JPH0841649A - Surface treating device - Google Patents

Abstract

PURPOSE:To improve the treatment efficiency and treatment accuracy of works and to lessen adhesion of impurities, etc., on the work so as to improve a yield. CONSTITUTION:Rotating holders 10 rotatable in a perpendicular direction are mounted at opposite hanging members 2 and a sun gear 30 concentrical with these rotating holders 10 is fixed thereto. The outer peripheral parts of the rotating holders 10 are provided with supporting shaft holding grooves 12 which open radially and supporting shafts 1 which perpendicularly support plural disks D apart with spaced intervals are removably and rotatably inserted into these holding grooves 12. Planetary gears 31 fixed to the supporting shafts 1 are meshed with the sun gear 30. As a result, the disks D are set by fitting the supporting shafts 1 into the holding grooves 12 of the rotating holders 10. While the disks D are rotated according to the revolution of the rotating holders 10 after setting the disks, the disks are moved in a treating liquid, by which the disks are subjected to the uniform surface treatment.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus, and more particularly to a surface treatment apparatus for subjecting an object to be treated such as a magnetic disk to electroless plating.

[0002]

2. Description of the Related Art Conventionally, when a surface of an aluminum magnetic disk is coated with, for example, nickel phosphorus, a donut-shaped disk substrate D (hereinafter referred to as a disk), which is an object to be processed, is appropriately spaced as shown in FIG. The supporting shaft 1 is vertically supported on the supporting shaft 1, and the supporting shaft 1 is laid horizontally between the supporting members 2 facing each other. Then, the supporting member 1 is lowered to perform plating in the plating tank 3 which is a processing tank. Immerse disk D in liquid 4
The surface of the disk D is plated. According to such surface treatment, a large number of discs D can be surface-treated at the same time at the same time, and the suspension member 2 is vibrated vertically (or horizontally) by a driving means (not shown), thereby A uniform plating film can be formed on the surface. Furthermore, a plurality of disks D can be processed more efficiently by horizontally suspending a plurality of support shafts 1 between the suspension members and performing the same processing as described above.

[0003]

However, in the conventional surface treatment apparatus of this type, the spring 6 is interposed between the bearings 5 provided on the opposing mounting surfaces of the suspension member 2 facing the support shaft 1. By attaching, or by providing a holding hole in one of the suspension members 2 and inserting one end of the support shaft 1 into the one holding hole, the other end of the support shaft 1 is engaged with the bearing 5. Since the support shaft 1 is laid horizontally between the suspension members 2, the spring 6 and the holding holes are also plated during the plating process. Therefore, during repeated surface treatment, the plated portion such as the spring 6 is peeled off to generate particulate impurities (particles), and the impurities cause a chemical reaction (chemical contamination) attached to the disk D, resulting in a magnetic field. There is a problem that the characteristics of the disk and the yield are deteriorated.

Further, by moving the suspension member 2 up and down (or horizontally), the contact between the disk surface and the plating liquid can be increased as compared with the case where the disk D is fixed, but the up and down direction is constant. Since it is dynamic (or horizontal), it is difficult to uniformly plate the entire surface of the disk D. Further, there is a problem that setting the support shaft 1 and the disk D is troublesome.

The present invention has been made in view of the above circumstances, and it is possible to reduce the adhesion of impurities and the like to the object to be processed to improve the yield and to uniformly perform the surface treatment of the object to be processed. An object is to provide a surface treatment device.

[0006]

In order to achieve the above object, the surface treating apparatus of the present invention has a supporting member that vertically supports a plurality of objects to be processed at intervals with a suspension member facing each other. Assuming a surface treatment device for treating the surface of the object to be treated by laterally immersing it in the treatment liquid, a circular guide body fixed to the suspension member and concentric with the circular guide body. A rotatable holding body, and a holding groove is formed on the outer peripheral portion of the rotating holding body, the holding groove opening in a radial direction so that the supporting shaft can be detachably and rotatably fitted. It is characterized in that a rotor that engages with a circular guide and rolls is fixed.

In the present invention, if the circular guide body and the rotor are engaged with each other and the rotor rolls,
For example, it is possible to form the circular guide body and the rotor by a friction disk or the like that is brought into contact with each other and is rotated by a frictional force, but preferably the circular guide body is formed by a sun gear and the rotor is formed by a sun gear. It is better to use a planetary gear that meshes with.

In addition, by arranging spacing holding grooves for holding the objects to be processed at intervals in the axial direction of the auxiliary support shaft that is rotatably fitted in the holding grooves, the objects to be processed are spaced. It is preferable in that it can be surely supported.

[0009]

According to the surface treatment apparatus of the present invention configured as described above, the support shaft is rotatably fitted in the holding groove provided in the outer peripheral direction of the rotatable rotary holder and is fixed to the support shaft. The support shaft supporting a large number of objects to be processed can be easily set by engaging the rotor with the rotation guide body which is fixed concentrically with the rotation holder. Further, the support shaft can rotate (spin) with the rotation (revolution) of the rotary holder, and the treatment liquid is uniformly contacted with the surface of the object to be processed (spin) that rotates with the rotation of the support shaft. Can be processed. In this case, by forming the circular guide body by the sun gear and forming the rotor by the planetary gear that meshes with the sun gear, the rotation (rotation) of the support shaft can be further ensured, and the object to be processed can be processed. The surface treatment can be made more uniform.

In addition, by arranging space holding grooves for holding the object to be processed at intervals in the axial direction of the auxiliary support shaft which is detachably and rotatably fitted in the holding groove, the objects to be processed are spaced apart. Since it can be reliably supported, even if it is a small-diameter and lightweight object to be processed, it can be reliably surface-treated without floating during the movement in the processing liquid and coming into contact with each other. it can.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings. Here, a case where the surface treatment apparatus of the present invention is applied to an electroless plating apparatus for an aluminum magnetic disk will be described. Further, the same parts as those of the conventional surface treatment apparatus will be described with the same reference numerals.

First Embodiment FIG. 1 is a schematic side sectional view of a first embodiment of the surface treatment apparatus of the present invention, FIG. 2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a main part of the first embodiment. A schematic perspective view of is shown.

The surface treatment apparatus of the present invention is a vertically rotatable holder 10 mounted on the opposing surfaces of a pair of suspension members 2 that are suspended from a transport mechanism (not shown) and face each other. The sun gear 30 which is a circular guide coaxial with the rotary holder 10 fixed to the rotary holder 10 and the rotary holder 1
A support shaft 1 which is detachably and rotatably fitted in support shaft holding grooves 12 provided at substantially equal intervals in 0 and which vertically supports a large number of disks D, which are objects to be processed, at appropriate intervals.
The planetary gear 31, which is a rotor that is fixed to the support shaft 1 and that engages with (engages with) the sun gear 30, and is disposed near the outer periphery of the rotary holder 10 to prevent the support shaft 1 from falling. And a guide 20 for The suspension member 2, the rotary holder 10, and the guide 20 are made of a synthetic resin member that is difficult to be plated, and the support shaft 1 has a structure in which the surface of a stainless steel shaft is covered with a synthetic resin. There is.

In this case, the rotary holder 10 is provided with teeth 11 on its outer peripheral surface and is rotatably mounted on a shaft 13 penetratingly fixed to the suspension member 2 via a bearing 14. This rotary holder 10 has a first transmission gear 15
Mesh with each other, and the first transmission gear 15 and the second transmission gear 1
The drive gear 19 mounted on the drive shaft 18 of the drive motor 17 is meshed with the drive gear 19. Therefore, the rotation of the drive motor 17 causes the drive gear 19 and the second transmission gear 16 to rotate.
Also, the rotary holder 10 can rotate in the vertical direction via the first transmission gear 15. Further, a plurality of (8 in the drawing shows the case of eight) support shaft holding grooves 12 which are opened in the radial direction are provided on the outer peripheral portion of the rotary holder 10, and the support shaft 1 is detachably mounted in the holding grooves 12. And is rotatably fitted.

Further, the tip of the shaft 13 is formed in a quadrangular cross section protruding toward the facing surface of the suspension member 2.
The sun gear 30 is fixed to the cross-section square portion 13a in a state where rotation is blocked, and the planetary gear 31 fixed to the support shaft 1 can be meshed with the sun gear 30. In this case, by tilting the sides of the square section 13a of the shaft 13 in the vertical direction, it is possible to make the plating liquid 4 drain well on the shaft 13.

The support shaft 1 is provided with small-diameter portions 1a at equal intervals along the axial direction, and the discs D are locked to the small-diameter portions 1a, so that a plurality of discs D are arranged at intervals. It can be supported vertically (see FIG. 4).

Further, as shown in FIG. 2, the guide 20 is provided with an opening groove 21 at a position matching the holding groove 12 at an angle of 90 ° to the left and right of the upper part, and the other portion is a rotary holder. It is fixed to the suspension member 2 with a fixing pin 22 so as to be arranged in the vicinity of the outer peripheral portion of 10 (see FIG. 2). Therefore, when the support shaft 1 that moves vertically in accordance with the rotation of the rotary holder 10 is positioned below, the holding groove 1
It can be prevented from falling off from the guide 2 by the guide 20. In addition, in this case, the opening grooves 21 are provided at two places on the left and right, but the opening grooves 21 do not necessarily have to be provided on two places on the left and right, and at least one place may be provided. Further, the guide 20 may be arranged at least in the lower part of the rotary holder 10.

Next, an operation mode of the surface treatment apparatus of the present invention will be described. First, a predetermined number of disks D are previously supported on the support shaft 1, and the support shaft 1 supporting the disks D is inserted so as to be dropped from the opening groove 21 of the guide 20 into the holding groove of the rotary holder 10. Together with the planetary gear 31
After engaging (engaging) with the sun gear 30, the rotary holder 10
While rotating the other by a predetermined angle (45 °), the other support shaft 1
Is inserted into the holding groove 12, and eight supporting shafts 1 are horizontally mounted between the both rotary holding bodies 10 to set the disk D.

The disk D set as described above is immersed in a cleaning tank or a predetermined chemical tank by a transport mechanism (not shown) for pretreatment, and then moved to above the plating tank 3. Then, the suspension member 2 is lowered to immerse the rotary holder 10, the support shaft 1, and the disk D in the plating solution 4 in the plating tank 3 and then the drive motor 17 is driven, whereby the rotation of the drive motor 17 is driven. Through the gear 19, the second transmission gear 16 and the first transmission gear 15, the rotary holder 1
When transmitted to 0, the rotary holder 10 rotates (revolves) in the vertical direction. Along with the rotation (revolution) of the rotation holder 10, the planetary gear 31 fixed to the support shaft 1 rolls on the sun gear 30 to rotate (spin). Therefore, since the disk D supported by the support shaft 1 revolves around its axis and moves in the plating solution 4, the surface of the disk D can be plated with a uniform film thickness.

After the plating process is performed as described above, the suspension member 2 is lifted and pulled up from the plating tank 3 and conveyed to the next processing step. At this time, the plating tank 3 is formed by the inclined surface 2a provided on the lower end surface of the suspension member 2.
Therefore, it is possible to favorably run out of the plating liquid when the suspension member 2 is pulled up. Then, after the final processing is performed, the support shaft 1 is removed from the rotary holder 10 in the reverse order of the procedure for setting the support shaft 1 described above.

Second Embodiment FIG. 5 is a schematic side view of the essential parts of a second embodiment of the surface treatment apparatus of the present invention, and FIG. 6 is an enlarged sectional view taken along the line BB of FIG. .

The surface treatment apparatus in the second embodiment is a case where the surface treatment can be surely performed when the disk D as the object to be treated has a small diameter and a light weight. That is, when the disk D has a small diameter and is lightweight, when the disk D is moved while revolving and rotating in the plating solution 4 as in the first embodiment, the disk D floats from the small diameter portion 1a of the support shaft 1. There is a possibility that the discs may come apart and come into contact with each other. Therefore, in order to prevent the discs from coming into contact with each other, the auxiliary support shaft 40 is disposed between the adjacent support shafts 11, and the auxiliary support shaft 40 is arranged in the axial direction. The disks D are positioned in the space holding grooves 41 arranged in rows, and the disks D are revolved and rotated while maintaining the distance between the disks D. In this case,
The number of holding grooves 12 is twice as many as the number of support shafts 1 for supporting the disk D to be processed (16 × in this embodiment).
2 = 32 (pieces) of holding grooves 12 are provided).

In this case, the auxiliary support shaft 40 is the support shaft 1 described above.
Similarly to the above, it is removably and rotatably fitted into the holding groove 12 of the rotary holder 10, but the supporting shaft 1 adjacent to the rotary holding body 10 is inserted in advance by inserting one holding groove 12 and the disc D is arranged vertically. After that, the auxiliary support shaft 40 is fitted into the holding groove 12 between them, and the discs D are positioned in the gap holding grooves 41, whereby the gap between the discs D can be reliably held.

Since the other parts of the second embodiment are the same as those of the first embodiment, the same parts are designated by the same reference numerals and the description thereof will be omitted.

In the above embodiment, the rotation of the rotary holder 10 is transmitted from the drive motor 17 to the rotary holder 10 via the gear transmission mechanism, but the rotation means is not necessarily the gear transmission mechanism. It does not have to be provided, and for example, the wire may be used for the rotation. Further, in the above embodiment, the surface treatment apparatus of the present invention has been described for the case of electroless plating of a magnetic disk. However, the surface treatment other than the plating or the surface treatment other than the plating of the object to be processed such as a donut-shaped disk other than the magnetic disk is performed. Of course, it can be applied to.

[0026]

As described above, according to the surface treatment apparatus of the present invention, which is configured as described above, the following effects can be obtained.

1) According to the surface treatment apparatus of the first aspect, the rotor is fixed to the support shaft by rotatably inserting the support shaft into the holding groove provided in the outer circumferential direction of the rotatable rotary holder. Is engaged with the rotation guide body which is fixed concentrically with the rotation holding body, so that the support shaft supporting a large number of objects to be processed can be easily set. Further, since the contact area of the support portion of the support shaft can be reduced, it is possible to reduce the adhesion of impurities such as particles to the object to be processed,
The yield can be improved. Further, since the object to be processed can revolve while revolving around, the processing liquid can be uniformly contacted with the surface of the object to be processed, and the processing accuracy can be improved.

2) According to the surface treatment apparatus of the second aspect, since the circular guide body is formed by the sun gear and the rotor is formed by the planetary gear that meshes with the sun gear, the rotation of the object to be treated ( The surface treatment of the object can be made more uniform by further ensuring the rotation.

3) According to the surface treatment apparatus of the third aspect, the space holding groove for holding the object to be processed at intervals is provided in the axial direction of the auxiliary support shaft which is detachably and rotatably fitted in the holding groove. Since the objects to be processed are arranged in a row, the objects to be processed can be reliably supported at intervals, and the surface treatment of the objects to be processed having a small diameter and light weight can be reliably performed.

[Brief description of drawings]

FIG. 1 is a schematic side sectional view of a first embodiment of a surface treatment apparatus of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a schematic perspective view showing a main part of the present invention.

FIG. 4 is a perspective view showing an object to be processed and a support shaft in the first embodiment.

FIG. 5 is a schematic side view of a second embodiment of the surface treatment apparatus of the present invention.

6 is an enlarged cross-sectional view taken along the line BB of FIG.

FIG. 7 is a schematic sectional view showing an example of a conventional surface treatment apparatus.

[Explanation of symbols]

 D disk (object to be treated) 1 support shaft 2 suspension member 3 plating tank (treatment tank) 4 plating liquid (treatment liquid) 10 rotation holder 12 support shaft holding groove 20 support shaft drop prevention guide 30 sun gear (circular guide) Body 31 Planetary gear (rotor) 40 Auxiliary support shaft 41 Spacing groove

FIG.

[Fig. 2]

[Figure 3]

[Figure 4]

[Figure 5]

[Figure 6]

[Figure 7]

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[Procedure amendment]

[Submission date] October 12, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Brief description of the drawing

[Correction method] Change

[Correction content]

[Brief description of drawings]

FIG. 1 is a schematic side sectional view of a first embodiment of a surface treatment apparatus of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a schematic perspective view showing a main part of the present invention.

FIG. 4 is a perspective view showing an object to be processed and a support shaft in the first embodiment.

FIG. 5 is a schematic side view of a second embodiment of the surface treatment apparatus of the present invention.

6 is an enlarged cross-sectional view taken along the line BB of FIG.

FIG. 7 is a schematic sectional view showing an example of a conventional surface treatment apparatus.

[Explanation of reference symbols] D disk (object to be processed) 1 support shaft 2 suspension member 3 plating tank (processing tank) 4 plating liquid (processing liquid) 10 rotation holder 12 support shaft holding groove 20 support shaft drop prevention guide 30 Sun gear (circular guide) 31 Planetary gear (rotor) 40 Auxiliary support shaft 41 Spacing holding groove

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Correction target item name] All drawings

[Correction method] Added

[Correction content]

FIG.

[Fig. 2]

[Figure 3]

[Figure 4]

[Figure 6]

[Figure 5]

[Figure 7]

Claims (3)

[Claims] 1. A surface of the object to be processed is obtained by horizontally supporting a plurality of objects to be processed with a support shaft vertically supported by a suspension member facing each other and immersing the supporting shaft in the processing solution. In the surface treatment device for processing, a circular guide body fixed to the suspension member and a rotatable holding body concentric with the circular guide body are provided, and an outer peripheral portion of the rotating holding body, A holding groove that is opened in the radial direction is formed so that the support shaft can be detachably and rotatably fitted, and a rotor that engages with the circular guide and rolls is fixed to the support shaft. Surface treatment equipment. 2. The surface treatment apparatus according to claim 1, wherein the circular guide body is formed of a sun gear, and the rotor is formed of a planetary gear that meshes with the sun gear. 3. An interval holding groove for holding an object to be processed at intervals is arranged in a row in the axial direction of an auxiliary support shaft that is rotatably fitted in the holding groove. 1
The surface treatment device described.