JPWO2018083914A1 - Plating processing jig and plating processing apparatus - Google Patents

Abstract

A plating processing jig and a plating processing apparatus capable of suppressing the generation of nodules even when the plating processing jig rotates in a plating bath. A plating processing jig according to the present invention is a plating processing jig for immersing a disk-shaped substrate having a center hole in a plating solution in a plating bath, the center hole of the substrate being A support rod that is inserted into the support rod, a restraint member that supports the support rod, and that includes a rotation suppression mechanism that inhibits the supported support rod from rotating, and the support rod is attached via the restraint member. A carousel. [Selection] Figure 1

Description

  The present invention relates to a plating processing technique, and more particularly to a plating processing jig and a plating processing apparatus for forming a plating film on a substrate by immersing a disc-shaped substrate having a center hole in a plating bath.

Magnetic recording media used in HDDs (Hard Disk Drives) installed in PCs and home appliances are in high demand due to their high convenience and the recording density is being remarkably improved.
For such a magnetic recording medium, there is a continuing demand from the market to achieve higher recording density, and therefore even a disc-shaped substrate used for a magnetic recording medium is more smooth than ever. There is a need for a high-quality substrate with high scratches.

  For example, an aluminum alloy substrate or a glass substrate is used as the disk-shaped substrate. Of these, the aluminum alloy substrate is manufactured through, for example, the following steps. That is, first, an aluminum alloy plate having a thickness of about 1 to 3 mm is punched into a donut shape to form a substrate having a desired size. Next, after chamfering the end of the punched substrate, grinding with a grindstone is performed, and thereafter, electroless NiP plating is performed on the substrate surface.

  In electroless NiP plating, for example, as shown in Patent Document 1, a plurality of substrates are held by a jig for plating treatment, and these substrates are collectively immersed in a plating bath. In addition, as disclosed in Patent Document 1, in order to efficiently form a plating film on the substrate surface, electroless NiP plating is applied to a plurality of substrates while rotating or revolving the jig for plating treatment. It is also known to apply.

On the other hand, in the technique of rotating and revolving the plating jig described above in the plating bath, defects called nodules may be generated on the substrate surface due to wear powder generated from the sliding portion of the plating jig.
When this nodule is generated, the quality of the substrate is remarkably deteriorated, so it is important how to suppress such nodule. In this regard, Patent Document 1 shows that nodules that are likely to be generated at the outer peripheral edge of the substrate can be suppressed by making the cross section of the groove into which the outer peripheral edge of the substrate 10 is fitted into a U shape. .

JP 2007-169757 A

However, the above-described conventional plating jig has the following problems, and it can be said that there are still points to be improved.
That is, according to Patent Document 1, there is a possibility that nodules caused by the outer peripheral edge of the substrate can be suppressed, but there is no mention of abrasion powder generated from the sliding portion of the plating processing jig. As described above, in the configuration of Patent Document 1, there is a concern that another nodule may be generated due to the abrasion powder generated from the sliding portion of the plating processing jig.

  The present invention has been made in view of solving such problems, and a plating treatment jig and a plating treatment capable of suppressing the generation of nodules even when the plating treatment jig rotates in the plating bath. An object is to provide an apparatus.

In order to solve the above problems, a plating processing jig according to an embodiment of the present invention is (1) for plating processing for immersing a disk-shaped substrate having a center hole in a plating solution in a plating bath. A support rod that is inserted into a center hole of the substrate; a restraint member that supports the support rod and includes a rotation suppression mechanism that suppresses rotation of the supported support rod; and And a carousel to which the support rod is attached via a restraining member.

  In the plating jig described in (1) above, (2) the rotation suppression mechanism includes a contact member that contacts the support rod, and an elastic member that presses the contact member against the support rod. It is preferable to include a pressing member having

  Furthermore, in the plating processing jig according to (2) described above, (3) the restraining member is provided with a U-shaped accommodation recess that accommodates at least a part of the peripheral surface of the support rod, It is preferable that the contact member is pressed in contact with the support rod via the elastic member in a state where the support rod is accommodated in the accommodation recess.

  In the plating processing jig described in (2) or (3) above, (4) at least two of the pressing members are provided so that the contact members are opposed to each other in the advancing / retreating direction. It is preferable that

  In the plating jig according to any one of the above (1) to (4), (5) a guide surface for urging and removing the support rod is formed on the top of the contact member. It is preferable.

