JPWO2010018875A1 - 電界効果型トランジスタの製造方法 - Google Patents
電界効果型トランジスタの製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 44
- 230000005669 field effect Effects 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000000137 annealing Methods 0.000 claims abstract description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 238000004544 sputter deposition Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 229910007541 Zn O Inorganic materials 0.000 claims abstract description 16
- 230000001681 protective effect Effects 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 7
- 238000005546 reactive sputtering Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 139
- 230000008569 process Effects 0.000 abstract description 22
- 230000015572 biosynthetic process Effects 0.000 abstract description 18
- 239000010409 thin film Substances 0.000 abstract description 16
- 230000007547 defect Effects 0.000 abstract description 7
- 238000000151 deposition Methods 0.000 abstract description 3
- 230000008021 deposition Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 95
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 238000005530 etching Methods 0.000 description 14
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
Abstract
Description
これにより、無加熱で成膜された活性層と比較して、所定のトランジスタ特性を付与するのに必要なアニール温度を低温化することが可能となる。なお、成膜温度は100℃に限られず、成膜条件に応じて適宜変更することが可能である。基材を加熱する加熱機構としては、シースヒータやランプヒータ等を採用することができる。
本発明者らの実験によれば、加熱成膜した活性層を300℃で大気中アニールすることで、無加熱で成膜した活性層を400℃で大気中アニールした場合と同等のオンオフ電流比(オン電流/オフ電流)を得ることができた。このことから、加熱成膜した活性層は、無加熱で成膜された同一材料の活性層と比較して、低温のアニール処理によって優れたトランジスタ特性を有する活性層を形成できることがわかる。
In−Ga−Zn−O薄膜を形成するためのスパッタリングターゲットは、In−Ga−Zn−Oの単一のターゲットを用いてもよいし、In2O3ターゲット、Ga2O3ターゲット及びZnOターゲットのような複数のターゲットを用いてもよい。酸素雰囲気中でのスパッタリング成膜は、導入する酸素の分圧(流量)を制御することによって、膜中の酸素濃度を容易に制御することが可能となる。
これにより、ボトムゲート型の電界効果型トランジスタを作製することができる。ゲート電極は基材の上に形成された電極膜でもよいし、基材そのものをゲート電極で構成してもよい。
11…ゲート電極
14…ゲート絶縁膜
15…活性層
16…ストッパ層
17(17S、17D)…ソース/ドレイン電極
19…保護膜
Claims (6)
- 基材を加熱しながら、前記基材の上に、In−Ga−Zn−O系組成を有する活性層をスパッタリング法によって形成し、
前記形成した活性層をアニールする
電界効果型トランジスタの製造方法。 - 請求項1に記載の電界効果型トランジスタの製造方法であって、
前記活性層を形成する工程は、前記活性層を100℃以上の温度に加熱しながら成膜することを含む
電界効果型トランジスタの製造方法。 - 請求項2に記載の電界効果型トランジスタの製造方法であって、
前記活性層をアニールする工程は、前記基材を300℃以上の温度に加熱することを含む
電界効果型トランジスタの製造方法。 - 請求項1に記載の電界効果型トランジスタの製造方法であって、
前記活性層を形成する工程は、前記活性層を酸化性ガスとの反応性スパッタリング法によって成膜することを含む
電界効果型トランジスタの製造方法。 - 請求項1に記載の電界効果型トランジスタの製造方法であって、
前記基材はゲート電極を含み、
前記活性層を形成する前に、前記ゲート電極を被覆するゲート絶縁膜をさらに形成する
電界効果型トランジスタの製造方法。 - 請求項5に記載の電界効果型トランジスタの製造方法であって、さらに、
前記活性層を被覆する保護膜を形成し、
前記活性層にコンタクトするソース電極及びドレイン電極を形成する
電界効果型トランジスタの製造方法。
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JP2010524761A JP5291105B2 (ja) | 2008-08-15 | 2009-08-17 | 電界効果型トランジスタの製造方法 |
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JP2008209277 | 2008-08-15 | ||
JP2008209277 | 2008-08-15 | ||
PCT/JP2009/064376 WO2010018875A1 (ja) | 2008-08-15 | 2009-08-17 | 電界効果型トランジスタの製造方法 |
JP2010524761A JP5291105B2 (ja) | 2008-08-15 | 2009-08-17 | 電界効果型トランジスタの製造方法 |
Publications (2)
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JPWO2010018875A1 true JPWO2010018875A1 (ja) | 2012-01-26 |
JP5291105B2 JP5291105B2 (ja) | 2013-09-18 |
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JP (1) | JP5291105B2 (ja) |
KR (1) | KR101260147B1 (ja) |
CN (2) | CN102165569B (ja) |
TW (1) | TWI498970B (ja) |
WO (1) | WO2010018875A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9546416B2 (en) * | 2010-09-13 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming crystalline oxide semiconductor film |
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CN102906882B (zh) * | 2010-05-21 | 2015-11-25 | 株式会社半导体能源研究所 | 半导体装置及其制造方法 |
WO2011145634A1 (en) * | 2010-05-21 | 2011-11-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP5739257B2 (ja) | 2010-08-05 | 2015-06-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR102424181B1 (ko) | 2010-12-17 | 2022-07-21 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 산화물 재료 및 반도체 장치 |
KR101459502B1 (ko) * | 2011-07-13 | 2014-11-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 박막 트랜지스터 디바이스들을 제조하는 방법들 |
CN102683193B (zh) * | 2012-03-30 | 2014-07-23 | 京东方科技集团股份有限公司 | 晶体管的制作方法、晶体管、阵列基板以及显示装置 |
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WO2006051994A2 (en) * | 2004-11-10 | 2006-05-18 | Canon Kabushiki Kaisha | Light-emitting device |
JP4732080B2 (ja) * | 2005-09-06 | 2011-07-27 | キヤノン株式会社 | 発光素子 |
JP4560502B2 (ja) * | 2005-09-06 | 2010-10-13 | キヤノン株式会社 | 電界効果型トランジスタ |
JP5198066B2 (ja) * | 2005-10-05 | 2013-05-15 | 出光興産株式会社 | Tft基板及びtft基板の製造方法 |
JP5244295B2 (ja) * | 2005-12-21 | 2013-07-24 | 出光興産株式会社 | Tft基板及びtft基板の製造方法 |
JP4999400B2 (ja) * | 2006-08-09 | 2012-08-15 | キヤノン株式会社 | 酸化物半導体膜のドライエッチング方法 |
JP5127183B2 (ja) * | 2006-08-23 | 2013-01-23 | キヤノン株式会社 | アモルファス酸化物半導体膜を用いた薄膜トランジスタの製造方法 |
TWI478347B (zh) * | 2007-02-09 | 2015-03-21 | Idemitsu Kosan Co | A thin film transistor, a thin film transistor substrate, and an image display device, and an image display device, and a semiconductor device |
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2009
- 2009-08-17 WO PCT/JP2009/064376 patent/WO2010018875A1/ja active Application Filing
- 2009-08-17 KR KR1020117003050A patent/KR101260147B1/ko active IP Right Grant
- 2009-08-17 TW TW098127552A patent/TWI498970B/zh active
- 2009-08-17 CN CN200980137848.6A patent/CN102165569B/zh active Active
- 2009-08-17 CN CN201610010064.9A patent/CN105575803B/zh active Active
- 2009-08-17 JP JP2010524761A patent/JP5291105B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9546416B2 (en) * | 2010-09-13 | 2017-01-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming crystalline oxide semiconductor film |
Also Published As
Publication number | Publication date |
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CN102165569A (zh) | 2011-08-24 |
TWI498970B (zh) | 2015-09-01 |
KR101260147B1 (ko) | 2013-05-02 |
KR20110028392A (ko) | 2011-03-17 |
JP5291105B2 (ja) | 2013-09-18 |
CN105575803A (zh) | 2016-05-11 |
CN102165569B (zh) | 2016-08-03 |
WO2010018875A1 (ja) | 2010-02-18 |
TW201017756A (en) | 2010-05-01 |
CN105575803B (zh) | 2018-11-09 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |