JPWO2006101152A1 - 不揮発性メモリ素子 - Google Patents
不揮発性メモリ素子 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 22
- 230000006870 function Effects 0.000 claims abstract description 21
- 239000006104 solid solution Substances 0.000 claims abstract description 20
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 15
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 15
- 229910052705 radium Inorganic materials 0.000 claims abstract description 5
- 229910002182 La0.7Sr0.3MnO3 Inorganic materials 0.000 claims description 19
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 13
- 150000002910 rare earth metals Chemical class 0.000 claims description 13
- 239000004020 conductor Substances 0.000 claims description 6
- 230000008859 change Effects 0.000 abstract description 32
- 238000009413 insulation Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 19
- 229910004121 SrRuO Inorganic materials 0.000 description 16
- 230000005684 electric field Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 239000012212 insulator Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000003446 memory effect Effects 0.000 description 5
- 239000002052 molecular layer Substances 0.000 description 5
- 229910000314 transition metal oxide Inorganic materials 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 229910002367 SrTiO Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0007—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising metal oxide memory material, e.g. perovskites
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- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
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- H10N70/026—Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
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- H10N70/883—Oxides or nitrides
- H10N70/8836—Complex metal oxides, e.g. perovskites, spinels
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Abstract
Description
以下実施例にしたがって、本発明を実施するための最良の形態を詳細に説明する。
オーミック電極となる、80nm厚のSrRuO3のような深い仕事関数の導電体を絶縁体であるSrTiO3酸化物単結晶基板上に基板温度700℃、酸素圧力100mTorrの作製条件でパルスレーザーデポジションにより形成し、続いて同じ作製条件でp型半導体となる、Pr0.7Ca0.3MnO3を100nm形成し、続いてその上に同じ作製条件で2nm厚の、Pr0.7Ca0.3MnO3よりもバンド幅が小さく絶縁性の高いSm0.7Ca0.3MnO3を形成し、その後、温度を400℃に下げて、酸素圧力400Torrで30分間アニール処理を行った。
なお従来構造のものでは、図4の(a)に示す条件(パルス電圧時間幅100μs)内では、電界・電流誘起抵抗変化メモリ効果はほとんど認められなかった。
これは、Pr0.7Ca0.3MnO3よりもバンド幅の小さい、すなわちPr0.7Ca0.3MnO3よりも絶縁性の高いSm0.7Ca0.3MnO3を介在させることにより、Ti/Pr0.7Ca0.3MnO3接合の特性が改善されたものである。
またSm0.7Ca0.3MnO3において、Smに代えて、Nd等の他の希土類を1種又は2種以上の希土類からなる固溶体を採用した場合にも、希土類の平均イオン半径がPrよりも小さい場合に同様の改善が認められた。また希土類とCaの比率についても、Rb1−yCayMnO3において、Pr0.7Ca0.3MnO3よりもより絶縁性の高くなる0<y<0.3の範囲で、適宜選択が可能である。
オーミック電極となる、80nm厚のSrRuO3のような深い仕事関数の導電体を絶縁体であるSrTiO3酸化物単結晶基板上に基板温度700℃、酸素圧力100mTorrの作製条件でパルスレーザーデポジションにより形成し、続いて同じ作製条件でペロブスカイト型遷移金属酸化物金属となる、La0.7Sr0.3MnO3を100nm形成し、続いてその上に同じ作製条件で1分子層(0.4nm)から5分子層(2nm)厚の、La0.7Sr0.3MnO3よりもバンド幅が小さく絶縁性の高いSm0.7Ca0.3MnO3を形成し、その後、温度を400℃に下げて、酸素圧力400Torrで30分間アニール処理を行った。
これは、La0.7Sr0.3MnO3よりもバンド幅の小さい、すなわちLa0.7Sr0.3MnO3よりも絶縁性の高いSm0.7Ca0.3MnO3を介在させることにより、Ti/La0.7Sr0.3MnO3接合の電界・電流誘起抵抗変化メモリ特性が改善されるとともに制御可能となったものである。
なおTi/La0.7Sr0.3MnO3/SrRuO3接合からなる素子では、図7に示す条件(パルス電圧時間幅100μs)内では、電界・電流誘起抵抗変化メモリ効果は認められなかった。