  In the plating jig according to any one of the above (1) to (5), (6) it is preferable that at least a part of the top of the contact member is subjected to a low friction treatment. .

  Moreover, in order to solve the said subject, the plating processing apparatus concerning one Embodiment of this invention is the rotation which rotates the jig for plating processing in any one of above-described (1)-(6), and the said carousel. And a mechanism.

  According to the present invention, since the support rod attached to the carousel is prevented from rotating by the rotation suppressing mechanism, the nodule generated due to wear powder that may occur at the connection portion between the support rod and the carousel is suppressed. It becomes possible to do.

1 is a view showing a plating processing jig 10 and a plating processing apparatus 100. FIG. It is the figure which showed the restraint member 12 among the jigs 10 for a plating process. FIG. 3 is a development view in which each side surface of the plating processing jig 10 is developed. It is a schematic diagram for demonstrating the contact member 12b among the rotation suppression mechanisms in the jig | tool 10 for a plating process. It is a schematic diagram for demonstrating the bearing member 12a among the rotation suppression mechanisms in the jig | tool 10 for a plating process. It is a figure of a state transition at the time of the support rod 11 being attached or detached with the restraint member 12 in the jig | tool 10 for a plating process.

  Hereinafter, an embodiment for carrying out the present invention will be described. In the drawings used for the following description, for convenience, the direction in which the support rod 11 extends when attached to the plating processing jig 10 is defined as the X direction, and this drawing is suitable for the description with reference to the X direction. The directions are set appropriately in the Y direction and the Z direction. However, these directions are set only for the purpose of clarifying the explanation, and do not unduly limit and interpret the present invention.

  FIG. 1 is a view showing a plating processing jig 10 and a plating processing apparatus 100. Among these, FIG. 1A is a schematic view of a plating apparatus 100 including a plating jig 10, and FIG. 1B is a plan view of the plating jig 10 viewed from the axial direction. FIG. 2A is a partially enlarged view of a region P in FIG. 1A, and FIG. 1D is a cross-sectional view taken along the line AA in FIG. As shown in these drawings, the plating apparatus 100 according to the present embodiment mainly includes a plating processing jig 10 and a rotation mechanism 15.

  The plating processing jig 10 is used for immersing the disc-shaped substrate 1 having a center hole in the plating solution L in the plating bath 20. The plating processing jig 10 of this embodiment includes at least a support rod 11, a restraining member 12, and a carousel 13.

  Here, the board | substrate 1 is a disk-shaped member comprised with metal materials, such as glass or aluminum which have a circular through-hole (center hole) in the center. Such a substrate 1 has a thickness of about 0.3 mm to 2.0 mm, and generally has a diameter of 2. For a substrate exceeding 5 inches, an aluminum substrate is mainly used, and for a size of 2.5 inches or less, a glass substrate is mainly used.

  Of these, for the aluminum substrate 1, for example, a substrate punched out of an aluminum material is subjected to a necessary pretreatment, and then subjected to an electroless plating treatment using a Ni-P plating solution bath, which will be described later. A film is formed, and a ferromagnetic metal thin film is further laminated thereon, and the magnetic recording disk substrate is formed.

The plating bath 20 is a metal or resin tank having a size enough to enclose one or a plurality of plating treatment jigs 10. In addition, as the plating bathtub 20, the bathtub disclosed by the above-mentioned patent document and other well-known electroless plating bathtubs can be applied, for example. In addition, the well-known Ni-P plating solution is applicable to the plating solution L stored in the plating bath 20 in this embodiment, for example, nickel sulfate: 20 g / dm ³ , sodium hypophosphite: 20 g. An aqueous solution containing / dm ³ , sodium acetate: 10 g / dm ³ , sodium citrate: 10 g / dm ³ and the like can be exemplified.

The support rod 11 is a rod-shaped member that is inserted into the center hole of the substrate 1. As shown in FIG. 1, one or more support rods 11 are arranged between a pair of carousels 13a and 13b. Although there is no restriction | limiting in particular in the material of the support rod 11, For example, resin etc. are illustrated.
The support rod 11 supports the substrate 1 through the above-described center hole, and is further provided with an outer peripheral holding shaft arranged at predetermined intervals on a circumferential line near the outer peripheral edge of the substrate 1 (Japanese Patent Application Laid-Open No. 2005-260707). 2007-169757 or the like) may be disposed around the support rod 11.

The restraining member 12 has a function of supporting the support rod 11. As an example, the restraint member 12 in the present embodiment is a member having a U-shaped cross section so as to grip the support rod 11. And the restraint member 12 of this embodiment is provided with the rotation suppression mechanism (after-mentioned) which suppresses the supported support rod 11 rotating. Although there is no restriction | limiting in particular in the material of this restraining member 12, For example, resin etc. are illustrated. As shown in FIG. 1, the restraining member 12 is arranged such that the U-shaped opening side (the space on the side where the support rod 11 is inserted) faces the outer peripheral direction via a positioning protrusion 12a ₃ described later. One or a plurality of support rods 11 are installed in the carousel 13 according to the number of support rods 11.

  The carousel 13 is a member to which the support rod 11 is attached via the restraining member 12. The carousel 13 of this embodiment is a large disk having teeth formed on the outer periphery, and is arranged in pairs so that the support rod 11 can be supported horizontally. More specifically, as shown in FIG. 1, the first carousel 13a and the second carousel 13b are arranged to face each other at a predetermined interval, and one or a plurality of support rods 11 are arranged horizontally in the inside. Although there is no restriction | limiting in particular in the material of this carousel 13, For example, resin etc. are illustrated.

In addition, the plating apparatus 100 of the present embodiment may include a suspension apparatus 14 that supports the plating processing jig 10 while being immersed in the plating bath 20.
As shown in FIG. 1, the hanging device 14 has a function of hanging and supporting both ends of the carousel 13. At this time, it is preferable that the suspension device 14 is not fixed to both ends of the carousel 13 and supports the carousel 13 in a manner that does not hinder the rotation of the carousel 13 by the rotation mechanism 15 described later.

Therefore, as shown in FIG. 1, the plurality of substrates 1 accommodated in the plating processing jig 10 suspended by the suspension device 14 are in the plating bath 20 with the support rods 11 inserted through the center holes. It is immersed in the plating solution L.
Then, after the plurality of substrates 1 are immersed in the plating solution L, the carousel 13 rotates around the rotation shaft 16 via the rotation mechanism 15 of the plating apparatus 100, so that the support rod 11 revolves in the plating solution L. It is possible to do.

Such a rotating mechanism 15 includes, for example, a motor 15a and a transmission gear 15b. Of these, various known electric motors may be applied to the motor 15a. Further, the transmission gear 15 b transmits the power from the motor 15 a to the carousel 13, whereby the carousel 13 can rotate around the rotation shaft 16.
As described above, when the carousel 13 rotates around the rotation shaft 16, the support rod 11 supported by the carousel 13 revolves around the rotation shaft 16.

Next, the rotation suppression mechanism of the restraining member 12 in the present embodiment will be described in detail with reference to FIGS. 2A is an external perspective view of the restraining member 12, and FIG. 2B is a side view and a top view. FIG. 3 is an external view of the restraining member 12 as seen from the front, side, back and top. FIG. 4 is a diagram illustrating the configuration of the pressing member 12b in the rotation suppressing mechanism of the restraining member 12. FIG. 5 is a view showing the bearing 12 a in the rotation suppressing mechanism of the restraining member 12.
As described above, the restraining member 12 installed in the carousel 13 rotates (rotates) in the restraining member 12 when the support rod 11 revolves around the rotation axis 16 as the carousel 13 rotates. This includes a rotation suppression mechanism capable of suppressing the rotation.

As shown in FIG. 2, the rotation suppression mechanism of the restraining member 12 in the present embodiment includes a bearing 12a and a pressing member 12b.
Of these, the bearing 12a is configured to include an accommodation recess 12a ₁ , a pressing member storage 12a ₂ , a positioning protrusion 12a _{3 and the} like, as shown in FIGS. Although there is no restriction | limiting in particular in the material of this bearing 12a, For example, you may form with resin.

The housing recess 12 a ₁ is a recess capable of housing at least a part of the peripheral surface of the support rod 11, and the bottom surface with which the support rod 11 comes into contact is a U-shaped curved surface so as to follow the outer peripheral surface of the support rod 11. ing. As shown in FIG. 3, the length L into which the support rod 11 is inserted is not particularly limited as long as the support rod 11 can be supported by the restraining member 12, and the height of the restraining member 12 from the carousel 13 is taken into consideration. May be set as appropriate.

The pressing member storage portion 12a ₂ is a portion in which a pressing member 12b described later is accommodated. In this embodiment, the pressing member storage portion 12a ₂ is disposed so as to face each other at two positions so as to sandwich the housing recess 12a ₁ . Further, as shown in FIG. 5, the pressing member storage portion 12a ₂ is formed with a guide groove 12a ₄ that guides the movement of the pressing member 12b so that the pressing member 12b does not fall off.

Further, the pressing member storage portion 12a ₂ is formed with an insertion hole 12a ₅ into which a mounting member 12b ₃ described later is inserted. Thus for the present embodiment the mounting member 12b ₃ are disposed in the pressing member storing portion 12a in the ₂ through the insertion hole 12a _5, be located pressed stably against member storing portion 12a in the ₂ members 12b It is possible.

The positioning protrusion 12a ₃ is a guide for installing the restraining member 12 at a predetermined position of the carousel 13 described above. That is, a positioning recess (not shown) corresponding to the positioning protrusion 12a ₃ is also formed in the carousel 13, and the position of the restraining member 12 on the carousel 13 is determined by inserting the positioning protrusion 12a ₃ into the positioning recess. Confirmed.

The positioning protrusion 12a ₃ in the present embodiment is cylindrical, for example a triangular prism or a quadrangular prism is not limited to this embodiment, or may be rectangular, such as pentagonal prism. By making the positioning protrusion 12a ₃ rectangular and the corresponding positioning recess also rectangular, the direction of the restraining member 12 can be automatically determined, for example, the U-shaped opening side faces the outer periphery. .

Next, a detailed configuration of the pressing member 12b in the above-described rotation suppression mechanism will be described with reference to FIGS.
First, as shown in FIG. 4, the pressing member 12 b includes a contact member 12 b ₁ , an elastic member 12 b _2, and a mounting member 12 b ₃ .
4, (a) shows the contact member 12b ₁ , (b) shows the elastic member 12b ₂ , (c) shows the attachment member 12b ₃ , and (d) shows the contact member 12b ₁ on the Y direction side. is a view from a view of the (e) the mounting member 12b ₃ from the Y direction.
The contact member 12b ₁ is a member that can contact the support rod 11 housed in the housing recess 12a ₁ . There is no particular limitation on the material of the contact member 12b _1, may be formed, for example, a resin such as.

As shown in the drawing, a screw hole M is formed in the contact member 12b ₁ and is screwed with a screw portion N of the mounting member 12b ₃ described later. Therefore, the contact member 12b ₁ can be pressed against the support rod 11 via the elastic member 12b ₂ described later in a state where the support rod 11 is housed in the housing recess 12a ₁ .

As further shown also in FIGS. 2 and 3, the restraining member 12 of this embodiment, at least two comprises a member 12b pressing the contact member 12b ₁ of each other are opposed with respect to (Y direction in FIG. 2) moving direction It may be arranged as follows.
Further, as shown in FIG. 4, the top t of the contact members 12b ₁ of the present embodiment, the guide surface t1 and the guide surface t2 encourage desorption of the support rod 11 is formed.

Among guide surfaces t1, the support rod 11 which is accommodated in the accommodating recess 12a ₁ is a surface which contacts. As apparent from FIG. 3, the top portion t has a triangular roof shape or an arrow-like shape, and the guide surface t <b> 1 extends along the circumferential surface of the support rod 11 from the distal end of the top portion t with respect to the Y direction. It has an inclined surface that tapers.

On the other hand the guide surface t2, the said support rod 11 is a surface which contacts when the support rod 11 in the accommodation recess 12a ₁ is accommodated. As is apparent from FIG. 3, the guide surface t2 is also an inclined surface with the tip tapered from the tip of the top t in the Y direction. Incidentally, as shown in Figure 4, in this embodiment, become angle alpha ₁ between the guide surface t1 and the Y-axis becomes an angle alpha ₂ between the guide surface t2 and Y-axis is made equal angles to each other. However, the present invention is not limited to this, and α ₁ ≠ α ₂ and α ₁ > α ₂ may be satisfied, or α ₁ <α ₂ may be satisfied.

Further, at least a part of the top part t of the contact member 12b ₁ may be subjected to a low friction process. In other words, at least one of the guide surface t1 and the guide surface t2 may be subjected to a low friction process so as to promote attachment / detachment of the support rod 11. As specific examples of this low friction treatment, various known treatments can be applied. For example, a fluorine coating film may be separately applied, or a DLC (diamond-like carbon) coating film may be separately applied.

Further, as shown in FIG. 4, the contact member 12b ₁ is formed with a guide projection 12b ₄ corresponding to _the guide groove 12a ₄ of the pressing member storage portion 12a ₂ described above. In the present embodiment, the guide protrusions 12b ₄ are respectively formed on the two adjacent side surfaces of the contact member 12b ₁ corresponding to the guide grooves 12a ₄ .

The elastic member 12 b ₂ has a function of pressing the contact member 12 b ₁ against the support rod 11. A specific example of the elastic member 12b ₂ in the present embodiment is not particularly limited as long as the contact member 12b ₁ can be pressed against the support rod 11, but examples thereof include a spring and rubber. The elastic member 12b _2, in a state where the support rod 11 is accommodated in the accommodating recess 12a _1, preferably has a spring constant of the degree to which the support rod 11 is contacted member 12b ₁ can continue pressing.

The elastic member 12b ₂ of the present embodiment has one end portion in contact with the contact member 12b ₁ and the other end portion in contact with the pressing member storage portion 12a ₂ . Thereby, when the support rod 11 is detached, the elastic member 12b ₂ can exert an action of pushing out the contact member 12b ₁ with the pressing member storage portion 12a ₂ as a base end.

The attachment member 12b ₃ is a part stored in the pressing member storage portion 12a ₂ as shown in FIG. There is no particular limitation on the material of the mounting member 12b _3, may be formed, for example, a resin such as. As described above, in the present embodiment, the insertion hole 12a ₅ is formed in the pressing member storage portion 12a ₂ , and the attachment member 12b ₃ is inserted into the insertion hole 12a ₅ . The tip portion of the mounting member 12b ₃ is a threaded portion N, are integrated by being screwed with the screw hole M as described above of the contact member 12b _1. This will member 12b pressing the pressing member storage section 12a ₂ is stored, it is prevented from further guide groove 12a ₄ and the guide projections 12b ₄ and in the pressing member 12b comes off.

Next, with reference to FIG. 6, the supporting rod 11 will be described the state transition when being inserted and removed with respect to the housing recess 12a ₁ of the restraint member 12. FIG. 6A shows the case where the support rod 11 is outside the housing recess 12a ₁ , FIG. 6B shows the time when the support rod 11 is being inserted into the housing recess 12a _1, and FIG. 6C shows the support rod 11. The time when the accommodation into the accommodation recess 12a ₁ is completed is shown.
As shown in FIG. 6B, when the support rod 11 is accommodated in the accommodating recess 12a ₁ of the restraining member 12, the contact member 12b ₁ of the pressing member 12 is moved outward as the support rod 11 is inserted ( The pair of contact members 12b ₁ slides in a direction away from each other.

Then, as shown in FIG. 6C, when the support rod 11 further moves and enters the housing recess 12 a ₁ , the contact member 12 b ₁ presses the outer peripheral surface of the support rod 11 by the action of the elastic member 12 b ₂ . Thereby, the accommodation recess 12a ₁ inside the support rod 11 becomes to be fixed, as carousel 13 as described above has support rods 11 revolve by rotating the supporting rod 11 is rotating in the housing recess 12a within ₁ Is suppressed.

On the other hand, for example, when the Ni-P plating process is completed and the substrate 1 is removed from the support rod 11, it is necessary to release the support rod 11 from the carousel 13 by releasing the restraint by the restraint member 12. In such a case, the contact member 12b ₁ of the member 12 pressed with as support rods 11 shown in FIG. 6 (b) is removed from the housing recess 12a within ₁ is slid to the outside. Then as FIG. 6 (a), the after supporting rod 11 is completely disengaged from the housing recess 12a within _1, the contact member 12b ₁ by the action of the elastic member 12b ₂ so that the return to the original position.

As described above, in this embodiment, the restraining member 12 installed in the carousel 13 supports the support rod 11 in a detachable manner, and the support rod 11 rotates within the accommodation recess 12a ₁ by the action of the rotation suppression mechanism. That is restrained.
Thereby, it becomes possible to suppress nodules generated due to wear powder that may be generated at the connection portion between the support rod and the carousel.

