JP7034083B2 - Plating jig and plating equipment - Google Patents

Description

The present invention relates to a plating treatment technique, and more particularly to a jig for plating treatment and a plating treatment apparatus for immersing a disk-shaped substrate having a central hole in a plating bath to form a plating film on the substrate.

Magnetic recording media used for HDDs (hard disk drives) mounted on PCs and home appliances are in high demand due to their high convenience, and the recording density is being remarkably improved.
The market continues to demand that such magnetic recording media achieve higher recording densities, and as a result, the disc-shaped substrate used for magnetic recording media is smoother than ever. There is a demand for high-quality substrates that are high and have few scratches.

As the disk-shaped substrate, for example, an aluminum alloy substrate, a glass substrate, or the like is used. Of these, the aluminum alloy substrate is manufactured, for example, by going through the following steps. That is, first, an aluminum alloy plate having a thickness of about 1 to 3 mm is punched into a donut shape to form a substrate having a desired size. Next, the punched substrate is chamfered at the edges, ground with a grindstone, and then electroless NiP plating is applied to the surface of the substrate.

In electroless NiP plating, for example, as shown in Patent Document 1, a plurality of substrates are held by a plating processing jig, and these substrates are collectively immersed in a plating bath. Further, as disclosed in Patent Document 1, in order to efficiently form a plating film on the substrate surface, electroless NiP plating is performed on a plurality of substrates while rotating or revolving the plating processing jig. It is also known to apply.

On the other hand, in the above-mentioned technique of rotating or revolving the plating jig in the plating bath, wear powder generated from the sliding portion of the plating jig may cause a defect called nodul on the surface of the substrate.
When this nodule is generated, the quality of the substrate is significantly deteriorated, so it is important how to suppress such nodules. Regarding this point, Patent Document 1 shows that nodules that are likely to occur on the outer peripheral edge of the substrate can be suppressed by forming the cross section of the groove into which the outer peripheral edge of the substrate 10 is fitted into a U shape. ..

Japanese Unexamined Patent Publication No. 2007-169757

However, the above-mentioned conventional plating jig has the following problems, and it can be said that there are still points to be improved.
That is, according to Patent Document 1, although there is a possibility that nodules caused by the outer peripheral edge of the substrate can be suppressed, there is no mention of wear debris generated from the sliding portion of the plating jig. As described above, in the configuration of Patent Document 1, there is a concern that another nodule may be generated by the wear powder generated from the sliding portion of the plating jig.

The present invention has been made in view of solving such a problem, and is a plating treatment jig and a plating treatment that can suppress the generation of nodules even if the plating treatment jig rotates in the plating bath. The purpose is to provide the device.

In order to solve the above problems, the plating jig according to the embodiment of the present invention is (1) for plating for immersing a disk-shaped substrate having a center hole in the plating solution in the plating bath. A jig, a support rod inserted into a central hole of the substrate, a restraint member having a rotation suppressing mechanism for supporting the support rod and suppressing the rotation of the supported support rod, and the above-mentioned A carocell to which the support rod is attached via a restraint member, and
The rotation suppressing mechanism is characterized by including a contact member in contact with the support rod and a pressing member having an elastic member for pressing the contact member against the support rod .

Further, in order to solve the above problems, the plating processing jig according to the embodiment of the present invention is (2) a plating process for immersing a disk-shaped substrate having a center hole in the plating solution in the plating bath. A jig for supporting a support rod inserted into a central hole of the substrate and a rotation suppressing mechanism for supporting the support rod detachably in a housing recess and suppressing the rotation of the supported support rod. The rotation suppressing mechanism includes a restraining member provided and a carocell to which the support rod is detachably attached via the restraining member, and the rotation suppressing mechanism is a contact for pressing the support rod housed in the housing recess toward the housing recess side. It is characterized by including a member.

Further, in the plating processing jig described in ( 1 ) above, (3) the restraining member is provided with a U-shaped accommodating recess in which at least a part of the peripheral surface of the support rod is accommodated. It is preferable that the contact member comes into contact with and is pressed against the support rod via the elastic member in a state where the support rod is housed in the housing recess.

Further, in the plating processing jig according to ( 1 ) or (3) described above, (4) at least two pressing members are provided, and the contact members are arranged so as to face each other in the advancing / retreating direction. It is preferable that the jig is used.

Further, in the plating processing jig according to any one of ( 1 ) to (4) described above, (5) a guide surface for promoting attachment / detachment of the support rod is formed on the top of the contact member. Is preferable.