Claims (10)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物Ra1−xMaxMnO3との間に、前記Ra1−xMaxMnO3よりも絶縁性の高いRb1−yMbyMnO3を介在させたことを特徴とする不揮発性メモリ素子。(式中、Ma及びMbは、アルカリ土類金属を表し、1種又は2種以上のアルカリ土類金属の固溶体である。Ra及びRbは希土類を表し、1種又は2種以上の希土類の固溶体である。Rbの平均イオン半径は、Raの平均イオン半径よりも小さいものとする。0<x,y<1)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物Ra1−xCaxMnO3との間に、前記Ra1−xCaxMnO3よりも絶縁性の高いRb1−yCayMnO3を介在させたことを特徴とする不揮発性メモリ素子。(式中、Ra及びRbは希土類を表し、1種又は2種以上の希土類の固溶体である。Rbの平均イオン半径は、Raの平均イオン半径よりも小さいものとする。0<x,y<1)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物Pr0.7Ca0.3MnO3との間に、前記Pr0.7Ca0.3MnO3よりも絶縁性の高いRb1−yCayMnO3を介在させたことを特徴とする不揮発性メモリ素子。(式中、Rbは希土類を表し、1種又は2種以上の希土類の固溶体である。0<y<1)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物Pr0.7Ca0.3MnO3との間に、Sm0.7Ca0.3MnO3を介在させたことを特徴とする不揮発性メモリ素子。
- 上記ペロブスカイト型Mn酸化物Ra1−xCaxMnO3又はペロブスカイト型Pr0.7Ca0.3MnO3とのオーミック電極として、深い仕事関数を有する導電体を使用した請求項2乃至4のいずれか1項に記載の不揮発性メモリ素子。
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物Ra1−xSrxMnO3との間に、前記Ra1−xSrxMnO3よりも絶縁性の高いRb1−yCayMnO3を介在させたことを特徴とする不揮発性メモリ素子。(式中、Ra及びRbは希土類を表し、1種又は2種以上の希土類の固溶体である。Rbの平均イオン半径は、Raの平均イオン半径よりも小さいものとする。0<x,y<1)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物La0.7Sr0.3MnO3との間に、前記La0.7Sr0.3MnO3よりも絶縁性の高いRb1−yCayMnO3を介在させたことを特徴とする不揮発性メモリ素子。(式中、Rbは希土類を表し、1種又は2種以上の希土類の固溶体である。0<y<1)
- 浅い仕事関数又は小さな電気陰性度を有する金属とペロブスカイト型Mn酸化物La0.7Sr0.3MnO3との間に、Sm0.7Ca0.3MnO3を介在させたことを特徴とする不揮発性メモリ素子。
- 上記ペロブスカイト型Mn酸化物Ra1−xCaxMnO3又はペロブスカイト型Pr0.7Ca0.3MnO3あるいはRa1−xSrxMnO3又はペロブスカイト型La0.7Sr0.3MnO3とのオーミック電極として、深い仕事関数を有する導電体を使用した請求項6乃至8のいずれか1項に記載の不揮発性メモリ素子。
- 浅い仕事関数又は小さな電気陰性度を有する金属として、Tiを使用した請求項1乃至9のいずれか1項に記載の不揮発性メモリ素子。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007026509A1 (ja) * | 2005-08-29 | 2007-03-08 | Sharp Kabushiki Kaisha | 可変抵抗素子及びその製造方法 |
KR100738116B1 (ko) * | 2006-07-06 | 2007-07-12 | 삼성전자주식회사 | 가변 저항 물질을 포함하는 비휘발성 메모리 소자 |
JP4868513B2 (ja) * | 2006-07-28 | 2012-02-01 | シャープ株式会社 | 抵抗変化型不揮発性メモリ素子及び不揮発性半導体記憶装置 |
KR100855966B1 (ko) * | 2007-01-04 | 2008-09-02 | 삼성전자주식회사 | 멀티 디코딩이 가능한 양방향성 rram 및 이를 이용하는데이터 기입 방법 |
KR100969807B1 (ko) * | 2008-04-11 | 2010-07-13 | 광주과학기술원 | 반응성 금속막을 구비하는 저항 변화 메모리 소자 및 이의동작방법 |
US8304754B2 (en) | 2008-11-12 | 2012-11-06 | Sandisk 3D Llc | Metal oxide materials and electrodes for Re-RAM |
WO2010147073A1 (ja) * | 2009-06-15 | 2010-12-23 | 株式会社村田製作所 | 抵抗スイッチング・メモリー素子 |
KR20170143023A (ko) * | 2009-10-21 | 2017-12-28 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 제작방법 |
KR20170072965A (ko) | 2009-11-13 | 2017-06-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링 타겟 및 그 제조방법, 및 트랜지스터 |
KR20120106950A (ko) * | 2009-11-13 | 2012-09-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 스퍼터링 타겟 및 그 제작 방법 및 트랜지스터 |
WO2011058865A1 (en) * | 2009-11-13 | 2011-05-19 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor devi ce |
KR20110072921A (ko) * | 2009-12-23 | 2011-06-29 | 삼성전자주식회사 | 메모리소자 및 그 동작방법 |
US20120012897A1 (en) * | 2010-07-16 | 2012-01-19 | Unity Semiconductor Corporation | Vertically Fabricated BEOL Non-Volatile Two-Terminal Cross-Trench Memory Array with Two-Terminal Memory Elements and Method of Fabricating the Same |
US8264868B2 (en) * | 2010-10-25 | 2012-09-11 | Hewlett-Packard Development Company, L.P. | Memory array with metal-insulator transition switching devices |
US9660092B2 (en) | 2011-08-31 | 2017-05-23 | Semiconductor Energy Laboratory Co., Ltd. | Oxide semiconductor thin film transistor including oxygen release layer |
JP5621940B2 (ja) * | 2011-10-19 | 2014-11-12 | 富士電機株式会社 | 強相関不揮発メモリー素子 |
CN102751437B (zh) * | 2012-07-03 | 2014-11-05 | 北京有色金属研究总院 | 一种免电激活的阻变存储器及其制备方法 |
US9373786B1 (en) * | 2013-01-23 | 2016-06-21 | Adesto Technologies Corporation | Two terminal resistive access devices and methods of formation thereof |
CN103831097B (zh) * | 2014-03-26 | 2016-05-04 | 苏州绿电能源科技有限公司 | 纳米催化剂镧锶锰氧材料及其制备方法和应用 |
NZ725497A (en) | 2014-04-02 | 2020-05-29 | Franck Natali | Magnetic materials and devices comprising rare earth nitrides |
CN106460229B (zh) | 2014-04-02 | 2019-12-10 | F·纳塔利 | 掺杂的稀土氮化物材料和包含其的器件 |
US10210970B2 (en) * | 2015-05-21 | 2019-02-19 | The Board Of Trustees Of The Leland Stanford Junior University | Metallic-magnetic-domain-wall-based nonvolatile tunable resistor for memory and sensor applications |
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US5792569A (en) * | 1996-03-19 | 1998-08-11 | International Business Machines Corporation | Magnetic devices and sensors based on perovskite manganese oxide materials |
JP3030333B2 (ja) * | 1997-03-14 | 2000-04-10 | 工業技術院長 | 電流及び電場誘起相転移を用いたスイッチング素子及びメモリー素子 |
US6759249B2 (en) | 2002-02-07 | 2004-07-06 | Sharp Laboratories Of America, Inc. | Device and method for reversible resistance change induced by electric pulses in non-crystalline perovskite unipolar programmable memory |
JP2004241396A (ja) | 2002-02-07 | 2004-08-26 | Sharp Corp | 抵抗変化素子の製造方法および不揮発性抵抗変化メモリデバイスの製造方法、並びに不揮発性抵抗変化メモリデバイス |
US6654210B2 (en) * | 2002-04-22 | 2003-11-25 | Sharp Laboratories Of America, Inc. | Solid-state inductor and method for same |
JP4158902B2 (ja) * | 2002-04-22 | 2008-10-01 | シャープ株式会社 | ソリッドステートインダクタおよびその製造方法 |
US6824814B2 (en) * | 2002-05-21 | 2004-11-30 | Sharp Laboratories Of America, Inc. | Preparation of LCPMO thin films which have reversible resistance change properties |
US6965137B2 (en) * | 2002-08-02 | 2005-11-15 | Unity Semiconductor Corporation | Multi-layer conductive memory device |
US6753561B1 (en) * | 2002-08-02 | 2004-06-22 | Unity Semiconductor Corporation | Cross point memory array using multiple thin films |
JP4231506B2 (ja) * | 2002-12-25 | 2009-03-04 | パナソニック株式会社 | 磁性スイッチ素子とそれを用いた磁気メモリ |
US6972238B2 (en) | 2003-05-21 | 2005-12-06 | Sharp Laboratories Of America, Inc. | Oxygen content system and method for controlling memory resistance properties |
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JPWO2005041303A1 (ja) | 2003-10-23 | 2007-04-26 | 松下電器産業株式会社 | 抵抗変化素子、その製造方法、その素子を含むメモリ、およびそのメモリの駆動方法 |
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KR100919430B1 (ko) | 2009-09-29 |
KR20070115970A (ko) | 2007-12-06 |
WO2006101152A1 (ja) | 2006-09-28 |
US20090065757A1 (en) | 2009-03-12 |
DE112006000612T5 (de) | 2008-02-14 |
JP4822287B2 (ja) | 2011-11-24 |
US7580276B2 (en) | 2009-08-25 |
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