The embodiment described above can be variously modified without departing from the spirit of the present invention. Hereinafter, modifications that can be applied to the present invention will be described.
In the above-described embodiment, a guide surface is formed on the top t of the contact member 12b ₁ to have a shape like a triangular roof shape or an arrow shape, but the guide surface t2 is a curved surface similar to the peripheral surface of the support rod 11. It may be. Alternatively, the guide surface is not essential at the top t of the contact member 12b ₁ and may be omitted as appropriate.

In the embodiment described above, the apex t has a shape like a triangular roof or an arrow with a tapered tip. Here, the tip of the top part t may be sharp, but it is more preferable that the tip part has a rounded shape having an R part (Ru part) at the tip.
That is, the support rod 11 can be mounted more smoothly by adopting a shape having an R portion (R portion) at the tip. As a result, when the support rod 11 with the disk substrate mounted thereon is mounted on the plating processing jig 10 of the present invention, the shallow pits (small dents) generated by the collision between the disk substrates and the disk substrate and the plating processing jig 10. It is possible to suppress the occurrence of defects.
Therefore, it is more preferable that the top part t has a shape having an R part (Ru part) at the tip.
In addition, although it does not restrict | limit especially as a magnitude | size of said R part (Ru part), For example, if it is a magnitude | size about R0.5-R5.0, it is preferable.

Moreover, although the example of the bearing 12a and the pressing member 12b was demonstrated as a rotation suppression mechanism of the restraint member 12, as long as the rotation of the support rod 11 can be suppressed, another structure may be employ | adopted. For example, a solid elastic member such as a concave sponge or rubber is arranged in the housing recess 12a ₁ of the bearing 12a so that the support rod 11 can be press-fitted, and the support rod 11 is press-fitted into the solid elastic member to rotate. It may be a mode of suppression. Moreover, in the said embodiment, although it formed so that the pressing member 12b might be opposed, the structure which provides only one pressing member 12b on one side may be used if rotation can be suppressed.
Furthermore, in the above-described embodiment, the constraining member 12 is a member having a U-shaped cross section capable of gripping the support rod 11. However, other structures may be used as long as the same function and effect can be obtained.

Moreover, in the said embodiment, although the main material of the jig | tool 10 for a plating process was formed with resin, it is not restricted to this, You may use other materials, such as the metal which carried out the plating process.
In the above-described embodiment, the magnetic disk (magnetic recording medium) for the HDD is described as an example of the use of the substrate 1, but it may be applied to other uses other than the magnetic disk. In this case, it goes without saying that the plating solution in the plating bath is changed according to the application.

  As described above, the plating jig and the plating apparatus of the present invention are suitable for manufacturing various types of substrates to be plated and can be applied to a wide range of industries.

L Plating solution 1 Substrate 10 Plating treatment jig 11 Support rod 12 Restraint member 12a Bearing 12b Pressing member 13 Carousel 13a First carousel 13b Second carousel 14 Suspension device 15 Rotating mechanism 15a Motor 15b Transmission gear 16 Rotating shaft 20 Plating bath 100 Plating equipment

Claims (7)

A plating treatment jig for immersing a disc-shaped substrate having a center hole in a plating solution in a plating bath,
A support rod inserted through the central hole of the substrate;
A restraint member provided with a rotation suppression mechanism that supports the support rod and suppresses rotation of the supported support rod;
A carousel to which the support rod is attached via the restraining member;
A plating jig characterized by comprising: The rotation suppression mechanism is
The plating processing jig according to claim 1, comprising a pressing member having a contact member that contacts the support rod and an elastic member that presses the contact member against the support rod. The constraining member is provided with a U-shaped accommodation recess that accommodates at least a part of the peripheral surface of the support rod,
3. The plating jig according to claim 2, wherein the contact member is pressed in contact with the support rod via the elastic member in a state where the support rod is accommodated in the accommodation recess. Each including at least two pressing members;
The plating jig according to claim 2 or 3, wherein the contact members are arranged so as to oppose each other in the advancing / retreating direction.   The jig for a plating process according to any one of claims 1 to 4, wherein a guide surface that promotes detachment of the support rod is formed on a top portion of the contact member.   The jig for plating treatment according to any one of claims 1 to 5, wherein at least a part of the top portion of the contact member is subjected to a low friction treatment. The jig for plating treatment according to any one of claims 1 to 6,
A rotation mechanism for rotating the carousel;
The plating apparatus characterized by including.