JPWO2005017991A1 - 半導体装置、半導体装置の製造方法及びプラズマcvd用ガス - Google Patents
半導体装置、半導体装置の製造方法及びプラズマcvd用ガス Download PDFInfo
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- JPWO2005017991A1 JPWO2005017991A1 JP2005513174A JP2005513174A JPWO2005017991A1 JP WO2005017991 A1 JPWO2005017991 A1 JP WO2005017991A1 JP 2005513174 A JP2005513174 A JP 2005513174A JP 2005513174 A JP2005513174 A JP 2005513174A JP WO2005017991 A1 JPWO2005017991 A1 JP WO2005017991A1
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Images
Classifications
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
- H01L21/0212—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC the material being fluoro carbon compounds, e.g.(CFx) n, (CHxFy) n or polytetrafluoroethylene
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- H—ELECTRICITY
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
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Abstract
Description
フッ素添加カーボン膜の原料ガス中には、水素が微量ながら例えば10−2オーダの原子%含まれている。ただし、ここでいう原料ガス中の原子%とは、C5F8を一つの原子とみなして計算した値である。この微量ながら含まれる水素は、主として原料ガス中に完全に取り除くことができないで含まれていた水分を構成していた水素であると推測される。
また、前記炭素及びフッ素の化合物は、例えばC5F8である。
なお、水分含有量が3重量ppm以下であることが好ましい。
一方、フッ素添加カーボン膜中の原子%は、{水素の原子数/(水素の原子数+炭素の原子数+フッ素の原子数)}×100で表される。
水素の含有量が15.2×10−3原子%であるC5F8ガスを原料ガスとして用い、その他は前記実施例1と同様にし、2枚のベアシリコン基板上に500nmのフッ素添加カーボン膜を成膜した。前記実施例1と同様の試験を行い、重量減少を調べた。水素の含有量は、水分の含有量から計算で求めた値であり、水分の含有量は6.5重量ppmであった。結果は図6の実線bに示すとおりである。
また、他方のシリコン基板について、フッ素添加カーボン膜中の水素の濃度を調べたところ、5原子%であった。
図6に示すように、室温から350℃付近までは、実施例1及び比較例1のいずれのフッ素添加カーボン膜についても、重量減少はほとんどない。しかし、350℃を越えたあたりから、比較例1の膜については重量減少が顕著になってくる。一方、実施例1の膜については、380℃付近まで重量減少の程度は小さいが、380℃付近を越えると重量減少が顕著になってくる。しかしながら、420℃に至るまでは、実施例1の膜は、比較例1の膜に比べて重量減少の程度が小さいと言える。また、425℃になると、いずれの膜も、重量減少が激しくなって10%よりも大きくなってしまう。
<分析条件1:ガスクロマトグラフィー分析(以下、「GC分析」と略す。)>
装置:ヒューレットパッカード社製HP6890
カラム:Ultra Alloy+−1(s)
(長さ50m、内径0.25mm、膜厚1.5μm)
カラム温度:10分間80℃に固定、その後20分間で200℃に昇温
インジェクション温度:200℃
キャリアーガス:ヘリウム(流量1ml/分)
検出器:FID
内部標準物質:n−ブタンで行った。
[ガスクロマトグラフィー部分]
装置:ヒューレットパッカード社製 HP−6890
カラム:Frontier Lab Ultra ALLOY+−1(s)
60m×I.D0.25mm、0.4μmdf
カラム温度:−20℃
キャリアーガス:ヘリウム
[質量分析計部分]
装置:ヒューレットパッカード社製 5973 NETWORK
検出器:EI型(加速電圧:70eV)
装置:平沼産業製 AQ−7
発生液:ハイドラナール アクアライトRS
対極液:アクアライトCN
検出限界:0.5ppm
ヘリウム雰囲気下に350℃で12時間焼成したモレキュラーシーブス13Xを5.4部使用する代わりに、市販のモレキュラーシーブズ13Xをそのまま2.7部使用した以外は、実施例2と同様にして実験を行ないステンレス製シリンダーに入れたプラズマCVD用ガスを得た。シリンダー内のプラズマCVD用ガスをGC−MS分析したところ水素原子を有する有機化合物の合計量は、プラズマCVD用ガス重量基準で150ppmであった。また、シリンダー内のプラズマCVD用ガスをKF分析したところ水分はプラズマCVD用ガス重量基準で5ppmであった。
ヘリウム雰囲気下に350℃で12時間焼成したモレキュラーシーブス13Xを2.6部使用する代わりに、未処理のモレキュラーシーブス13Xを2.6部使用した以外は、実施例2と同様にして実験を行ないステンレス製シリンダーに入れたプラズマCVD用ガスを得た。シリンダー内のプラズマCVD用ガスをGC−MS分析したところ水素原子を有する有機化合物はモノフルオロアセチレン、ペンタフルオロエタン、1,1−ジヒドロテトラフルオロペンテン、3,3,3−トリフルオロプロピンの4種類がそれぞれ20.5%、3.5%、20%、56%の割合で存在し、その合計量はプラズマCVD用ガスの重量基準で130ppmであった。また、シリンダー内のプラズマCVD用ガスをKF分析したところ水分はプラズマCVD用ガスの重量基準で6ppmであった。
基板として一部アルミ蒸着したシリコン酸化膜ウェハを用い、プラズマCVD装置として平行平板型プラズマCVD装置を用い、そして実施例2で製造したプラズマCVD用ガスを使用して、次の条件により絶縁膜のプラズマCVDを実施した。プラズマCVD用ガスの流量:40sccm、アルゴンの流量:400sccm、圧力:250mTorr,RF出力(周波数13.56MHz):400W、基板温度:260℃。
