JPWO2009031290A1 - 弾性波デバイス - Google Patents
弾性波デバイス Download PDFInfo
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- JPWO2009031290A1 JPWO2009031290A1 JP2009531109A JP2009531109A JPWO2009031290A1 JP WO2009031290 A1 JPWO2009031290 A1 JP WO2009031290A1 JP 2009531109 A JP2009531109 A JP 2009531109A JP 2009531109 A JP2009531109 A JP 2009531109A JP WO2009031290 A1 JPWO2009031290 A1 JP WO2009031290A1
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- 239000000758 substrate Substances 0.000 claims abstract description 92
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 71
- 230000005284 excitation Effects 0.000 claims abstract description 55
- 239000000126 substance Substances 0.000 claims abstract description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 42
- 230000000694 effects Effects 0.000 claims abstract description 14
- 230000032258 transport Effects 0.000 claims description 145
- 239000007788 liquid Substances 0.000 claims description 24
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 39
- 230000000644 propagated effect Effects 0.000 abstract description 8
- 230000005855 radiation Effects 0.000 abstract description 3
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- 238000004140 cleaning Methods 0.000 description 12
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- 239000011521 glass Substances 0.000 description 5
- 230000003466 anti-cipated effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000009429 electrical wiring Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
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- 238000002474 experimental method Methods 0.000 description 2
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- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
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- 239000010720 hydraulic oil Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- 238000005476 soldering Methods 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/36—Devices for manipulating acoustic surface waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
- B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0654—Lenses; Optical fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/089—Virtual walls for guiding liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0436—Moving fluids with specific forces or mechanical means specific forces vibrational forces acoustic forces, e.g. surface acoustic waves [SAW]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
- B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Clinical Laboratory Science (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Non-Mechanical Conveyors (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
(図において右端の二点鎖線で示す)を生成するとともに、同生成した液滴Dp’を更に搬送して電極206a’,206b’にて電気的特性を計測する。その後、液滴Dp’は更に搬送されて搬送路プレート205の中央部に位置決めされる(図において中央の二点鎖線で示す)。
Claims (12)
- 圧電効果により弾性表面波を発生する圧電基板と、
前記圧電基板の表面に前記弾性表面波を励振する励振電極と、
前記励振電極により前記圧電基板の表面に発生した前記弾性表面波を用いて被搬送物質を搬送する弾性波デバイスにおいて、
前記被搬送物質の搬送路を構成する搬送路プレートを、前記圧電基板の表面に発生した前記弾性表面波が伝播する伝播面に液層を介して配置したことを特徴とする弾性波デバイス。 - 請求項1に記載した弾性波デバイスにおいて、さらに、
前記搬送路プレート上の前記被搬送物質に関する物理量を検出するセンサを備える弾性波デバイス。 - 請求項2に記載した弾性波デバイスにおいて、
前記センサは、前記搬送路プレート上に配置された弾性波デバイス。 - 請求項3に記載した弾性波デバイスにおいて、さらに、
前記搬送路プレート上に配置されたセンサに対応する前記圧電基板上の位置に、前記励振電極を配置した弾性波デバイス。 - 請求項2ないし請求項4のうちのいずれか1つに記載した弾性波デバイスにおいて、さらに、
前記励振電極および前記センサの作動を制御する制御装置を備えた弾性波デバイス。 - 請求項1ないし請求項5のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記搬送路プレートは、前記伝播面から張り出した状態で配置された弾性波デバイス。 - 請求項1ないし請求項6のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記励振電極は、前記圧電基板に複数配置された弾性波デバイス。 - 請求項7に記載した弾性波デバイスにおいて、
前記複数の励振電極は、互いに異なる前記励振電極によりそれぞれ励起された前記弾性表面波の合成または組み合わせによって前記搬送物質を搬送するための位置および向きで配置される弾性波デバイス。 - 請求項1ないし請求項8のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記搬送路プレートは、前記被搬送物質を所定の方向に導くためのガイドを備える弾性波デバイス。 - 請求項1ないし請求項9のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記搬送路プレートは、光線を透過する物体で構成された弾性波デバイス。 - 請求項1ないし請求項10のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記液層は、水である弾性波デバイス。 - 請求項1ないし請求項11のうちのいずれか1つに記載した弾性波デバイスにおいて、
前記液層は、数μm以上ないし数十μm以下の厚さで形成された弾性波デバイス。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009531109A JP5283232B2 (ja) | 2007-09-03 | 2008-09-01 | 弾性波デバイス |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007228404 | 2007-09-03 | ||
