JPWO2007023692A1 - Electronic component mounting apparatus and mounting method - Google Patents

Electronic component mounting apparatus and mounting method Download PDF

Info

Publication number
JPWO2007023692A1
JPWO2007023692A1 JP2007532062A JP2007532062A JPWO2007023692A1 JP WO2007023692 A1 JPWO2007023692 A1 JP WO2007023692A1 JP 2007532062 A JP2007532062 A JP 2007532062A JP 2007532062 A JP2007532062 A JP 2007532062A JP WO2007023692 A1 JPWO2007023692 A1 JP WO2007023692A1
Authority
JP
Japan
Prior art keywords
substrate
electronic component
mounting
imaging
backup tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007532062A
Other languages
Japanese (ja)
Other versions
JP4664366B2 (en
Inventor
圭剛 広瀬
圭剛 広瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of JPWO2007023692A1 publication Critical patent/JPWO2007023692A1/en
Application granted granted Critical
Publication of JP4664366B2 publication Critical patent/JP4664366B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/36Assembling printed circuits with other printed circuits
    • H05K3/361Assembling flexible printed circuits with other printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/757Means for aligning
    • H01L2224/75743Suction holding means
    • H01L2224/75745Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/75Apparatus for connecting with bump connectors or layer connectors
    • H01L2224/758Means for moving parts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0269Marks, test patterns or identification means for visual or optical inspection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/16Inspection; Monitoring; Aligning
    • H05K2203/166Alignment or registration; Control of registration

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)

Abstract

基板を保持する保持テーブル(12)と、保持テーブルを水平方向に駆動するX、Y及びθ駆動源(14,19,20)と、電子部品(4)を保持し電子部品を基板の側部上面に実装する実装ツール(5)と、上下方向に駆動可能に設けられ基板の側部上面に実装ツールによって電子部品を実装するときに基板の側部下面を支持するバックアップツール(22)と、基板に電子部品を実装する前に基板と電子部品を撮像する撮像カメラ(24)と、撮像カメラからの撮像信号に基いて基板と電子部品を位置合わせした後、バックアップツールを上昇させて基板の側部下面を支持させ、その状態で撮像カメラによって基板を再度撮像させ、基板と電子部品とに位置ずれがあるときには基板と電子部品との位置合わせをやり直させる制御装置(25)とを具備する。A holding table (12) for holding the substrate, X, Y and θ drive sources (14, 19, 20) for driving the holding table in the horizontal direction, and holding the electronic component (4) and placing the electronic component on the side of the substrate A mounting tool (5) to be mounted on the upper surface, a backup tool (22) which is provided so as to be driven in the vertical direction and supports the lower surface of the side portion of the substrate when mounting electronic components on the upper surface of the side portion of the substrate by the mounting tool An imaging camera (24) for imaging the board and the electronic component before mounting the electronic component on the board, and aligning the board and the electronic component based on the imaging signal from the imaging camera, and then raising the backup tool A control device (2) that supports the lower surface of the side portion, causes the image pickup camera to pick up an image again in that state, and realigns the substrate and the electronic component when the substrate and the electronic component are misaligned. ); And a.

Description

この発明は基板の側部上面に電子部品を実装する電子部品の実装装置及び実装方法に関する。  The present invention relates to an electronic component mounting apparatus and mounting method for mounting an electronic component on a side surface of a substrate.

たとえば、液晶セルなどの基板には接着材料としての異方性導電部材を介してTCP(Tape Carrier Package)などの電子部品が圧着される。上記基板は、2枚のガラス板をシール剤を介して所定の間隔で接着し、これらのガラス板間に液晶を封入するとともに、各ガラス板の外面にそれぞれ偏光板を貼着して構成される。そして、上記構成の基板には、一方のガラス板の側部の、他方のガラス板の側部から外方へ突出した上面(貼り合されたときの内面)に、その側部の長手方向に沿ってテープ状で、両面粘着性の上記異方性導電部材を接着し、この異方性導電部材を介して上記電子部品を実装するようにしている。  For example, an electronic component such as a TCP (Tape Carrier Package) is pressure-bonded to a substrate such as a liquid crystal cell via an anisotropic conductive member as an adhesive material. The substrate is formed by adhering two glass plates at a predetermined interval via a sealant, enclosing liquid crystal between these glass plates, and attaching a polarizing plate to the outer surface of each glass plate. The And in the board | substrate of the said structure, on the upper surface (inner surface when bonded) of the side part of one glass plate which protruded outward from the side part of the other glass plate in the longitudinal direction of the side part The anisotropic conductive member having a double-sided adhesive property is adhered along a tape, and the electronic component is mounted through the anisotropic conductive member.

上記基板の側部上面に電子部品を実装する場合、基板に形成されたセル側リードに対して上記電子部品に形成されたアウタリードを精密に位置合わせしなければならない。最近ではたとえばリードの幅寸法が20μm、隣り合うアウタリードの間隔が50μm程度と配線パターンが高密度化してきており、したがって基板に対して電子部品を上記セル側リードのピッチ方向に精密に位置決めしなければ、互いのリードを電気的に確実に接続できなくなるということがある。  When an electronic component is mounted on the upper surface of the side part of the substrate, the outer lead formed on the electronic component must be precisely aligned with the cell-side lead formed on the substrate. Recently, for example, the lead pattern has a width of 20 μm, and the interval between adjacent outer leads is about 50 μm, and the wiring pattern has been densified. In this case, it may be impossible to electrically connect the leads to each other.

上記電子部品を上記基板に実装するための実装装置は、上記基板を保持する保持テーブルを有する。基板は電子部品が実装される側部を上記保持テーブルの側縁から外方へ突出させていて、その側部の下面をバックアップツールで保持した状態で、実装ツールに保持された電子部品を上記基板の側部の上面に実装するようにしている。  A mounting apparatus for mounting the electronic component on the board has a holding table for holding the board. The board protrudes outward from the side edge of the holding table to the side where the electronic component is mounted, and the electronic component held by the mounting tool is held in the state where the lower surface of the side is held by the backup tool. Mounting on the upper surface of the side portion of the substrate.

