JPWO2009157101A1 - 磁気メモリ素子とその駆動方法及び不揮発記憶装置 - Google Patents
磁気メモリ素子とその駆動方法及び不揮発記憶装置 Download PDFInfo
- Publication number
- JPWO2009157101A1 JPWO2009157101A1 JP2010517660A JP2010517660A JPWO2009157101A1 JP WO2009157101 A1 JPWO2009157101 A1 JP WO2009157101A1 JP 2010517660 A JP2010517660 A JP 2010517660A JP 2010517660 A JP2010517660 A JP 2010517660A JP WO2009157101 A1 JPWO2009157101 A1 JP WO2009157101A1
- Authority
- JP
- Japan
- Prior art keywords
- memory element
- magnetic
- magnetic memory
- layer
- magnetization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3295—Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1659—Cell access
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5607—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using magnetic storage elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3268—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the exchange coupling being asymmetric, e.g. by use of additional pinning, by using antiferromagnetic or ferromagnetic coupling interface, i.e. so-called spin-valve [SV] structure, e.g. NiFe/Cu/NiFe/FeMn
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3286—Spin-exchange coupled multilayers having at least one layer with perpendicular magnetic anisotropy
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/10—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having two electrodes, e.g. diodes or MIM elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/13—Amorphous metallic alloys, e.g. glassy metals
- H01F10/133—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1143—Magnetoresistive with defined structural feature
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Crystallography & Structural Chemistry (AREA)
- Power Engineering (AREA)
- Nanotechnology (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
本発明は、電気的手段によって情報を記憶可能な磁気メモリ素子とその駆動方法及び不揮発記憶装置に関する。
2 下部電極(Cu/Ta)
3 ピン層(CoFeB/Ru/CoFe/PtMn)
4 非磁性層(MgOトンネル絶縁膜)
5 フリー層(CoFeB)
6 非磁性層(Pt)
7 磁気変化層(GdFeCo)
8 層間絶縁膜(SiO2)
9 上部電極(Cu/Ta)
10 メモリセル
11 整流素子
本発明の実施形態として、本発明のスピンバルブ素子と該素子の駆動方法を図1〜図4に基づいて説明する。
次に、本発明素子をメモリセルとして使用した不揮発記憶装置(本発明装置)の構成例について図5及び図6を用いて説明する。
Claims (9)
- フリー層と、ピン層と、該フリー層及び該ピン層に挟まれた非磁性層とを有するスピンバルブ構造と、
前記非磁性層とともに前記フリー層を挟むように配置された別の非磁性層と、
前記フリー層とともに前記別の非磁性層を挟むように配置され、温度に応じて磁気特性が変化する磁気変化層と
を備え、前記スピンバルブ構造には、形状の異なる切欠を1つ含む複数の切欠が周縁部に設けられていることを特徴とする磁気メモリ素子。 - 前記形状の異なる切欠の延びる方向とピン層の磁化の向きとが互いに直交していることを特徴とする請求項1に記載の磁気メモリ素子。
- 前記磁気変化層がアモルファス希土類遷移金属合金薄膜からなることを特徴とする請求項2に記載の磁気メモリ素子。
- 前記磁気変化層は、膜面内かつ形状の異なる切欠の延びる方向に沿った向きの磁化をある温度において示し、当該温度から昇温することにより磁化に膜面に垂直な成分が生じることを特徴とする請求項3に記載の磁気メモリ素子。
- 前記磁気変化層が、磁気補償温度Tcompを磁気メモリ素子の記憶保持動作温度域に有するN型フェリ磁性体であることを特徴とする請求項3に記載の磁気メモリ素子。
- 請求項1〜5のいずれかに記載の磁気メモリ素子を駆動する駆動方法であって、単極性電気パルスを印加することにより情報を記録することを特徴とする磁気メモリ素子の駆動方法。
- 情報を記憶するに用いる単極性電気パルスが互いに異なる高さの2つ以上のパルスからなり、2つ目のパルス高さを変えることにより異なる情報を記録することを特徴とする請求項6に記載の磁気メモリ素子の駆動方法。
- 磁気メモリ素子の記録状態によらず、記録される多値情報と、該多値情報の記録を行うための単極性電気パルスの種類とが互いに1対1に対応することを特徴とする請求項7に記載の磁気メモリ素子の駆動方法。
- 請求項1〜5のいずれかに記載の磁気メモリ素子と、
該磁気メモリ素子に直列に接続した整流素子と、
前記磁気メモリ素子を駆動するために、単極性電気パルスを生成する情報書換え手段と、
磁気メモリ素子を流れる電流量から記憶された情報を読出す手段と
を備えてなることを特徴とする不揮発記憶装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010517660A JP5387990B2 (ja) | 2008-06-25 | 2008-09-05 | 磁気メモリ素子とその駆動方法及び不揮発記憶装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008165989 | 2008-06-25 | ||
JP2008165989 | 2008-06-25 | ||
PCT/JP2008/066075 WO2009157101A1 (ja) | 2008-06-25 | 2008-09-05 | 磁気メモリ素子とその駆動方法及び不揮発記憶装置 |
JP2010517660A JP5387990B2 (ja) | 2008-06-25 | 2008-09-05 | 磁気メモリ素子とその駆動方法及び不揮発記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009157101A1 true JPWO2009157101A1 (ja) | 2011-12-01 |
JP5387990B2 JP5387990B2 (ja) | 2014-01-15 |
Family
ID=41444176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010517660A Expired - Fee Related JP5387990B2 (ja) | 2008-06-25 | 2008-09-05 | 磁気メモリ素子とその駆動方法及び不揮発記憶装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8709617B2 (ja) |
EP (1) | EP2306510B1 (ja) |
JP (1) | JP5387990B2 (ja) |
KR (1) | KR101461262B1 (ja) |
WO (1) | WO2009157101A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009157100A1 (ja) * | 2008-06-24 | 2009-12-30 | 富士電機ホールディングス株式会社 | スピンバルブ記録素子及び記憶装置 |
KR20140135566A (ko) * | 2013-05-16 | 2014-11-26 | 삼성전자주식회사 | 자기저항요소 및 이를 포함하는 메모리소자 |
JP2017139399A (ja) * | 2016-02-05 | 2017-08-10 | Tdk株式会社 | 磁気メモリ |
US10868233B2 (en) * | 2016-03-30 | 2020-12-15 | Intel Corporation | Approaches for strain engineering of perpendicular magnetic tunnel junctions (pMTJs) and the resulting structures |
WO2018179193A1 (ja) * | 2017-03-29 | 2018-10-04 | 国立大学法人東北大学 | 記憶素子及び記憶素子の駆動方法 |
CN111725394B (zh) * | 2019-09-06 | 2022-11-11 | 中国科学院上海微系统与信息技术研究所 | 一种磁性存储单元的加工方法、磁性随机存储器及设备 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0019506D0 (en) * | 2000-08-08 | 2000-09-27 | Univ Cambridge Tech | Magnetic element with switchable domain structure |
JP4458703B2 (ja) * | 2001-03-16 | 2010-04-28 | 株式会社東芝 | 磁気抵抗効果素子、その製造方法、磁気ランダムアクセスメモリ、携帯端末装置、磁気ヘッド及び磁気再生装置 |
JP3661652B2 (ja) * | 2002-02-15 | 2005-06-15 | ソニー株式会社 | 磁気抵抗効果素子および磁気メモリ装置 |
JP3769241B2 (ja) * | 2002-03-29 | 2006-04-19 | 株式会社東芝 | 磁気抵抗効果素子及び磁気メモリ |
US7095646B2 (en) * | 2002-07-17 | 2006-08-22 | Freescale Semiconductor, Inc. | Multi-state magnetoresistance random access cell with improved memory storage density |
US6654278B1 (en) * | 2002-07-31 | 2003-11-25 | Motorola, Inc. | Magnetoresistance random access memory |
JP2004179483A (ja) | 2002-11-28 | 2004-06-24 | Hitachi Ltd | 不揮発性磁気メモリ |
US6765823B1 (en) * | 2003-01-29 | 2004-07-20 | Micron Technology Incorporated | Magnetic memory cell with shape anisotropy |
EP1610386A4 (en) * | 2003-03-31 | 2009-04-01 | Japan Science & Tech Agency | TUNNEL TRANSISTOR WITH SPIN-DEPENDENT TRANSFER CHARACTERISTICS AND NON-VOLATILE MEMORY THEREOF |
JP4403264B2 (ja) | 2003-06-05 | 2010-01-27 | 独立行政法人産業技術総合研究所 | 環状単磁区構造微小磁性体およびその製造方法又はそれを用いた磁気記録素子 |
US7242045B2 (en) * | 2004-02-19 | 2007-07-10 | Grandis, Inc. | Spin transfer magnetic element having low saturation magnetization free layers |
US6992359B2 (en) * | 2004-02-26 | 2006-01-31 | Grandis, Inc. | Spin transfer magnetic element with free layers having high perpendicular anisotropy and in-plane equilibrium magnetization |
JP2005317739A (ja) * | 2004-04-28 | 2005-11-10 | Toshiba Corp | 磁気記憶装置およびその製造方法 |
