JP6035461B1 - Laser processing method and laser processing apparatus - Google Patents

Abstract

A laser processing method capable of processing at high speed and high quality by scanning laser light at a required speed and at a constant speed is provided. Using a scanning range of laser light by a galvano scanner, the trajectory and velocity are generated so that the influence of inertia can be suppressed when the work set table is moved, and the total movement length is minimized. For each required section of the track, compare the differential value of the speed with the operation limit value of the acceleration / deceleration that is the standard for determining whether it is possible, and move the work set table at the generated speed in the acceptable section The laser beam is scanned while the laser beam is scanned. At the start point of the no category, the laser beam emission is stopped to stop processing, and in this state, the work set table is moved at the required speed, and the category determined to be acceptable. The process of continuing the process by the scanning of a laser beam from the location where the process was stopped is provided. [Selection] Figure 3

Description

  The present invention relates to a laser processing method and a laser processing apparatus. More specifically, in laser processing that scans the condensing unit by relative and physical movement of the laser beam emitting unit and the workpiece, by scanning the workpiece with the laser beam at a required speed and at a constant speed. , High speed and high quality processing.

  Laser processing equipment that condenses and cuts workpieces by condensing laser light into fine spots and scanning the condensing part with respect to the workpiece (processing object) has various materials. Used in the processing of articles made of

  As a method for scanning and processing a laser beam two-dimensionally with respect to the workpiece, first, scanning is performed by moving the laser beam emitting portion and the workpiece relatively and physically (mechanically). There is something to process. This method includes fixing the laser light emitting part side and moving the work side, conversely fixing the work side and moving the laser light emitting part side, or the laser light emitting part side and the work side. Some move both.

  As another method, there is a method in which laser light emitted from a laser light emitting portion fixed at a required position is optically controlled using a galvano scanner, a polygon mirror, or the like, scanned, and processed. Further, a combination of physical movement on the laser beam emitting part side or workpiece side and optical scanning of the laser beam has been proposed.

  Each of the above methods has its own characteristics, and is appropriately selected according to the required ability and functionality and adopted in the laser processing apparatus. In particular, those equipped with a function for processing by moving the laser beam emitting part and the workpiece relatively and physically can condense the laser beam into a fine spot using a short focal length lens. Therefore, it is advantageous in that high quality processing can be performed in a wide range. As an example of such a laser processing apparatus, there is a laser processing machine described in Patent Document 1.

  The laser processing machine described in Patent Document 1 scans a laser beam only with a scanner mirror while the galvano scanner body is stationary at a specified position when the galvano scanner moves horizontally in the front-rear or left-right direction. In addition to the method to be performed, laser processing can be performed without dividing the entire moving range by controlling the scanner mirror while the galvano scanner body is self-propelled (moved), expanding the processing capability of the galvano scanner. It is to do.

JP 2011-240403 A

However, the conventional laser beam machine has the following problems.
That is, the laser processing machine has a configuration in which the relative and physical movement between the galvano scanner serving as the laser light emitting unit and the workpiece is combined with the optical scanning of the laser light by the galvano scanner. The former moves the galvano scanner in the X and Y directions, that is, in the two-dimensional direction. Particularly, a portion where the amount of laser beam scanning is large is scanned by this relative and physical movement. ing.

  In laser processing, especially when processing workpieces by scanning laser light two-dimensionally, in order to perform higher-quality processing, such as enabling the swell of melt in the processed part to be averaged. It is known that it is preferable to scan the condensing part of the laser light at a required constant speed (constant speed).

  However, when the galvano scanner moves in a large amount of movement, as in the conventional laser processing machine, a large inertial force is likely to act, especially with deceleration and subsequent acceleration when changing the movement direction. At the same time, the movement speed greatly varies. For this reason, in laser processing, it has been difficult to maintain a stable and constant speed of the galvano scanner depending on the processing shape.

  Furthermore, in order to optically scan the laser light in accordance with the moving speed of such a galvano scanner that fluctuates greatly, extremely complicated control is required. This control is performed at a high speed and the scanning is constant. In practice, it was difficult to control the speed (constant speed). This is a bottleneck in high-speed and high-quality processing in a laser processing machine that scans the condensing unit by relative and physical movement of the galvano scanner and the workpiece. It was.

  The present invention was devised in view of the above points, and in laser processing that performs scanning of a condensing unit by relative and physical movement of a laser beam emitting unit and a workpiece, the laser beam is applied to the workpiece. An object of the present invention is to provide a laser processing method and a laser processing apparatus capable of performing high-speed and high-quality processing by scanning at a required speed and a constant speed.

(1) In order to achieve the above object, the laser processing method of the present invention corresponds to a preset work shape of the workpiece, and uses the laser beam scanning range of the laser beam emitting portion to The trajectory and motion information of the work set table is generated so that the influence of inertia during movement can be suppressed and the total travel length is minimized, and the motion information is generated for each required section of the generated trajectory. And the operation limit value serving as a reference of whether or not to be set in advance, determining that the operation information is equal to or less than the operation limit value, and determining that the operation limit value is exceeded, and the generation In the determined section of the track, the section of the processing shape corresponding to the section is processed by scanning the laser beam while moving the work set table based on the operation information, In the section determined to be not accepted or not, after processing to the end point of the section of the processing shape corresponding to the previous section in the moving direction of the section, the emission of laser light is stopped at the end point and the processing is stopped Then, when the work set table is moved at a required speed and moved to the section determined to be no, the machining shape section corresponding to the section determined to be the same is processed from the position where the processing is stopped. A process to continue.

  In the laser processing method of the present invention, a processing shape (for example, a cutting shape) of a workpiece is set. Corresponding to the preset work shape of the workpiece, the laser beam scanning range of the laser beam emitting part can be used to suppress the influence of inertia when moving the workpiece set table, and the total movement length is the shortest The trajectory and motion information of the work set table are generated so that

  For example, the trajectory is generated by converting two-dimensional line segment data of the processed shape into point data of a fixed interval, and grouping these points by enclosing them within a range of areas that can be handled by the laser beam emitting part. Calculate the centroid position of the point data from the coordinates of each point, and pass through all the obtained centroid positions, and the line with the shortest total movement length (a straight line or a curved line that has a large curvature and is closer to the straight line) And this line is used as trajectory information on which the work set table operates. This suppresses or reduces the influence of inertia when the work set table operates. The method for generating the trajectory is not limited to this, and other methods may be adopted.

  Then, for each required segment of the generated trajectory, the generated motion information is compared with a motion limit value serving as a criterion for whether or not preset, and if the motion information is equal to or less than the motion limit value (the motion limit value is If it does not exceed, it is determined as possible, and if it exceeds the operation limit value, it is determined as not possible (impossible). In this determination method, when determining an operation limit value that is a criterion for propriety, it is determined that the generated motion information is less than the operation limit value that is a criterion for propriety. You may set so that it may determine.

  The motion limit value is, for example, an allowable limit acceleration / deceleration set in advance under required conditions for each value of curvature or radius when the segment of the track is an arc. Alternatively, when the track is a polygonal line, an allowable limit of acceleration / deceleration set in advance under required conditions for each angle of the line segment.

  In the generated trajectory, the section determined to be acceptable emits laser light from the laser light emitting section while moving the work set table at the required speed, which is the generated motion information, and scans the work. Then, the section of the processing shape corresponding to the above section is processed. In addition, in the division determined to be no, after machining to the end point (to be the next machining start point) of the section of the machining shape corresponding to the previous division in the movement direction of the division, this end point (in other words, The emission of the laser beam is stopped at the start point of the section of the machining shape corresponding to the category determined as “no”. In the movement of the work set table during the movement to the position corresponding to the next machining start point in the machining shape section (relative movement of the laser beam emitting part), so-called free running state in which machining by the laser beam is not performed. It becomes.

  Then, the laser beam emitting unit emits a laser beam to the machining start point after reaching a predetermined machining speed at the machining start point of the section of the machining shape corresponding to the next section through a relative idle state. The machining of the section of the machining shape corresponding to the section is continued. By continuing this processing, scanning of the laser beam condensing part on the workpiece will be performed at the required speed and at the same speed (constant speed) without interruption. As a result, the workpiece is processed at high speed. And can be processed with high quality.

(2) Further, in the present invention, the generated motion information is a differential value of the moving speed of the work set table, and the motion limit value serving as a reference for the preset possibility is a motion limit value of acceleration / deceleration. It is good also as a structure.

  In this case, it is possible to scan the laser beam continuously at a required speed and at a constant speed within the scanning range of the laser beam by the laser beam emitting unit, corresponding to the workpiece processing shape set in advance. Generate the trajectory and speed of the work set table, compare the generated differential value of the speed with the operation limit value of the acceleration / deceleration that is the reference of whether or not the speed is set for each required section of the generated trajectory. If the differential value is less than or equal to the operation limit value, it is determined that the operation is possible, and if it exceeds the operation limit value, it is determined that the operation is not possible, and a predetermined operation similar to the above case (1) is performed in each case. .

(3) The present invention further measures an actual machining shape remaining on the workpiece after machining of the workpiece, compares the actual machining shape with the preset workpiece machining shape, It can also be set as the structure provided with the process of correct | amending a difference.

  In this case, after the machining of the workpiece is completed, the workpiece is moved to a predetermined position (measurement position), and the actual machining shape remaining on the workpiece is measured by the image sensor. The measured value data is compared with the machining shape data of the workpiece that is machining conditions and is set in advance, and the difference is calculated. Using this difference as a correction value, processing using the correction value is performed in the next processing.

  Thereby, the error of the actual machining shape with respect to the preset machining shape due to signal delay, mechanical resistance of the movable part, and the like can be further reduced, and the machining accuracy of the workpiece is improved. This correction may be performed for each workpiece or each time a plurality of workpieces are processed.

(4) In order to achieve the above object, the laser processing apparatus of the present invention includes a laser beam emitting part for emitting laser light and a work attachment part, and is scanned by the laser light emitted from the laser light emitting part. Corresponding to the workpiece set table that can be moved by the drive unit in the entire range within the required range in the two-dimensional direction, and the preset machining shape of the workpiece, using the laser beam scanning range of the laser beam emitting unit Generating the trajectory and motion information of the work set table so that the influence of inertia can be suppressed during movement of the work set table and the total movement length is the shortest, and for each required section of the generated trajectory Then, the motion information is compared with a motion limit value that is a criterion for determining whether or not the motion information is set in advance. If the section of the generated trajectory is determined to be acceptable, the work set table is moved based on the operation information in the section of the machining shape corresponding to the section. In the section determined to be negative, the laser beam is scanned and processed to the end point of the section of the processing shape corresponding to the previous section in the moving direction of the section, and then the laser beam is processed at the end point. In a state where the ejection is stopped and the machining is stopped, the work set table is moved at a required speed and moved to the section determined to be the above, and the section determined to be the same from the position where the processing is stopped The operation information generating unit for generating operation information for continuing the processing of the section of the processing shape corresponding to the position information of the work set table is received from the driving unit, and The laser control unit that issues the emission command generated by the operation information generation unit to the laser beam output unit, and the position information of the work set table received from the drive unit, and the operation information generation to the drive unit that moves the work set table An operation control unit that issues an operation command generated by the unit.

The laser processing apparatus has the following operations.
First, necessary machining shape data is input to the motion information generation unit.
Next, based on the input data, the operation information generation unit generates operation information of the drive unit that moves the work set table and operation information of the laser beam emitting unit.

  That is, a workpiece set that can scan a laser beam continuously at a required speed and at a constant speed within a scanning range of a laser beam by a laser beam emitting unit, corresponding to a preset work shape of the workpiece. Generate table trajectory and velocity information.

  Further, for each required segment of the generated trajectory, the generated motion information is compared with a motion limit value that is a criterion for whether or not preset, and it is determined that the motion information is equal to or less than the motion limit value, If the operation limit value is exceeded, it is determined as no. In the generated trajectory, the section determined to be acceptable emits laser light from the laser light emitting section while moving the work set table at the required speed, which is the generated motion information, and scans the work. Then, the section of the machining shape corresponding to the above section is machined, and in the section determined to be no, the end point of the section of the machining shape corresponding to the previous section in the moving direction of the section (next machining start point) Laser beam emission is stopped at the end point (direction change point), and the work set table moves while moving to the position corresponding to the next machining start point in the section of the machining shape (laser). In the relative movement of the light emitting part, do not perform processing with laser light, and start processing from the start point of the section of the processing shape corresponding to the next section. It generates an operation information.

  Based on the generated operation information, an operation command is output from the operation control unit to the drive unit, and the work set table moves. In addition, a two-dimensional direction signal indicating the current position of the work set table is output from the drive unit and is sent to the laser control unit and the operation control unit. Based on this signal, the optimum signal from the operation control unit to the drive unit is output. The feedback of the operation signal is sequentially performed, so that the work set table operates with high accuracy.

  Then, a two-dimensional signal based on the operation of the work set table is sent to the laser control unit, and based on this signal, the operation information at that time is continuously updated, so to speak, the updated operation information is sequentially updated. Output from the laser control unit to the laser beam emitting unit.

  In this way, in the laser processing that scans the condensing unit by relative and physical movement between the laser beam emitting unit and the workpiece, the generated value of the moving speed of the work set table is set in advance for the generated trajectory. In a segment exceeding the operation limit value of acceleration / deceleration serving as a criterion for acceptability (in which the load increases) (that is, a segment judged as “no”), the end point of the section of the machining shape corresponding to the previous segment in the moving direction of the segment In order to stop the laser beam emission at the end point, the laser beam emitting part is not moved until it moves to the machining start point of the section of the machining shape corresponding to the next segment (the segment determined as “no”). It is in an idle state relative to the workpiece.

  Also, in the trajectory, when accelerated to a predetermined speed and moved to the next section, the laser beam was emitted to the processing start point of the section of the processing shape corresponding to the section, and the position (position where the processing stopped before idling ) To continue processing with laser light in this section. In other words, the laser beam condensing unit can be scanned with respect to the workpiece at a required speed and at a constant speed without interruption, so that processing can be performed at high speed and with high quality.

(5) In the present invention, the drive unit is provided with a first drive shaft having a first linear encoder, and the first drive shaft is movable in parallel with the first drive shaft. A second drive shaft that is substantially orthogonal to the first drive shaft may be provided, and the work set table may be movably provided on the second drive shaft.

In this case, the movement of the work set table in the entire range within the required range in the two-dimensional direction can be performed by the first drive shaft and the second drive shaft.
Also, the two-dimensional position of the work set table is specified by information sent from both the first linear encoder provided on the first drive shaft and the second linear encoder provided on the second drive shaft. It becomes possible to do.

(6) The present invention includes an image sensor that measures an actual machining shape remaining on the workpiece after the machining of the workpiece is completed, and the operation information generation unit sets the actual machining shape and the preset value. The machining shape of the workpiece is compared, the difference is corrected, and the correction value is used to control the laser light emitting unit by the laser control unit and the movement control of the work set table by the operation control unit. It can also be set as the structure which performed.

  In this case, first, after the machining of the workpiece is completed, the workpiece is moved to a predetermined position (measurement position), and the actual machining shape remaining on the workpiece is measured by the image sensor. The measured value data is compared with the machining shape data of the workpiece that is machining conditions and is set in advance, and the difference is calculated. Using this difference as a correction value, processing using the correction value is performed in the next processing. Thereby, the error between the preset workpiece machining shape and the actual machining shape due to the delay of the electrical signal, the mechanical resistance of the movable part, and the like can be further reduced, and the workpiece machining accuracy is improved.

(7) In order to achieve the above object, the laser processing method of the present invention corresponds to a preset work shape of the workpiece, and uses the laser beam scanning range of the laser beam emitting portion to move the workpiece set table. The trajectory and motion information of the work set table are generated so that the influence of inertia can be suppressed at the time and the total movement length is minimized, and the motion information and the motion information are generated for each required section of the generated trajectory. The operation limit value, which is a criterion for determining whether or not to set in advance, is compared. If the operation information is equal to or less than the operation limit value, it is determined to be acceptable. In the section of the track determined to be acceptable, the section of the machining shape corresponding to the section is machined by scanning the laser beam while moving the work set table based on the motion information, In each of the sections determined to be no, in each section with the turning point included in the section as a boundary, after processing the section of the machining shape corresponding to the previous section in the moving direction from the start point to the end point, the end point In the state where the emission of the laser beam is stopped and the processing is stopped, the work set table is moved at a required speed and moved to the next subsequent section. And continuing the machining of the section of the machining shape corresponding to the section.

  In this laser processing method, the laser beam is emitted from the laser beam emitting unit while moving the work set table at the required speed, which is the generated motion information, in the segment determined to be acceptable in the generated trajectory. Then, the workpiece is scanned to machine a section having a machining shape corresponding to the above section. Further, in a segment determined to be no in the trajectory, after machining to the end point (which becomes the next machining start point) of the section of the machining shape corresponding to the segment before the turning point in the moving direction of the segment. The laser beam emission is stopped at the end point (direction change point). In the movement of the work set table during the movement to the position corresponding to the next machining start point in the machining shape section (relative movement of the laser beam emitting part), so-called free running state in which machining by the laser beam is not performed. It becomes.

  Then, the laser beam emitting portion passes through a relative idle state and reaches a predetermined processing speed at the processing start point of the section of the processing shape corresponding to the next section (section after the turning point). Laser light is emitted to the starting point, and machining of the section of the machining shape corresponding to the next division is continued. By continuing this processing, scanning of the laser beam condensing part on the workpiece will be performed at the required speed and at the same speed (constant speed) without interruption. As a result, the workpiece is processed at high speed. And can be processed with high quality.

  According to the present invention, in laser processing that scans a condensing unit by relative and physical movement between a laser beam emitting unit and a workpiece, the laser beam is scanned with respect to the workpiece at a required speed and a constant speed. It is possible to provide a laser processing method and a laser processing apparatus capable of processing at high speed and with high quality.

It is explanatory drawing which shows embodiment of the laser processing apparatus which concerns on this invention. It is a planar view explanatory drawing which shows the structure of the work set table which comprises a laser processing apparatus, and shows the state which fixed the film. It is a flowchart which shows the flow of operation | movement in the operation information generator which comprises a laser processing apparatus. It is a flowchart which shows the flow of operation | movement of the drive shaft controller and galvano scanner which comprise a laser processing apparatus. It is a flowchart which shows the operation | movement which correct | amends the process shape data using the image sensor which comprises a laser processing apparatus. (A) is explanatory drawing which shows the processing shape on data, (b) is explanatory drawing which shows the state which has input the processing conditions for every section of processing shape, (c) is subdivided into processing shape data as processing shape data. FIG. 6 is an explanatory diagram showing a state in which the object is further classified into three types of objects, that is, a straight line and an arc, and (d) is an explanatory diagram showing a state illustrating a point object. (A) is an explanatory diagram of a state in which objects are grouped, (b) is an explanatory diagram of a state in which a work set table calculates a trajectory that can be linearly moved as much as possible, and (c) is an operation of a drive shaft. FIG. 4D is an explanatory diagram of a state where information is being created, and FIG. 4D is an explanatory diagram of a state where operation information of the galvano scanner is being created. It is explanatory drawing of the movement of a work set table in the case of showing an example of the track | orbit of a work set table and adding an idling part to a track | orbit.

The embodiment of the present invention will be described in more detail with reference to FIGS.
First, the structure of the operation system of the laser processing apparatus A of the present invention will be described.
The laser processing apparatus A shown in FIG. A Y-direction drive shaft 10 that is a first drive shaft is fixed in the Y direction at the center of the upper surface of the base board 17 in the X direction. The Y-direction drive shaft 10 is provided with a Y-direction linear encoder 11 that is a first linear encoder over almost the entire length.

  On the Y direction drive shaft 10, the X direction drive shaft 8, which is the second drive shaft, is directed in a direction perpendicular to the Y direction drive shaft 10 (X direction), and the coordinates can be specified by the Y direction linear encoder 11. It is attached so as to be movable in the Y direction. The X-direction drive shaft 8 is provided with an X-direction linear encoder 9 that is a second linear encoder over almost the entire length. A work set table 7 (described later) is mounted on the X direction drive shaft 8 so as to be movable in the X direction so that coordinates can be specified by the X direction linear encoder 9. The Y-direction drive shaft 10 and the X-direction drive shaft 8 constitute a drive unit that moves the work set table 7.

  A gantry 18 is provided on the rear side of the base board 17. On the gantry 18, the laser oscillator 1 is installed. A head lifting mechanism 5 is provided at the front end of the gantry 18. A galvano scanner 4 that constitutes a laser beam emitting unit is fixed to an elevating body 50 capable of elevating control of the head elevating mechanism unit 5. The galvano scanner 4 has an fθ lens (F-theta lens) 3 as an emission part on the lower side, and scans laser light by an optical system such as a mirror in addition to the fθ lens.

  The galvano scanner 4 is a single unit and has a scanning range of laser light unique to the scanner. This unique scanning range is used for data input as one of the conditions when calculating a trajectory in which the work set table 7 can operate as linearly as possible, which will be described later. An image sensor 6 is juxtaposed to the lift 50 next to the galvano scanner 4. Further, a laser beam path 2 leading to the galvano scanner 4 is extended from the laser oscillator 1.

  Further, as a control system for operating the operation system, a drive axis controller 14 as an operation control unit, a galvano scanner and laser light emission controller 15 as a laser control unit, an operation information generator 16 as an operation information generation unit, Further, an X direction encoder signal distributor 12 and a Y direction encoder signal distributor 13 are provided. These control systems exchange command signals (control signals) via signal lines within the control system and between the control system and the operation system.

  This will be described in more detail below. First, the drive axis controller 14 sends a Y direction drive axis control command to the Y direction drive axis 10 via the signal line L1, and sends an X direction drive axis control command to the X direction drive axis 8 via the signal line L2. Will be sent. A Y-direction encoder signal is sent from the Y-direction linear encoder 11 to the Y-direction encoder signal distributor 13 via the signal line L3. The Y-direction encoder signal is sent to the drive axis controller 14, the galvano scanner, and the laser light emission controller. 15 through signal lines L4 and L5.

  The X-direction linear encoder 9 sends an X-direction encoder signal to the X-direction encoder signal distributor 12 via the signal line L6. The X-direction encoder signal is sent to the drive axis controller 14, the galvano scanner, and the laser light emission controller 15. Distributed through the signal lines L7 and L8. From the galvano scanner and laser light emission controller 15, a galvano scanner control command is sent to the galvano scanner 4 via the signal line L9, and a laser light emission command is sent to the laser oscillator 1 via the signal line L10.

  Further, image information is sent from the image sensor 6 to the motion information generator 16 via the signal line L11. This image information is sent to the galvano scanner and the laser light emission controller 15 via the signal line L12, and is sent to the drive axis controller 14 via the signal line L13.

Next, the work set table 7 employed in the laser processing apparatus A will be described with reference to FIG.
The work set table 7 sucks and fixes a work that is a processing object such as a film or a sheet. In general, in a table of a laser processing device, when cutting a fixed workpiece, it is necessary to hold the workpiece processing part in a suspended state in order to suppress the influence of the reflection of laser light that has passed through the processing point. is there.

  Usually, a table having a groove having a shape corresponding to a part to be processed (processed shape) on the upper surface is used. However, there are various workpiece processing shapes, and it is troublesome and costly to manage a table having groove shapes corresponding to these workpieces in advance, and managing them.

  The work set table 7 provided in the laser processing apparatus A has a rectangular table main body 70, and a large number of air intake holes 71 are provided on the entire surface thereof. Further, suction blocks 72 and 72a having different sizes and the same thickness are detachably fixed to the surface of the table body 70 with appropriate arrangement. The large suction block 72 and the small suction block 72a are arranged as shown in FIG. 2, for example.

  Thus, the work is sucked from the surface of the table main body 70 in a state where the processing portion is suspended in the air by sucking air from the suction holes 73 provided on the upper surfaces of the suction blocks 72 and 72a and communicating with the suction holes 71. Can do. In addition, by fixing the suction blocks 72 and 72a, it is possible to suck and remove the vaporized material of the workpiece generated by the laser processing by the intake holes 71 on the surface of the table body 70 which is lowered by one step. is there.

  In this example, in the film 700 which is a work and indicated by a dotted line in FIG. 2, a rectangular processing shape 74 indicated by an alternate long and short dash line corresponding to each suction block 72 and a square corresponding to each set of suction blocks 72a. , A cross-shaped processed shape 76 corresponding to twelve of the suction blocks 72a, and a circular processed shape 77 corresponding to twelve of the suction blocks 72a are set.

Here, an outline of the operation of the laser processing apparatus A will be described with reference to FIG.
The laser processing apparatus A has a configuration capable of scanning a laser beam with respect to an object to be processed by using a combined speed of a scanning speed of a laser beam by a galvano scanner 4 serving as an emission unit and a moving speed obtained by moving a work set table. It is.

(1) Input necessary machining shape data to the motion information generator 16.
(2) Based on the input data, the motion information generator 16 causes the relative movement of the galvano scanner 4, the motion information of the X-direction drive shaft 8 and the Y-direction drive shaft 10 based thereon, the galvano scanner 4 Operation information is generated.

(3) Based on these operation information, an operation command is output from the drive axis controller 14 to the X direction drive shaft 8 and the Y direction drive shaft 10, and the galvano scanner and the laser light emission controller 15 operate to the galvano scanner 4. A command is output.
(4) Based on the operation command, the work set table 7 is moved, and X direction and Y direction encoder signals indicating the current position are output from the X direction linear encoder 9 and the Y direction linear encoder 11.

(5) Encoder signals in the X direction and Y direction are distributed by the X direction encoder signal distributor 12 and the Y direction encoder signal distributor 13, and are output to the drive shaft controller 14, the galvano scanner, and the laser light emission controller 15. The
(6) Based on the X direction and Y direction encoder signals, the drive axis controller 14 sequentially feeds back optimum operation signals to the X direction drive shaft 8 and the Y direction drive shaft 10, and the work set table 7. Works with precision.

(7) The encoder signals in the X direction and Y direction by the operation of the work set table 7 are sent to the galvano scanner and the laser light emission controller 15, and based on the encoder signals in the X direction and Y direction, In other words, the operation information is continuously updated, and the updated operation information is sequentially output to the galvano scanner 4 and the laser oscillator 1 to perform laser processing.

(8) After processing one workpiece to completion, the processing position of the processed workpiece is measured by the image sensor 6 and output to the motion information generator 16.
(9) The motion information generator 16 calculates the difference between the input machining shape and the actual machining shape caused by the delay of the electrical signal, etc., corrects the motion signal, and increases the accuracy of the next machining.

  Next, with reference to FIGS. 1 to 8, the case where the workpiece is a synthetic resin film using the laser processing apparatus A as an example, the operation and processing method of the apparatus when the film is cut into a required shape. Will be described in detail.

  First, a work such as a rectangular film 700 is placed on the work set table 7, and a signal for fixing the work is input (electrical signal input from a switch or the outside). As a result, negative pressure is generated in the pipe connected to the suction hole 71 provided in the work set table 7, and the work is sucked and fixed by sucking air from the suction holes 73 of the blocks 72 and 72a.

  Thereafter, in order to prevent exposure of the laser beam, a cover (not shown) provided in the laser processing apparatus A is closed to ensure safety. Next, when a machining start signal is input, each controller sends an operation command to each device, and each device starts its operation. Hereinafter, the operation flow of the machining operation will be described with reference to FIGS. In the explanation, explanations of numbers with <> correspond to the numbers shown in these drawings.

<1> Creation and input of machining shape data (manual operation)
On the software screen of the motion information generator 16 (generally a personal computer), input a line of a machining shape (including a one-dimensional point) to be machined (for example, cut) on the workpiece. To do. When inputting, a two-dimensional figure is created by selecting various objects such as points, straight lines, curves, circles, and rectangles (see FIG. 6A). In addition, this figure is illustrated for description and is different from the machining shapes 74 to 77 illustrated in FIG.

  Further, two-dimensional drawing data created in advance by a CAD (computer-aided design) system or the like may be taken in. Further, in order to correct the relative positional deviation between the work and the work set table 7, when a mark (not shown: by printing, film formation, or other processing) is provided on the work in advance, the image sensor 6. Since the position needs to be detected, the coordinates are also set.

<2> Machining condition input (manual operation)
For the two-dimensional machining shape data created in <1> above, set the machining speed, repetition frequency (oscillation frequency) and machining point output (laser output) necessary for machining, and operate information It inputs into the generator 16 (refer FIG.6 (b)). The setting of the machining conditions can be specified and input for each section of the line segment of the created machining shape. Note that the limit values (such as the scanning range and speed of the galvano scanner 4, the maximum speed of the work set table 7, and the acceleration / deceleration operation limit values) of the laser processing apparatus A are set in advance.

  The processing point output refers to the energy per second of the laser light that the laser light emitted from the laser oscillator 1 reaches the workpiece via the optical system and actually contributes to the processing. Since this energy usually has a certain attenuation in the optical system, it is taken into consideration when setting.

<3> Classification of machining shape data (preparation process for preliminary verification)
The machining shape data consisting of the line segment input in the above <1> is subdivided and classified into three types of objects: points, straight lines, and arcs (see FIGS. 6C and 6D). In addition, what was shown in FIG.6 (d) illustrated the object of a point in three places in addition to the object of the straight line and circular arc shown in FIG.6 (c).

  Next, those objects are grouped for each range of the corresponding area of the galvano scanner 4. When one object exceeds the corresponding range (corresponding area) of the galvano scanner 4, the object is not grouped but exists alone (see FIG. 7A).

<4> Preliminary verification Preliminary verification is made in advance as to whether or not the processing shape can be supported.
In a state where the group of objects created in <3> and the single object are respectively arranged, it is easy to determine a place where the operation load such as the Y-direction drive shaft 10 and the X-direction drive shaft 8 which are driving devices is large. Specifically, a trajectory in which the work set table 7 can operate as linearly as possible is calculated while keeping the object group and the single object within the corresponding range of the galvano scanner 4 (see FIG. 7B).

  In this way, the trajectory and the moving speed of the work set table 7 are generated within the scanning range of the galvano scanner 4 so that the laser beam can be scanned at a required speed and continuously at a constant speed. If the scanning command can be completed by this automatic processing, processing excellent in terms of processing time and processing quality is possible.

  Then, the direction change amount between the straight lines is compared with a preset operation limit value of the driving device, and it is determined whether or not scanning at a constant speed is possible. That is, for each required section of the generated trajectory, the generated differential value of the speed is compared with the operation limit value of the acceleration / deceleration serving as a criterion for whether or not preset, and if the differential value of the speed is less than the operation limit value, It is determined that the operation is possible, and it is determined that the operation limit value is exceeded. The operation limit value, which is a criterion for availability, is set based on the acceleration / deceleration, establishment time, vibration, etc. of the drive device, and is input in advance. Further, the operation limit means that the acceleration / deceleration and establishment time of the work set table 7 cannot correspond to a preset scanning speed.

<5> Calculation of free running distance and position information In the preliminary verification of <4> above, the free running of the work set table 7 is determined in the category in which the generated trajectory is determined not to be scanned at the required speed and constant speed. Information on the path / distance (relative free running path / distance of the galvano scanner 4) and the position where the laser beam is turned on / off is calculated. In the category determined as “No”, after processing up to the end point in the section of the machining shape corresponding to the previous category in the movement direction, the next segment (corresponding to the category determined as “No”) When the galvano scanner 4 is relatively moved to the machining start point of the machining shape section), it is dealt with by moving it at a required speed without emitting the laser beam, that is, by making it relatively idle.

<6-A> Creation of drive axis motion information (automatic processing)
The two-dimensional line segment data of the machining shape created in the above <1> is converted into point data at a constant interval. These points are surrounded and grouped within a range of, for example, 1/4 to 1/2 of the area that can be supported by the galvano scanner. The centroid position of the grouped point data is calculated from the coordinates of each point.

  A line that passes through all the obtained center-of-gravity positions and has the shortest total movement length (a straight line or a curved line having a large curvature and closer to the straight line) is calculated. Note that the total movement length here refers to the total length of the length that the work set table 7 moves in one machining in units of workpieces. In other words, it refers to the total length of the galvano scanner 4 that moves relative to the workpiece in one machining operation for each workpiece. This line is used as trajectory information on which the work set table operates (see FIG. 7C). Thereby, the influence of inertia when the work set table 7 operates can be suppressed or reduced.

  Then, by obtaining the machining length from the number of points existing in the group and dividing it by the machining speed, the required time allowed in the group is obtained. Further, speed information for moving the work set table 7 is obtained from the distance between the center of gravity positions and the required time.

<6-B> Galvano scanner operation information creation (automatic processing)
The galvano scanner 4 recognizes a shape approximated to a point, a straight line, and an arc with the machining shape data as a minimum unit. A curve that does not belong to an arc is processed as a series of short straight lines, and then a laser processing start point position and end point position are set (see FIG. 7D). The start point position and end point position are reflected in the laser beam emission information and also in the drive shaft operation information, and are common to the operation start point position and end point position.

<7-A> Output Drive Axis Motion Information The motion information generator 16 outputs the motion information of the X direction drive shaft 8 and the Y direction drive shaft 10 to the drive axis control device 14.

<7-B> Output Galvano Scanner Operation Information and Laser Light Emission Information The galvano scanner and laser light emission controller 15 output a galvano scanner operation command to the galvano scanner 4 and a laser light emission command to the laser oscillator 1.

Please refer to FIG.
<8-A> Drive axis control command generation (automatic processing)
Write the initial operation information to the drive axis controller 14 and receive the signals output from the X-direction linear encoder 9 and the Y-direction linear encoder 11 which are the current position of the work set table 7, and based on this signal A (or optimal) drive axis control signal is generated, and feedback to the X direction drive shaft 8 and the Y direction drive shaft 10 which are drive units is sequentially performed. Thereby, the work set table 7 operates with high accuracy.

<8-B> Galvano scanner and laser light emission control command generation (automatic processing)
Initial operation information is written to the drive axis controller 14, and a control command is generated while subtracting the current position of the work set table 7 obtained from the encoder signal. The galvano scanner and laser light emission controller 15 recognizes the command generated here as an initial value relative to the reference position of the workpiece. In addition, since the workpiece reference position moves with the movement of the workpiece set table 7 during the operation, the distance from the laser light irradiation position (laser-side reference position) relatively fluctuates. On the premise of subtraction, a command value larger than the corresponding range of the galvano scanner 4 is accepted.

  More specifically, the current position information of the work set table 7 based on the encoder signals output as electrical signals from the X-direction linear encoder 9 and the Y-direction linear encoder 11, the drive axis controller 14, the galvano scanner, and the laser light emission controller 15. To enter. The drive axis controller 14 cancels influences such as inertia during operation and overall thermal expansion while comparing with the current position information so as to operate accurately according to the trajectory and speed conditions set in the work set table 7. Thus, the motor operations of the X-direction drive shaft 8 and the Y-direction drive shaft 10 are controlled. On the other hand, the galvano scanner and the laser light emission controller 15 receive the current position information of the work set table 7 and continuously determine the relative difference between the work reference position and the laser reference position. A command subtracted from the information is output to the galvano scanner 4 and the laser oscillator 1 for processing.

<9-A> Drive Axis Control Command Output A control command is output from the drive axis controller 14 to the X direction drive shaft 8 and the Y direction drive shaft 10.
<9-B> Galvano Scanner Control Command Output A control command is output from the galvano scanner and the laser light emission controller 15 to the galvano scanner 4.
<9-C> Laser beam emission control command output A control command is output from the galvano scanner and the laser beam emission controller 15 to the laser oscillator 1.

<10-A> Work Set Table Operation With the above <9-A>, the work set table 7 operates on a required track.
<10-B> Galvano Scanner Operation Laser light is emitted from the galvano scanner 4 and stopped by the above <9-B>.
<10-C> Laser Light Emission Laser light is emitted by the above <9-C> and sent to the galvano scanner 4 via the laser optical path 2.

  When the operation of each device starts and the machining start point set for the workpiece falls within the corresponding range of the galvano scanner 4 based on the encoder signal, the galvano scanner 4 emits laser light toward the position to be the machining start point of the workpiece. It is emitted and processed. It should be noted that in the section determined to be acceptable in the generated trajectory (arc-shaped section 1 in FIG. 8), the galvano scanner 4 is moved relative to the workpiece at the generated required speed. The laser beam is emitted from 4 and the workpiece is scanned to process the section of the processing shape corresponding to the section 1.

  In the segment determined to be no (exceeding the operation limit) in the trajectory along which the work set table 7 moves (in the linear segments 5 and 9 in FIG. 8), the deceleration segments ( A free running portion consisting of straight sections 2, 6), connecting sections (straight sections 3, 7) and acceleration sections (straight sections 4, 8) is added to the track.

  In addition, when the category determined as NO is category 5, category 1 determined as acceptable is the previous category in the moving direction, and when the category determined as NO is category 9, it is determined as NO. The divided section 5 is the previous section in the moving direction. Further, regarding the relationship between the sections 5 and 9 determined as “no”, the section 5 is the previous section with the turning point that is the end point of the section 5 as a boundary, and the section 9 is the subsequent section. The end point of section 1 and the end point of section 5 are turning points.

  This will be described with reference to FIG. After processing the section of the processing shape corresponding to section 1 with the laser beam by the galvano scanner 4, the laser is stopped at the end point, and each section 2, 3, 4 is idled and accelerated in the acceleration section 4 and required speed Then, the laser beam is emitted from the starting point of the machining shape corresponding to the section 5, and the machining is started. And after processing to the end point of the processing shape corresponding to the section 5, stop the laser beam at the end point, perform idle running of each section 6, 7, 8 and when it accelerates in the acceleration section 8 and reaches the required speed, The laser beam is emitted from the start point of the machining shape corresponding to the section 9 to start machining, and the machining shape is processed to the start point (machining start point) corresponding to the section 1.

By continuing the above processing, the scanning of the laser beam on the workpiece is performed without interruption at the required speed and the same speed (constant speed), and as a result, the workpiece can be processed at a high speed. At the same time, it can be processed with high quality.
Although FIG. 8 shows a case where the track of the work set table 7 and the entire machining shape on the workpiece overlap, it is needless to say that there is a case where some deviation occurs and the both do not overlap. Absent.

  In this way, the work set table 7 is scanned on the work by the laser light emitted from the galvano scanner 4 while moving in a speed-changing manner at a moving speed that is equal to or lower than the machining speed condition. However, if the movement to the machining start point corresponding portion of the work set table 7 and the machining shape are discontinuous and the next machining start point is outside the corresponding range of the galvano scanner 4, a required speed (for example, a preset workpiece) The work set table 7 is moved at the maximum speed of the set table 7).

  Then, the galvano scanner 4 processes the moving film by relatively following the irradiation position of the laser light according to the set processing shape, and sets the processing speed between the processing start point and the processing end point. That is, processing is performed in a state where laser processing is not interrupted at a constant speed.

<11. Processing complete>
After the processing is completed, the laser light irradiation by the galvano scanner 4 is stopped. Thereafter, the work set table 7 moves to the initial position where the work is fixed.

<12> Position correction of the workpiece by the image sensor When the work fixed to the work set table 7 is misaligned with respect to the work set table 7, a mark (not shown) provided on the film by the image sensor 6. ) Is detected, the position of the workpiece is detected, and the difference is corrected in the next machining.

  Specifically, before starting the processing, the work set table 7 is moved to a position where the image sensor 6 can photograph the mark, the image sensor 6 detects the mark, and the amount of deviation in the XYθ direction on the plane with respect to the normal position. Is measured, and the machining shape data is offset (offset, corrected) by the amount of deviation. It should be noted that it is preferable to set the marks at two or more positions in order to exclude the deviation in the rotation direction.

Please refer to FIG.
<13> Correction of command delay using image sensor In laser processing, there may be a difference between the position irradiated with laser light and the set shape due to a delay in operation with respect to the command. Therefore, after the machining is completed, the machining position (cutting position) of the actually machined workpiece is measured by the image sensor 6. That is, the work set table 7 is moved to a position where the image sensor 6 can shoot (FIG. 5-1), the set machining position is measured (FIG. 5-2), and the measured value is input to the motion information generator 16 (Fig. 5-3). (FIGS. 5-1) to (FIG. 5-3) are repeated for the measured value.

  A plurality of measurement positions can be provided, and the accuracy increases as the number of measurement positions increases. Then, the created machining shape data is compared with the measured value of the actual cutting position obtained, and the difference between the X direction and the Y direction is calculated (FIG. 5-4). The correction value is obtained by continuously assigning the amount in an inclined manner and subtracting it from the created machining shape data (FIGS. 5-5). This correction value is used in the next processing to reduce the error.

  The terms and expressions used in the present specification and claims are for illustrative purposes only, and are not intended to be limiting in any way. The features described in the present specification and claims and their There is no intention of excluding some equivalent terms and expressions. It goes without saying that various modifications are possible within the scope of the technical idea of the present invention.

A Laser processing device 1 Laser oscillator 2 Laser optical path 3 fθ lens 4 Galvano scanner 5 Head lifting mechanism 50 Lifting body 6 Image sensor 7 Work set table 70 Table body 71 Intake hole 72 Large adsorption block 72a Small adsorption block 73 Adsorption hole 700 Film 74 to 77 Machining shape 8 X direction drive shaft 9 X direction linear encoder 10 Y direction drive shaft 11 Y direction linear encoder 12 X direction encoder signal distributor 13 Y direction encoder signal distributor 14 Drive axis controller 15 Galvano scanner and laser beam Output controller 16 Operation information generator 17 Base panel 18 Base L1 to L13 Signal line

Claims (7)

Corresponding to the workpiece shape set in advance, the laser beam scanning range of the laser beam emitting part can be used to suppress the influence of inertia when moving the workpiece set table, and the total movement length is the shortest As described above, the trajectory and motion information of the work set table are generated, and the motion information is compared with a motion limit value serving as a criterion for determining whether or not the motion trajectory is set for each required section of the generated trajectory. If the information is equal to or less than the same operation limit value, determine that it is possible, and if the information exceeds the same operation limit value, determine whether or not,
In the determined section of the generated trajectory, the section of the processing shape corresponding to the section is processed by scanning the laser beam while moving the work set table based on the operation information. In the section determined as “no”, after processing to the end point of the section of the processing shape corresponding to the previous section in the moving direction of the section, the emission of the laser beam was stopped at the end point and the processing was stopped. In the state, when the work set table is moved at a required speed and moved to the section determined to be not, the processing of the section of the processing shape corresponding to the section determined to be the same from the location where the processing was stopped A laser processing method. The laser processing method according to claim 1, wherein the generated operation information is a differential value of a moving speed of a work set table, and the operation limit value serving as a reference of the preset possibility is an operation limit value of acceleration / deceleration. The step of measuring an actual machining shape remaining on the workpiece after the machining of the workpiece is completed, comparing the actual machining shape with the preset machining shape of the workpiece, and correcting the difference. Laser processing method 1 or 2. A laser beam emitting part for emitting a laser beam;
A work set table that is a work attachment unit and can be moved by a drive unit in the entire range within a required range in a two-dimensional direction that can be scanned by laser light emitted from the laser light emitting unit;
Corresponding to the workpiece shape set in advance, the laser beam scanning range of the laser beam emitting part can be used to suppress the influence of inertia when moving the workpiece set table, and the total movement length is the shortest As described above, the trajectory and motion information of the work set table are generated, and the motion information is compared with a motion limit value serving as a criterion for determining whether or not the motion trajectory is set for each required section of the generated trajectory. If the information is equal to or less than the same operation limit value, it is determined to be acceptable, and if the information exceeds the same operation limit value, it is determined to be no. In the determined category of the generated trajectory, the corresponding to the category The section of the machining shape is machined by scanning the laser beam while moving the work set table based on the motion information. After processing to the end point of the section of the processing shape corresponding to the previous section, stop emitting laser light at the end point, and with the processing stopped, move the work set table at a required speed, and When moving to the determined section, the operation information generating unit for generating operation information to continue the processing of the section of the processing shape corresponding to the section determined to be the same from the location where the processing is stopped,
A laser control unit that receives position information of the work set table from the drive unit and issues an emission command generated by the operation information generation unit to the laser beam emission unit;
A laser processing apparatus comprising: an operation control unit that receives position information of a work set table from the drive unit and issues an operation command generated by the operation information generation unit to the drive unit that moves the work set table. The drive unit is provided with a first drive shaft having a first linear encoder, and is movable on the first drive shaft so as to be substantially parallel to the first drive shaft. The laser processing apparatus according to claim 4, further comprising a second drive shaft orthogonal to the work set table, wherein the work set table is movably provided on the second drive shaft. An image sensor that measures an actual machining shape remaining on the workpiece after machining of the workpiece is provided, and the operation information generation unit compares the actual machining shape with the preset workpiece machining shape. Then, the difference is corrected, and the correction value is used to control the laser light emitting unit by the laser control unit and to control the movement of the work set table by the operation control unit. 4 or 5 laser processing equipment. Corresponds to the workpiece processing shape set in advance, the laser beam scanning range of the laser beam emitting part is used, the influence of inertia can be suppressed when moving the work set table, and the total movement length is the shortest As described above, the trajectory and motion information of the work set table is generated, and the motion information is compared with a motion limit value serving as a reference for setting in advance for each required section of the generated trajectory. Is determined to be acceptable if is less than or equal to the operation limit value, and determined to be not if the operation limit value is exceeded,
In the determined section of the generated trajectory, the section of the processing shape corresponding to the section is processed by scanning the laser beam while moving the work set table based on the operation information. In each of the sections determined to be no, in each section with the turning point included in the section as a boundary, after processing the section of the processing shape corresponding to the previous section in the moving direction from the start point to the end point, In the state where the emission of the laser beam is stopped at the end point and the processing is stopped, the work set table is moved at a required speed and moved to the next subsequent section, where the processing of the section is stopped, And a step of continuing the processing of the section of the processing shape corresponding to the later section.

Images