上記電子部品を上記基板に実装する前に、基板と電子部品とに設けられた、それぞれ一対の位置合わせマークを撮像カメラによって撮像し、その撮像結果に応じて基板と電子部品とを位置合わせする。そして、基板と電子部品とを上下方向に位置合わせしたならば、上記基板の側部下面を上記バックアップツールで支持し、その状態で上記実装ツールを下降させて上記電子部品を上記基板に実装するようにしている。  Before mounting the electronic component on the substrate, a pair of alignment marks provided on the substrate and the electronic component are imaged by an imaging camera, and the substrate and the electronic component are aligned according to the imaging result. . When the substrate and the electronic component are aligned in the vertical direction, the lower side surface of the substrate is supported by the backup tool, and the mounting tool is lowered in this state to mount the electronic component on the substrate. I am doing so.

ところで、上記基板と上記電子部品は、上記基板の側部下面をバックアップツールによって支持する前に撮像カメラによって撮像された撮像信号に基いて位置決めされる。位置決めされた基板は、その側部上面に電子部品を実装する前に、上記バックアップツールによって側部下面が支持される。その際、基板の側部はバックアップツールによって突き上げられることになる。  By the way, the board and the electronic component are positioned on the basis of an imaging signal imaged by the imaging camera before the side lower surface of the board is supported by the backup tool. Before the electronic component is mounted on the upper surface of the side portion of the positioned substrate, the lower surface of the side portion is supported by the backup tool. At that time, the side of the substrate is pushed up by the backup tool.

基板の側部がバックアップツールによって突き上げられると、突き上げられる前に対して基板の側部が上記電子部品に対して位置ずれが生じることがある。その位置ずれは、基板の撓みによって生じたり、基板が保持テーブルに応力が残留する状態で保持されている場合には、突き上げられることで応力の状態が変化して生じるなどのことがある。  When the side portion of the substrate is pushed up by the backup tool, the side portion of the substrate may be displaced with respect to the electronic component before being pushed up. The positional deviation may be caused by the bending of the substrate, or when the substrate is held in a state where stress remains on the holding table, the state of stress may be changed by being pushed up.

しかしながら、従来は基板の側部をバックアップツールによって支持する前に、基板と電子部品を撮像カメラによって撮像し、その撮像信号に基いてこれらを位置合わせしてから基板の側部下面をバックアップツールで支持したならば、上記実装ツールによって電子部品を実装していた。  However, conventionally, before supporting the side of the board with the backup tool, the board and the electronic component are imaged by the imaging camera, and these are aligned based on the imaging signal, and then the lower side of the side of the board is backed up by the backup tool. If supported, the electronic component was mounted by the mounting tool.

すなわち、基板の側部下面がバックアップツールによって突き上げられて支持されることで、基板の側部が電子部品に対して位置ずれが生じても、その位置ずれを補正することなく、電子部品を実装していた。そのため、電子部品の実装精度が低下し、基板と電子部品とのリードを電気的に確実に接続できなくなる虞があった。  In other words, if the side of the board is supported by being pushed up and supported by the backup tool, even if the side of the board is misaligned with respect to the electronic component, the electronic component can be mounted without correcting the misalignment. Was. For this reason, the mounting accuracy of the electronic component is lowered, and there is a possibility that the lead between the substrate and the electronic component cannot be electrically connected reliably.

この発明は、基板をバックアップツールによって支持することで位置ずれが生じたならば、その位置ずれを補正して基板に電子部品を実装することができるようにした電子部品の実装装置及び実装方法を提供することにある。  The present invention provides a mounting apparatus and mounting method for an electronic component that enables mounting of an electronic component on a substrate by correcting the positional shift if a positional shift occurs by supporting the substrate with a backup tool. It is to provide.

この発明は、基板の側部上面に電子部品を実装する実装装置であって、
上記基板を保持する保持手段と、
この保持手段を水平方向に駆動する駆動手段と、
上記電子部品を保持しこの電子部品を上記基板の側部上面に実装する実装手段と、
上下方向に駆動可能に設けられ上記基板の側部上面に上記実装手段によって上記電子部品を実装するときにこの基板の側部下面を支持するバックアップツールと、
上記基板に上記電子部品を実装する前にこれらの基板と電子部品を撮像する撮像手段と、
この撮像手段からの撮像信号に基いて上記基板と電子部品を位置合わせした後、上記バックアップツールを上昇させて上記基板の側部下面を支持させ、その状態で上記撮像手段によって上記基板を再度撮像させ、上記基板と電子部品とに位置ずれがあるときには上記基板と上記電子部品との位置合わせをやり直させる制御手段と
を具備したことを特徴とする電子部品の実装装置にある。
The present invention is a mounting apparatus for mounting electronic components on the upper side surface of a substrate,
Holding means for holding the substrate;
Driving means for driving the holding means in the horizontal direction;
Mounting means for holding the electronic component and mounting the electronic component on the side surface of the substrate;
A backup tool provided so as to be driven in the vertical direction, and supporting the lower surface of the side portion of the substrate when the electronic component is mounted on the upper surface of the side portion of the substrate by the mounting means;
Imaging means for imaging these substrates and electronic components before mounting the electronic components on the substrate;
After aligning the board and the electronic component based on the imaging signal from the imaging means, the backup tool is raised to support the lower side surface of the board, and in that state, the board is imaged again by the imaging means. An electronic component mounting apparatus comprising: a control means for re-aligning the substrate and the electronic component when the substrate and the electronic component are misaligned.