US7355884B2 (en) * | 2004-10-08 | 2008-04-08 | Kabushiki Kaisha Toshiba | Magnetoresistive element |
US7599156B2 (en) * | 2004-10-08 | 2009-10-06 | Kabushiki Kaisha Toshiba | Magnetoresistive element having specially shaped ferromagnetic layer |
JP4682585B2 (ja) | 2004-11-01 | 2011-05-11 | ソニー株式会社 | 記憶素子及びメモリ |
WO2006092849A1 (ja) * | 2005-03-01 | 2006-09-08 | Fujitsu Limited | 磁気抵抗効果素子及び磁気メモリ装置 |
JP5062481B2 (ja) * | 2005-08-15 | 2012-10-31 | 日本電気株式会社 | 磁気メモリセル、磁気ランダムアクセスメモリ、及び磁気ランダムアクセスメモリへのデータ読み書き方法 |
US8063459B2 (en) * | 2007-02-12 | 2011-11-22 | Avalanche Technologies, Inc. | Non-volatile magnetic memory element with graded layer |
WO2007105358A1 (ja) * | 2006-03-02 | 2007-09-20 | Kyoto University | 強磁性ドットのコア回転素子及び強磁性ドットのコア利用情報記憶素子 |
US7881020B2 (en) * | 2007-05-11 | 2011-02-01 | Hitachi Global Storage Technologies Netherlands B.V. | Extraordinary magnetoresistive (EMR) device with novel lead structure |
JP2009252878A (ja) * | 2008-04-03 | 2009-10-29 | Renesas Technology Corp | 磁気記憶装置 |
WO2009157100A1 (ja) | 2008-06-24 | 2009-12-30 | 富士電機ホールディングス株式会社 | スピンバルブ記録素子及び記憶装置 |
JP2011210830A (ja) * | 2010-03-29 | 2011-10-20 | Renesas Electronics Corp | 磁気記憶素子および磁気記憶装置 |
JP2012209358A (ja) * | 2011-03-29 | 2012-10-25 | Renesas Electronics Corp | 磁気記憶素子および磁気記憶装置 |
-
2008
- 2008-09-05 KR KR1020107028481A patent/KR101461262B1/ko active IP Right Grant
- 2008-09-05 JP JP2010517660A patent/JP5387990B2/ja not_active Expired - Fee Related
- 2008-09-05 EP EP08810130A patent/EP2306510B1/en not_active Not-in-force
- 2008-09-05 WO PCT/JP2008/066075 patent/WO2009157101A1/ja active Application Filing
- 2008-09-05 US US13/001,343 patent/US8709617B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8709617B2 (en) | 2014-04-29 |
EP2306510B1 (en) | 2013-01-23 |
EP2306510A1 (en) | 2011-04-06 |
US20110188297A1 (en) | 2011-08-04 |
JP5387990B2 (ja) | 2014-01-15 |
WO2009157101A1 (ja) | 2009-12-30 |
KR101461262B1 (ko) | 2014-11-12 |
EP2306510A4 (en) | 2011-07-06 |
KR20110038626A (ko) | 2011-04-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101550080B1 (ko) | 자기 메모리 소자, 그 구동 방법 및 불휘발성 기억 장치 | |
JP5321991B2 (ja) | 磁気メモリー素子及びその駆動方法 | |
US8279661B2 (en) | Magnetic memory element, driving method for the same, and nonvolatile storage device | |
JP2008177421A (ja) | 記憶素子、メモリ | |
JP2012235015A (ja) | 記憶素子及び記憶装置 | |
KR101458263B1 (ko) | 자기 저항 소자 및 그것을 이용하는 기억 장치 | |
JP5387990B2 (ja) | 磁気メモリ素子とその駆動方法及び不揮発記憶装置 | |
JP5316967B2 (ja) | 磁気メモリー素子及び不揮発性記憶装置 | |
JP2008117930A (ja) | 記憶素子、メモリ | |
JP5356377B2 (ja) | 磁気メモリセル及び磁気ランダムアクセスメモリ | |
JP4438806B2 (ja) | メモリ | |
JP2008211059A (ja) | 記憶素子、メモリ | |
JP2005135495A (ja) | 磁気メモリの記録方法 | |
JP2008205186A (ja) | 記憶素子、メモリ | |
JP2010021584A (ja) | 記憶素子、メモリ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121204 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130802 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130822 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130913 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130926 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5387990 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |