JPWO2014106919A1 - Processing control device, laser processing device, and processing control method - Google Patents

Abstract

When the control device that controls the XY table (9) and the galvano scanner moves the machining area (82) on the workpiece to the galvano area, the machining area (82) is set in advance from the movement target coordinates. When the in-position range having a certain distance is entered, coordinated control for positioning the laser beam in the galvano area (82) is started while the XY table (9) is moved without being stopped, and the processing area (82) However, by executing cooperative control until reaching the galvano area and the XY table (9) stops, the cooperative control area in the processing area (82) is laser processed, and the processing area (82) When the XY table (9) is stopped after reaching, the remaining machining area in the machining area (82) with the XY table (9) stopped. It is to laser processing, improve the easy processing efficiency.

Description

  The present invention relates to a processing control device, a laser processing device, and a processing control method used for laser processing of a workpiece.

  As one of apparatuses for processing a workpiece (processing object) such as a printed circuit board, there is a laser processing apparatus (micro laser processing machine) that performs drilling by irradiating the workpiece with laser light. In such a laser processing apparatus, the XY table on which the work is placed is moved and stopped, and then the galvano scanner is scanned to perform laser processing in the galvano area (step method). In this step method, the XY table is moved and stopped, the laser processing is performed in the galvano area, and then the XY table is moved to the next galvano area and stopped. For this reason, the workpiece could not be laser processed while the XY table was moving, and a loss time occurred in the laser processing.

  For this reason, in the laser processing methods described in Patent Documents 1 and 2, by synchronizing the XY table and the galvano scanner, coordinated control is performed to perform laser processing by scanning the galvano scanner while operating the XY table. Yes.

JP 2000-100608 A Japanese Patent Application Laid-Open No. 2011-140057

  However, the above conventional technique has a problem that the algorithm (CAM (Computer Aided Manufacturing) data) for calculating the positioning data on the galvano scanner side is complicated, and it takes a lot of time for development to realize cooperative control. It was.

  The present invention has been made in view of the above, and an object thereof is to obtain a machining control device, a laser machining device, and a machining control method capable of easily performing efficient laser machining.

  In order to solve the above-described problems and achieve the object, the machining control apparatus of the present invention places a workpiece and moves it in an XY plane that is parallel to the main surface of the workpiece. A control unit that controls an XY table and a galvano scanner that positions a laser beam emitted from a laser light source in a galvano area and irradiates the workpiece with the laser beam, and the control unit includes: When performing laser processing on a workpiece, by controlling the XY table, the processing area set on the workpiece is sequentially moved to the galvano area, and by controlling the galvano scanner, The laser beam is positioned with respect to each processing area that has moved onto the galvano area, and the processing area is moved when the processing area is moved to the galvano area. Is within the in-position range having a preset distance from the target coordinate of movement, the first cooperative control for positioning the laser beam in the galvano area while moving the XY table without stopping And the first cooperative control region in the processing area is lasered by executing the first cooperative control until the processing area reaches the galvano area and the XY table stops. When the processing area reaches the galvano area and the XY table stops, the remaining processing area in the processing area is laser processed with the XY table stopped. .

  According to the present invention, it is possible to easily perform efficient laser processing.

FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. FIG. 2 is a block diagram illustrating a configuration of the control device. FIG. 3 is a diagram for explaining the order of the machining areas set on the workpiece. FIG. 4 is a diagram for explaining a processing procedure of the laser processing according to the first embodiment. FIG. 5A is a diagram illustrating the moving speed of the XY table. FIG. 5B is a diagram for explaining the relationship between the distance to the target coordinates of the machining area and the in-position range. FIG. 6A is a diagram illustrating a processing procedure of a conventional laser processing. FIG. 6B is a diagram illustrating a processing procedure of the laser processing according to the first embodiment. FIG. 7 is a diagram illustrating an example of settling characteristics of the XY table. FIG. 8 is a diagram for explaining vibrations when the XY table is stopped. FIG. 9 is a diagram for explaining the relationship between the amplitude and the in-position range when the remaining distance information is stopped. FIG. 10 is a diagram for explaining the processing procedure of the laser processing according to the second embodiment. FIG. 11 is a diagram illustrating a processing procedure of laser processing according to the second embodiment. FIG. 12 is a diagram illustrating a processing procedure of laser processing according to the third embodiment. FIG. 13 is a diagram for explaining the processing procedure of the laser processing according to the fourth embodiment. FIG. 14 is a diagram illustrating the moving speed of the XY table. FIG. 15 is a diagram illustrating a processing procedure of laser processing according to the fourth embodiment.

  Hereinafter, a machining control device, a laser machining device, and a machining control method according to an embodiment of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to these embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram illustrating a configuration of a laser processing apparatus according to the first embodiment. The laser processing apparatus 100 is an apparatus that performs hole processing for forming a through hole of a printed wiring board in a workpiece (workpiece) W described later. The laser processing apparatus 100 according to the present embodiment moves the XY table 9 by a step method, and when the galvano area becomes a desired coordinate (target coordinate) by moving the XY table 9, until the XY table 9 stops. Laser processing is performed by cooperative control. Then, when the XY table 9 stops and the galvano area reaches a desired coordinate, the laser processing apparatus 100 performs laser processing with the XY table 9 stopped.

  The laser processing device 100 includes a control device (processing control device) 200, amplifiers 31x, 31y, 32x, 32y, motors 5x, 5y, an XY table 9, a galvano scanner Gx, Gy, and a laser oscillator (laser light source) 6. .

  The control device 200 includes a galvano controller (laser beam scanning system control unit) 1 that controls the galvano scanners Gx and Gy, and an XY table controller (conveyance system control unit) 2 that controls the XY table 9. The control device 200 controls the XY table 9 and the galvano scanners Gx and Gy so that the desired laser beam irradiation position is irradiated with the laser beam.

  The galvano controller 1 outputs a control signal (galvano control command) for controlling the galvano scanners Gx and Gy to the amplifiers 31x and 31y. The XY table controller 2 outputs a control signal (XY table control command) for controlling the XY table 9 to the amplifiers 32x and 32y.

  The amplifiers 31x and 31y amplify the galvano control commands sent from the galvano controller 1 and send them to the galvano scanners Gx and Gy. The amplifiers 32x and 32y amplify the XY table control commands sent from the XY table controller 2 and send them to the motors 5x and 5y.

  The laser oscillator 6 is a device that outputs laser light (pulse emission) and sends it to the workpiece W, and is controlled by the galvano controller 1. The galvano scanners Gx and Gy position the laser beam emitted from the laser oscillator 6 in the galvano area and irradiate the workpiece W with the laser beam. The galvano scanners Gx and Gy irradiate the laser processing position on the workpiece W with a laser beam via an fθ lens (not shown) by scanning the laser beam. The galvano scanners Gx and Gy have encoders 8x and 8y connected to the galvano controller 1. The encoders 8x and 8y detect the state (galvano position information) of the galvano scanners Gx and G, and send the detected galvano position information to the galvano controller 1.

  The emission timing of the laser beam output from the laser oscillator 6 and the irradiation position of the laser beam by the galvano scanners Gx and Gy are based on the galvano position information from the encoders 8x and 8y so that the laser beam can be irradiated to a desired drilling position. And controlled by the galvano controller 1.

  The motors 5x and 5y move the XY table 9 to a position (X, Y coordinates) according to the XY table control command in the XY plane (in a plane parallel to the main surface of the workpiece W). The XY table 9 carries the workpiece W by placing the workpiece W and moving in the XY plane. The XY table 9 includes a linear scale 7x that detects a position of the XY table 9 in the X direction and a linear scale 7y that detects a position of the XY table 9 in the Y direction. The linear scales 7x and 7y are attached to the XY table 9 in order to detect the position information (coordinates) of the XY table 9 with high accuracy.

  The linear scales 7x and 7y of the present embodiment send the detected position information (XY table position information) in the XY plane of the XY table 9 to the XY table controller 2 and the galvano controller 1. The linear scales 7x and 7y send the XY table position information to the galvano controller 1 directly to the galvano controller 1 without going through the XY table controller 2. This is because the processing cycle of the galvano controller 1 is faster than the processing cycle of the XY table controller 2, so if the position information of the linear scales 7 x and 7 y is transferred to the galvano controller 1 through the XY table controller 2, a delay occurs. This is because cooperative control cannot be performed.

  The XY table controller 2 controls the position of the XY table 9 based on a machining program described later and XY table position information. The XY table controller 2 of the present embodiment controls the XY table 9 to move in a step system in the XY plane. Specifically, the XY table controller 2 sequentially moves the XY table 9 on which the workpiece W is placed to the galvano area, and stops the XY table 9 while performing laser processing in each processing area.

  The galvano controller 1 controls the galvano scanners Gx and Gy (laser light irradiation positions) based on a processing program described later and XY table position information. The galvano controller 1 according to the present embodiment starts scanning the galvano scanners Gx and Gy and starts laser processing in the galvano area before the predetermined time when the XY table 9 starts moving and stops at the next processing position. Start.

  Specifically, when the XY table 9 moves the next machining area of the workpiece W onto the galvano area by the step method, the most advanced part of the next machining area is the target coordinate (the most advanced part of the galvano area). When approaching to a predetermined distance (entering an in-position range described later), cooperative control is started. The cooperative control is control for performing laser processing by synchronizing the XY table 9 and the galvano scanners Gx and Gy to scan the galvano scanners Gx and Gy while the XY table 9 is operated.

  When the XY table 9 moves, the XY table 9 accelerates to a predetermined speed and then decelerates until it stops. For this reason, the timing at which the next processing area approaches the target coordinate to the predetermined distance is the timing at which the speed of the XY table 9 becomes slower than the predetermined speed. Therefore, when the XY table 9 moves the next machining position on the workpiece W to the galvano area by the step method, the cooperative control is performed at a timing (before the stop) when the speed of the XY table 9 becomes slower than the predetermined speed. Will be started.

  As described above, in the present embodiment, the XY table controller 2 moves the XY table 9 by the step method, and the galvano controller 1 stops the XY table 9 (work W) at the next processing position (galvano area). Prior to this, cooperative control between the galvano scanners Gx and Gy and the XY table 9 is performed. Thereby, cooperative control is performed only at a predetermined timing during which the XY table 9 is moving (a predetermined period immediately before the XY table 9 stops).

  FIG. 2 is a block diagram illustrating a configuration of the control device. The control device 200 includes a galvano controller 1, an XY table controller 2, a machining program storage unit 3, and a machining instruction unit 4. Here, the galvano controller 1 and the XY table controller 2 correspond to the control unit described in the claims.

  The machining program storage unit 3 is a memory or the like that stores a machining program used for laser machining of the workpiece W. The machining program is configured to include a machining program for an XY table that includes a workpiece position command that designates the position of the XY table 9, a machining position command that designates a laser machining position to the galvano scanner, and the like. It consists of two programs: a processing program for the galvano scanner. The machining instruction unit 4 sends a machining position command to the galvano controller 1 according to two machining programs, and sends a workpiece position command to the XY table controller 2.

  The XY table controller 2 includes an XY table position information input unit 21 and a table control unit 22. The XY table position information input unit 21 inputs the XY table position information sent from the linear scales 7 x and 7 y and sends it to the table control unit 22. The table control unit 22 controls the position of the XY table 9 based on the workpiece position command and the XY table position information sent from the processing instruction unit 4.

  The galvano controller 1 has an XY table position information input unit 11 and a galvano scanner control unit 12. The XY table position information input unit 11 inputs the XY table position information sent from the linear scales 7x and 7y and sends it to the galvano scanner control unit 12. The galvano scanner control unit 12 controls the galvano scanners Gx and Gy (laser beam irradiation position) based on the processing position command and the XY table position information sent from the processing instruction unit 4.

  The control device 200 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. And CPU performs laser processing control of the workpiece | work W using the processing program which is a computer program.

  Here, the relationship between the coordinates of the XY table 9 in coordinated control and the coordinates of the galvano scanners Gx and Gy will be described. In normal step processing, the processing area is positioned at a position where the center of the processing area is irradiated with the laser beam when the coordinates (Gx, Gy) = (0, 0) of the galvano scanner Gx, Gy. The position of this processing area (position of the XY table 9) is (Tx0, Ty0) = (0, 0).

  On the other hand, in the case of cooperative control, the XY table 9 is positioned with (Tx, Ty) = (0, 0) as a target. For example, when the XY table is moving in the X + direction, (Tx, Ty ) = (− 1.0, 0) is the in-position range. At this time, if an attempt is made to irradiate the center of the processing area with laser light, the coordinates of the galvano scanner Gx, Gy must be (Gx, Gy) = (− 1.0, 0). That is, by moving the galvano scanner Gx, Gy the difference distance between the current coordinates (Tx, Ty) at the time of step feed of the XY table 9 and the target coordinates (Tx0, Ty0), the amount of deviation of the XY table 9 from the target coordinates is obtained. Can be offset.

  Further, by controlling the galvano scanners Gx and Gy in this way, the time required for laser light irradiation (several microseconds to several tens of microseconds) is also operated while the galvano scanners Gx and Gy are linked to the XY table 9. As a result, it is possible to prevent the laser processing hole from becoming an ellipse or from being displaced. As a method for synchronizing the XY table 9 and the galvano scanners Gx and Gy, the method described in Patent Document 1 can be used.

  Next, the machining order of each machining area set on the workpiece W will be described. The processing order of each processing area is set in advance in the processing program for the galvano scanner. FIG. 3 is a diagram for explaining the machining order of the machining areas set on the workpiece.

  In the present embodiment, by setting a plurality of machining areas on the workpiece W, the area on the workpiece W is divided by the plurality of machining areas. FIG. 3 shows a top view of the workpiece W when the region on the workpiece W is divided by a lattice-shaped processing area arranged in the X-axis direction and the Y-axis direction. Here, the size of the processing areas 10-1, 10-2, 10-N (N is a natural number) corresponds to the size of the galvano area.

  When performing laser processing on the workpiece W, the XY table 9 moves in the XY plane so that each processing area becomes a galvano area in order. For example, after laser processing is performed in the processing area 10-1, the XY table 9 moves so that the processing area 10-2 becomes a galvano area. Then, after laser processing is performed in the processing area 10-2, the XY table 9 moves so that the next processing area 10-3 becomes a galvano area. When performing laser processing on the workpiece W, processing for moving the galvano area to the processing area and laser processing in the processing area are repeated.

  Next, a processing procedure of laser processing according to the first embodiment will be described. FIG. 4 is a diagram for explaining a processing procedure of the laser processing according to the first embodiment. Here, a case where laser processing is performed in the order of the processing area 10-1 to the processing area 10-6 will be described.

  After laser processing is performed in the processing area 10-1, the XY table 9 moves so that the processing area 10-2 becomes a galvano area. When the XY table 9 starts moving, the XY table 9 starts to accelerate. When the XY table 9 reaches a predetermined speed, the acceleration of the XY table 9 is completed, and the XY table 9 continues to move at the predetermined speed. When the XY table 9 is stopped, the XY table 9 starts to decelerate. When the speed of the XY table 9 becomes 0, the XY table 9 stops.

  In the present embodiment, after the XY table 9 starts decelerating, the control device 200 starts cooperative control when the processing area approaches the target coordinates to a predetermined distance. In other words, when the difference in distance between the machining area and the target coordinates (distance to the target coordinates) becomes equal to or less than a predetermined value, the control device 200 starts cooperative control. As described above, when the processing area enters the in-position range having a predetermined distance from the target coordinates, the cooperative control is started.

  Until the XY table 9 is stopped, the control device 200 performs cooperative control between the galvano scanners Gx and Gy and the XY table 9. In other words, within the in-position range, cooperative control is performed until the XY table 9 stops. The in-position range is set based on, for example, the moving speed of the XY table 9 or the positioning speed by the galvano scanner Gx, Gy.

  A region where cooperative control is performed (cooperative control region) is a partial region within the machining area. For example, the tip part in the movement direction in the processing area is set as the cooperative control area. In FIG. 4, each cooperative control area | region of process area 10-2 to 10-6 is shown by cooperative control area 40-2 to 40-6.

  For example, after the entire area of the processing area 10-1 is laser processed, the XY table 9 starts to move so that the processing area 10-2 becomes a galvano area. When the processing area 10-2 enters the in-position range, the cooperative control area 40-2 in the processing area 10-2 is laser processed by cooperative control until the XY table 9 stops. Then, after the XY table 9 is stopped, a region other than the cooperative control region 40-2 in the processing area 10-2 is laser processed in a state where the XY table 9 is stopped.

  Then, after the entire area of the processing area 10-2 is laser processed, the XY table 9 starts moving so that the processing area 10-3 becomes a galvano area. Thereafter, the processing areas 10-3 to 10-6 are sequentially laser processed by the same processing as the processing area 10-2. Note that the in-position range and the cooperative control region do not have to be the same region, and the cooperative control region may be any region.

  FIG. 5A is a diagram illustrating the moving speed of the XY table, and FIG. 5B is a diagram for explaining the relationship between the distance to the target coordinates of the machining area and the in-position range. The horizontal axis in FIG. 5A is time, and the vertical axis is the moving speed of the XY table 9. As shown in FIG. 5A, the XY table 9 accelerates for a predetermined time when the movement starts. As a result, the XY table 9 reaches a predetermined speed. When the processing area approaches the target coordinates, the XY table 9 starts to decelerate. Thereby, the XY table 9 stops the processing area at the target coordinates.

  In the present embodiment, after the XY table 9 becomes slower than the predetermined speed, until the XY table 9 stops (while the machining area is within the in-position range) (time range 71), Control is performed.

  In FIG. 5B, the remaining distance 51A indicating the distance to the target coordinates of the processing area, the in-position information 52A indicating whether or not the in-position is being performed, and the irradiation timing information 53A indicating the timing of irradiating the laser beam. , Shows. The remaining distance 51A corresponds to the current position of the processing area.

  As the XY table 9 moves, the remaining distance 51A becomes a small value, and the remaining distance 51A becomes 0 when the XY table 9 stops. In the process of decreasing the remaining distance 51A, when the remaining distance 51A decreases to a predetermined value, the machining area enters the in-position range. The in-position range is a range in which cooperative control is performed, and is, for example, a range of ± 1 mm from the target coordinates in the X direction and the Y direction.

  When the machining area enters the in-position range, the in-position information 52A is in a state (High) indicating that the in-position is being performed. When the in-position information 52A is in the in-position state, laser processing may be performed, so laser processing by cooperative control is started. When laser processing is started, as shown in the irradiation timing information 53A, the laser beam is irradiated onto the workpiece W at a predetermined timing. In this case, the galvano controller 1 controls the galvano scanners Gx and Gy on the assumption that the XY table 9 is stopped at the target position.

  For example, it is assumed that the maximum moving speed of the XY table 9 is 50 m / min and the acceleration / deceleration time of the XY table 9 is 100 msec (trapezoidal acceleration / deceleration). Further, it is assumed that the processing area is 50 mm square and the in-position range is ± 1 mm. In this case, in order to move the galvano area from the processing area to the next processing area, the XY table 9 needs to be moved by 50 mm. And the moving time of 50 mm is 0.2 sec. This is because the XY table 9 does not reach the maximum speed with a movement of 50 mm, and has a triangular waveform with the apex at 500 mm / sec.

  In this case, when the XY table 9 stops, the time from when the remaining distance 51A enters the in-position range until it stops is 0.02 sec. Therefore, if the in-position range is set to ± 1 mm and the laser processing is started by operating the galvano scanners Gx and Gy immediately after entering the range, the processing time is shortened by 0.02 sec per processing area.

  FIG. 6A is a diagram illustrating a processing procedure of conventional laser processing, and FIG. 6-2 is a diagram illustrating a processing procedure of laser processing according to the first embodiment. 6A and 6B are cross-sectional views of the workpiece W.

  As shown in FIG. 6A, when the machining area 82 on the workpiece W is outside the galvano area 81 (S1), laser machining is not performed. Thereafter, even when the machining area 82 on the workpiece W enters the galvano area 81 (S2), the laser machining is not performed until the entire machining area 82 enters the galvano area 81. When all of the processing area 82 enters the galvano area 81 (S3), laser processing is started with the processing area 82 stopped.

  As shown in FIG. 6B, in the present embodiment, when the processing area 82 on the workpiece W is outside the galvano area 81 (S11), laser processing is not performed. Thereafter, even when the machining area 82 on the workpiece W enters the galvano area 81 (S12), laser machining is not performed until the machining area 82 enters the in-position range 83A.

  When the machining area 82 enters the in-position range 83A (S13), the control device 200 starts cooperative control of laser machining while the machining area 82 is moving. For example, when the XY table 9 moves close to the target coordinates (for example, 1 mm before), galvano processing using cooperative control is started. The cooperative control of laser processing is performed on the cooperative control region 84A. The machining area 82 here corresponds to the machining areas 10-1 to 10-6 shown in FIG. 4 and the like, and the cooperative control area 84A corresponds to the cooperative control areas 40-2 to 40-6 shown in FIG. It corresponds. For example, as shown in FIG. 6B, the galvano processing on the cooperative control region 84A is performed from the traveling direction of the XY table 9.

  After starting cooperative control of laser processing, when the entire processing area 82 enters the galvano area 81 (S14), the control device 200 continues laser processing with the processing area 82 stopped. At this time, since the laser processing has already been completed in the cooperative control region 84A, the control device 200 performs laser processing on a processing area other than the cooperative control region 84A. Thereby, the laser processing time can be shortened as compared with the conventional case by the processing time of the cooperative control region 84A.

  Regardless of whether the XY table 9 is moving or stopped, the control device 200 determines the current position of the XY table 9 and the error of the positioning position of the XY table 9 as galvano target coordinates. And is irradiated with a laser beam.

  The in-position range is not limited to ± 1 mm, and may be a range narrower than ± 1 mm or a range wider than ± 1 mm. When the length of the galvano area in the X direction is x, a distance shorter than x / 2 is set in the in-position range in the X direction. Similarly, when the length of the galvano area in the Y direction is y, a distance shorter than y / 2 is set in the in-position range in the Y direction.

  Incidentally, the actual settling characteristic of the XY table 9 may be, for example, a characteristic as shown in FIG. FIG. 7 is a diagram illustrating an example of settling characteristics of the XY table. FIG. 7 shows the remaining distance 51B, the in-position information 52B, and the irradiation timing information 53B when the in-position range is ± 5 μm.

  The XY table 9 is very heavy, for example, with a mass of 300 kg to 500 kg, and cannot be stopped suddenly. For this reason, the XY table 9 is gradually reduced in speed and stopped as indicated by the remaining distance 51B. As a result, if the machining area enters the in-position range when the speed is reduced at a constant rate, and if the machining area enters the in-position range when the speed is gradually reduced and stopped, the in-position range is entered. There is a difference in the time required to complete the process. This time difference is a settling delay time, for example, 300 μsec.

  Even after the machining area enters the in-position range, the XY table 9 gradually decreases in speed and stops. For this reason, the time from when the machining area enters the in-position range until the XY table 9 stops has a time difference between when the speed is decreased at a constant rate and when the speed is gradually decreased. For example, when the speed is gradually decreased, it takes 0.05 sec until the XY table 9 stops after the machining area enters the in-position range.

  Therefore, there is a difference of 0.05 sec between the case where laser processing is started after the XY table 9 is stopped and the case where laser processing is started after the processing area enters the in-position range. For this reason, by using the laser processing method of the present embodiment, it is possible to shorten the processing time of 0.05 sec per processing area.

  When the machining area enters the in-position range, the in-position information 52B is in a state (for example, High) indicating that the in-position is being performed. When the in-position information 52B is in the in-position state, laser processing may be performed, so laser processing by cooperative control is started. When laser processing is started, as shown in the irradiation timing information 53B, the laser beam is irradiated onto the workpiece W at a predetermined timing.

  The XY table 9 may vibrate when it stops when the backlash of the ball screw of the XY table 9 increases or the floor rigidity is low. FIG. 8 is a diagram for explaining vibrations when the XY table is stopped. FIG. 8 shows the remaining distance 51C, in-position information 52C, and irradiation timing information 53C when the XY table 9 vibrates when stopped.

  When the XY table 9 vibrates when stopped, the XY table 9 operates to repeat the amplitude such that the machining area once enters the in-position range and then goes out of the in-position range.

  In such a case, unless coordinated control of the vibration of the XY table 9 and the timing of irradiating the laser light is performed, the laser light is irradiated ignoring the vibration of the XY table 9, so that the position of the laser light is positioned Deviation may occur.

  When the in-position range is set to a range (for example, ± 5 μm) smaller than the amplitude (vibration width of the XY table 9) when the remaining distance 51C is stopped, the in-position information 52C is high when the XY table 9 is stopped. And Low are repeated.

  Specifically, when the processing area enters the in-position range, the in-position information 52C once indicates High, and when the processing area goes out of the in-position range, the in-position information 52C indicates Low.

  When the in-position information 52C becomes High, laser processing may be performed, so that laser processing by cooperative control is started, and when the in-position information 52C becomes Low, the laser processing is not performed. Therefore, laser processing is stopped. When laser processing is started, as shown in the irradiation timing information 53C, the laser beam is irradiated onto the workpiece W at a predetermined timing, but the processing area exceeds the in-position range at the timing of laser beam irradiation. In some cases, the laser beam irradiation position may be displaced.

  Therefore, in the present embodiment, when the XY table 9 vibrates when stopped, the in-position range is set to a range (for example, ± 1 mm) larger than the amplitude when the remaining distance 51C is stopped. , Perform cooperative control within the in-position range.

  FIG. 9 is a diagram for explaining the relationship between the amplitude and the in-position range when the remaining distance information is stopped. FIG. 9 shows the remaining distance 51D, the in-position information 52D, and the irradiation timing information 53D when the in-position range is set to a range larger than the amplitude when the remaining distance 51D is stopped. Here, the remaining distance 51D is the same as the remaining distance 51C shown in FIG.

  By setting the in-position range to a range larger than the amplitude at the time of stopping of the remaining distance 51D, even if the XY table 9 vibrates at the time of stopping, the in-position is once after the machining area has entered the in-position range. It can be prevented from going out of range. Even when the XY table 9 vibrates, the galvano scanners Gx and Gy are positioned in consideration of the table coordinates of the XY table 9, so that the vibration of the XY table 9 can be canceled from the processing position accuracy.

  When the processing area enters the in-position range, the in-position information 52D becomes High. When the in-position information 52D becomes High, laser processing may be performed, so laser processing by cooperative control is started. When laser processing is started, as shown in the irradiation timing information 53D, the workpiece W is irradiated with laser light at a predetermined timing.

  The in-position range may be set to a different range in the X direction and the Y direction. The in-position range may be set based on the moving distance of the XY table 9 when moving the machining area, the deceleration when the XY table 9 stops, or the like.

  The timing for performing the cooperative control may be set based on the moving speed of the XY table 9. For example, the control device 200 performs cooperative control when the moving speed of the XY table 9 is a predetermined value or less. Moreover, you may set the timing which performs cooperative control based on the shape (roundness etc.) of the hole formed on the workpiece | work W. FIG.

  As described above, according to the first embodiment, the laser processing apparatus 100 incorporates the elements of the cooperative control while being based on the step method. Therefore, it is possible to easily realize cooperative control without complicating the algorithm of CAM data. Further, since the cooperative control is adopted, the machining cycle time can be reduced. Therefore, efficient laser processing can be easily performed. Further, since the in-position range is set to a range larger than the amplitude when the remaining distance 51D is stopped, the machining position accuracy can be improved.

  In addition, since the tip in the moving direction of the processing area is used as a cooperative control area, the laser beam irradiation position can be efficiently positioned with respect to the remaining processing area after laser processing using cooperative control. It becomes.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the rear end portion in the movement direction in the processing area is used as a cooperative control region, and laser processing is performed by the same processing procedure as in the first embodiment.

  FIG. 10 is a diagram for explaining the processing procedure of the laser processing according to the second embodiment. Here, a case where laser processing is performed in the order of the processing area 10-1 to the processing area 10-6 will be described. In the present embodiment, the laser processing apparatus 100 performs the movement process and the cooperative control process of the XY table 9 as in the case of the first embodiment.

  The cooperative control region of the present embodiment is a rear end portion in the movement direction in the processing area. In FIG. 10, each cooperative control area | region of process area 10-2 to 10-6 is shown by cooperative control area | region 41-2 to 41-6.

  For example, after the entire area of the processing area 10-1 is laser processed, the XY table 9 starts to move so that the processing area 10-2 becomes a galvano area. When the processing area 10-2 enters the in-position range, the cooperative control area 41-2 in the processing area 10-2 is laser processed by cooperative control until the XY table 9 stops. Then, after the XY table 9 is stopped, a region other than the cooperative control region 41-2 in the processing area 10-2 is laser processed in a state where the XY table 9 is stopped. Then, after all areas of the processing area 10-2 are laser processed, the processing areas 10-3 to 10-6 are sequentially laser processed.

  FIG. 11 is a diagram illustrating a processing procedure of laser processing according to the second embodiment. FIG. 11 shows a cross-sectional view of the workpiece W. The processes (S21) to (S22) shown in FIG. 11 are the same as the processes (S11) to (S12) described in FIG. 6-2 of the first embodiment. That is, when the machining area 82 on the workpiece W is outside the galvano area 81 (S21), laser machining is not performed. Thereafter, even when the machining area 82 on the workpiece W enters the galvano area 81 (S22), laser machining is not performed until the machining area 82 enters the in-position range 83B.

  When the machining area 82 enters the in-position range 83B (S23), the control device 200 starts cooperative control of laser machining while the machining area 82 is moving. The cooperative control of laser processing is performed on the cooperative control region 84B (S24). The cooperative control area 84B here corresponds to the cooperative control areas 41-2 to 41-6 shown in FIG.

  After starting the cooperative control of the laser processing, when the entire processing area 82 enters the galvano area 81 (S25), the control device 200 continues the laser processing with the XY table 9 stopped. At this time, since the laser processing has already been completed in the cooperative control region 84B, the control device 200 performs laser processing on a processing area other than the cooperative control region 84B. As a result, the laser processing time can be shortened by a time corresponding to the processing time of the cooperative control region 84B.

  As described above, according to the second embodiment, the laser processing apparatus 100 incorporates the elements of the cooperative control while being based on the step method, so that the cooperative control is easily realized as in the first embodiment. It becomes possible. Further, since the cooperative control is adopted, the machining cycle time can be reduced.

  In addition, since the rear end portion in the movement direction in the processing area is used as a cooperative control region, the laser beam irradiation position can be efficiently positioned with respect to the remaining processing region after laser processing using cooperative control. It becomes possible.

Embodiment 3 FIG.
Next, Embodiment 3 of the present invention will be described with reference to FIG. In Embodiment 3, laser processing using cooperative control is started when the processing area enters the galvano area. Then, after the laser processing to the cooperative control region is completed, the laser processing is temporarily stopped, and after the movement of the XY table 9 is completed, laser processing outside the cooperative control region is performed.

  FIG. 12 is a diagram illustrating a processing procedure of laser processing according to the third embodiment. In FIG. 12, a cross-sectional view of the workpiece W is shown. The process (S31) illustrated in FIG. 12 is the same process as the process (S11) described in FIG. 6-2 of the first embodiment. That is, when the machining area 82 on the workpiece W is outside the galvano area 81 (S31), laser machining is not performed.

  Thereafter, when the machining area 82 on the workpiece W enters the galvano area 81, the control device 200 starts cooperative control of laser machining while the machining area 82 is moving. The cooperative control of laser processing is performed on the cooperative control region 84C at the tip end in the moving direction in the processing area 82 (S32). The cooperative control area 84C here corresponds to the cooperative control areas 40-2 to 40-6 shown in FIG.

  The control device 200 stops the laser processing when the laser processing on the cooperative control region 84C is completed. In this case, the XY table 9 continues the process of moving the machining area 82 to the galvano area 81 even after the laser machining to the cooperative control area 84C is completed (S33).

  When the movement of the XY table 9 is completed and the entire processing area 82 enters the galvano area 81 (S34), the control device 200 restarts the laser processing with the XY table 9 stopped. At this time, since the laser processing has already been completed in the cooperative control region 84C, the control device 200 performs laser processing on a processing area other than the cooperative control region 84C. As a result, the laser processing time can be shortened by a time corresponding to the processing time of the cooperative control region 84C.

  As described above, according to the third embodiment, the laser processing apparatus 100 incorporates the elements of the cooperative control while being based on the step method, so that the cooperative control is easily realized as in the first embodiment. It becomes possible. Further, since the cooperative control is adopted, the machining cycle time can be reduced.

  In addition, since the tip in the moving direction of the processing area is used as a cooperative control area, the laser beam irradiation position can be efficiently positioned with respect to the remaining processing area after laser processing using cooperative control. It becomes.

Embodiment 4 FIG.
Next, a fourth embodiment of the present invention will be described with reference to FIGS. In the fourth embodiment, both the cooperative control described in the second embodiment and the cooperative control described in the third embodiment are performed. That is, when the processing area enters the galvano area, laser processing using cooperative control is started. Then, after the laser processing to the cooperative control region is completed, the laser processing is temporarily stopped, and when the processing area enters the in-position range, the laser processing using the cooperative control is started again. Then, after the movement of the XY table 9 is completed, laser processing outside the cooperative control area is performed.

  Next, a processing procedure of laser processing according to the fourth embodiment will be described. FIG. 13 is a diagram for explaining the processing procedure of the laser processing according to the fourth embodiment. Here, a case where laser processing is performed in the order of the processing area 10-1 to the processing area 10-6 will be described.

  The cooperative control area of the present embodiment is a front end portion and a rear end portion in the movement direction in the processing area. In FIG. 13, the cooperative control areas of the processing areas 10-2 to 10-6 are indicated by the cooperative control areas 40-2 to 40-6 and 41-2 to 41-6.

  For example, after the entire area of the processing area 10-1 is laser processed, the XY table 9 starts to move so that the processing area 10-2 becomes a galvano area. When a part of the processing area 10-2 enters the galvano area, the cooperative control region 41-2 in the processing area 10-2 is laser processed by cooperative control. The control device 200 stops the laser processing after the laser processing on the cooperative control region 41-2 is completed.

  Then, after the XY table 9 starts decelerating, the control device 200 resumes cooperative control when the machining area 10-2 enters the in-position range. Thereby, the laser processing to the cooperative control area 40-2 is performed until the XY table 9 stops.

  Thus, in the processing area 10-2, laser processing using cooperative control is performed on the cooperative control regions 40-1 and 40-2. Then, after the XY table 9 is stopped, the regions other than the cooperative control regions 40-1 and 40-2 in the processing area 10-2 are laser processed with the XY table 9 stopped.

  After all areas of the processing area 10-2 are laser processed, the XY table 9 starts moving so that the processing area 10-3 becomes a galvano area. Thereafter, the processing areas 10-3 to 10-6 are sequentially laser processed by the same processing as the processing area 10-2.

  FIG. 14 is a diagram illustrating the moving speed of the XY table. The horizontal axis in FIG. 14 is time, and the vertical axis is the moving speed of the XY table 9. In the present embodiment, cooperative control is performed during the period from when the XY table 9 starts moving until it becomes faster than the predetermined speed (time range 72). Further, after the XY table 9 becomes slower than the predetermined speed, the cooperative control is performed until the XY table 9 stops (time range 71).

  FIG. 15 is a diagram illustrating a processing procedure of laser processing according to the fourth embodiment. FIG. 15 shows a cross-sectional view of the workpiece W. The processes (S41) to (S43) shown in FIG. 15 are the same as the processes (S31) to (S33) described in FIG. 12 of the third embodiment. Further, the processes (S44) to (S46) shown in FIG. 15 are the same as the processes (S23) to (S25) described in FIG. 11 of the second embodiment.

  That is, when the machining area 82 on the workpiece W is outside the galvano area 81 (S41), laser machining is not performed. Thereafter, when the machining area 82 on the workpiece W enters the galvano area 81, the control device 200 starts cooperative control of laser machining while the machining area 82 is moving. The cooperative control of laser processing is performed on the cooperative control region 84C (S42).

  The control device 200 stops the laser processing when the laser processing on the cooperative control region 84C is completed. In this case, the XY table 9 continues the process of moving the machining area 82 to the galvano area 81 even after the laser machining to the cooperative control area 84C is completed (S43).

  When the processing area 82 enters the in-position range 83B (S44), the control device 200 resumes cooperative control of laser processing while the processing area 82 is moving. The cooperative control of laser processing is performed on the cooperative control region 84B (S45).

  After starting the cooperative control of laser processing, when the entire processing area 82 enters the galvano area 81 (S46), the control device 200 continues the laser processing with the XY table 9 stopped. At this time, since the laser processing has already been completed in the cooperative control areas 84B and 84C, the control device 200 causes the processing areas other than the cooperative control areas 84B and 84C to perform laser processing. Thereby, the laser processing time can be shortened as compared with the conventional case by the processing time of the cooperative control regions 84B and 84C.

  As described above, according to the fifth embodiment, since the laser processing apparatus 100 incorporates the elements of the cooperative control based on the step method, the cooperative control can be easily realized as in the first embodiment. It becomes possible. Further, since the cooperative control is adopted, the machining cycle time can be reduced.

  In addition, since the tip and rear ends in the movement direction of the processing area are used as cooperative control areas, after laser processing using cooperative control, the laser beam irradiation position is efficiently positioned with respect to the remaining processing areas. It becomes possible to do.

  Note that laser processing may be performed by combining the processes described in Embodiments 1 to 4. For example, the processing described in FIGS. 7 and 9 of the first embodiment may be applied to the second to fourth embodiments.

  As described above, the machining control device, the laser machining device, and the machining control method according to the present invention are suitable for laser machining of a workpiece.

  DESCRIPTION OF SYMBOLS 1 Galvano controller, 2 XY table controller, 6 Laser oscillator, 9 XY table, 10-1 to 10-N, 82 Processing area, 12 Galvano scanner control part, 22 Table control part, 40-2 to 40-6, 41- 1-41-6 cooperative control area, 81 galvano area, 83A, 83B in-position range, 84A-84C cooperative control area, 100 laser processing apparatus, 200 control apparatus, W work.

Claims (8)

An XY table that is placed on a workpiece and moves in an XY plane that is parallel to the main surface of the workpiece, and a laser beam emitted from a laser light source is positioned in a galvano area to position the workpiece. A galvano scanner for irradiating a workpiece with laser light, and a control unit for controlling
The controller is
When performing laser processing on the workpiece, the processing area set on the workpiece is sequentially moved to the galvano area by controlling the XY table, and the galvano scanner is controlled. By positioning the laser beam with respect to each processing area that has moved on the galvano area,
When moving the machining area to the galvano area, if the machining area enters an in-position range having a preset distance from the target coordinate of movement, the XY table is moved without stopping. The first cooperative control for positioning the laser beam in the galvano area is started, and the first cooperative control is executed until the processing area reaches the galvano area and the XY table stops. By performing laser processing on the first cooperative control area in the processing area,
When the processing area reaches the galvano area and the XY table stops, the processing control device performs laser processing on the remaining processing area in the processing area with the XY table stopped. .   The processing control apparatus according to claim 1, wherein the in-position range is set based on a vibration width when the XY table is stopped.   When the processing area enters the galvano area, the second coordinated control region is started by laser processing the second coordinated control area to start positioning the laser beam in the galvano area while moving the XY table without stopping. When the laser processing of the second cooperative control region is completed, the laser processing is stopped, and when the processing region enters the in-position range, the first cooperative control is executed to execute the first cooperative control in the processing area. The processing control apparatus according to claim 1, wherein the first cooperative control region is laser processed.   The processing control apparatus according to claim 1, wherein the first cooperative control region is a tip portion in a moving direction in the processing area.   The processing control apparatus according to claim 1, wherein the first cooperative control region is a rear end portion in a moving direction in the processing area.   The first cooperative control region is a leading end portion in the moving direction in the processing area, and the second cooperative control region is a trailing end portion in the moving direction in the processing area. The processing control apparatus according to claim 3. An XY table that places a workpiece and moves in an XY plane that is parallel to the main surface of the workpiece;
A galvano scanner that positions laser light emitted from a laser light source in a galvano area and irradiates the workpiece with laser light;
A control unit for controlling the XY table and the galvano scanner;
With
The controller is
When performing laser processing on the workpiece, the processing area set on the workpiece is sequentially moved to the galvano area by controlling the XY table, and the galvano scanner is controlled. By positioning the laser beam with respect to each processing area that has moved on the galvano area,
When moving the machining area to the galvano area, if the machining area enters an in-position range having a preset distance from the target coordinate of movement, the XY table is moved without stopping. By starting cooperative control for positioning the laser beam in the galvano area, and executing the cooperative control until the processing area reaches the galvano area and the XY table stops, the processing area Laser processing of the cooperative control area inside,
When the processing area reaches the galvano area and the XY table stops, the remaining processing area in the processing area is laser processed with the XY table stopped. . An XY table that is placed on a workpiece and moves in an XY plane that is parallel to the main surface of the workpiece, and a laser beam emitted from a laser light source is positioned in a galvano area to position the workpiece. When performing laser processing on the workpiece with respect to a galvano scanner that irradiates the workpiece with laser light, the processing area set on the workpiece is controlled by controlling the XY table. Including sequentially controlling the galvano area and controlling the galvano scanner to position the laser beam with respect to each processing area that has moved onto the galvano area,
The control step includes
When moving the machining area to the galvano area, if the machining area enters an in-position range having a preset distance from the target coordinate of movement, the XY table is moved without stopping. By starting cooperative control for positioning the laser beam in the galvano area, and executing the cooperative control until the processing area reaches the galvano area and the XY table stops, the processing area Laser processing of the cooperative control area inside,
When the processing area reaches the galvano area and the XY table stops, the remaining processing area in the processing area is laser processed with the XY table stopped. .

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