JPWO2016133103A1 - 走査露光装置 - Google Patents
走査露光装置 Download PDFInfo
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- JPWO2016133103A1 JPWO2016133103A1 JP2017500698A JP2017500698A JPWO2016133103A1 JP WO2016133103 A1 JPWO2016133103 A1 JP WO2016133103A1 JP 2017500698 A JP2017500698 A JP 2017500698A JP 2017500698 A JP2017500698 A JP 2017500698A JP WO2016133103 A1 JPWO2016133103 A1 JP WO2016133103A1
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- 239000000758 substrate Substances 0.000 claims abstract description 75
- 230000001133 acceleration Effects 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/02815—Means for illuminating the original, not specific to a particular type of pick-up head
- H04N1/0282—Using a single or a few point light sources, e.g. a laser diode
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/88—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof prepared by photographic processes for production of originals simulating relief
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/40—Picture signal circuits
- H04N1/40056—Circuits for driving or energising particular reading heads or original illumination means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/40—Picture signal circuits
- H04N1/401—Compensating positionally unequal response of the pick-up or reproducing head
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Liquid Crystal (AREA)
Abstract
Description
ステージ表面との間に間隙を設けて基板を支持するステージと、前記基板上の一方向に沿って延設される光照射領域に光を照射する光源ユニットと、前記ステージと前記光源ユニットの一方又は両方を、前記一方向に交差する走査方向に沿って相対的に移動させる走査装置とを備え、前記走査装置には、前記ステージ及び前記光源ユニットが静止した位置から前記光照射領域に前記ステージに支持された基板が入るまでの加速区間が設けられ、前記ステージは、前記ステージ表面と前記基板との間の間隙を覆う遮光体を当該ステージの端部に備えることを特徴とする走査露光装置。
2S:間隙,20:遮光体,
3:光源ユニット,3L:光照射領域,
30,30A:光源,31:反射部材,32:偏光板,
4:走査装置,5:床面,
S:走査方向,W:基板,R:迷光
Claims (4)
- ステージ表面との間に間隙を設けて基板を支持するステージと、
前記基板上の一方向に沿って延設される光照射領域に光を照射する光源ユニットと、
前記ステージと前記光源ユニットの一方又は両方を、前記一方向に交差する走査方向に沿って相対的に移動させる走査装置とを備え、
前記走査装置には、前記ステージ及び前記光源ユニットが静止した位置から前記光照射領域に前記ステージに支持された基板が入るまでの加速区間が設けられ、
前記ステージは、前記ステージ表面と前記基板との間の間隙を覆う遮光体を当該ステージの端部に備えることを特徴とする走査露光装置。 - 前記ステージは、前記ステージ表面に立設された複数のピンの上端で前記基板を支持することを特徴とする請求項1記載の走査露光装置。
- 前記光源ユニットは紫外線を照射することを特徴とする請求項1又は2記載の走査露光装置。
- 前記基板上には、光配向材料層が形成されていることを特徴とする請求項3記載の走査露光装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015030025 | 2015-02-18 | ||
JP2015030025 | 2015-02-18 | ||
PCT/JP2016/054518 WO2016133103A1 (ja) | 2015-02-18 | 2016-02-17 | 走査露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2016133103A1 true JPWO2016133103A1 (ja) | 2018-02-15 |
JP6712587B2 JP6712587B2 (ja) | 2020-06-24 |
Family
ID=56692263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017500698A Expired - Fee Related JP6712587B2 (ja) | 2015-02-18 | 2016-02-17 | 走査露光装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10469692B2 (ja) |
JP (1) | JP6712587B2 (ja) |
KR (1) | KR20170117071A (ja) |
CN (1) | CN107407888B (ja) |
TW (1) | TWI698714B (ja) |
WO (1) | WO2016133103A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201921131A (zh) * | 2017-08-09 | 2019-06-01 | 日商V科技股份有限公司 | 光配向用曝光裝置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150708A (ja) * | 2003-10-24 | 2005-06-09 | Nikon Corp | 静電チャック、ステージ装置及び露光装置 |
JP2008010643A (ja) * | 2006-06-29 | 2008-01-17 | Canon Inc | ステージ装置 |
JP2009075303A (ja) * | 2007-09-20 | 2009-04-09 | Seiko Epson Corp | 電気光学装置の製造装置及び製造方法 |
JP2014174287A (ja) * | 2013-03-07 | 2014-09-22 | V Technology Co Ltd | 走査露光装置及び走査露光方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0758423A (ja) * | 1993-08-19 | 1995-03-03 | Sony Corp | バックアップピン受け部を設けたプリント基板 |
JP2002151400A (ja) * | 2000-11-15 | 2002-05-24 | Canon Inc | 露光装置、その保守方法並びに同装置を用いた半導体デバイス製造方法及び半導体製造工場 |
JP2009295950A (ja) | 2008-05-09 | 2009-12-17 | Nsk Ltd | スキャン露光装置およびスキャン露光方法 |
JP5294488B2 (ja) * | 2009-12-03 | 2013-09-18 | 株式会社ブイ・テクノロジー | 露光装置 |
CN103365123B (zh) * | 2012-04-06 | 2015-08-26 | 上海微电子装备有限公司 | 一种对准系统光阑板的调整机构 |
JP6239813B2 (ja) * | 2012-07-18 | 2017-11-29 | 株式会社Screenセミコンダクターソリューションズ | 基板処理装置および基板処理方法 |
JP5344105B1 (ja) | 2013-03-08 | 2013-11-20 | ウシオ電機株式会社 | 光配向用偏光光照射装置及び光配向用偏光光照射方法 |
WO2017204131A1 (ja) * | 2016-05-27 | 2017-11-30 | シャープ株式会社 | 液晶表示装置の製造方法 |
JP6985803B2 (ja) * | 2017-03-01 | 2021-12-22 | 株式会社Screenホールディングス | 露光装置、基板処理装置、基板の露光方法および基板処理方法 |
-
2016
- 2016-02-17 JP JP2017500698A patent/JP6712587B2/ja not_active Expired - Fee Related
- 2016-02-17 TW TW105104656A patent/TWI698714B/zh not_active IP Right Cessation
- 2016-02-17 WO PCT/JP2016/054518 patent/WO2016133103A1/ja active Application Filing
- 2016-02-17 US US15/551,378 patent/US10469692B2/en not_active Expired - Fee Related
- 2016-02-17 CN CN201680010209.3A patent/CN107407888B/zh not_active Expired - Fee Related
- 2016-02-17 KR KR1020177022388A patent/KR20170117071A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150708A (ja) * | 2003-10-24 | 2005-06-09 | Nikon Corp | 静電チャック、ステージ装置及び露光装置 |
JP2008010643A (ja) * | 2006-06-29 | 2008-01-17 | Canon Inc | ステージ装置 |
JP2009075303A (ja) * | 2007-09-20 | 2009-04-09 | Seiko Epson Corp | 電気光学装置の製造装置及び製造方法 |
JP2014174287A (ja) * | 2013-03-07 | 2014-09-22 | V Technology Co Ltd | 走査露光装置及び走査露光方法 |
Also Published As
Publication number | Publication date |
---|---|
CN107407888B (zh) | 2019-03-29 |
KR20170117071A (ko) | 2017-10-20 |
CN107407888A (zh) | 2017-11-28 |
US20180041656A1 (en) | 2018-02-08 |
TW201643550A (zh) | 2016-12-16 |
WO2016133103A1 (ja) | 2016-08-25 |
US10469692B2 (en) | 2019-11-05 |
TWI698714B (zh) | 2020-07-11 |
JP6712587B2 (ja) | 2020-06-24 |
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