この発明は、基板の側部上面に電子部品を実装する実装方法であって、
上記基板の上記電子部品が実装される部分と上記電子部品を撮像する工程と
上記撮像に基いて上記基板と上記電子部品を位置合わせする工程と、
位置決めされた基板の側部下面をバックアップツールによって支持する工程と、
バックアップツールによって支持された基板を再び撮像して基板と上記電子部品とに位置ずれがあるか否かを判定する工程と、
位置ずれがあるときには上記基板を再度位置合わせする工程と、
上記基板と上記電子部品とに位置ずれがないときに上記バックアップツールによって支持された上記基板の側部上面に上記電子部品を実装する工程と
を具備したことを特徴とする電子部品の実装方法にある。
This invention is a mounting method for mounting an electronic component on the side surface of the substrate,
A portion of the substrate on which the electronic component is mounted, a step of imaging the electronic component, a step of aligning the substrate and the electronic component based on the imaging,
Supporting the lower side surface of the positioned substrate with a backup tool;
Re-imaging the substrate supported by the backup tool and determining whether there is a misalignment between the substrate and the electronic component;
A step of re-aligning the substrate when there is a misalignment;
And mounting the electronic component on the side surface of the substrate supported by the backup tool when there is no displacement between the substrate and the electronic component. is there.

図1はこの発明の一実施の形態の実装装置及び実装装置に電子部品を供給する供給装置を示す概略的構成図である。FIG. 1 is a schematic configuration diagram showing a mounting apparatus and a supply apparatus for supplying electronic components to the mounting apparatus according to an embodiment of the present invention. 図2は実装装置を示す側面図である。FIG. 2 is a side view showing the mounting apparatus. 図3は実装装置のバックアップツールの部分を示す側面図である。FIG. 3 is a side view showing a backup tool portion of the mounting apparatus. 図4は基板と電子部品に設けられた位置合わせマークを示す斜視図である。FIG. 4 is a perspective view showing alignment marks provided on the substrate and the electronic component. 図5は実装装置を制御する制御回路のブロック図である。FIG. 5 is a block diagram of a control circuit for controlling the mounting apparatus. 図6は基板に電子部品を実装するときの工程の一部を示すフローチャートである。FIG. 6 is a flowchart showing a part of the process when the electronic component is mounted on the substrate. 図7は図6に示す工程の続きの工程を示すフローチャートである。FIG. 7 is a flowchart showing a step subsequent to the step shown in FIG.

以下、この発明の一実施の形態を図面を参照して説明する。
図1は電子部品の供給装置及びこの供給装置から供給された電子部品を基板に実装する実装装置を示し、上記供給装置は部品供給テーブル1を備えている。この部品供給テーブル1は周方向に90度間隔で4つの載置部2(3つのみ図示)が設けられ、第1の駆動源3によって所定角度、たとえば90度ずつ回転駆動されるようになっている。上記各載置部2にはTCPなどの電子部品4が図示しない吸着アームなどによって供給されるようになっている。
An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 shows an electronic component supply apparatus and a mounting apparatus for mounting an electronic component supplied from the supply apparatus on a substrate. The supply apparatus includes a component supply table 1. The component supply table 1 is provided with four mounting portions 2 (only three are shown) at intervals of 90 degrees in the circumferential direction, and is rotationally driven by a first drive source 3 by a predetermined angle, for example, 90 degrees. ing. An electronic component 4 such as TCP is supplied to each mounting unit 2 by a suction arm or the like (not shown).

上記部品供給テーブル1の載置部2に供給載置された電子部品4は上記実装装置を構成する実装ツール5に受け渡される。上記実装ツール5は第2の駆動源6によって90度ずつ回転駆動されるインデックステーブル7の周方向に90度間隔で設けられている。上記実装ツール5はシリンダ8と、このシリンダ8のロッド9に取り付けられた吸着ヘッド11を有する。  The electronic component 4 supplied and mounted on the mounting portion 2 of the component supply table 1 is delivered to the mounting tool 5 constituting the mounting apparatus. The mounting tool 5 is provided at intervals of 90 degrees in the circumferential direction of the index table 7 that is rotated 90 degrees by the second drive source 6. The mounting tool 5 includes a cylinder 8 and a suction head 11 attached to a rod 9 of the cylinder 8.

上記吸着ヘッド11は、上記部品供給テーブル1と上記インデックステーブル7とが同期して回転駆動されることで、上記部品供給テーブル1の載置部2の上方に位置決めされる。その状態で、上記シリンダ8が駆動されると、上記吸着ヘッド11が下降して上記載置部2に供給載置された電子部品4を吸着保持するようになっている。  The suction head 11 is positioned above the mounting portion 2 of the component supply table 1 by the rotational drive of the component supply table 1 and the index table 7 in synchronization. In this state, when the cylinder 8 is driven, the suction head 11 is lowered to suck and hold the electronic component 4 supplied and placed on the placement portion 2.

上記吸着ヘッド11に吸着保持された電子部品4は液晶表示パネルなどの基板Wの側部上面に実装される。上記基板Wは保持手段としての保持テーブル12の上面に、上記電子部品4が実装される側部を上記保持テーブル12の側縁よりも外方に突出させて吸着保持されている。  The electronic component 4 sucked and held by the suction head 11 is mounted on the upper surface of the side portion of the substrate W such as a liquid crystal display panel. The substrate W is adsorbed and held on the upper surface of a holding table 12 as holding means with a side portion on which the electronic component 4 is mounted protruding outward from the side edge of the holding table 12.

図2に示すように、上記保持テーブル12はXY方向及びθ方向に駆動可能となっている。すなわち、保持テーブル12はXテーブル13にX駆動源14によって矢印で示すX方向に沿って駆動可能に設けられている。このXテーブル13の下面には上記X方向と直交するY方向に沿って一対の受け部材13aが設けられている。これらの受け部材13aはベース15上に上記Y方向に沿って設けられた一対のYガイド16に沿って移動可能に支持されている。  As shown in FIG. 2, the holding table 12 can be driven in the XY and θ directions. That is, the holding table 12 is provided on the X table 13 so that it can be driven by the X drive source 14 along the X direction indicated by the arrow. A pair of receiving members 13a are provided on the lower surface of the X table 13 along the Y direction orthogonal to the X direction. These receiving members 13a are supported on the base 15 so as to be movable along a pair of Y guides 16 provided along the Y direction.

上記Xテーブル13の下面にはめねじ体17が設けられ、このめねじ体17にはねじ軸18が螺合されている。このねじ軸18はY駆動源19によって回転駆動される。それによって、上記Xテーブル13はY方向に駆動される。さらに、保持テーブル12の上記基板Wを保持した部分はθ駆動源20によって水平面上を回転方向に駆動されるようになっている。それによって、上記保持テーブル12はX、Y方向及びθ方向に駆動可能となっている。  A female screw body 17 is provided on the lower surface of the X table 13, and a screw shaft 18 is screwed onto the female screw body 17. The screw shaft 18 is rotationally driven by a Y drive source 19. Thereby, the X table 13 is driven in the Y direction. Further, the portion of the holding table 12 that holds the substrate W is driven in the rotational direction on the horizontal plane by the θ drive source 20. Thereby, the holding table 12 can be driven in the X, Y and θ directions.

上記ベース15のX方向に沿う一端部には支持体21が立設されている。この支持体21の上端には支持体21と同じ幅寸法のバックアップツール22が設けられている。このバックアップツール22は、図1と図3に示す上記支持体21に内蔵されたシリンダなどのZ駆動源23によって図1乃至図3に矢印Zで示す上下方向に駆動されるようになっている。図3はバックアップツール22が下降した状態を示しており、図1と図2は上昇した状態を示している。  A support 21 is erected on one end of the base 15 along the X direction. A backup tool 22 having the same width as that of the support 21 is provided at the upper end of the support 21. The backup tool 22 is driven in a vertical direction indicated by an arrow Z in FIGS. 1 to 3 by a Z drive source 23 such as a cylinder built in the support 21 shown in FIGS. . FIG. 3 shows a state where the backup tool 22 is lowered, and FIGS. 1 and 2 show a state where the backup tool 22 is raised.

図3に示すように、上記支持体21の幅方向両側には撮像手段を構成する一対の撮像カメラ24が設けられている。図4に示すように、一対の撮像カメラ24は上記電子部品4に設けられた一対の第1の位置合わせマークm1と、上記基板Wの電子部品4を実装する端子部27の両側に設けられた一対の第2の位置合わせマークm2を同一視野で撮像する。  As shown in FIG. 3, a pair of imaging cameras 24 constituting imaging means are provided on both sides of the support 21 in the width direction. As shown in FIG. 4, the pair of imaging cameras 24 is provided on both sides of the pair of first alignment marks m1 provided on the electronic component 4 and the terminal portion 27 on which the electronic component 4 of the substrate W is mounted. The pair of second alignment marks m2 is imaged in the same field of view.

すなわち、上記電子部品4には、その一側辺に一対の上記第1の位置合わせマークm1が所定間隔で形成され、上記基板Wには一対の第1の位置合わせマークm1と同じ間隔で一対の上記第2の位置合わせマークm2が形成されている。  That is, a pair of the first alignment marks m1 is formed on one side of the electronic component 4 at a predetermined interval, and a pair of the first alignment marks m1 is formed on the substrate W at the same interval. The second alignment mark m2 is formed.

図5に示すように、一対の撮像カメラ24の撮像信号は制御装置25に入力される。制御装置25は撮像カメラ24からの信号をデジタル信号に変換し、その変換に基いてそれぞれ一対の電子部品4の第1の位置合わせマークm1と、基板Wの第2の位置合わせマークm2の位置ずれ量を算出する。  As shown in FIG. 5, the imaging signals of the pair of imaging cameras 24 are input to the control device 25. The control device 25 converts the signal from the imaging camera 24 into a digital signal, and the positions of the first alignment mark m1 of the pair of electronic components 4 and the second alignment mark m2 of the substrate W, respectively, based on the conversion. The amount of deviation is calculated.

そして、その算出に基いて上記X駆動源14、Y駆動源19及びθ駆動源20を駆動して上記保持テーブル12をX、Y及びθ方向に駆動し、上記基板Wと上記電子部品4とを位置合わせする。つまり、基板Wが実装ツール5に保持された電子部品4に対して位置合わせされる。  Based on the calculation, the X drive source 14, the Y drive source 19 and the θ drive source 20 are driven to drive the holding table 12 in the X, Y and θ directions, and the substrate W, the electronic component 4, and the like. Align. That is, the substrate W is aligned with the electronic component 4 held by the mounting tool 5.

基板Wが電子部品4に対して位置合わせされると、上記制御装置25はZ駆動源23を上昇方向に駆動して電子部品4が実装される基板Wの端部下面を上記バックアップツール22によって支持させる。  When the substrate W is aligned with the electronic component 4, the control device 25 drives the Z drive source 23 in the upward direction so that the lower surface of the end of the substrate W on which the electronic component 4 is mounted is moved by the backup tool 22. Support.

図3に示すように、上記バックアップツール22の幅寸法は上記電子部品4に設けられた一対の第1の位置合わせマークm1の間隔よりもわずかに小さく設定されている。つまり、電子部品4の幅寸法はバックアップツール22の幅寸法よりも大きくなっている。上記実装ツール5の幅寸法は上記バックアップツール22の幅寸法とほぼ同じに設定されている。  As shown in FIG. 3, the width dimension of the backup tool 22 is set slightly smaller than the distance between the pair of first alignment marks m1 provided on the electronic component 4. That is, the width dimension of the electronic component 4 is larger than the width dimension of the backup tool 22. The width dimension of the mounting tool 5 is set to be substantially the same as the width dimension of the backup tool 22.

それによって、上記基板Wがティーチング位置に位置決めされ、この基板Wの上方に上記インデックステーブル7の回転によって上記実装ツール5に保持された電子部品4が位置決めされると、支持体21の幅方向両側に設けられた一対の撮像カメラ24によって上下方向に位置する基板Wの第2の位置合わせマークm2と電子部品4の第1の位置合わせマークm1を下方から同一視野で撮像することができるようになっている。  Accordingly, the substrate W is positioned at the teaching position, and when the electronic component 4 held by the mounting tool 5 is positioned above the substrate W by the rotation of the index table 7, both sides of the support 21 in the width direction are positioned. The second alignment mark m2 of the substrate W positioned in the vertical direction and the first alignment mark m1 of the electronic component 4 can be imaged from below with the same visual field by the pair of imaging cameras 24 provided in the vertical direction. It has become.

つぎに、上記構成の実装装置によって基板Wの側部上面に電子部品を実装する際の動作を図6と図7に示すフローチャートを参照しながら説明する。
まず、ステップ1(以下、ステップをSとする)では保持テーブル12に基板Wが供給され、この基板Wが上記保持テーブル12に吸着保持される。S2では上記保持テーブル12が予めティーチングされた位置に駆動される。それによって、上記基板Wの電子部品4が実装される側部が上記バックアップツール22の上方に位置決めされる。ついで、S3ではインデックステーブル7が回転駆動されて、電子部品4を吸着保持した実装ツール5が上記基板Wの側部の近傍に位置決めされる。
Next, the operation when mounting the electronic component on the upper surface of the side portion of the substrate W by the mounting apparatus having the above configuration will be described with reference to the flowcharts shown in FIGS.
First, in step 1 (hereinafter, step is referred to as S), the substrate W is supplied to the holding table 12, and the substrate W is sucked and held on the holding table 12. In S2, the holding table 12 is driven to a previously taught position. Accordingly, the side portion on which the electronic component 4 of the substrate W is mounted is positioned above the backup tool 22. Next, in S3, the index table 7 is rotationally driven, and the mounting tool 5 holding the electronic component 4 by suction is positioned in the vicinity of the side portion of the substrate W.

電子部品4と基板Wとが予め設定されたティーチング位置に位置決めされると、S4では一対の撮像カメラ24によって電子部品4と基板Wに設けられた各一対の第1、第2の位置合わせマークm1、m2がそれぞれ撮像される。つまり、各撮像カメラ24は、それぞれわずかな高さの差で接近して位置する第1、第2の位置合わせマークm1、m2を同一視野で撮像する。  When the electronic component 4 and the substrate W are positioned at a preset teaching position, a pair of first and second alignment marks provided on the electronic component 4 and the substrate W by the pair of imaging cameras 24 in S4. m1 and m2 are respectively imaged. That is, each imaging camera 24 images the first and second alignment marks m1 and m2 that are located close to each other with a slight height difference in the same field of view.

撮像カメラ24の撮像信号は制御装置25に入力されて画像処理される。それによって、S5では、それぞれの第1の位置合わせマークm1と第2の位置合わせマークm2との位置ずれ量が算出される。つまり、電子部品4と、基板WとのX、Y及びθ方向の位置ずれ量が算出される。  The imaging signal of the imaging camera 24 is input to the control device 25 and subjected to image processing. Thereby, in S5, the amount of displacement between the first alignment mark m1 and the second alignment mark m2 is calculated. That is, the amount of positional deviation between the electronic component 4 and the substrate W in the X, Y, and θ directions is calculated.

つぎに、S6では制御装置25が算出した位置ずれ量に基いて上記保持テーブル12、つまり基板WをX、Y及びθ方向に駆動し、基板Wを電子部品4に対して位置合わせする。基板Wが電子部品4に対して位置合わせされると、S7ではバックアップツール22がZ駆動源23によって上昇方向に駆動される。それによって、基板Wは電子部品4が実装される部分の下面が上記バックアップツール22によって突き上げられて支持される。  Next, in S <b> 6, the holding table 12, that is, the substrate W is driven in the X, Y, and θ directions based on the displacement amount calculated by the control device 25, and the substrate W is aligned with the electronic component 4. When the substrate W is aligned with the electronic component 4, the backup tool 22 is driven in the upward direction by the Z drive source 23 in S7. Thereby, the lower surface of the part on which the electronic component 4 is mounted is pushed up and supported by the backup tool 22.

基板Wの側部をバックアップツール22によって支持すると、S8では一対の撮像カメラ24によって基板Wに設けられた第2の位置合わせマークm2が再び撮像される。つまり、基板Wの側部がバックアップツール22によって突き上げられた状態で、基板Wの第2の位置合わせマークm2と電子部品4の第1の位置合わせマークm1との座標が算出されて比較される。ついで、S9では算出された第1、第2の位置合わせマークm1、m2の座標に基いて基板Wと電子部品4とに位置ずれが生じているか否かが判定される。  When the side portion of the substrate W is supported by the backup tool 22, the second alignment mark m2 provided on the substrate W is imaged again by the pair of imaging cameras 24 in S8. That is, the coordinates of the second alignment mark m2 of the substrate W and the first alignment mark m1 of the electronic component 4 are calculated and compared in a state where the side portion of the substrate W is pushed up by the backup tool 22. . Next, in S9, it is determined whether or not a positional deviation has occurred between the substrate W and the electronic component 4 based on the calculated coordinates of the first and second alignment marks m1 and m2.

電子部品4と基板Wに位置ずれが生じていない場合にはS10となり、実装ツール5が下降方向に駆動されて吸着保持された電子部品4を基板Wに実装する。
基板Wをバックアップツール22によって突き上げることで、電子部品4と基板Wとに位置ずれが生じた場合にはS11となり、バックアップツール22が下降方向に駆動される。ついで、上記基板WがX、Y及びθ方向に駆動され、S8で求められた位置ずれ量に応じて電子部品4に対する基板Wの位置が補正される。基板Wの位置ずれが補正されるとS7に戻り、上述した動作が繰り返して行なわれる。
If there is no positional deviation between the electronic component 4 and the substrate W, the process proceeds to S10, and the mounting tool 5 is driven in the downward direction to mount the electronic component 4 held by suction on the substrate W.
If the electronic component 4 and the substrate W are misaligned by pushing up the substrate W by the backup tool 22, the process proceeds to S <b> 11 and the backup tool 22 is driven in the downward direction. Next, the substrate W is driven in the X, Y, and θ directions, and the position of the substrate W with respect to the electronic component 4 is corrected according to the amount of displacement obtained in S8. When the positional deviation of the substrate W is corrected, the process returns to S7 and the above-described operation is repeated.

