JPWO2018062503A1 - センサモジュール及び検出方法 - Google Patents
センサモジュール及び検出方法 Download PDFInfo
- Publication number
- JPWO2018062503A1 JPWO2018062503A1 JP2018542944A JP2018542944A JPWO2018062503A1 JP WO2018062503 A1 JPWO2018062503 A1 JP WO2018062503A1 JP 2018542944 A JP2018542944 A JP 2018542944A JP 2018542944 A JP2018542944 A JP 2018542944A JP WO2018062503 A1 JPWO2018062503 A1 JP WO2018062503A1
- Authority
- JP
- Japan
- Prior art keywords
- filter
- component
- fluid
- flow path
- sensor module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/28—Control of physical parameters of the fluid carrier
- G01N30/34—Control of physical parameters of the fluid carrier of fluid composition, e.g. gradient
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/34—Purifying; Cleaning
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
20 筐体
30 チャンバ
31 センサ部
40a 第1供給部
40b 第2供給部
50a 第1流路
50b 第2流路
50c 第3流路
60 基板
61 制御部
62 記憶部
70a 第1フィルタ
70b 第2フィルタ
80 再生機構
Claims (11)
- 第1成分を検出するセンサ部と、
前記センサ部に、被検流体を供給する第1流路と、
前記センサ部に、前記被検流体に含まれ前記第1成分とは異なる第2成分を含む対照流体を供給する第2流路と、
を備え、
前記第2流路は、前記対照流体から前記第1成分の量を低減する第1フィルタを有する、
センサモジュール。 - 前記第1フィルタは、前記第2成分よりも前記第1成分の量を低減する、請求項1に記載のセンサモジュール。
- 前記第1流路及び前記第2流路のそれぞれは、前記第2成分の量を低減する第2フィルタを有する、請求項1又は請求項2に記載のセンサモジュール。
- 前記第2フィルタは、前記第1成分よりも前記第2成分の量を低減する、請求項3に記載のセンサモジュール。
- 前記第1フィルタは、前記第2フィルタよりも前記第1成分の量を低減する、請求項3又は請求項4に記載のセンサモジュール。
- 前記第2流路において、前記第1フィルタは前記第2フィルタよりも下流側に位置する、請求項3乃至請求項5のいずれか一項に記載のセンサモジュール。
- 前記第2流路において、前記第1フィルタよりも上流側に、前記対照流体を前記センサ部に供給するための供給部を備える、請求項1乃至請求項6のいずれか一項に記載のセンサモジュール。
- 前記第2流路において、前記第1フィルタよりも下流側に、前記対照流体を前記センサ部に供給するための供給部を備える、請求項1乃至請求項6のいずれか一項に記載のセンサモジュール。
- 前記第1フィルタによる前記第1成分の量を低減する機能を再生可能な第1再生機構をさらに備える、請求項1乃至請求項8のいずれか一項に記載のセンサモジュール。
- 前記第2フィルタによる前記第2成分の量を低減する機能を再生可能な第2再生機構をさらに備える、請求項3乃至請求項6のいずれか一項に記載のセンサモジュール。
- 第1流路に設けられた第1供給部と、第1成分の量を低減する第2フィルタを有する第2流路に設けられた第2供給部と、センサ部と、を備えるセンサモジュールを準備するステップと、
前記第1供給部を駆動することにより、前記第1流路を介して、被検流体を、前記センサ部に供給するステップと、
前記第2供給部を駆動することにより、前記第2流路を介して、前記被検流体に含まれ前記第1成分とは異なる第2成分を含む対照流体を、前記センサ部に供給するステップと、
前記センサ部において前記第1成分を検出するステップと、
を含む、検出方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016194409 | 2016-09-30 | ||
JP2016194409 | 2016-09-30 | ||
PCT/JP2017/035534 WO2018062503A1 (ja) | 2016-09-30 | 2017-09-29 | センサモジュール及び検出方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018062503A1 true JPWO2018062503A1 (ja) | 2019-07-04 |
JP6956097B2 JP6956097B2 (ja) | 2021-10-27 |
Family
ID=61760826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018542944A Active JP6956097B2 (ja) | 2016-09-30 | 2017-09-29 | センサモジュール及び検出方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11326988B2 (ja) |
JP (1) | JP6956097B2 (ja) |
CN (2) | CN109716099A (ja) |
WO (1) | WO2018062503A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201903473D0 (en) * | 2019-03-14 | 2019-05-01 | Sumitomo Chemical Co | Interferent and baseline drift correcting gas sensor system |
CN113597550A (zh) * | 2019-03-20 | 2021-11-02 | 京瓷株式会社 | 气体检测系统 |
GB2593511A (en) * | 2020-03-25 | 2021-09-29 | Sumitomo Chemical Co | Sensor apparatus |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11174051A (ja) * | 1997-12-15 | 1999-07-02 | Hitachi Tokyo Electron Co Ltd | 呼気分析装置および呼気分析方法 |