Further, in the plating jig according to any one of ( 1 ) to (5) described above, it is preferable that (6) at least a part of the top of the contact member is subjected to low friction treatment. ..

Further, in order to solve the above-mentioned problems, the plating processing apparatus according to the embodiment of the present invention includes the plating processing jig according to any one of (1) to (6) described above and the rotation for rotating the carocell. It is characterized by including a mechanism.

According to the present invention, since the support rod attached to the carousel is suppressed from rotating by the rotation suppression mechanism, nodules generated due to wear debris that may occur at the connection portion between the support rod and the carocell are suppressed. It becomes possible to do.

It is a figure which showed the plating processing jig 10 and the plating processing apparatus 100. It is a figure which showed the restraint member 12 in the plating process jig 10. It is a developed view which developed each side surface of the plating process jig 10. It is a schematic diagram for demonstrating the contact member 12b among the rotation suppression mechanism in a plating process jig 10. It is a schematic diagram for demonstrating the bearing member 12a among the rotation suppression mechanism in a plating process jig 10. It is a figure of the state transition when the support rod 11 is attached to and detached from the restraint member 12 in the plating process jig 10.

Hereinafter, embodiments for carrying out the present invention will be described. In the drawings used in the following description, the direction in which the support rod 11 extends when attached to the plating jig 10 is defined as the X direction for convenience, and the X direction is used as a reference for the description in each drawing. The directions are appropriately set to the Y direction and the Z direction. However, these directions are set only for the purpose of clarifying the explanation, and do not unreasonably limit the interpretation of the present invention.

FIG. 1 is a diagram showing a plating processing jig 10 and a plating processing apparatus 100. Of these, FIG. 1A is a schematic view of a plating processing apparatus 100 including a plating processing jig 10, and FIG. 1B is a plan view of the plating processing jig 10 as viewed from the axial direction. 1A is a partially enlarged view of a region P in FIG. 1A, and FIG. 1D is a cross-sectional view taken along the line AA of FIG. 1C (sliced in the YZ plane direction). As shown in these figures, the plating processing apparatus 100 in the present embodiment mainly includes a plating processing jig 10 and a rotation mechanism 15.

The plating processing jig 10 is used to immerse the disk-shaped substrate 1 having a central hole in the plating solution L in the plating bath 20. The plating jig 10 of the present embodiment includes at least a support rod 11, a restraining member 12, and a carocell 13.

Here, the substrate 1 is a disk-shaped member made of a metal material such as glass or aluminum having a circular through hole (center hole) in the center. Such a substrate 1 has a thickness of about 0.3 mm to 2.0 mm, and generally has a diameter of 2. Aluminum substrates are mainly used for substrates larger than 5 inches, and glass substrates are mainly used for substrates larger than 2.5 inches.

Of these, in the aluminum substrate 1, for example, the substrate punched from the aluminum material is subjected to the required pretreatment, and then electroless plating is performed by a Ni-P plating solution bath described later, and the surface of the substrate is Ni-P alloy. A film is formed, and a ferromagnetic metal thin film is laminated on the film to form a magnetic recording disk substrate.

The plating bath 20 is a metal or resin bath having a size capable of containing one or a plurality of plating jigs 10. As the plating bathtub 20, for example, a bathtub disclosed in the above-mentioned patent document or another known electroless plating bathtub can be applied. A known Ni-P plating solution can be applied to the plating solution L stored in the plating bath 20 in the present embodiment. As an example, for example, nickel sulfate: 20 g / dm ³ , sodium hypophosphite: 20 g. Examples thereof include an aqueous solution containing / dm ³ , sodium acetate: 10 g / dm ³ , and sodium citrate: 10 g / dm ³ .

The support rod 11 is a rod-shaped member that is inserted into the central hole of the substrate 1. As shown in FIG. 1, the support rod 11 is arranged one or more between the pair of carocells 13a and 13b. The material of the support rod 11 is not particularly limited, and examples thereof include resin.
The support rod 11 supports the substrate 1 through the center hole described above, but is further arranged on a circumferential line near the outer peripheral edge of the substrate 1 at predetermined intervals (Japanese Patent Laid-Open No. (See 2007-169757, etc.) may be arranged around the support rod 11.