JP2007228404 | 2007-09-03 | ||
JP2009531109A JP5283232B2 (ja) | 2007-09-03 | 2008-09-01 | 弾性波デバイス |
PCT/JP2008/002392 WO2009031290A1 (ja) | 2007-09-03 | 2008-09-01 | 弾性波デバイス |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009031290A1 true JPWO2009031290A1 (ja) | 2010-12-09 |
JP5283232B2 JP5283232B2 (ja) | 2013-09-04 |
Family
ID=40428614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009531109A Expired - Fee Related JP5283232B2 (ja) | 2007-09-03 | 2008-09-01 | 弾性波デバイス |
Country Status (3)
Country | Link |
---|---|
US (1) | US8118156B2 (ja) |
JP (1) | JP5283232B2 (ja) |
WO (1) | WO2009031290A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011006525A1 (en) * | 2009-07-13 | 2011-01-20 | Foss Analytical A/S | Analysis of an acoustically separated liquid |
GB0914762D0 (en) | 2009-08-24 | 2009-09-30 | Univ Glasgow | Fluidics apparatus and fluidics substrate |
GB201103211D0 (en) | 2011-02-24 | 2011-04-13 | Univ Glasgow | Fluidics apparatus, use of fluidics apparatus and process for the manufacture of fluidics apparatus |
GB201108462D0 (en) * | 2011-05-19 | 2011-07-06 | Univ Glasgow | Sample nebulization |
US8785855B2 (en) * | 2012-10-16 | 2014-07-22 | Uvic Industry Partnerships Inc. | Interlaced terahertz transceiver using plasmonic resonance |
KR101602172B1 (ko) * | 2014-01-29 | 2016-03-10 | 한국해양과학기술원 | 자기장과 토네이도 와류 기술을 이용한 장거리 준설토 운송 시스템 및 그 제어방법 |
DE102014109314A1 (de) * | 2014-07-03 | 2016-01-07 | Afag Holding Ag | Schwingförderer |
GB201420061D0 (en) | 2014-11-11 | 2014-12-24 | Univ Glasgow | Nebulisation of liquids |
US9620006B2 (en) | 2014-11-21 | 2017-04-11 | At&T Intellectual Property I, L.P. | Systems, methods, and computer readable storage devices for controlling an appearance of a surface using sound waves |
US9889564B2 (en) | 2015-07-08 | 2018-02-13 | Empire Technology Development Llc | Stable grasp point selection for robotic grippers with machine vision and ultrasound beam forming |
WO2017136509A1 (en) * | 2016-02-02 | 2017-08-10 | Sensor Electronic Technology, Inc. | Curing ultraviolet sensitive polymer materials |
US10054501B2 (en) * | 2016-03-16 | 2018-08-21 | Nissan North America, Inc. | In-situ stress detector for an electrode and a method of use |
CN109731621B (zh) * | 2019-01-02 | 2020-07-24 | 京东方科技集团股份有限公司 | 微流控基板及其制备方法、微流控面板 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01106453A (ja) | 1987-10-19 | 1989-04-24 | Mitsubishi Electric Corp | リードフレームの製造方法 |
JPH01106453U (ja) * | 1988-01-06 | 1989-07-18 | ||
JPH10327590A (ja) * | 1997-05-22 | 1998-12-08 | Yoshikazu Matsui | 弾性表面波アクチュエータ |
KR20040096614A (ko) * | 2002-03-11 | 2004-11-16 | 가부시기가이샤 아이 에이 아이 | 초음파 부상장치 |
CA2391171C (en) * | 2002-06-20 | 2010-01-12 | Cashcode Company Inc. | Motion sensor for flat objects |
JP2004173409A (ja) | 2002-11-20 | 2004-06-17 | Yamanashi Tlo:Kk | 弾性表面波の干渉を利用した液膜の流動制御方法および装置 |
DE10352944A1 (de) * | 2003-11-11 | 2005-06-23 | Technische Universität München | Vorrichtung zum berührungslosen Transportieren, Handhaben und Lagern von Bauteilen und Materialien |
JP2006009727A (ja) * | 2004-06-28 | 2006-01-12 | Fuji Xerox Co Ltd | 液体制御ユニット及び液体制御装置 |
JP4733404B2 (ja) | 2005-02-21 | 2011-07-27 | 日本無線株式会社 | 弾性波センサ |
JP4860935B2 (ja) | 2005-03-14 | 2012-01-25 | 日本無線株式会社 | 搬送システム |
JP4886332B2 (ja) | 2005-07-19 | 2012-02-29 | パナソニック電工株式会社 | 弾性表面波アクチュエータ |
JP2007068334A (ja) * | 2005-08-31 | 2007-03-15 | Japan Radio Co Ltd | 搬送システム |
JP2007129788A (ja) * | 2005-11-01 | 2007-05-24 | Japan Radio Co Ltd | 弾性波デバイス |
US7764005B2 (en) * | 2006-08-08 | 2010-07-27 | Palo Alto Research Center Incorporated | Traveling wave grids with agitated surface using piezoelectric effect and acoustic traveling waves |
JP2008101969A (ja) * | 2006-10-18 | 2008-05-01 | Japan Radio Co Ltd | 液体搬送方法および液体搬送装置 |
-
2008
- 2008-09-01 US US12/676,107 patent/US8118156B2/en not_active Expired - Fee Related
- 2008-09-01 JP JP2009531109A patent/JP5283232B2/ja not_active Expired - Fee Related
- 2008-09-01 WO PCT/JP2008/002392 patent/WO2009031290A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2009031290A1 (ja) | 2009-03-12 |
US8118156B2 (en) | 2012-02-21 |
JP5283232B2 (ja) | 2013-09-04 |
US20100206696A1 (en) | 2010-08-19 |
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