S11で基板Wを再度位置合わせする際、バックアップツール22を下降させるようにしている。そのため、基板WをX、Y及びθ方向に駆動しても、基板Wの下面がバックアップツールの上端面に摺動することがないから、基板Wの位置合わせを円滑に、しかも確実に行なうことができる。  When aligning the substrate W again in S11, the backup tool 22 is lowered. Therefore, even if the substrate W is driven in the X, Y, and θ directions, the lower surface of the substrate W does not slide on the upper end surface of the backup tool, so that the alignment of the substrate W can be performed smoothly and reliably. Can do.

このように、基板Wに電子部品4を実装する際、撮像カメラ24の撮像結果に基いて電子部品4と基板Wを位置合わせして基板Wの側部下面をバックアップツール22によって支持する。そして、電子部品4を基板Wに実装する前に、基板Wを再び撮像カメラ24によって撮像する。その結果、電子部品4と基板Wとに位置ずれがあったならば、バックアップツール22を下降させて基板Wを再度位置決めし直すようにした。  As described above, when the electronic component 4 is mounted on the substrate W, the electronic component 4 and the substrate W are aligned based on the imaging result of the imaging camera 24, and the lower side surface of the substrate W is supported by the backup tool 22. Then, before the electronic component 4 is mounted on the substrate W, the substrate W is imaged again by the imaging camera 24. As a result, if the electronic component 4 and the substrate W are misaligned, the backup tool 22 is lowered to reposition the substrate W again.

つまり、基板Wに電子部品4を実装する際、基板Wをバックアップツール22で突き上げることで、基板Wに撓みが生じるなどして電子部品4に対する位置がずれても、その位置ずれを補正してから電子部品4を実装するようにした。そのため、電子部品4を基板Wに対して高い位置決め精度で実装することが可能となる。  In other words, when the electronic component 4 is mounted on the substrate W, even if the position of the electronic component 4 is displaced by pushing up the substrate W with the backup tool 22 and the substrate W is deflected, the positional displacement is corrected. The electronic component 4 is mounted. For this reason, the electronic component 4 can be mounted on the substrate W with high positioning accuracy.

なお、上記一実施の形態では、バックアップツールによって基板の側部下面を支持した後、撮像カメラによって電子部品と基板を撮像したならば、その撮像に基く基板の位置決め補正が繰り返して行われることになるが、バックアップツールによって基板を支持することによって生じる位置ずれは、通常は1回の補正で補正され、つぎに基板をバックアップツールによって突き上げて支持したときに位置ずれが生じることはほとんどない。  In the above embodiment, if the electronic component and the substrate are imaged by the imaging camera after the side surface of the substrate is supported by the backup tool, the positioning correction of the substrate is repeatedly performed based on the imaging. However, the misalignment caused by supporting the substrate by the backup tool is normally corrected by one correction, and the misalignment hardly occurs when the substrate is then pushed up and supported by the backup tool.

したがって、基板をバックアップツールによって支持したときの位置ずれ補正は1回だけとし、2回目にバックアップツールによって基板を支持したときには電子部品と基板の位置ずれを検出せずに、上記電子部品を基板に実装するようにしてもよい。  Therefore, when the substrate is supported by the backup tool, the positional deviation correction is performed only once, and when the substrate is supported by the backup tool for the second time, the electronic component is mounted on the substrate without detecting the positional deviation between the electronic component and the substrate. You may make it mount.

また、電子部品と基板とに位置ずれが生じた場合、S11ではバックアップツールを下降方向に駆動してから位置合わせを行なうようにしたが、バックアップツールを下降させずに位置合わせを行なうようにしても差し支えない。  When the electronic component and the substrate are misaligned, the alignment is performed after the backup tool is driven in the downward direction in S11. However, the alignment is performed without lowering the backup tool. There is no problem.

バックアップツールを下降させずに位置合わせを行なえば、位置決めされた基板がバックアップツールによって再び突き上げられるということがないから、突き上げによって基板に位置ずれが生じる虞を除去することができる。  If alignment is performed without lowering the backup tool, the positioned substrate will not be pushed up again by the backup tool, so that it is possible to eliminate the possibility that the substrate is displaced due to the pushing-up.

さらに、バックアップツールを下降させずに位置合わせを行なえば、基板と電子部品とのX、Y及びθ方向の位置を補正した後、バックアップツールを上昇させるという動作を行なわずに、基板に電子部品を実装できるから、実装に要するタクトタイムを短縮することができる。  Furthermore, if alignment is performed without lowering the backup tool, the position of the board and the electronic component in the X, Y, and θ directions is corrected, and then the backup tool is raised without performing the operation of moving the electronic component to the board. Therefore, the tact time required for mounting can be shortened.

また、基板をX、Y及びθ方向に駆動して電子部品に対する位置合わせを行うようにしたが、電子部品を基板に供給する実装ツールがインデックステーブルに設けられておらず、X、Y及びθ方向に駆動可能な状態であれば、基板の位置を補正せず、電子部品の位置を補正するようにしてもよい。  Further, the substrate is driven in the X, Y, and θ directions to perform alignment with the electronic component. However, a mounting tool that supplies the electronic component to the substrate is not provided in the index table, and the X, Y, and θ are not provided. As long as it can be driven in the direction, the position of the electronic component may be corrected without correcting the position of the substrate.

基板に代わり電子部品をX、Y及びθ方向に駆動して位置合わせすれば、保持テーブルとともに基板を移動させて位置合わせする場合に比べて慣性力や振動の発生を低減させることができるから、位置合わせに要する時間の短縮が図れるばかりか、位置合わせ精度及び実装精度を向上させることができ、さらにはタクトタイムの短縮による生産性の向上を図ることができる。  If the electronic components are driven and aligned in the X, Y and θ directions instead of the substrate, it is possible to reduce the generation of inertial force and vibration compared to the case where the substrate is moved together with the holding table for alignment. Not only can the time required for alignment be shortened, but also the alignment accuracy and mounting accuracy can be improved, and further, the productivity can be improved by reducing the tact time.

この発明によれば、基板と電子部品を位置合わせして基板の側部をバックアップツールで支持したならば、基板を再度撮像して位置ずれがあるか否かを確認し、位置ずれがある場合には修正するため、基板に対して電子部品を高精度に実装することが可能となる。  According to the present invention, when the substrate and the electronic component are aligned and the side portion of the substrate is supported by the backup tool, the substrate is imaged again to check whether there is a displacement, and there is a displacement. Therefore, the electronic component can be mounted on the substrate with high accuracy.

Claims (7)

基板の側部上面に電子部品を実装する実装装置であって、
上記基板を保持する保持手段と、
この保持手段を水平方向に駆動する駆動手段と、
上記電子部品を保持しこの電子部品を上記基板の側部上面に実装する実装手段と、
上下方向に駆動可能に設けられ上記基板の側部上面に上記実装手段によって上記電子部品を実装するときにこの基板の側部下面を支持するバックアップツールと、
上記基板に上記電子部品を実装する前にこれらの基板と電子部品を撮像する撮像手段と、
この撮像手段からの撮像信号に基いて上記基板と電子部品を位置合わせした後、上記バックアップツールを上昇させて上記基板の側部下面を支持させ、その状態で上記撮像手段によって上記基板を再度撮像させ、上記基板と電子部品とに位置ずれがあるときには上記基板と上記電子部品との位置合わせをやり直させる制御手段と
を具備したことを特徴とする電子部品の実装装置。
A mounting device for mounting electronic components on the side surface of a substrate,
Holding means for holding the substrate;
Driving means for driving the holding means in the horizontal direction;
Mounting means for holding the electronic component and mounting the electronic component on the side surface of the substrate;
A backup tool provided so as to be driven in the vertical direction, and supporting the lower surface of the side portion of the substrate when the electronic component is mounted on the upper surface of the side portion of the substrate by the mounting means;
Imaging means for imaging these substrates and electronic components before mounting the electronic components on the substrate;
After aligning the board and the electronic component based on the imaging signal from the imaging means, the backup tool is raised to support the lower side surface of the board, and in that state, the board is imaged again by the imaging means. An electronic component mounting apparatus comprising: control means for re-aligning the substrate and the electronic component when the substrate and the electronic component are misaligned.
上記制御手段は、上記基板と電子部品とに位置ずれがあるときには上記バックアップツールを下降させて上記基板と上記電子部品との位置合わせをやり直させることを特徴とする請求項1記載の電子部品の実装装置。  2. The electronic component according to claim 1, wherein the control unit lowers the backup tool and repositions the substrate and the electronic component when the substrate and the electronic component are misaligned. 3. Mounting device. 上記基板には上記電子部品が実装される位置に一対の第1の位置合わせマークが所定の間隔で設けられ、上記電子部品には第1の位置合わせマークと対応する間隔で一対の第2の位置合わせマークが設けられ、上記バックアップツールは一対の第2の位置合わせマークの間隔よりも幅寸法が小さく設定されていて、
上記撮像手段は対向する位置にある一方の第1、第2の位置合わせマークと、他方の第1、第2の位置合わせマークをそれぞれ同一視野で撮像する一対の撮像カメラであることを特徴とする請求項1記載の電子部品の実装装置。
The substrate is provided with a pair of first alignment marks at a predetermined interval at a position where the electronic component is mounted, and the electronic component has a pair of second alignment marks at an interval corresponding to the first alignment mark. An alignment mark is provided, and the backup tool is set to have a width dimension smaller than the interval between the pair of second alignment marks,
The imaging means is a pair of imaging cameras for imaging the first and second alignment marks at opposite positions and the other first and second alignment marks in the same field of view. The electronic component mounting apparatus according to claim 1.
上記実装手段はインデックステーブルの周方向に所定間隔で設けられた複数の実装ヘッドであって、上記基板と電子部品の位置合わせは上記基板を上記駆動手段によって水平方向に駆動して行うことを特徴とする請求項1記載の電子部品の実装装置。  The mounting means is a plurality of mounting heads provided at predetermined intervals in the circumferential direction of the index table, and the positioning of the board and the electronic component is performed by driving the board in the horizontal direction by the driving means. The electronic component mounting apparatus according to claim 1. 基板の側部上面に電子部品を実装する実装方法であって、
上記基板の上記電子部品が実装される部分と上記電子部品を撮像する工程と
上記撮像に基いて上記基板と上記電子部品を位置合わせする工程と、
位置合わせされた基板の側部下面をバックアップツールによって支持する工程と、
バックアップツールによって支持された基板を再び撮像して基板と上記電子部品とに位置ずれがあるか否かを判定する工程と、
位置ずれがあるときには上記基板を再度位置合わせする工程と、
上記基板と上記電子部品とに位置ずれがないときに上記バックアップツールによって支持された上記基板の側部上面に上記電子部品を実装する工程と
を具備したことを特徴とする電子部品の実装方法。
A mounting method for mounting electronic components on a side surface of a substrate,
A portion of the substrate on which the electronic component is mounted, a step of imaging the electronic component, a step of aligning the substrate and the electronic component based on the imaging,
Supporting the bottom side surface of the aligned substrate with a backup tool;
Re-imaging the substrate supported by the backup tool and determining whether there is a misalignment between the substrate and the electronic component;
A step of re-aligning the substrate when there is a misalignment;
Mounting the electronic component on the side surface of the substrate supported by the backup tool when there is no positional deviation between the substrate and the electronic component.
上記基板を再度位置合わせするとき、上記バックアップツールを下降させることを特徴とする請求項5記載の電子部品の実装方法。  6. The electronic component mounting method according to claim 5, wherein when the substrate is aligned again, the backup tool is lowered. 上記基板には一対の第1の位置合わせマークが設けられ、上記電子部品には一対の第2の位置合わせマークが設けられていて、上記第1の位置合わせマークと第2の位置合わせマークを同一視野で撮像することを特徴とする請求項4記載の電子部品の実装方法。  The substrate is provided with a pair of first alignment marks, and the electronic component is provided with a pair of second alignment marks. The first alignment mark and the second alignment mark are 5. The electronic component mounting method according to claim 4, wherein imaging is performed in the same field of view.
JP2007532062A 2005-08-24 2006-08-10 Electronic component mounting apparatus and mounting method Active JP4664366B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005243085 2005-08-24
JP2005243085 2005-08-24
PCT/JP2006/315844 WO2007023692A1 (en) 2005-08-24 2006-08-10 Electronic component mounting device and method

Publications (2)

Publication Number Publication Date
JPWO2007023692A1 true JPWO2007023692A1 (en) 2009-02-26
JP4664366B2 JP4664366B2 (en) 2011-04-06

Family

ID=37771443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007532062A Active JP4664366B2 (en) 2005-08-24 2006-08-10 Electronic component mounting apparatus and mounting method

Country Status (5)

Country Link
JP (1) JP4664366B2 (en)
KR (1) KR101014292B1 (en)
CN (1) CN100596266C (en)
TW (1) TW200715436A (en)
WO (1) WO2007023692A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4829813B2 (en) * 2007-03-01 2011-12-07 芝浦メカトロニクス株式会社 Electronic component mounting apparatus and mounting method
KR101095189B1 (en) * 2007-05-25 2011-12-16 시바우라 메카트로닉스 가부시끼가이샤 Electronic component mounting device and mounting method
JP4937857B2 (en) * 2007-08-03 2012-05-23 芝浦メカトロニクス株式会社 Electronic component mounting apparatus and mounting method
JP4918015B2 (en) * 2007-11-01 2012-04-18 パナソニック株式会社 Component mounting method
JP4852513B2 (en) * 2007-11-01 2012-01-11 パナソニック株式会社 Component mounting system
US8319831B2 (en) * 2009-03-25 2012-11-27 Fuji Xerox Co., Ltd. Component manipulating method, component extracting method, component assembling method, component manipulating apparatus, component extracting apparatus, and component assembling apparatus
JP2011035028A (en) * 2009-07-30 2011-02-17 Juki Corp Electronic component-mounting apparatus
KR101096460B1 (en) 2010-10-01 2011-12-20 다래비젼주식회사 Substrate attachment attaching method using substrate attachment attaching apparatus
DE102015106224B4 (en) * 2015-04-22 2022-09-01 Asm Assembly Systems Gmbh & Co. Kg Process for repeated measurement of a component carrier located in a placement area of a placement machine, as well as placement machine and computer program for carrying out this method
JP6675356B2 (en) * 2016-08-16 2020-04-01 芝浦メカトロニクス株式会社 Electronic component mounting equipment
CN110301172B (en) * 2017-02-20 2022-02-01 株式会社富士 Component mounting system and component mounting method
JP7285303B2 (en) * 2017-09-28 2023-06-01 芝浦メカトロニクス株式会社 Mounting equipment for electronic components and method for manufacturing display members

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000277991A (en) * 1999-03-25 2000-10-06 Shibaura Mechatronics Corp Apparatus and method for mounting component
JP2005123372A (en) * 2003-10-16 2005-05-12 Matsushita Electric Ind Co Ltd Workpiece mounting apparatus and workpiece mounting method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10284891A (en) * 1997-04-02 1998-10-23 Matsushita Electric Ind Co Ltd Component mounter and mounting method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000277991A (en) * 1999-03-25 2000-10-06 Shibaura Mechatronics Corp Apparatus and method for mounting component
JP2005123372A (en) * 2003-10-16 2005-05-12 Matsushita Electric Ind Co Ltd Workpiece mounting apparatus and workpiece mounting method

Also Published As

Publication number Publication date
CN100596266C (en) 2010-03-24
KR20080046614A (en) 2008-05-27
WO2007023692A1 (en) 2007-03-01
CN101223840A (en) 2008-07-16
TWI311792B (en) 2009-07-01
KR101014292B1 (en) 2011-02-16
JP4664366B2 (en) 2011-04-06
TW200715436A (en) 2007-04-16

Similar Documents

Publication Publication Date Title
JP4664366B2 (en) Electronic component mounting apparatus and mounting method
US8074351B2 (en) Part mounting device and part mounting method
KR100913579B1 (en) Apparatus and method for Bonding Printed Circuit on FPD Panel
CN210429751U (en) Semiconductor device chip mounting device and mechanism for aligning multiple semiconductor devices
JP2012004143A (en) Mounting device and mounting method for electronic component
KR100722452B1 (en) Apparatus and method for bonding printed circuit on fpd panel
WO2011016307A1 (en) Apparatus and method for mounting electronic component
CN108091287B (en) Panel lighting inspection device
JP2007207855A (en) Position recognition device of electronic component
JP4829813B2 (en) Electronic component mounting apparatus and mounting method
JP2003249794A (en) Camera unit, table unit, method and apparatus for mounting component
KR20080015240A (en) Apparatus and control method for clamp for multi shape in plat display panel
JP4323410B2 (en) Electronic component mounting apparatus and mounting method
KR100487581B1 (en) Bonding device of surface mounting equipment
JP4262162B2 (en) Electronic component mounting equipment
JP2009088158A (en) Component mounting method and device
JP2015177086A (en) Part mounting device and method
KR100983337B1 (en) Apparatus for Bonding Driving Printed Circuit on FPD Panel
JP3886850B2 (en) Alignment mark position detection method
JP2011165702A (en) Device and method for mounting electronic component
JP2003234373A (en) Apparatus and method for mounting electronic component, and apparatus and method for adhering adhesive material
JP2006120928A (en) Mounting apparatus and method of electronic component
JP4802909B2 (en) Alignment method and alignment apparatus
KR20160018912A (en) Apparatus for folding a printed circuit board
JP5095544B2 (en) Electronic component mounting apparatus and mounting method

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100625

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100914

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101008

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110104

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110106

R150 Certificate of patent or registration of utility model

Ref document number: 4664366

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140114

Year of fee payment: 3