プラズマCVD用ガスを比較例2で製造したものに代える以外は、実施例4と同様に実験を行ない基板上に厚さ0.5μmの膜を得た。この膜はボイドの発生もなく緻密で均一であり、基板への密着性も良好であった。膜の比誘電率は2.4であった。しかしながら、成膜したシリコンウェハを真空容器内に置き、減圧下400℃で加温処理を行ったところ、GC−MS分析によりフッ化水素の発生が認められた。
プラズマCVD用ガスを比較例2で製造したものに代える以外は、実施例3と同様に実験を行ない基板上に厚さ0.4μmの膜を得た。この膜はボイドの発生もなく緻密で均一であり、基板への密着性も良好であった。膜の比誘電率は2.0であった。しかしながら、成膜したシリコンウェハを真空容器内に置き、減圧下400℃で加温処理を行ったところ、GC−MS分析によりフッ化水素の発生が認められた。
Claims (14)
- 420℃以下の熱履歴を経たフッ素添加カーボン膜からなる絶縁膜を備えた半導体装置であって、
前記フッ素添加カーボン膜中の水素原子の含有量が、前記熱履歴を経る前において、3原子%以下である
ことを特徴とする半導体装置。 - 前記絶縁膜は、層間絶縁膜である
ことを特徴とする請求項1に記載の半導体装置。 - 炭素及びフッ素の化合物からなり、1×10−3原子%以下の含有量で水素原子を含む原料ガスをプラズマ化する工程と、
プラズマ化された前記原料ガスを用いて、基板上に水素原子の含有量が3原子%以下であるようなフッ素添加カーボン膜からなる絶縁膜を成膜する工程と、
を備えたことを特徴とする半導体装置の製造方法。 - 前記絶縁膜を成膜する工程の後において、前記基板を420℃以下の温度で加熱する工程を更に備えたことを特徴とする請求項3に記載の半導体装置の製造方法。
- 前記炭素及びフッ素の化合物は、C5F8である
ことを特徴とする請求項3または4に記載の半導体装置の製造方法。 - 不飽和フッ素化炭素化合物からなり、水素原子含有化合物量が90重量ppm以下である
ことを特徴とするプラズマCVD用ガス。 - 水素原子含有化合物量が10重量ppm以下である
ことを特徴とする請求項6に記載のプラズマCVD用ガス。 - 水分含有量が3重量ppm以下である
ことを特徴とする請求項6に記載のプラズマCVD用ガス。 - 前記不飽和フッ素化炭素化合物が、オクタフルオロシクロペンテン、オクタフルオロ−2−ペンチンまたはヘキサフルオロ−1,3−ブタジエンである
ことを特徴とする請求項6乃至8のいずれかに記載のプラズマCVD用ガス。 - 請求項6乃至9のいずれかに記載のCVD用ガスを製造する方法であって、
水素原子含有化合物を含有する不飽和フッ素化炭素化合物を、焼成した吸着剤に接触させる工程
を備えたことを特徴とするCVD用ガスの製造方法。 - 請求項6乃至9のいずれかに記載のCVD用ガスを用いて、プラズマCVD処理を行う工程
を備えたことを特徴とする絶縁膜形成方法。 - 不飽和フッ素化炭素化合物からなり、水素原子の含有量が1×10−3原子%以下である
ことを特徴とするプラズマCVD用ガス。 - 不飽和フッ素化炭素化合物からなり、水分含有量が0.5重量ppm以下であることを特徴とするプラズマCVD用ガス。
- 水分含有量が0.1重量ppm以下である
ことを特徴とする請求項13に記載のプラズマCVD用ガス。
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US20110127075A1 (en) * | 2007-08-16 | 2011-06-02 | National University Corporation Tohoku University | Interlayer insulating film, wiring structure, and methods of manufacturing the same |
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US9928994B2 (en) * | 2015-02-03 | 2018-03-27 | Lam Research Corporation | Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films |
US11199671B2 (en) * | 2020-04-21 | 2021-12-14 | Hewlett Packard Enterprise Development Lp | Glass-as-a-platform (GaaP)-based photonic assemblies comprising shaped glass plates |
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JP3666106B2 (ja) | 1996-02-29 | 2005-06-29 | ソニー株式会社 | 半導体装置の製造方法 |
US5989998A (en) | 1996-08-29 | 1999-11-23 | Matsushita Electric Industrial Co., Ltd. | Method of forming interlayer insulating film |
US5661093A (en) * | 1996-09-12 | 1997-08-26 | Applied Materials, Inc. | Method for the stabilization of halogen-doped films through the use of multiple sealing layers |
JP3402972B2 (ja) | 1996-11-14 | 2003-05-06 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
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WO1999028963A1 (fr) * | 1997-11-28 | 1999-06-10 | Nippon Zeon Co., Ltd. | Procede de formation d'un film isolant |
JP2000156375A (ja) * | 1998-11-19 | 2000-06-06 | Matsushita Electric Ind Co Ltd | 絶縁膜の形成方法 |
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WO2005017991A1 (ja) | 2005-02-24 |
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EP1655772A4 (en) | 2007-12-26 |
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