The restraining member 12 has a function of supporting the support rod 11. As an example, the restraint member 12 in the present embodiment is a member having a U-shaped cross section so as to grip the support rod 11. The restraining member 12 of the present embodiment is provided with a rotation suppressing mechanism (described later) that suppresses the rotation of the supported support rod 11. The material of the restraining member 12 is not particularly limited, and examples thereof include resin. Then, as shown in FIG. 1, the restraint member 12 is provided so that the U-shaped opening side (the space on the side where the support rod 11 is inserted) faces the outer peripheral direction via the positioning protrusion 12a ₃ described later. One or a plurality of support rods 11 are installed in the carousel 13 depending on the number of support rods 11.

The carocell 13 is a member to which the support rod 11 is attached via the restraint member 12. The carocell 13 of the present embodiment is a large disk having teeth formed on the outer periphery thereof, and is arranged in pairs so that the support rods 11 can be supported horizontally. More specifically, as shown in FIG. 1, the first caro cell 13a and the second caro cell 13b are arranged to face each other at a predetermined interval, and one or a plurality of support rods 11 are arranged horizontally in the first caro cell 13a and the second caro cell 13b. The material of the carocell 13 is not particularly limited, and examples thereof include resin.

Further, the plating processing device 100 of the present embodiment may include a hanging device 14 that supports the plating processing jig 10 in a state of being immersed in the plating bath 20.
As shown in FIG. 1, the suspending device 14 has a function of suspending and supporting both ends of the carocell 13. At this time, it is preferable that the suspension device 14 is not fixed to both ends of the carocell 13 and supports the carocell 13 in such a manner that the rotation mechanism 15 described later does not hinder the rotation of the carocell 13.

Therefore, as shown in FIG. 1, the plurality of substrates 1 housed in the plating processing jig 10 suspended by the suspending device 14 are in the plating bath 20 with the support rod 11 inserted through the center hole. Immerse in the plating solution L.
Then, after the plurality of substrates 1 are immersed in the plating solution L, the carocell 13 rotates about the rotation shaft 16 via the rotation mechanism 15 of the plating processing apparatus 100, so that the support rod 11 revolves in the plating solution L. It is possible to do.

Such a rotation mechanism 15 includes, for example, a motor 15a and a transmission gear 15b. Of these, various known electric motors may be applied to the motor 15a. Further, the transmission gear 15b transmits the power from the motor 15a to the carocell 13, whereby the carocell 13 can rotate about the rotation shaft 16.
As described above, when the carocell 13 rotates about the rotation shaft 16, the support rod 11 supported by the carocell 13 revolves around the rotation shaft 16.

Next, the rotation suppressing mechanism of the restraining member 12 in the present embodiment will be described in detail with reference to FIGS. 2 to 5. 2A is an external perspective view of the restraint member 12, and FIG. 2B is a side view and a top view. Further, FIG. 3 is an external view of the restraint member 12 as viewed from the front, side surfaces, back surface, and top surface. Further, FIG. 4 is a diagram showing the configuration of the pressing member 12b among the rotation suppressing mechanisms of the restraining member 12. Further, FIG. 5 is a diagram showing a bearing 12a among the rotation suppressing mechanisms of the restraining member 12.
As described above, in the restraint member 12 installed in the carocell 13, when the support rod 11 revolves around the rotation shaft 16 with the rotation of the carocell 13, the support rod 11 itself rotates (rotates) in the restraint member 12. It includes a rotation suppression mechanism that can suppress the rotation.

As shown in FIG. 2, the rotation suppressing mechanism of the restraining member 12 in the present embodiment includes the bearing 12a and the pressing member 12b.
Of these, the bearing 12a is configured to include a housing recess 12a ₁ , a pressing member accommodating portion 12a ₂ , a positioning protrusion 12a ₃ , and the like, as shown in FIGS. 3 and 5. The material of the bearing 12a is not particularly limited, but may be formed of, for example, resin.

The accommodating recess 12a ₁ is a recess capable of accommodating at least a part of the peripheral surface of the support rod 11, and the bottom surface with which the support rod 11 contacts has a U-shaped curved surface so as to follow the outer peripheral surface of the support rod 11. ing. As shown in FIG. 3, the length L into which the support rod 11 is inserted is not particularly limited as long as the support rod 11 can be supported by the restraint member 12, and the height of the restraint member 12 from the carocell 13 is taken into consideration. It may be set as appropriate.

The pressing member storage portion 12a ₂ is a portion in which the pressing member 12b, which will be described later, is accommodated. In the present embodiment, the pressing member storage portions 12a ₂ are arranged so as to face each other at two locations so as to sandwich the accommodating recess 12a ₁ . Further, as shown in FIG. 5, the pressing member storage portion 12a ₂ is formed with a guide groove 12a ₄ for guiding the movement of the pressing member 12b so that the pressing member 12b does not fall off.

