)m(CF2O)n−CF2−(Q)p−
(式中、Qはアルキレン基またはオキシアルキレン基である。pは0または1である。m/nが0.2〜5である。)で表され、分子量が500〜10000である(パー)フルオロポリオキシアルキレン基である。)で表されるモノマー
からなる群より選択される少なくとも1種であることが好ましい。
一般式(11)〜(27):
CY11 2=CY11(CF2)n−CN (11)
(式中、Y11は水素原子またはフッ素原子、nは1〜8の整数)
CF2=CFCF2Rf 12−CN (12)
(式中、Rf 12は、−(OCF2)n−又は−(OCF(CF3))n−、nは0〜5の整数)
CF2=CFCF2(OCF(CF3)CF2)m(OCH2CF2CF2)nOCH2CF2−CN (13)
(式中、mは0〜5の整数、nは0〜5の整数)
CF2=CFCF2(OCH2CF2CF2)m(OCF(CF3)CF2)nOCF(CF3)−CN (14)
(式中、mは0〜5の整数、nは0〜5の整数)
CF2=CF(OCF2CF(CF3))mO(CF2)n−CN (15)
(式中、mは0〜5の整数、nは1〜8の整数)
CF2=CF(OCF2CF(CF3))m−CN (16)
(式中、mは1〜5の整数)
CF2=CFOCF2(CF(CF3)OCF2)nCF(−CN)CF3 (17)
(式中、nは1〜4の整数)
CF2=CFO(CF2)nOCF(CF3)−CN (18)
(式中、nは2〜5の整数)
CF2=CFO(CF2)n−(C6H4)−CN (19)
(式中、nは1〜6の整数)
CF2=CF(OCF2CF(CF3))nOCF2CF(CF3)−CN (20)
(式中、nは1〜2の整数)
CH2=CFCF2O(CF(CF3)CF2O)nCF(CF3)−CN (21)
(式中、nは0〜5の整数)、
CF2=CFO(CF2CF(CF3)O)m(CF2)n−CN (22)
(式中、mは0〜5の整数、nは1〜3の整数)
CH2=CFCF2OCF(CF3)OCF(CF3)−CN (23)
CH2=CFCF2OCH2CF2−CN (24)
CF2=CFO(CF2CF(CF3)O)mCF2CF(CF3)−CN (25)
(式中、mは0以上の整数)
CF2=CFOCF(CF3)CF2O(CF2)n−CN (26)
(式中、nは1以上の整数)
CF2=CFOCF2OCF2CF(CF3)OCF2−CN (27)
で表されるモノマーなどがあげられ、これらをそれぞれ単独で、または任意に組み合わせて用いることができる。
一般式(38):CF2=CF−ORf38
(式中、Rf38は、炭素数1〜8のパーフルオロアルキル基を表す。)で表されるフルオロモノマー、
一般式(39):CF2=CFOCF2ORf39
(式中、Rf39は炭素数1〜6の直鎖又は分岐状パーフルオロアルキル基、炭素数5〜6の環式パーフルオロアルキル基、1〜3個の酸素原子を含む炭素数2〜6の直鎖又は分岐状パーフルオロオキシアルキル基である)で表されるフルオロモノマー、及び、
一般式(40):CF2=CFO(CF2CF(Y40)O)m(CF2)nF
(式中、Y40はフッ素原子又はトリフルオロメチル基を表す。mは1〜4の整数である。nは1〜4の整数である。)で表されるフルオロモノマー
からなる群より選択される少なくとも1種であることが好ましく、一般式(38)で表されるフルオロモノマーがより好ましい。
本発明のフルオロエラストマー成形品は、特に高度なクリーンさが要求される半導体製造装置、特に高密度プラズマ照射が行なわれる半導体製造装置のシール材として好適に使用できる。上記シール材としては、O−リング、角−リング、ガスケット、パッキン、オイルシール、ベアリングシール、リップシール等が挙げられる。
そのほか、半導体製造装置に使用される各種のポリマー製品、例えばダイヤフラム、チューブ、ホース、各種ゴムロール、ベルト等としても使用できる。また、コーティング用材料、ライニング用材料としても使用できる。
ドライエッチング装置
プラズマエッチング装置
反応性イオンエッチング装置
反応性イオンビームエッチング装置
スパッタエッチング装置
イオンビームエッチング装置
ウェットエッチング装置
アッシング装置
(2)洗浄装置
乾式エッチング洗浄装置
UV/O3洗浄装置
イオンビーム洗浄装置
レーザービーム洗浄装置
プラズマ洗浄装置
ガスエッチング洗浄装置
抽出洗浄装置
ソックスレー抽出洗浄装置
高温高圧抽出洗浄装置
マイクロウェーブ抽出洗浄装置
超臨界抽出洗浄装置
(3)露光装置
ステッパー
コータ・デベロッパー
(4)研磨装置
CMP装置
(5)成膜装置
CVD装置
スパッタリング装置
(6)拡散・イオン注入装置
酸化拡散装置
イオン注入装置
多層カーボンナノチューブ(MWCNT、昭和電工社製、VGCF−H)1.5gを濃硫酸60mlに加えて1時間撹拌した後、過マンガン酸カリウム7.5gを加えて1時間撹拌した。この分散液を55℃に昇温して1時間撹拌し、さらに70℃に昇温して30分撹拌した後、室温に冷却した。不溶性の二酸化マンガンの沈殿を予防するための過酸化水素水30mlを含む氷水400mlにこの分散液を加えた後、孔サイズが0.45μmのポリテトラフルオロエチレン製ろ紙を用いて吸引ろ過を行った。得られた固体を150mlの水に分散させて超音波処理を30分間行った。固体を凝集させるためにこの分散液に0.5mol/lの塩酸100mlを加えた後、孔サイズが0.45μmのポリテトラフルオロエチレン製ろ紙を用いて吸引ろ過を行った。得られた固体をエタノール200mlに分散させて超音波処理を30分間行った。この分散液にヘキサン200mlを加えた後、孔サイズが0.45μmのポリテトラフルオロエチレン製ろ紙を用いて吸引ろ過を行った。得られた固体を真空オーブン中で60℃に昇温して24時間乾燥させて酸化グラフェン(GO)を得た。
長さ(L)=1,000〜2,000nm
幅(W)=470nm(最大値)、240nm(平均値)
厚み(T)=10nm(同じ方法による文献値(Kosynkin, Dmitry V., et al. Nature 458.7240 (2009): 872−876.))
比表面積=440m2/g
L/W=4〜8(平均値)
L/T=100〜200
実施例1〜3及び比較例1〜4のフィラー分散エラストマーシートから打抜刃を用いて作製したJIS7号形のダンベル状試験片に対して、引張試験機を用いて引張速度50mm/minの条件で引張試験を行った。得られた応力−ひずみ曲線から引張弾性率(MPa)、破断強度(MPa)、破断伸びを求めた。
Claims (8)
- 架橋性基含有モノマー単位を含むフルオロエラストマー、及び、細長いシート状のグラフェンを含み、前記グラフェンの最大長さ(L)に対する幅方向の長さ(W)の比(L/W)が2〜105であり、前記グラフェンの最大長さ(L)に対する厚み(T)の比(L/T)が1×101〜1×107であることを特徴とするフルオロエラストマー組成物。
- 前記フルオロエラストマーが、パーフルオロエラストマーである請求項1記載のフルオロエラストマー組成物。
- 前記架橋性基が、シアノ基、カルボキシル基、アルコキシカルボニル基、及び、酸ハライド基からなる群より選択される少なくとも1種である請求項1又は2記載のフルオロエラストマー組成物。
- 前記フルオロエラストマー及び前記グラフェンの合計量に対して0.1〜20質量%の前記グラフェンを含む請求項1、2又は3記載のフルオロエラストマー組成物。
- 更に、トリアジン環を生じさせる触媒を含み、前記架橋性基がシアノ基である請求項1、2、3又は4記載のフルオロエラストマー組成物。
- 更に、架橋剤を含む請求項1、2、3又は4記載のフルオロエラストマー組成物。
- 前記架橋剤は、オキサゾール架橋剤、イミダゾール架橋剤及びチアゾール架橋剤からなる群より選択される少なくとも1種である請求項6記載のフルオロエラストマー組成物。
- 請求項1、2、3、4、5、6又は7記載のフルオロエラストマー組成物からなることを特徴とするフルオロエラストマー成形品。
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WO2011074125A1 (ja) * | 2009-12-18 | 2011-06-23 | 国立大学法人 北海道大学 | 酸化グラフェンシート及びこれを還元して得られるグラフェン含有物質を含有する物品、並びに、その製造方法 |
WO2016154057A1 (en) * | 2015-03-23 | 2016-09-29 | Garmor Inc. | Engineered composite structure using graphene oxide |
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CN110709465B (zh) | 2023-02-17 |
US11492480B2 (en) | 2022-11-08 |
WO2018225682A1 (ja) | 2018-12-13 |
JP6861423B2 (ja) | 2021-04-21 |
EP3636711A1 (en) | 2020-04-15 |
JP7486125B2 (ja) | 2024-05-17 |
CN110709465A (zh) | 2020-01-17 |
JP2020200482A (ja) | 2020-12-17 |
KR102327854B1 (ko) | 2021-11-17 |
KR20190130173A (ko) | 2019-11-21 |
EP3636711B1 (en) | 2022-08-31 |
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US20200181386A1 (en) | 2020-06-11 |
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