JPWO2015093510A1 - 透明導電膜用保護膜形成組成物 - Google Patents
透明導電膜用保護膜形成組成物 Download PDFInfo
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- JPWO2015093510A1 JPWO2015093510A1 JP2015553571A JP2015553571A JPWO2015093510A1 JP WO2015093510 A1 JPWO2015093510 A1 JP WO2015093510A1 JP 2015553571 A JP2015553571 A JP 2015553571A JP 2015553571 A JP2015553571 A JP 2015553571A JP WO2015093510 A1 JPWO2015093510 A1 JP WO2015093510A1
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
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Abstract
Description
1.下記式(1)で表される繰り返し単位構造を含むトリアジン環含有ハイパーブランチポリマー及び分子量1,000以上の架橋剤Aを含有することを特徴とする透明導電膜用保護膜形成組成物。
Arは、式(2)〜(13)で示される基からなる群から選ばれる少なくとも1種の基を表す。
R93及びR94は、水素原子又は炭素数1〜10のアルキル基を表し、
W1及びW2は、それぞれ独立に、単結合、−C(R95)(R96)−(R95及びR96は、それぞれ独立に、水素原子又は炭素数1〜10のアルキル基を表し、R95及びR96がともにアルキル基である場合、これらは互いに結合してこれらが結合する炭素原子とともに環を形成してもよい。)、−C(O)−、−O−、−S−、−S(O)−、−S(O)2−又は−N(R97)−(R97は、水素原子又は炭素数1〜10のアルキル基を表す。)を表し、
X1及びX2は、それぞれ独立に、単結合、炭素数1〜10のアルキレン基又は式(14)で表される基を表す。
Y1及びY2は、それぞれ独立に、単結合又は炭素数1〜10のアルキレン基を表す。)]}
2.架橋剤Aが多官能(メタ)アクリル化合物である1の組成物。
3.架橋剤Aを前記トリアジン環含有ハイパーブランチポリマー100質量部に対して0.1〜30質量部含む1又は2の組成物。
4.更に、分子量1,000未満の架橋剤Bを含有する1〜3のいずれかの組成物。
5.架橋剤Bが、多官能(メタ)アクリル化合物である4の組成物。
6.架橋剤Bを架橋剤A100質量部に対して0.5〜400質量部含む4又は5の組成物。
7.更に溶媒を含む1〜6のいずれかの組成物。
8.1〜7のいずれかの組成物を硬化させて得られる透明導電膜用保護膜。
9.透明導電膜が導電性ナノ構造を有する透明導電膜である8の保護膜。
10.導電性ナノ構造が銀ナノワイヤである9の保護膜。
11.透明導電膜と該透明導電膜上に形成された8の保護膜とを備える透明電極。
12.透明導電膜と該透明導電膜上に形成された8の保護膜とを備える電子デバイス。
13.有機エレクトロルミネッセンスディスプレイである12の電子デバイス。
本発明の透明導電膜用保護膜形成組成物は、下記式(1)で表される繰り返し単位を含むトリアジン環含有ハイパーブランチポリマーを含有する。
R93及びR94は、水素原子又は炭素数1〜10のアルキル基を表す。
W1及びW2は、それぞれ独立に、単結合、−C(R95)(R96)−(R95及びR96は、それぞれ独立に、水素原子又は炭素数1〜10のアルキル基を表し、R95及びR96がともにアルキル基である場合、これらは互いに結合してこれらが結合する炭素原子とともに環を形成してもよい。)、−C(O)−、−O−、−S−、−S(O)−、−S(O)2−又は−N(R97)−(R97は、水素原子又は炭素数1〜10のアルキル基を表す。)を表す。
本発明で用いるトリアジン環含有ハイパーブランチポリマーは、特許文献4に開示された手法によって製造することができる。
例えば、下記スキーム1に示されるように、ハイパーブランチポリマー(20)は、ハロゲン化シアヌル(18)及びm−フェニレンジアミン化合物(19)を適当な有機溶媒中で反応させて得ることができる。
本発明の組成物は、分子量1,000以上の架橋剤Aを含有する。これによって、保護膜の膜密度を高め、高温高湿耐性を向上させることができる。
本発明の組成物には、各種の溶媒を添加し、トリアジン環含有ハイパーブランチポリマーを溶解させて使用することが好ましい。この場合、溶媒は重合時に用いた溶媒と同じものでも別のものでもよい。この溶媒は、ポリマーとの相溶性を損なわなければ特に限定されない。
本発明の組成物には、それぞれの架橋剤に応じた開始剤を配合することもできる。なお、上述のとおり、架橋剤として多官能エポキシ化合物及び/又は多官能(メタ)アクリル化合物を用いる場合、開始剤を使用せずとも光硬化が進行して硬化膜を与えるものであるが、その場合に開始剤を使用しても差し支えない。
本発明の膜形成用組成物は、本発明の効果を損なわない限りにおいて、その他の成分、例えば、レベリング剤、界面活性剤等を含んでもよい。
本発明の透明導電膜用保護膜は、上述した透明導電膜用保護膜形成組成物を透明導電膜に塗布し、必要に応じて加熱して溶媒を蒸発させた後、加熱又は光照射することによって形成することができる。
[1H−NMR]
装置:Varian NMR System 400NB (400MHz)
JEOL−ECA700 (700MHz)
測定溶媒:DMSO-d6
基準物質:テトラメチルシラン(TMS)(δ 0.0ppm)
[GPC]
装置:東ソー(株)製HLC-8200 GPC
カラム:Shodex KF-804l+KF-805l
カラム温度:40℃
溶媒:テトラヒドロフラン(THF)
検出器:UV(254nm)
検量線:標準ポリスチレン
[エリプソメーター]
装置:ジェー・エー・ウーラム・ジャパン(株)製多入射角分光エリプソメーターVASE
[示差熱天秤(TG−DTA)]
装置:(株)リガク製TG-8120
昇温速度:10℃/分
測定温度:25−750℃
[高温高湿試験器]
装置:エスペック(株)製ライトスペック恒温(恒湿)器LHU-113
[HAZE]
装置:日本電色工業(株)製ヘーズメーターNDH5000
[光学顕微鏡]
装置:OLYMPUS(株)製研究用システム顕微鏡BX51
[非接触式シート抵抗測定器]
装置:ナプソン(株)EC-80
[膜密度測定]
装置:Bruker AXS社製多機能薄膜材料評価X線回折装置D8 DISCOVER
合成例1で得られたHB−TmDA40について、TG−DTA測定の結果を図2に示す。5%重量減少は419℃であった。
(2)屈折率測定
合成例1で得られたHB−TmDA40 0.5gを、シクロヘキサノン4.5gに溶解し、薄黄色透明溶液を得た。得られた溶液をガラス基板上にスピンコーターを用いて200rpmで5秒間、2,000rpmで30秒間スピンコートし、150℃で1分、250℃で5分間加熱して溶媒を除去し、膜厚500nmの被膜を得た。得られた被膜の屈折率を測定したところ、550nmにおける屈折率は1.790であった。
合成例1で得られたHB−TmDA40 100gをシクロヘキサノン384.0g、イオン交換水16.0gの混合溶媒に溶解させ、20質量%の溶液(以下、HB−TmDA40V1という。)を調製した。
銀ナノワイヤ分散液50g(ClearOhm、Cambrios Technologies Corporation社製)をイソプロピルアルコール50gで希釈し、導電性インクAを調製した。
調製例2で調製した導電性インクAを、無アルカリガラス基板上にスピンコート法で200rpm、5秒、その後900rpm、30秒で成膜した後に、ホットプレート上で120℃、1分乾燥し、透明導電膜を作製した。
調製例1で調製したHB−TmDA40V1 5.0g、10質量%シクロヘキサノン溶液のA−9300(分子量423、新中村化学工業(株)製)0.5g、60質量%シクロヘキサノン溶液のエトキシ化ペンタエリスリトールテトラアクリレート(ATM−35E、350mPa・s、分子量1,892、新中村化学工業(株)製)0.167g、5質量%シクロヘキサノン溶液の光ラジカル開始剤イルガキュア184(BASF社製)1.6g、1質量%シクロヘキサノン溶液の界面活性剤メガファックR−30−N(DIC(株)製)0.05g、イオン交換水1.35g、及びシクロヘキサノン32.4gを加え、目視で溶解したことを確認して総固形分濃度3質量%のワニス(以下、HB−TmDA40VF1という。)を調製した。
調製例1で調製したHB−TmDA40V1 1.0g、10質量%シクロヘキサノン溶液のM−403[5官能アクリレート(分子量524)と6官能アクリレート(分子量579)との混合物、東亞合成(株)製]0.4g、10質量%シクロヘキサノン溶液のエトキシ化ペンタエリスリトールテトラアクリレート(ATM−35E、350mPa・s、分子量1,892、新中村化学工業(株)製)0.2g、5質量%シクロヘキサノン溶液の光ラジカル開始剤イルガキュア184(BASF社製)0.32g、1質量%シクロヘキサノン溶液の界面活性剤メガファックR−30−N(DIC(株)製)0.01g、イオン交換水0.29g、及びシクロヘキサノン8.47gを加え、目視で溶解したことを確認して総固形分濃度3質量%のワニス(以下、HB−TmDA40VF2という。)を調製した。
調製例1で調製したHB−TmDA40V1 1.0g、60質量%シクロヘキサノン溶液のエトキシ化グリセリントリアクリレート(A−GLY−20E、200mPa・s、分子量1,295、新中村化学工業(株)製)0.033g、60質量%シクロヘキサノン溶液のエトキシ化ペンタエリスリトールテトラアクリレート(ATM−35E、分子量1,892、350mPa・s、新中村化学工業(株)製)0.033g、5質量%シクロヘキサノン溶液の光ラジカル開始剤イルガキュア184(BASF社製)0.32g、1質量%シクロヘキサノン溶液の界面活性剤メガファックR−30−N(DIC(株)製)0.01g、イオン交換水0.37g、及びシクロヘキサノン8.47gを加え、目視で溶解したことを確認して総固形分濃度3質量%のワニス(以下、HB−TmDA40VF3という。)を調製した。
実施例1〜3で調製した各ワニスをソーダライムシリカガラス基板上にスピンコーターを用いて200rpmで5秒、1,000rpmで30秒スピンコートし、オーブンを用いて130℃で3分間の焼成を行った。その後、高圧水銀ランプを用いて、大気下(実施例4及び6)又は窒素雰囲気下(実施例5)で、積算露光量400mJ/cm2で硬化させ、膜厚100nmの硬化膜を得た。得られた膜の屈折率の測定結果を表1に示す。
実施例1〜3で調製した各ワニスをシリコンウエハ基板上にスピンコーターを用いて200rpmで5秒、1,000rpmで30秒スピンコートし、オーブンを用いて130℃で3分の焼成を行った。その後、高圧水銀ランプを用いて、大気下又は窒素雰囲気下で、積算露光量400mJ/cm2で硬化させて、膜厚100nmの硬化膜を得た。これらの硬化膜についてXRR測定を行い、膜密度を算出した。表2に、各実施例において使用したワニス、露光環境、膜密度の測定結果を示す。
調製例3で作製した透明導電膜上に、実施例1〜3で調製した各ワニスを固形分2%になるようにシクロヘキサノンにて希釈し、スピンコーターを用いて200rpmで5秒、1,000rpmで30秒スピンコートし、オーブンを用いて130℃で3分の焼成を行った。その後、高圧水銀ランプを用いて、大気下又は窒素雰囲気下で、積算露光量400mJ/cm2で硬化させて、膜厚50nmの保護膜を形成し、ヘイズ値を測定した(実施例10〜14)。なお、比較例1として調製例3で作製した透明導電膜そのもののヘイズ値を測定した。表3に、各実施例において使用したワニス、露光環境、及び実施例、比較例で測定したヘイズ値の測定結果を示す。
合成例1で得られたHB−TmDA40 100gをシクロペンタノン384.0g、イオン交換水16.0gの混合溶媒に溶解させ、20質量%の溶液(以下、HB−TmDA40VP1という。)を調製した。
調製例4で調製したHB−TmDA40VP1 0.08g、10質量%シクロペンタノン/イオン交換水(96/4)混合溶液のDN0075(3,000〜5,000mPa・s、日本化薬(株)製)0.78g、10質量%シクロペンタノン/イオン交換水(96/4)混合溶液のエトキシ化ペンタエリスリトールテトラアクリレート(ATM−35E、分子量1,892、350mPa・s、新中村化学工業(株)製)0.033g、5質量%シクロヘキサノン溶液の光ラジカル開始剤イルガキュア127(BASF社製)0.06g、1質量%シクロヘキサノン溶液の界面活性剤メガファックR−40(DIC(株)製)0.002g、イオン交換水0.16g、及びシクロヘキサノン3.88gを加え、目視で溶解したことを確認して総固形分濃度2質量%のワニス(以下、HB−TmDA40VPF1という。)を調製した。
実施例15で調製したHB−TmDA40VPF1をソーダライムガラス基板上にスピンコーターを用いて200rpmで5秒、1,500rpmで30秒スピンコートし、オーブンを用いて120℃で3分間の焼成を行った。その後、高圧水銀ランプを用いて、窒素下で、積算露光量400mJ/cm2で硬化させ、膜厚57nmの硬化膜を得た。得られた膜の屈折率は1.5683(波長550nm)であった。
調製例3で作製した透明導電膜上に、実施例15で調製したHB−TmDA40VPF1を、スピンコーターを用いて200rpmで5秒、1,500rpmで30秒スピンコートし、オーブンを用いて120℃で3分の焼成を行った。その後、高圧水銀ランプを用いて、窒素雰囲気下で積算露光量400mJ/cm2で硬化させて、膜厚80nmの保護膜を形成し、ヘイズ値を測定した結果、0.74%であった。
実施例17で得られた試料を槽内温度85℃、相対湿度85%に設定した恒温恒湿試験器中に入れて168、500時間保持した後の、シート抵抗変化を測定した。その結果を表5に示す。なお、表5中0hとは、試料作製直後のシート抵抗を示す。
Claims (13)
- 下記式(1)で表される繰り返し単位構造を含むトリアジン環含有ハイパーブランチポリマー及び分子量1,000以上の架橋剤Aを含有することを特徴とする透明導電膜用保護膜形成組成物。
Arは、式(2)〜(13)で示される基からなる群から選ばれる少なくとも1種の基を表す。
R93及びR94は、水素原子又は炭素数1〜10のアルキル基を表し、
W1及びW2は、それぞれ独立に、単結合、−C(R95)(R96)−(R95及びR96は、それぞれ独立に、水素原子又は炭素数1〜10のアルキル基を表し、R95及びR96がともにアルキル基である場合、これらは互いに結合してこれらが結合する炭素原子とともに環を形成してもよい。)、−C(O)−、−O−、−S−、−S(O)−、−S(O)2−又は−N(R97)−(R97は、水素原子又は炭素数1〜10のアルキル基を表す。)を表し、
X1及びX2は、それぞれ独立に、単結合、炭素数1〜10のアルキレン基又は式(14)で表される基を表す。
Y1及びY2は、それぞれ独立に、単結合又は炭素数1〜10のアルキレン基を表す。)]} - 架橋剤Aが多官能(メタ)アクリル化合物である請求項1記載の組成物。
- 架橋剤Aを前記トリアジン環含有ハイパーブランチポリマー100質量部に対して0.1〜30質量部含む請求項1又は2記載の組成物。
- 更に、分子量1,000未満の架橋剤Bを含有する請求項1〜3のいずれか1項記載の組成物。
- 架橋剤Bが、多官能(メタ)アクリル化合物である請求項4記載の組成物。
- 架橋剤Bを架橋剤A100質量部に対して0.5〜400質量部含む請求項4又は5記載の組成物。
- 更に溶媒を含む請求項1〜6のいずれか1項記載の組成物。
- 請求項1〜7のいずれか1項記載の組成物を硬化させて得られる透明導電膜用保護膜。
- 透明導電膜が導電性ナノ構造を有する透明導電膜である請求項8記載の保護膜。
- 導電性ナノ構造が銀ナノワイヤである請求項9記載の保護膜。
- 透明導電膜と該透明導電膜上に形成された請求項8記載の保護膜とを備える透明電極。
- 透明導電膜と該透明導電膜上に形成された請求項8記載の保護膜とを備える電子デバイス。
- 有機エレクトロルミネッセンスディスプレイである請求項12記載の電子デバイス。
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