JP2005049287A (ja) * | 2003-07-31 | 2005-02-24 | Best Sokki:Kk | So2/h2s連続分離測定法 |
JP2006220544A (ja) * | 2005-02-10 | 2006-08-24 | Riken Keiki Co Ltd | フィルター複合体およびガス検知器 |
JP2010025718A (ja) * | 2008-07-18 | 2010-02-04 | Sharp Corp | ガス測定装置 |
WO2016030386A1 (en) * | 2014-08-28 | 2016-03-03 | Koninklijke Philips N.V. | Sensor system and sensing method |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4619136A (en) * | 1985-07-03 | 1986-10-28 | The United States Of America As Represented By The United States Department Of Energy | Apparatus for measuring the decontamination factor of a multiple filter air-cleaning system |
KR101098125B1 (ko) * | 2005-07-01 | 2011-12-26 | 감브로 룬디아 아베 | 필터 테스트 장치 및 방법 |
EP2188034B1 (en) * | 2007-06-29 | 2014-07-30 | Camfil Farr, Inc. | Method and apparatus for in-situ testing of filtration systems |
JP5264994B2 (ja) * | 2008-05-05 | 2013-08-14 | インフィコン エービー | 流体から気体分子を採取するためのガスプローブおよびガスプローブを備えた装置 |
CN101368921B (zh) * | 2008-09-08 | 2011-11-16 | 无锡尚沃生物科技有限公司 | 高灵敏度与高选择性气体传感器 |
JP4744618B2 (ja) * | 2009-04-13 | 2011-08-10 | シャープ株式会社 | ガス成分検出装置 |
US20120031077A1 (en) * | 2009-04-27 | 2012-02-09 | Toyota Jidosha Kabushiki Kaisha | Pm sensor, pm amount sensing device for exhaust gas, and abnormality detection apparatus for internal combustion engine |
WO2011036772A1 (ja) * | 2009-09-25 | 2011-03-31 | イビデン株式会社 | 微粒子センサ及び排ガス浄化装置 |
US8584509B2 (en) * | 2009-12-31 | 2013-11-19 | Emilcott Associates, Inc. | Environmental monitoring system and method with a prefilter |
KR101897618B1 (ko) * | 2010-03-05 | 2018-09-12 | 엑스트랄리스 테크놀로지 리미티드 | 필터 바이패스 |
US8113046B2 (en) * | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
US8910506B2 (en) * | 2010-09-23 | 2014-12-16 | Li-Cor, Inc. | Gas exchange system flow configuration |
EP2732276A2 (en) | 2011-07-13 | 2014-05-21 | Koninklijke Philips N.V. | Gas sensing apparatus |
US9689864B2 (en) * | 2012-02-01 | 2017-06-27 | Invoy Technologies, Llc | Method and apparatus for rapid quantification of an analyte in breath |
EP2885624A4 (en) * | 2012-08-20 | 2016-04-20 | Camfil Usa Inc | FIELD CONTROL DEVICE FOR ALTERNATIVE INTAKE |
GB201220651D0 (en) * | 2012-11-16 | 2013-01-02 | Oxford Medical Diagnostics Ltd | Portable breath VOC analyser and method |
AU2013370411B2 (en) * | 2012-12-27 | 2018-08-30 | Medi-Physics, Inc. | Dual-filter dual-integrity test assembly |
HUE044429T2 (hu) * | 2014-06-27 | 2019-10-28 | Pulse Health Llc | Analizáló patron és eljárás annak használatára |
US10054575B2 (en) * | 2015-09-25 | 2018-08-21 | General Electric Company | Hydrogen detector and hydrogen detection method |
EP3371588A1 (en) * | 2015-11-06 | 2018-09-12 | Koninklijke Philips N.V. | Modular fluid sensing system |
SE540448C2 (en) * | 2016-04-01 | 2018-09-18 | Dinair Ab | Method of optimizing filter life cycle between replacements and system for monitoring a ventilation system |
EP3786614A1 (de) * | 2019-08-29 | 2021-03-03 | Carl Freudenberg KG | Verfahren zur bereitstellung eines luftstroms |
-
2017
- 2017-09-29 CN CN201780058288.XA patent/CN109716099A/zh active Pending
- 2017-09-29 CN CN202210436231.1A patent/CN114935467A/zh active Pending
