JPWO2016185865A1 - ノボラック型フェノール性水酸基含有樹脂及びレジスト膜 - Google Patents
ノボラック型フェノール性水酸基含有樹脂及びレジスト膜 Download PDFInfo
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- JPWO2016185865A1 JPWO2016185865A1 JP2016560022A JP2016560022A JPWO2016185865A1 JP WO2016185865 A1 JPWO2016185865 A1 JP WO2016185865A1 JP 2016560022 A JP2016560022 A JP 2016560022A JP 2016560022 A JP2016560022 A JP 2016560022A JP WO2016185865 A1 JPWO2016185865 A1 JP WO2016185865A1
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- Prior art keywords
- group
- phenolic hydroxyl
- hydroxyl group
- resin
- integer
- Prior art date
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- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 title claims abstract description 196
- 125000002887 hydroxy group Chemical group [H]O* 0.000 title claims abstract description 163
- 229920005989 resin Polymers 0.000 title claims abstract description 162
- 239000011347 resin Substances 0.000 title claims abstract description 162
- 229920003986 novolac Polymers 0.000 title claims abstract description 102
- -1 aldehyde compound Chemical class 0.000 claims abstract description 168
- 150000001875 compounds Chemical class 0.000 claims abstract description 80
- 239000000203 mixture Substances 0.000 claims description 71
- 125000003118 aryl group Chemical group 0.000 claims description 45
- 125000000217 alkyl group Chemical group 0.000 claims description 40
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 35
- 125000003545 alkoxy group Chemical group 0.000 claims description 34
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 30
- 125000005843 halogen group Chemical group 0.000 claims description 30
- 125000004432 carbon atom Chemical group C* 0.000 claims description 27
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 125000001931 aliphatic group Chemical group 0.000 claims description 11
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 27
- 239000000758 substrate Substances 0.000 abstract description 19
- 239000010408 film Substances 0.000 description 47
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 34
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 33
- 238000005227 gel permeation chromatography Methods 0.000 description 24
- 150000002989 phenols Chemical class 0.000 description 21
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 20
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 20
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- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 17
- 229930003836 cresol Natural products 0.000 description 17
- 239000002904 solvent Substances 0.000 description 17
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- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 16
- 150000003934 aromatic aldehydes Chemical class 0.000 description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 15
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 15
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- 239000003822 epoxy resin Substances 0.000 description 14
- 239000011572 manganese Substances 0.000 description 14
- 229920000647 polyepoxide Polymers 0.000 description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 12
- 239000003513 alkali Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
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- 238000001816 cooling Methods 0.000 description 11
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- 229930040373 Paraformaldehyde Natural products 0.000 description 9
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
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- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 7
- RGHHSNMVTDWUBI-UHFFFAOYSA-N 4-hydroxybenzaldehyde Chemical class OC1=CC=C(C=O)C=C1 RGHHSNMVTDWUBI-UHFFFAOYSA-N 0.000 description 7
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- 238000011156 evaluation Methods 0.000 description 7
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- NXXYKOUNUYWIHA-UHFFFAOYSA-N 2,6-Dimethylphenol Chemical compound CC1=CC=CC(C)=C1O NXXYKOUNUYWIHA-UHFFFAOYSA-N 0.000 description 6
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 6
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 6
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 6
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 6
- 125000001153 fluoro group Chemical group F* 0.000 description 6
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 5
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 5
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- 150000001491 aromatic compounds Chemical class 0.000 description 5
- 150000004292 cyclic ethers Chemical class 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
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- 229940100630 metacresol Drugs 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 235000006408 oxalic acid Nutrition 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
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- YCOXTKKNXUZSKD-UHFFFAOYSA-N 3,4-xylenol Chemical compound CC1=CC=C(O)C=C1C YCOXTKKNXUZSKD-UHFFFAOYSA-N 0.000 description 4
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- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 4
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 4
- 125000005036 alkoxyphenyl group Chemical group 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 4
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 4
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- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 4
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- 239000002075 main ingredient Substances 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 125000002960 margaryl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 125000001434 methanylylidene group Chemical group [H]C#[*] 0.000 description 1
- VYKXQOYUCMREIS-UHFFFAOYSA-N methylhexahydrophthalic anhydride Chemical compound C1CCCC2C(=O)OC(=O)C21C VYKXQOYUCMREIS-UHFFFAOYSA-N 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- VSWALKINGSNVAR-UHFFFAOYSA-N naphthalen-1-ol;phenol Chemical compound OC1=CC=CC=C1.C1=CC=C2C(O)=CC=CC2=C1 VSWALKINGSNVAR-UHFFFAOYSA-N 0.000 description 1
- 150000004780 naphthols Chemical class 0.000 description 1
- 125000001196 nonadecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- BTFQKIATRPGRBS-UHFFFAOYSA-N o-tolualdehyde Chemical compound CC1=CC=CC=C1C=O BTFQKIATRPGRBS-UHFFFAOYSA-N 0.000 description 1
- JJVNINGBHGBWJH-UHFFFAOYSA-N ortho-vanillin Chemical compound COC1=CC=CC(C=O)=C1O JJVNINGBHGBWJH-UHFFFAOYSA-N 0.000 description 1
- 125000005702 oxyalkylene group Chemical group 0.000 description 1
- QUBQYFYWUJJAAK-UHFFFAOYSA-N oxymethurea Chemical compound OCNC(=O)NCO QUBQYFYWUJJAAK-UHFFFAOYSA-N 0.000 description 1
- QBDSZLJBMIMQRS-UHFFFAOYSA-N p-Cumylphenol Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=CC=C1 QBDSZLJBMIMQRS-UHFFFAOYSA-N 0.000 description 1
- LSSGAGGYJWTEPQ-UHFFFAOYSA-N phenyl-(2,3,6-trihydroxyphenyl)methanone Chemical compound OC1=CC=C(O)C(C(=O)C=2C=CC=CC=2)=C1O LSSGAGGYJWTEPQ-UHFFFAOYSA-N 0.000 description 1
- 229940100595 phenylacetaldehyde Drugs 0.000 description 1
- QCDYQQDYXPDABM-UHFFFAOYSA-N phloroglucinol Chemical compound OC1=CC(O)=CC(O)=C1 QCDYQQDYXPDABM-UHFFFAOYSA-N 0.000 description 1
- 229960001553 phloroglucinol Drugs 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920000636 poly(norbornene) polymer Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000259 polyoxyethylene lauryl ether Polymers 0.000 description 1
- 239000000256 polyoxyethylene sorbitan monolaurate Substances 0.000 description 1
- 235000010486 polyoxyethylene sorbitan monolaurate Nutrition 0.000 description 1
- 239000001818 polyoxyethylene sorbitan monostearate Substances 0.000 description 1
- 235000010989 polyoxyethylene sorbitan monostearate Nutrition 0.000 description 1
- 239000001816 polyoxyethylene sorbitan tristearate Substances 0.000 description 1
- 235000010988 polyoxyethylene sorbitan tristearate Nutrition 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000001226 reprecipitation Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229940035044 sorbitan monolaurate Drugs 0.000 description 1
- 239000001593 sorbitan monooleate Substances 0.000 description 1
- 235000011069 sorbitan monooleate Nutrition 0.000 description 1
- 229940035049 sorbitan monooleate Drugs 0.000 description 1
- 239000001587 sorbitan monostearate Substances 0.000 description 1
- 235000011076 sorbitan monostearate Nutrition 0.000 description 1
- 229940035048 sorbitan monostearate Drugs 0.000 description 1
- 239000001589 sorbitan tristearate Substances 0.000 description 1
- 235000011078 sorbitan tristearate Nutrition 0.000 description 1
- 229960004129 sorbitan tristearate Drugs 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XBFJAVXCNXDMBH-UHFFFAOYSA-N tetracyclo[6.2.1.1(3,6).0(2,7)]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1 XBFJAVXCNXDMBH-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 229950002929 trinitrophenol Drugs 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
- FGQOOHJZONJGDT-UHFFFAOYSA-N vanillin Natural products COC1=CC(O)=CC(C=O)=C1 FGQOOHJZONJGDT-UHFFFAOYSA-N 0.000 description 1
- 235000012141 vanillin Nutrition 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
- C08G8/20—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with polyhydric phenols
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
- C07C39/12—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings
- C07C39/15—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic with no unsaturation outside the aromatic rings with all hydroxy groups on non-condensed rings, e.g. phenylphenol
- C07C39/16—Bis-(hydroxyphenyl) alkanes; Tris-(hydroxyphenyl)alkanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G8/00—Condensation polymers of aldehydes or ketones with phenols only
- C08G8/04—Condensation polymers of aldehydes or ketones with phenols only of aldehydes
- C08G8/08—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ
- C08G8/24—Condensation polymers of aldehydes or ketones with phenols only of aldehydes of formaldehyde, e.g. of formaldehyde formed in situ with mixtures of two or more phenols which are not covered by only one of the groups C08G8/10 - C08G8/20
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
- G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
- G03F7/0236—Condensation products of carbonyl compounds and phenolic compounds, e.g. novolak resins
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- Polymers & Plastics (AREA)
- General Physics & Mathematics (AREA)
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- Structural Engineering (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。]
で表されるフェノール性水酸基含有化合物(A)、下記構造式(2)
で表されるフェノール性水酸基含有化合物(B)及びアルデヒド化合物(C)を必須の反応成分とする重縮合物であることを特徴とするノボラック型フェノール性水酸基含有樹脂に関する。
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。R5は水素原子、アルキル基又はアリール基の何れかである。]
で表される構造部位(a)と、下記構造式(4)
で表される構造部位(b)とを繰り返し単位として有することを特徴とするノボラック型フェノール性水酸基含有樹脂に関する。
本発明のノボラック型フェノール性水酸基含有樹脂は、下記構造式(1)
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。]
で表されるフェノール性水酸基含有化合物(A)、下記構造式(2)
で表されるフェノール性水酸基含有化合物(B)及びアルデヒド化合物(C)を必須の反応成分とする重縮合物であることを特徴とする。
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。]
で表される。本発明のノボラック型フェノール性水酸基含有樹脂を製造する際、前記フェノール性水酸基含有化合物(A)は、前記構造式(1)で表される化合物のうち1種類を単独で用いても良いし、2種類以上を併用しても良い。
[GPCの測定条件]
測定装置:東ソー株式会社製「HLC−8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF803」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF804」(8.0mmФ×300mm)
カラム温度:40℃
検出器: RI(示差屈折計)
データ処理:東ソー株式会社製「GPC−8020モデルIIバージョン4.30」
展開溶媒:テトラヒドロフラン
流速:1.0ml/分
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの
注入量:0.1ml
標準試料:下記単分散ポリスチレン
(標準試料:単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
で表される。本発明のノボラック型フェノール性水酸基含有樹脂を製造する際、前記フェノール性水酸基含有化合物(B)は、前記構造式(2)で表される化合物のうち1種類を単独で用いても良いし、2種類以上を併用しても良い。
[GPCの測定条件]
測定装置:東ソー株式会社製「HLC−8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF803」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmФ×300mm)
カラム温度:40℃
検出器: RI(示差屈折計)
データ処理:東ソー株式会社製「GPC−8020モデルIIバージョン4.30」
展開溶媒:テトラヒドロフラン
流速:1.0mL/分
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの(100μl)
標準試料:下記単分散ポリスチレン
(標準試料:単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。R5は水素原子、アルキル基又はアリール基の何れかである。]
で表される構造部位(a)と、下記構造式(4)
で表される構造部位(b)とを繰り返し単位として有することを特徴とするノボラック型フェノール性水酸基含有樹脂が挙げられる。
で表される構造部位(a−1)と、下記構造式(4−1)
で表される構造部位(b−1)とを繰り返し単位として有することを特徴とするノボラック型フェノール性水酸基含有樹脂がより好ましい。
[GPCの測定条件]
測定装置:東ソー株式会社製「HLC−8220 GPC」
カラム:昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF802」(8.0mmФ×300mm)
+昭和電工株式会社製「Shodex KF803」(8.0mmФ×300mm)+昭和電工株式会社製「Shodex KF804」(8.0mmФ×300mm)
カラム温度:40℃
検出器: RI(示差屈折計)
データ処理:東ソー株式会社製「GPC−8020モデルIIバージョン4.30」
展開溶媒:テトラヒドロフラン
流速:1.0mL/分
試料:樹脂固形分換算で0.5質量%のテトラヒドロフラン溶液をマイクロフィルターでろ過したもの
注入量:0.1mL
標準試料:下記単分散ポリスチレン
(標準試料:単分散ポリスチレン)
東ソー株式会社製「A−500」
東ソー株式会社製「A−2500」
東ソー株式会社製「A−5000」
東ソー株式会社製「F−1」
東ソー株式会社製「F−2」
東ソー株式会社製「F−4」
東ソー株式会社製「F−10」
東ソー株式会社製「F−20」
[13C−NMRスペクトル測定条件]
測定モード:SGNNE(NOE消去の1H完全デカップリング法)
パルス角度:45℃パルス
試料濃度:30wt%
積算回数:10000回
冷却管を設置した2000mlの4口フラスコに、2,5−キシレノール293.2g(2.4mol)、4−ヒドロキシベンズアルデヒド122g(1mol)を仕込み、2−エトキシエタノール500mlに溶解させた。氷浴中で冷却しながら硫酸10mlを添加した後、マントルヒーターで100℃まで加熱し、2時間攪拌しながら反応させた。反応後、得られた溶液に水を加えて粗成生物を再沈殿させた。得られた粗生成物をアセトンに再溶解し、さらに水で再沈殿させた後、沈殿物を濾別して真空乾燥を行い、白色結晶のフェノール性水酸基含有化合物(A−1)213gを得た。13C−NMRにて下記構造式で表される化合物の生成を確認した。また、GPCチャート図から算出される純度は98.2%であった。フェノール性水酸基含有化合物(A−1)のGPCチャートを図1に、13C−NMRチャートを図2に示す。
冷却管を設置した300mlの4口フラスコに前記フェノール性水酸基含有化合物(A−1)34.8g(0.1mol)、3−ペンタデシルフェノール1.5g(0.005mol)を仕込んだ後、2−エトキシエタノール15ml、酢酸15mlに溶解させた。氷浴中で冷却しながら硫酸10mlを添加した後、92%パラホルムアルデヒド3.3g(0.1mol)を仕込んだ。オイルバスで80℃まで昇温し、10時間加熱、攪拌を継続し反応させた。反応後、得られた溶液に水を加えて粗生成物を再沈殿させた。得られた粗生成物をアセトンに再溶解し、さらに水で再沈殿させた後、沈殿物を濾別して真空乾燥し、赤色粉末のノボラック型フェノール性水酸基含有樹脂(1)33.6gを得た。ノボラック型フェノール性水酸基含有樹脂(1)のGPCチャートを図3に示す。ノボラック型フェノール性水酸基含有樹脂(1)の数平均分子量(Mn)は2,909、重量平均分子量(Mw)は14,426、多分散度(Mw/Mn)は4.96であった。
冷却管を設置した300mlの4口フラスコに前記フェノール性水酸基含有化合物(A−1)34.8g(0.1mol)、3−ペンタデシルフェノール6.1g(0.02mol)を仕込んだ後、2−エトキシエタノール15ml、酢酸15mlに溶解させた。氷浴中で冷却しながら硫酸10mlを添加した後、92%パラホルムアルデヒド3.3g(0.1mol)を仕込んだ。オイルバスで80℃まで昇温し、10時間加熱、攪拌を継続し反応させた。反応後、得られた溶液に水を加えて粗生成物を再沈殿させた。得られた粗生成物をアセトンに再溶解し、さらに水で再沈殿させた後、沈殿物を濾別して真空乾燥し、赤色粉末のノボラック型フェノール性水酸基含有樹脂(2)37.3gを得た。ノボラック型フェノール性水酸基含有樹脂(2)のGPCチャートを図4示す。ノボラック型フェノール性水酸基含有樹脂(2)の数平均分子量(Mn)は3,200、重量平均分子量(Mw)は24,188、多分散度(Mw/Mn)は7.56であった。
冷却管を設置した300mlの4口フラスコに前記フェノール性水酸基含有化合物(A−1)34.8g(0.1mol)、4−ノニルフェノール2.2g(0.01mol)を仕込んだ後、2−エトキシエタノール15ml、酢酸15mlに溶解させた。氷浴中で冷却しながら硫酸10mlを添加した後、92%パラホルムアルデヒド3.3g(0.1mol)を仕込んだ。オイルバスで80℃まで昇温し、10時間加熱、攪拌を継続し反応させた。反応後、得られた溶液に水を加えて粗生成物を再沈殿させた。得られた粗生成物をアセトンに再溶解し、さらに水で再沈させた後、沈殿物を濾別して真空乾燥し、赤色粉末のノボラック型フェノール性水酸基含有樹脂(3)35.1gを得た。ノボラック型フェノール性水酸基含有樹脂(3)のGPCチャートを図5に示す。ノボラック型フェノール性水酸基含有樹脂(3)の数平均分子量(Mn)は3,221、重量平均分子量(Mw)は18,778、多分散度(Mw/Mn)は5.83であった
冷却管を設置した300mlの4口フラスコにメタクレゾール13.0g(0.12mol)、パラクレゾール8.6g(0.08mol)、3−ペンタデシルフェノール6.1g(0.02mol)を仕込んだ後、2−エトキシエタノール15ml、酢酸15mlに溶解させた。氷浴中で冷却しながら硫酸10mlを添加した後、92%パラホルムアルデヒド6.5g(0.2mol)を仕込んだ。オイルバスで80℃まで昇温し、10時間加熱、攪拌を継続し反応させた。反応後、得られた溶液に水を加えて粗生成物を再沈殿させた。得られた粗生成物をアセトンに再溶解し、さらに水で再沈殿させた後、沈殿物を濾別して真空乾燥し、黄色粉末のノボラック型フェノール性水酸基含有樹脂(1’)24.6gを得た。ノボラック型フェノール性水酸基含有樹脂(1’)のGPCチャートを図6に示す。ノボラック型フェノール性水酸基含有樹脂(1’)の数平均分子量(Mn)は1,792、重量平均分子量(Mw)は11,701、多分散度(Mw/Mn)は6.53であった
攪拌機、温度計を備えた2Lの4つ口フラスコに、m−クレゾール648g(6mol)、p−クレゾール432g(4mol)、シュウ酸2.5g(0.2mol)、42%ホルムアルデヒド492gを仕込み、100℃まで昇温、反応させた。常圧で200℃まで加熱して脱水及び蒸留し、更に230℃で6時間減圧蒸留を行い、淡黄色固形のノボラック型フェノール性水酸基含有樹脂(2’)736gを得た。ノボラック型フェノール性水酸基含有樹脂(2’)の数平均分子量(Mn)は1,450、重量平均分子量(Mw)は10,316、多分散度(Mw/Mn)は7.12であった。
実施例1〜3、比較製造例1、2で得たノボラック型フェノール性水酸基含有樹脂について、下記の要領で評価した。結果を表1に示す。
前記ノボラック型フェノール性水酸基含有樹脂28質量部をプロピレングリコールモノメチルエーテルアセテート60質量部に溶解させ、この溶液に感光剤12質量部を加えて溶解させた。これを0.2μmのメンブランフィルターで濾過し、感光性組成物を得た。
感光剤は東洋合成工業株式会社製「P−200」(4,4’−[1−[4−[1−(4−ヒドロキシフェニル)−1メチルエチル]フェニル]エチリデン]ビスフェノール1モルと1,2−ナフトキノン−2−ジアジド−5−スルホニルクロリド2モルとの縮合物)を用いた。
前記ノボラック型フェノール性水酸基含有樹脂28質量部をプロピレングリコールモノメチルエーテルアセテート60質量部に溶解させ、これを0.2μmのメンブランフィルターで濾過し、耐熱性試験用組成物を得た。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。このウェハーを2枚用意し、一方を「露光なしサンプル」とした。他方を「露光有サンプル」としてghi線ランプ(ウシオ電機株式会社製「マルチライト」)を用いて100mJ/cm2のghi線を照射したのち、140℃、60秒間の条件で加熱処理を行った。
「露光なしサンプル」と「露光有サンプル」の両方をアルカリ現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬した後、110℃のホットプレート上で60秒乾燥させた。各サンプルの現像液浸漬前後の膜厚を測定し、その差分を60で除した値をアルカリ現像性[ADR(Å/s)]とした。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。このウェハー上にラインアンドスペースが1:1であり、ライン幅が1〜10μmまで1μmごとに設定されたレジストパターン対応のマスクを密着させた後、ghi線ランプ(ウシオ電機株式会社製「マルチライト」)を用いてghi線を照射し、140℃、60秒間の条件で加熱処理を行った。次いで、アルカリ現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬した後、110℃のホットプレート上で60秒乾燥させた。
ghi線露光量を30mJ/cm2から5mJ/cm2毎に増加させた場合の、ライン幅3μmを忠実に再現することのできる露光量(Eop露光量)を評価した。
先で得た感光性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。得られたウェハー上にフォトマスクを乗せ、先のアルカリ現像性評価の場合と同様の方法でghi線200mJ/cm2を照射し、アルカリ現像操作を行った。レーザーマイクロスコープ(株式会社キーエンス製「VK−X200」)を用いてパターン状態を確認し、L/S=5μmで解像できているものを○、L/S=5μmで解像できていないものを×として評価した。
先で得た耐熱性試験用組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。得られたウェハーより樹脂分をかきとり、そのガラス転移温度(Tg)を測定した。ガラス転移温度(Tg)の測定は示差走査熱量計(DSC)(株式会社TAインスツルメント製「Q100」)を用いて、窒素雰囲気下、温度範囲−100〜250℃、昇温温度10℃/分の条件で行った。
先で得た感光性組成物を5インチシリコンウェハー上に約50μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で300秒乾燥させた。得られたウェハーの表面をレーザーマイクロスコープ(株式会社キーエンス製「VK−X200」)を用いて観察し、クラックが無い場合を○、クラックがある場合を×として評価した。
先で得た感光性組成物を厚さ50μmのポリイミドフィルム上に約5μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で300秒乾燥させた。得られた積層フィルムを180度に折り曲げて、折り曲げ箇所の状態をレーザーマイクロスコープ(株式会社キーエンス製「VK−X200」)を用いて観察し、クラックが無い場合を○、クラックがある場合を×として評価した。
実施例1〜3、比較製造例1、2で得たノボラック型フェノール性水酸基含有樹脂について、下記の要領で評価した。結果を表2に示す。
前記ノボラック型フェノール性水酸基含有樹脂16質量部、硬化剤(東京化成工業株式会社製「1,3,4,6−テトラキス(メトキシメチル)グリコールウリル」)4質量部をプロピレングリコールモノメチルエーテルアセテート30質量部に溶解させ、これを0.2μmのメンブランフィルターで濾過し、硬化性組成物を得た。
前記ノボラック型フェノール性水酸基含有樹脂28質量部をプロピレングリコールモノメチルエーテルアセテート60質量部に溶解させ、これを0.2μmのメンブランフィルターで濾過し、耐熱性試験用組成物を得た。
先で得た硬化性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた。このウェハーを2枚用意し、一方を「未硬化サンプル」とした。他方を「硬化サンプル」として160℃、60秒間の条件で加熱処理を行った。
「未硬化サンプル」と「硬化サンプル」の両方をアルカリ現像液(2.38%水酸化テトラメチルアンモニウム水溶液)に60秒間浸漬した後、110℃のホットプレート上で60秒乾燥させた。各サンプルの現像液浸漬前後の膜厚を測定し、その差分を60で除した値をアルカリ現像性[ADR(Å/s)]とした。
先で得た硬化性組成物を5インチシリコンウェハー上に約1μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で60秒乾燥させた後、160℃、60秒間の条件で加熱処理を行った。得られたウェハーより樹脂分をかきとり、そのガラス転移温度(Tg)を測定した。ガラス転移温度(Tg)の測定は示差走査熱量計(DSC)(株式会社TAインスツルメント製「Q100」)を用いて、窒素雰囲気下、温度範囲−100〜250℃、昇温温度10℃/分の条件で行った。
先で得た硬化性組成物を5インチシリコンウェハー上に約50μmの厚さになるようにスピンコーターで塗布し、110℃のホットプレート上で300秒乾燥させた。得られたウェハーの表面をレーザーマイクロスコープ(株式会社キーエンス製「VK−X200」)を用いて観察し、クラックが無い場合を○、クラックがある場合を×として評価した。
Claims (10)
- 下記構造式(1)
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。]
で表されるフェノール性水酸基含有化合物(A)、下記構造式(2)
で表されるフェノール性水酸基含有化合物(B)及びアルデヒド化合物(C)を必須の反応成分とする重縮合物であることを特徴とするノボラック型フェノール性水酸基含有樹脂。 - 前記フェノール性水酸基含有化合物(A)とフェノール性水酸基含有化合物(B)とのモル比[(A):(B)]が100:0.1〜100:30の範囲である請求項1記載のノボラック型フェノール性水酸基含有樹脂。
- 下記構造式(3)
で表される構造部位であり、R1はそれぞれ独立に水素原子、アルキル基、アルコキシ基、アリール基、アラルキル基、ハロゲン原子の何れかであり、mはそれぞれ独立に0〜4の整数である。R5は水素原子、アルキル基又はアリール基の何れかである。]
で表される構造部位(a)と、下記構造式(4)
で表される構造部位(b)とを繰り返し単位として有することを特徴とするノボラック型フェノール性水酸基含有樹脂。 - 樹脂中に存在する前記構造部位(a−1)と前記構造部位(b−1)とのモル比[(a−1):(b−1)]が100:0.1〜100:30の範囲である請求項3記載のノボラック型フェノール性水酸基含有樹脂。
- 請求項1〜4の何れか一つに記載のノボラック型フェノール性水酸基含有樹脂と感光剤とを含有する感光性組成物。
- 請求項5記載の感光性組成物からなるレジスト膜。
- 請求項1〜4の何れか一つに記載のノボラック型フェノール性水酸基含有樹脂と硬化剤とを含有する硬化性組成物。
- 請求項7記載の硬化性組成物を硬化させてなる硬化物。
- 請求項7記載の硬化性組成物からなるレジスト下層膜。
- 請求項7記載の硬化性組成物からなるレジスト永久膜。
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CN107531858A (zh) | 2018-01-02 |
KR102559230B1 (ko) | 2023-07-25 |
JP6156591B2 (ja) | 2017-07-05 |
TWI686428B (zh) | 2020-03-01 |
CN107531858B (zh) | 2020-05-08 |
KR20180011754A (ko) | 2018-02-02 |
WO2016185865A1 (ja) | 2016-11-24 |
US10577449B2 (en) | 2020-03-03 |
US20180134834A1 (en) | 2018-05-17 |
TW201708290A (zh) | 2017-03-01 |
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