Further, the pressing member storage portion 12a ₂ is formed with an insertion hole 12a ₅ into which the mounting member 12b ₃ described later is inserted. As described above, in the present embodiment, since the mounting member 12b ₃ is arranged in the pressing member storage portion 12a ₂ via the insertion hole 12a ₅ , the pressing member 12b can be stably positioned in the pressing member storage portion 12a ₂ . It is possible.

The positioning protrusion 12a ₃ is a guide for installing the restraint member 12 at a predetermined position of the carocell 13 described above. That is, the carocell 13 also has a positioning recess (not shown) corresponding to the positioning protrusion 12a ₃ , and by inserting the positioning protrusion 12a ₃ into the positioning recess, the position of the restraining member 12 on the carocell 13 can be changed. It will be confirmed.

Although the positioning protrusions 12a ₃ of the present embodiment are columnar, the present invention is not limited to this embodiment and may be a rectangular shape such as a triangular prism, a quadrangular prism, or a pentagonal prism. By making the positioning protrusion 12a ₃ rectangular and the corresponding positioning recess also rectangular, it is possible to automatically determine the orientation of the restraint member 12, for example, the U-shaped opening side faces the outer circumference. ..

Next, with reference to FIGS. 2 to 4, a detailed configuration of the pressing member 12b among the above-mentioned rotation suppressing mechanisms will be described.
First, as shown in FIG. 4, the pressing member 12b includes a contact member 12b ₁ , an elastic member 12b ₂ , and a mounting member 12b ₃ .
In FIG. 4, (a) shows the contact member 12b ₁ , (b) shows the elastic member 12b ₂ , (c) shows the mounting member 12b ₃ , and (d) shows the contact member 12b ₁ on the Y direction side. (E) is a view of the mounting member 12b ₃ seen from the Y direction side.
The contact member 12b ₁ is a member capable of contacting the support rod 11 accommodated in the accommodating recess 12a ₁ . The material of the contact member 12b ₁ is not particularly limited, but may be formed of, for example, resin.

As shown in the figure, a screw hole M is formed in the contact member 12b ₁ and is screwed with a screw portion N of the mounting member 12b ₃ described later. Therefore, the contact member 12b ₁ can be brought into contact with and pressed against the support rod 11 via the elastic member 12b ₂ , which will be described later, in a state where the support rod 11 is housed in the housing recess 12a ₁ .

Further, as shown in FIGS. 2 and 3, the restraining member 12 of the present embodiment includes at least two pressing members 12b, and the contact members 12b ₁ of each other face each other in the advancing / retreating direction (Y direction in FIG. 2). It may be arranged so as to.
Further, as shown in FIG. 4, a guide surface t1 and a guide surface t2 for promoting attachment / detachment of the support rod 11 are formed on the top portion t of the contact member 12b ₁ of the present embodiment.

Of these, the guide surface t1 is _a surface on which the support rod 11 accommodated in the accommodating recess 12a1 comes into contact. As is clear from FIG. 3, the top t has a shape like a triangular roof or an arrow, and the guide surface t1 has a tip in the Y direction from the tip of the top t along the peripheral surface of the support rod 11. Is an inclined surface that tapers.

On the other hand, the guide surface t2 is a surface that the support rod 11 comes into contact with when the support rod ₁₁ is accommodated in the accommodation recess 12a1. As is clear from FIG. 3, this guide surface t2 is also an inclined surface such that the tip is tapered in the Y direction from the tip of the top t. As shown in FIG. 4, in the present embodiment, the angle α ₁ formed by the guide surface t1 and the Y axis and the angle α ₂ formed by the guide surface t2 and the Y axis are equal to each other. However, the present invention is not limited to this form, and α ₁ ≠ α ₂ and α ₁ > α ₂ may be satisfied, or α ₁ <α ₂ may be satisfied.

Further, at least a part of the top portion t of the contact member 12b ₁ may be subjected to a low friction treatment. In other words, at least one of the guide surface t1 and the guide surface t2 may be subjected to a low friction treatment so as to promote the attachment / detachment of the support rod 11. As a specific example of this low friction treatment, various known treatments can be applied, for example, a fluorine coating film may be separately applied, or a DLC (diamond-like carbon) coating film may be separately applied.

Further, as shown in FIG. 4, the contact member 12b ₁ is formed with a guide protrusion 12b ₄ corresponding to the guide groove 12a ₄ of the above-mentioned pressing member storage portion 12a ₂ . In the present embodiment, the guide protrusions 12b ₄ are formed on the two adjacent side surfaces of the contact member 12b ₁ corresponding to the guide grooves 12a ₄ .

The elastic member 12b ₂ has a function of pressing the above-mentioned contact member 12b ₁ against the support rod 11. Specific examples of the elastic member 12b ₂ in the present embodiment are not particularly limited as long as the contact member 12b ₁ can be pressed against the support rod 11, but examples thereof include springs and rubber. The elastic member 12b ₂ preferably has a spring constant sufficient to allow the contact member 12b ₁ to continue pressing the support rod 11 while the support rod 11 is housed in the accommodation recess 12a ₁ .

The elastic member 12b ₂ of the present embodiment has one end in contact with the contact member 12b ₁ and the other end in contact with the pressing member storage portion 12a ₂ . As a result, when the support rod 11 is attached or detached, the elastic member 12b ₂ can exert an action of pushing out the contact member 12b ₁ with the pressing member accommodating portion 12a ₂ as the base end.

As shown in FIG. 3 and the like, the mounting member 12b ₃ is a portion stored in the pressing member storage portion 12a ₂ . The material of the mounting member 12b ₃ is not particularly limited, but may be formed of, for example, resin. As described above, in the present embodiment, the insertion hole 12a ₅ is formed in the pressing member storage portion 12a ₂ , and the mounting member 12b ₃ is inserted into the insertion hole 12a ₅ . Further, the tip portion of the mounting member 12b ₃ is a screw portion N, and is integrated by being screwed into the above-mentioned screw hole M of the contact member 12b ₁ . As a result, the pressing member 12b is stored in the pressing member storage portion 12a ₂ , and the pressing member 12b is prevented from falling off at the guide groove 12a ₄ and the guide protrusion 12b ₄ .

Next, with reference to FIG. 6, the state transition when the support rod 11 is inserted into and detached from the accommodating recess 12a ₁ of the restraining member 12 will be described. Note that FIG. 6A shows the case where the support rod ₁₁ is outside the housing recess 12a1, FIG. 6B shows the case where the support rod ₁₁ is being inserted into the housing recess 12a1, and FIG. 6C shows the case where the support rod 11 is being inserted into the housing recess 12a1. The time when the accommodation in the accommodation recess 12a ₁ is completed is shown.
Then, as shown in FIG. 6B, when the support rod 11 is accommodated in the accommodating recess 12a ₁ of the restraining member 12, the contact member 12b ₁ of the pressing member 12 is moved outward (as the support rod 11 is inserted). The pair of contact members 12b ₁ slide and move (in the direction in which they are separated from each other).

Then, as shown in FIG. 6 (c), when the support rod 11 further moves and enters the accommodating recess 12a ₁ , the contact member 12b ₁ presses the outer peripheral surface of the support rod 11 by the action of the elastic member 12b ₂ . As a result, the support rod 11 is fixed in the accommodating recess 12a ₁ , and even if the support rod 11 revolves due to the rotation of the carocell 13 as described above, the support rod 11 rotates in the accommodating recess 12a ₁ . It is suppressed that it ends up.

On the other hand, for example, when the Ni-P plating process is completed and the substrate 1 is removed from the support rod 11, it is necessary to release the restraint by the restraint member 12 and remove the support rod 11 from the carocell 13. In such a case, as shown in FIG. 6B, the contact member 12b ₁ of the pressing member 12 slides outward as the support rod 11 separates from the accommodation recess 12a ₁ . Then, as shown in FIG. 6A, after the support rod 11 is completely detached from the inside of the accommodating recess 12a ₁ , the contact member 12b ₁ returns to the original position by the action of the elastic member 12b ₂ .

As described above, in the present embodiment, the restraining member 12 installed in the carocell 13 supports the support rod 11 in a detachable manner, and the support rod 11 rotates in the accommodation recess 12a ₁ due to the action of the rotation suppression mechanism. It suppresses that.
This makes it possible to suppress nodules generated due to wear debris that may occur at the connection portion between the support rod and the carousel.

The embodiments described above can be modified in various ways without departing from the spirit of the present invention. Hereinafter, modifications applicable to the present invention will be described.
In the above-described embodiment, a guide surface is formed on the top portion t of the contact member 12b ₁ to form a triangular roof shape or an arrow shape, but the guide surface t2 has a curved surface similar to the peripheral surface of the support rod 11. It may be. Alternatively, the guide surface is not essential on the top portion t of the contact member 12b ₁ , and this may be omitted as appropriate.

Further, in the embodiment described above, the top portion t has a shape like a triangular roof or an arrow shape with a tapered tip. Here, the tip of the top portion t may be sharp, but it is more preferable that the tip has a rounded tip having an R portion (rounded portion) at the tip.
That is, by forming the shape having the R portion (R portion) at the tip, the support rod 11 can be mounted more smoothly. As a result, when the support rod 11 on which the disc substrate is mounted is mounted on the plating jig 10 of the present invention, the disc substrates or the disc substrate collide with the plating jig 10 to generate shallow pits (small dents). It is possible to suppress the occurrence of defects).
Therefore, it is more preferable that the top portion t has a shape having an R portion (rounded portion) at the tip.
The size of the R portion (R portion) is not particularly limited, but is preferably about R0.5 to R5.0, for example.

Further, although the example of the bearing 12a and the pressing member 12b has been described as the rotation suppressing mechanism of the restraining member 12, another structure may be adopted as long as the rotation of the support rod 11 can be suppressed. For example, a solid elastic member such as a concave sponge or rubber is arranged in the accommodating recess 12a ₁ of the bearing 12a so that the support rod 11 can be press-fitted, and the support rod 11 is press-fitted into the solid elastic member to rotate. It may be an aspect of suppressing. Further, in the above embodiment, the pressing member 12b is formed so as to face each other, but a structure in which only one pressing member 12b is provided on one side may be used as long as the rotation can be suppressed.
Further, in the above-described embodiment, the restraint member 12 is a member having a U-shaped cross section that can grip the support rod 11, but another structure may be used as long as the same effect can be obtained.

Further, in the above embodiment, the main material of the plating jig 10 is made of resin, but the present invention is not limited to this, and other materials such as plated metal may be used.
Further, in the above embodiment, the magnetic disk (magnetic recording medium) for HDD has been described as an example of the application of the substrate 1, but it may be applied to other applications other than the magnetic disk. In this case, it goes without saying that the plating solution in the plating bath is changed according to the application.

As described above, the plating processing jig and the plating processing apparatus of the present invention are suitable for manufacturing various types of substrates to be plated, and can be applied to a wide range of industries.

L Plating liquid 1 Substrate 10 Plating jig 11 Support rod 12 Restraining member 12a Bearing 12b Pushing member 13 Carocell 13a First carocell 13b Second carocell 14 Suspension device 15 Rotating mechanism 15a Motor 15b Transmission gear 16 Rotating shaft 20 Plating bath 100 Plating processing equipment

Claims (7)

A jig for plating processing for immersing a disk-shaped substrate having a central hole in the plating solution in a plating bath.
A support rod inserted into the center hole of the substrate and
A restraining member having a rotation suppressing mechanism that supports the support rod and suppresses the rotation of the supported support rod, and
A carocell to which the support rod is attached via the restraint member,
Including
The rotation suppression mechanism is
A jig for plating processing , comprising a contact member that comes into contact with the support rod and a pressing member having an elastic member that presses the contact member against the support rod . A jig for plating processing for immersing a disk-shaped substrate having a central hole in the plating solution in a plating bath.
A support rod inserted into the center hole of the substrate and
A restraining member provided with a rotation suppressing mechanism that supports the support rod in a detachable manner in a housing recess and suppresses the rotation of the supported support rod.
A carocell to which the support rod is detachably attached via the restraint member, and
Including
The rotation suppression mechanism is
A jig for plating processing, comprising a contact member for pressing the support rod housed in the housing recess toward the housing recess side. The restraining member is provided with a U-shaped accommodating recess in which at least a part of the peripheral surface of the support rod is accommodated.
The plating processing jig according to claim 1 , wherein the contact member is pressed against the support rod through the elastic member in a state where the support rod is housed in the storage recess. At least two of the pressing members are provided.
The plating processing jig according to claim 1 or 3, wherein the contact members are arranged so as to face each other in the advancing / retreating direction. The plating processing jig according to any one of claims 1 to 4, wherein a guide surface for promoting attachment / detachment of the support rod is formed on the top of the contact member. The plating treatment jig according to any one of claims 1 to 5, wherein at least a part of the top of the contact member is subjected to a low friction treatment. The plating jig according to any one of claims 1 to 6 and the jig for plating processing.
The rotation mechanism that rotates the carousel and
A plating processing apparatus characterized by containing.

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