- 2017-09-29 JP JP2018542944A patent/JP6956097B2/ja active Active
- 2017-09-29 US US16/336,267 patent/US11326988B2/en active Active
- 2017-09-29 WO PCT/JP2017/035534 patent/WO2018062503A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11174051A (ja) * | 1997-12-15 | 1999-07-02 | Hitachi Tokyo Electron Co Ltd | 呼気分析装置および呼気分析方法 |
JP2005049287A (ja) * | 2003-07-31 | 2005-02-24 | Best Sokki:Kk | So2/h2s連続分離測定法 |
JP2006220544A (ja) * | 2005-02-10 | 2006-08-24 | Riken Keiki Co Ltd | フィルター複合体およびガス検知器 |
JP2010025718A (ja) * | 2008-07-18 | 2010-02-04 | Sharp Corp | ガス測定装置 |
WO2016030386A1 (en) * | 2014-08-28 | 2016-03-03 | Koninklijke Philips N.V. | Sensor system and sensing method |
Non-Patent Citations (1)
Title |
---|
稲川 展裕: "シリカゲル吸着剤を用いた真空再生式VOC回収技術", ADSORPTION NEWS, JPN6020017183, February 2012 (2012-02-01), JP, pages 5 - 11, ISSN: 0004419425 * |
Also Published As
Publication number | Publication date |
---|---|
US11326988B2 (en) | 2022-05-10 |
US20190250077A1 (en) | 2019-08-15 |
JP6956097B2 (ja) | 2021-10-27 |
CN109716099A (zh) | 2019-05-03 |
CN114935467A (zh) | 2022-08-23 |
WO2018062503A1 (ja) | 2018-04-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6956097B2 (ja) | センサモジュール及び検出方法 | |
RU2668326C1 (ru) | Система датчиков и сепаратор кислорода, содержащий систему датчиков | |
US7975525B2 (en) | Self-calibrating sensor | |
JP4550672B2 (ja) | 蒸発燃料処理装置 | |
WO2019022081A1 (ja) | センサモジュール | |
KR960705205A (ko) | 차동식 가스 감지용 인라인 감시 시스템(differential gas sensing in-line monitoring system) | |
US20230063005A1 (en) | Gas detection system and control method for gas detection system | |
JP7430024B2 (ja) | ガスを濃縮するためのシステムおよび方法 | |
JP5933712B2 (ja) | 呼気分析装置の変換器の機能性の監視 | |
JP2016014658A (ja) | Co2濃度計用ゼロガス精製器及びco2濃度計測システム | |
JP2006289212A (ja) | 酸素濃縮装置 | |
JP2009129529A (ja) | 磁気ディスク装置の製造方法 | |
CN109580887A (zh) | 具有零气发生装置自诊断功能的气体监测系统和监测方法 | |
CA2805931A1 (en) | Device for detection of a partial pressure and method for its operation | |
US8770013B2 (en) | Evaporation leak check system | |
JP6814713B2 (ja) | センサモジュール | |
JP2008167917A5 (ja) | ||
JPH1019862A (ja) | 匂い検知装置 | |
US20240085391A1 (en) | Gas detection method, program, control system, and gas detection system | |
JP2004301027A (ja) | エバポガスパージシステムのリーク診断装置 | |
JP2015040836A (ja) | 水素リークテスト方法及び装置 | |
JPWO2022091391A5 (ja) | ||
JP4165341B2 (ja) | 赤外線ガス分析装置 | |
Strano et al. | Deconvolution of permeance in supported nanoporous membranes | |
JP2007177655A (ja) | 蒸発燃料処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190304 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190924 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191118 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200602 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200714 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210105 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210303 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210907 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211004 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6956097 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |