JPWO2009051069A1 - Gmrセンサ - Google Patents
Gmrセンサ Download PDFInfo
- Publication number
- JPWO2009051069A1 JPWO2009051069A1 JP2009538075A JP2009538075A JPWO2009051069A1 JP WO2009051069 A1 JPWO2009051069 A1 JP WO2009051069A1 JP 2009538075 A JP2009538075 A JP 2009538075A JP 2009538075 A JP2009538075 A JP 2009538075A JP WO2009051069 A1 JPWO2009051069 A1 JP WO2009051069A1
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- JP
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- Prior art keywords
- gmr
- magnet
- gmr element
- divided
- element group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 239000011295 pitch Substances 0.000 description 13
- 230000005291 magnetic effect Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000010363 phase shift Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
Description
(実施の形態1)
図1は、本発明の実施の形態1に係るGMRセンサ10の要部の構成を説明するための図である。図1に示すように、実施の形態1に係るGMRセンサ10は、4個のGMR素子(巨大磁気抵抗効果素子)R1〜R4を備えている。これらの4個のGMR素子R1〜R4は、複数個に分割されている。ここでは、各GMR素子R1〜R4が、それぞれ3つに分割された場合について示しているが、これに限定されるものではない。
実施の形態2に係るGMRセンサ60は、上述した構成を有するブリッジ回路20を2つ備えるものである。なお、実施の形態2に係るGMRセンサ60がブリッジ回路20を2つ備えるのは、磁石Mの移動方向を検出可能とするためである。以下、実施の形態2に係るGMRセンサ60の構成について説明する。
Claims (3)
- 第1から第4のそれぞれのGMR素子群を、複数に分割されたGMR素子における分割後の素子部分で構成し、第1のGMR素子群の一端と第2のGMR素子群の一端との接続点に電圧印加端子を接続し、第1のGMR素子群の他端と第3のGMR素子群の一端との接続点に第1出力端子を接続し、第2のGMR素子群の他端と第4のGMR素子群の一端との接続点に第2出力端子を接続し、第3のGMR素子群の他端と第4のGMR素子群の他端との接続点にグランド端子を接続して構成されるブリッジ回路と、前記ブリッジ回路に対向配置される磁石の移動に伴って生じる第1出力端子の出力信号と第2出力端子の出力信号との差動量を検出する差動量検出手段と、前記差動量を絶対値に変換する絶対値変換手段とを具備するGMRセンサであって、
前記ブリッジ回路は、第1のGMR素子群を構成する前記分割後の素子部分と、第3のGMR素子群を構成する前記分割後の素子部分と交互に一列に配置して第1GMRユニットとする一方、第2のGMR素子群を構成する前記分割後の素子部分と、第4のGMR素子群を構成する前記分割後の素子部分と交互に一列に配置して第2GMRユニットとし、第1GMRユニットの前記分割後の素子部分と、第2GMRユニットの前記分割後の素子部分とが前記磁石の移動方向と直交する方向に並ぶように第1GMRユニット及び第2GMRユニットを並べて配置したことを特徴とするGMRセンサ。 - 前記ブリッジ回路を前記磁石の移動方向と直交する方向に2つ並べて配置すると共に、当該2つのブリッジ回路が有する前記分割後の素子部分が前記磁石の移動方向にずれるように当該2つのブリッジ回路を配置したことを特徴とする請求項1記載のGMRセンサ。
- 前記2つのブリッジ回路が有する前記分割後の素子部分が、当該分割後の素子部分の配置ピッチの1/4又は3/4の距離だけずれるように配置したことを特徴とする請求項2記載のGMRセンサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009538075A JP4861483B2 (ja) | 2007-10-15 | 2008-10-10 | Gmrセンサ |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007267759 | 2007-10-15 | ||
JP2007267759 | 2007-10-15 | ||
JP2009538075A JP4861483B2 (ja) | 2007-10-15 | 2008-10-10 | Gmrセンサ |
PCT/JP2008/068435 WO2009051069A1 (ja) | 2007-10-15 | 2008-10-10 | Gmrセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009051069A1 true JPWO2009051069A1 (ja) | 2011-03-03 |
JP4861483B2 JP4861483B2 (ja) | 2012-01-25 |
Family
ID=40567336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009538075A Expired - Fee Related JP4861483B2 (ja) | 2007-10-15 | 2008-10-10 | Gmrセンサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4861483B2 (ja) |
WO (1) | WO2009051069A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5102808B2 (ja) * | 2009-06-08 | 2012-12-19 | アルプス電気株式会社 | センサ素子および磁気式センサ |
WO2010150725A1 (ja) * | 2009-06-24 | 2010-12-29 | アルプス電気株式会社 | 磁気検出装置 |
JP2013234939A (ja) | 2012-05-10 | 2013-11-21 | Alps Electric Co Ltd | 磁気検出装置及び磁気エンコーダ |
JP5956900B2 (ja) * | 2012-10-17 | 2016-07-27 | アルプス電気株式会社 | 磁気エンコーダ |
CN103267955B (zh) | 2013-05-28 | 2016-07-27 | 江苏多维科技有限公司 | 单芯片桥式磁场传感器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59146720A (ja) * | 1983-02-05 | 1984-08-22 | Nissan Motor Co Ltd | 工業用ロボツトにおける締結具締付装置の支持装置 |
JPS59146720U (ja) * | 1983-03-23 | 1984-10-01 | フアナツク株式会社 | 磁気パルスエンコ−ダ |
JPS6288914A (ja) * | 1985-10-16 | 1987-04-23 | Nec Corp | 高度計測装置 |
JPS6288914U (ja) * | 1985-11-22 | 1987-06-06 | ||
JPH10221004A (ja) * | 1997-01-31 | 1998-08-21 | Mitsutoyo Corp | 変位測定器 |
JP4288676B2 (ja) * | 2005-09-30 | 2009-07-01 | 日立金属株式会社 | 磁気エンコーダー |
-
2008
- 2008-10-10 JP JP2009538075A patent/JP4861483B2/ja not_active Expired - Fee Related
- 2008-10-10 WO PCT/JP2008/068435 patent/WO2009051069A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP4861483B2 (ja) | 2012-01-25 |
WO2009051069A1 (ja) | 2009-04-23 |
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