JPWO2004107451A1 - Mis型電界効果トランジスタを備える半導体装置及びその製造方法並びに金属酸化膜の形成方法 - Google Patents
Mis型電界効果トランジスタを備える半導体装置及びその製造方法並びに金属酸化膜の形成方法 Download PDFInfo
- Publication number
- JPWO2004107451A1 JPWO2004107451A1 JP2005506524A JP2005506524A JPWO2004107451A1 JP WO2004107451 A1 JPWO2004107451 A1 JP WO2004107451A1 JP 2005506524 A JP2005506524 A JP 2005506524A JP 2005506524 A JP2005506524 A JP 2005506524A JP WO2004107451 A1 JPWO2004107451 A1 JP WO2004107451A1
- Authority
- JP
- Japan
- Prior art keywords
- metal oxide
- oxide film
- film
- silicon
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 65
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 65
- 239000004065 semiconductor Substances 0.000 title claims abstract description 20
- 230000005669 field effect Effects 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims description 53
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 83
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 81
- 239000010703 silicon Substances 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 17
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims abstract description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- 238000000137 annealing Methods 0.000 claims description 36
- 230000015572 biosynthetic process Effects 0.000 claims description 27
- 239000002994 raw material Substances 0.000 claims description 27
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 27
- 230000001590 oxidative effect Effects 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 125000002524 organometallic group Chemical group 0.000 claims description 7
- VBCSQFQVDXIOJL-UHFFFAOYSA-N diethylazanide;hafnium(4+) Chemical group [Hf+4].CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC VBCSQFQVDXIOJL-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000007800 oxidant agent Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 20
- 229910004129 HfSiO Inorganic materials 0.000 description 23
- 229910004298 SiO 2 Inorganic materials 0.000 description 19
- 239000013078 crystal Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 11
- 238000009792 diffusion process Methods 0.000 description 10
- 229920005591 polysilicon Polymers 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 230000004913 activation Effects 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910018557 Si O Inorganic materials 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000002484 cyclic voltammetry Methods 0.000 description 3
- 229910000449 hafnium oxide Inorganic materials 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 125000000962 organic group Chemical group 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 241000252073 Anguilliformes Species 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 2
- ILCYGSITMBHYNK-UHFFFAOYSA-N [Si]=O.[Hf] Chemical compound [Si]=O.[Hf] ILCYGSITMBHYNK-UHFFFAOYSA-N 0.000 description 2
- 150000001408 amides Chemical class 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 229910000878 H alloy Inorganic materials 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910002064 alloy oxide Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HPNMFZURTQLUMO-UHFFFAOYSA-N diethylamine Chemical compound CCNCC HPNMFZURTQLUMO-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/518—Insulating materials associated therewith the insulating material containing nitrogen, e.g. nitride, oxynitride, nitrogen-doped material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02142—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides
- H01L21/02148—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides the material containing hafnium, e.g. HfSiOx or HfSiON
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02181—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing hafnium, e.g. HfO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
- H01L21/31608—Deposition of SiO2
- H01L21/31612—Deposition of SiO2 on a silicon body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
- H01L21/31645—Deposition of Hafnium oxides, e.g. HfO2
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
なお、本発明におけるモル比率は百分率で示すものとする。
発明の好適な実施の形態
第一点は結晶構造の変化である。図6(a)及び(b)はそれぞれ、1.2nmのSiO2上にHfSiO及びHfO2を3.5nm成膜し、1000℃、10秒のソース・ドレイン活性化アニール後のTEM写真(断面図および平面図)である。図6(b)に示すように、シリコンを添加しない場合には、HfO2のグレインサイズは100nm〜300nmであるが、図6(a)に示すように、シリコンを微量に含有すると、グレインサイズは100nm未満へ減少する。それにともなって、膜表面のラフネスもSiを含有しない場合に比べてシリコンを微量に含有すると改善され、平坦性が向上する。ゲートリークはhigh−k絶縁膜の凹部がウイークスポットとなって流れると考えられ、シリコンを微量に含有すると膜表面のラフネスが減少し、結晶化後のリーク特性が改善されるものと推察される。この観点から、本発明においては、金属酸化膜中の多結晶粒の直径を100nm未満に制御することが好ましい。また、多結晶粒の制御性や膜特性の点から多結晶粒の直径は30nm以上が好ましい。
Hf[NEt2]4 + 2H2O → HfO2 + 4HNEt2
と記述される。Hf原料中の有機基はジエチルアミンとなり離脱するが、水の分圧が10−6Torr(1.33×10−4Pa)以下になると未反応の有機基に由来する炭素が膜中に取り込まれ、リークの原因となる。また、水分圧が10−5Torr(1.33×10−3Pa)を超えると水に起因するOH基が膜中に残り、信頼性を著しく低下させる。
まず、8インチのP型ウエハを基板として、表面に1.2nmの熱酸化膜を形成した。次に、この熱酸化膜上に、テトラキスジエチルアミノハフニウム(Hf[NEt2]4)およびトリスジメチルアミノシリコン(HSi[NMt2]3)を、H2Oと同時供給をすることにより成膜を行った。成膜温度は400℃とした。その後、付設されたチャンバ内で600℃、10分のアニールを酸素分圧5×10−3Torr(0.665Pa)の条件下で行った。
図示するように、分離領域2を有するシリコン基板1上には、ゲート電極8/金属酸化膜7/界面絶縁膜6の積層からなるMIS構造が形成されており、ゲート電極8はゲート側壁9に取り囲まれている。シリコン基板1中には、高濃度に不純物を拡散した深い拡散領域3、浅い拡散領域4およびサリサイド5が、MIS構造に対して自己整合的に形成されている。
まず、通常の工程により素子分離領域2を設けたシリコン基板1を準備する。この基板を希HF水溶液で処理してシリコン基板表面の自然酸化膜を除去し、RTA(Rapid Thermal Annealing)法等によって厚み1.2nmの熱酸化膜6を形成する。この酸化膜厚は最終的に必要となる電気的膜厚によって適宜調整することができるが、厚いほど信頼性が向上する。
[図2]図2は、ゲート絶縁膜を構成する金属酸化膜中のシリコン濃度(モル比率:Si/(Si+Hf))とゲートリーク電流との関係を示すグラフである。
[図3]図3は、金電極を用いて測定したHfO2膜およびHfSiO膜のCV特性を示すグラフである。
[図4]図4は、金電極を用いて測定したHfO2膜およびHfSiO膜の電圧とリーク電流の関係を示すグラフである。
[図5]図5は、MISFETの酸化膜換算膜厚(EOT)とゲートリーク電流(Jg)との関係を示すグラフである。
[図6]図6(a)及び6(b)はそれぞれ、アニール後におけるSiO2上のHfSiO膜及びHfO2膜のTEM写真である。
[図7]図7は、TEM EELSにより測定した結晶中のシリコン濃度と膜全体のシリコン濃度の関係を示すグラフである。
[図8]図8(a)〜(d)はそれぞれ、原子層成長法による従来のハフニウム・シリコン酸化膜の製造方法の一工程を示す模式的断面図である。
[図9]図9(a)〜(d)はそれぞれ、本発明の一実施形態例におけるHfSiO膜の形成方法の一工程を示す模式的断面図である。
[図10]図10は、MOCVD法によるHfO2の成膜時における水分圧と、膜中不純物量(膜中炭素量および膜中OH基量)との関係を示すグラフである。
[図11]図11は、MOCVD法によるHfSiO膜の成膜において、Hf原料の流量を固定したときの、Si原料の流量と膜中Si濃度(モル比率(Si/(Si+Hf)))との関係を示すグラフである。
[図12]図12は、本発明の一実施形態例の方法により成膜されたウエハ表面のXPSスペクトル線図である。
[図13]図13は、本発明の一実施形態例のMISFETの模式的断面図である。
[図14]図14(a)〜(d)はそれぞれ、本発明の一実施形態例のMISFETの製造方法の一工程段階を示す断面図である。
Claims (20)
- シリコン基板と、
前記シリコン基板上に形成され、窒素および酸素の少なくとも1種とシリコンとを含有する絶縁膜と、
前記絶縁膜上に形成され、シリコン及びハフニウムを含む金属酸化膜と、
前記金属酸化膜上に形成されたゲート電極とを具備し、
前記金属酸化膜中のシリコンのモル比率(Si/(Si+Hf))が2%以上15%以下であるMIS型電界効果トランジスタを備えることを特徴とする半導体装置。 - 前記金属酸化膜中の多結晶粒の直径は30nm以上100nm未満であることを特徴とする請求項1に記載の半導体装置。
- 前記金属酸化膜上にシリコン窒化膜を有するMIS型電界効果トランジスタを備えることを特徴とする請求項1又は2に記載の半導体装置。
- 金属原料として有機金属ハフニウムと有機金属シリコン、酸化剤として水を用いるシリコン及びハフニウムを含む金属酸化膜の気相成長方法であって、水の分圧を1E−6Torr(1.33×10−4Pa)以上、1E−5Torr(1.33×10−3Pa)以下にすることを特徴とする金属酸化膜の形成方法。
- 前記有機金属シリコンがトリスジメチルアミノシランであることを特徴とする請求項4に記載の金属酸化膜の形成方法。
- 前記有機金属ハフニウムがテトラキスジエチルアミノハフニウムであることを特徴とする請求項4に記載の金属酸化膜の形成方法。
- 前記有機金属シリコンがトリスジメチルアミノシランであることを特徴とする請求項6に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成時の基板温度が150℃以上450℃以下であることを特徴とする請求項4〜7の何れか1項に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成時、途中で成膜を中断し、500℃以上で酸化性雰囲気中アニールを行い、その後に再び、所定の膜厚に達するまで成膜を行うことを特徴とする請求項8に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成時、途中で成膜を中断し、500℃以上で酸化性雰囲気中アニールを行い、その後に再び、所定の膜厚に達するまで成膜を行うことを特徴とする4〜7の何れか1項に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成時、膜厚が1nm以下で成膜を中断し、500℃以上で酸化性雰囲気中アニールを行い、その後に再び、所定の膜厚に達するまで成膜を行うことを特徴とする請求項10に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成後、酸化性雰囲気下500℃以上でアニールを行うことを特徴とする請求項11に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成後、酸化性雰囲気下500℃以上でアニールを行うことを特徴とする請求項4〜7のいずれか1項に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成後、不活性ガス雰囲気下700℃以上でアニールを行うことを特徴とする請求項12に記載の金属酸化膜の形成方法。
- 前記金属酸化膜形成後、不活性ガス雰囲気下700℃以上でアニールを行うことを特徴とする請求項4〜7のいずれか1項に記載の金属酸化膜の形成方法。
- 請求項1〜3の何れか1項に記載の半導体装置を製造する方法であって、前記金属酸化膜を、請求項4〜7のいずれか1項に記載の金属酸化膜の形成方法により形成することを特徴とする半導体装置の製造方法。
- 請求項1〜3の何れか1項に記載の半導体装置を製造する方法であって、前記金属酸化膜を、請求項9に記載の金属酸化膜の形成方法により形成することを特徴とする半導体装置の製造方法。
- 請求項1〜3の何れか1項に記載の半導体装置を製造する方法であって、前記金属酸化膜を、請求項11に記載の金属酸化膜の形成方法により形成することを特徴とする半導体装置の製造方法。
- 請求項1〜3の何れか1項に記載の半導体装置を製造する方法であって、前記金属酸化膜を、請求項12に記載の金属酸化膜の形成方法により形成することを特徴とする半導体装置の製造方法。
- 請求項1〜3の何れか1項に記載の半導体装置を製造する方法であって、前記金属酸化膜を、請求項14に記載の金属酸化膜の形成方法により形成することを特徴とする半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005506524A JP4742867B2 (ja) | 2003-05-29 | 2004-05-31 | Mis型電界効果トランジスタを備える半導体装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003153232 | 2003-05-29 | ||
JP2003153232 | 2003-05-29 | ||
JP2005506524A JP4742867B2 (ja) | 2003-05-29 | 2004-05-31 | Mis型電界効果トランジスタを備える半導体装置 |
PCT/JP2004/007480 WO2004107451A1 (ja) | 2003-05-29 | 2004-05-31 | Mis型電界効果トランジスタを備える半導体装置及びその製造方法並びに金属酸化膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2004107451A1 true JPWO2004107451A1 (ja) | 2006-07-20 |
JP4742867B2 JP4742867B2 (ja) | 2011-08-10 |
Family
ID=33487285
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005506524A Expired - Lifetime JP4742867B2 (ja) | 2003-05-29 | 2004-05-31 | Mis型電界効果トランジスタを備える半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7476916B2 (ja) |
JP (1) | JP4742867B2 (ja) |
WO (1) | WO2004107451A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4522900B2 (ja) * | 2005-03-30 | 2010-08-11 | 東京エレクトロン株式会社 | 成膜方法および記録媒体 |
US20080164582A1 (en) * | 2007-01-05 | 2008-07-10 | Shrinivas Govindarajan | Semiconductor devices and methods of manufacture thereof |
KR100877100B1 (ko) * | 2007-04-16 | 2009-01-09 | 주식회사 하이닉스반도체 | 비휘발성 메모리 소자 제조 방법 |
US8735243B2 (en) * | 2007-08-06 | 2014-05-27 | International Business Machines Corporation | FET device with stabilized threshold modifying material |
JP2009239002A (ja) * | 2008-03-27 | 2009-10-15 | Fujitsu Ltd | 半導体装置の製造方法 |
US7816278B2 (en) * | 2008-03-28 | 2010-10-19 | Tokyo Electron Limited | In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition |
JP4792132B2 (ja) * | 2009-02-27 | 2011-10-12 | キヤノンアネルバ株式会社 | 誘電体ならびに半導体装置の製造方法、プログラム、および、記録媒体 |
US8450774B2 (en) | 2009-07-13 | 2013-05-28 | Cornell University | High performance power switch |
JP5149936B2 (ja) * | 2010-04-28 | 2013-02-20 | パナソニック株式会社 | 高誘電率ゲート絶縁膜を備えた電界効果トランジスタを有する半導体装置及びその製造方法 |
WO2013075209A1 (en) * | 2011-11-24 | 2013-05-30 | University Of Manitoba | Oxidation of metallic films |
JP5882075B2 (ja) * | 2012-02-06 | 2016-03-09 | 東京エレクトロン株式会社 | キャパシタの製造方法、キャパシタ、およびそれに用いられる誘電体膜の形成方法 |
JP2014053571A (ja) * | 2012-09-10 | 2014-03-20 | Toshiba Corp | 強誘電体メモリ及びその製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6450428A (en) * | 1987-08-20 | 1989-02-27 | Tokyo Noukou Univ | Oxide thin film having high permittivity and formation thereof |
JP2000349287A (ja) * | 1999-06-08 | 2000-12-15 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2003008011A (ja) * | 2001-06-21 | 2003-01-10 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2003092404A (ja) * | 2001-07-09 | 2003-03-28 | Nikko Materials Co Ltd | ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法 |
JP2003124460A (ja) * | 2001-10-15 | 2003-04-25 | Atsushi Ogura | ゲート酸化膜、素子、ゲート酸化膜形成方法、ゲート酸化膜形成材料 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6642131B2 (en) | 2001-06-21 | 2003-11-04 | Matsushita Electric Industrial Co., Ltd. | Method of forming a silicon-containing metal-oxide gate dielectric by depositing a high dielectric constant film on a silicon substrate and diffusing silicon from the substrate into the high dielectric constant film |
US6797599B2 (en) * | 2001-08-31 | 2004-09-28 | Texas Instruments Incorporated | Gate structure and method |
JP4025542B2 (ja) * | 2001-12-11 | 2007-12-19 | 松下電器産業株式会社 | 絶縁膜形成方法、半導体装置及びその製造方法 |
JP2003249649A (ja) * | 2002-02-26 | 2003-09-05 | Toshiba Corp | 半導体装置及びその製造方法 |
JP3627106B2 (ja) * | 2002-05-27 | 2005-03-09 | 株式会社高純度化学研究所 | 原子層吸着堆積法によるハフニウムシリケート薄膜の製造方法 |
US6780708B1 (en) * | 2003-03-05 | 2004-08-24 | Advanced Micro Devices, Inc. | Method of forming core and periphery gates including two critical masking steps to form a hard mask in a core region that includes a critical dimension less than achievable at a resolution limit of lithography |
-
2004
- 2004-05-31 US US10/558,271 patent/US7476916B2/en not_active Expired - Lifetime
- 2004-05-31 JP JP2005506524A patent/JP4742867B2/ja not_active Expired - Lifetime
- 2004-05-31 WO PCT/JP2004/007480 patent/WO2004107451A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6450428A (en) * | 1987-08-20 | 1989-02-27 | Tokyo Noukou Univ | Oxide thin film having high permittivity and formation thereof |
JP2000349287A (ja) * | 1999-06-08 | 2000-12-15 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2003008011A (ja) * | 2001-06-21 | 2003-01-10 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2003092404A (ja) * | 2001-07-09 | 2003-03-28 | Nikko Materials Co Ltd | ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法 |
JP2003124460A (ja) * | 2001-10-15 | 2003-04-25 | Atsushi Ogura | ゲート酸化膜、素子、ゲート酸化膜形成方法、ゲート酸化膜形成材料 |
Also Published As
Publication number | Publication date |
---|---|
JP4742867B2 (ja) | 2011-08-10 |
WO2004107451A1 (ja) | 2004-12-09 |
US7476916B2 (en) | 2009-01-13 |
US20070096104A1 (en) | 2007-05-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4492783B2 (ja) | 半導体装置及びその製造方法 | |
JP4895803B2 (ja) | 誘電体膜及びゲートスタックの形成方法並びに誘電体膜の処理方法 | |
JP4340830B2 (ja) | 半導体装置のゲート絶縁膜形成方法 | |
US7217659B2 (en) | Process for producing materials for electronic device | |
JP4104834B2 (ja) | Mis型電界効果トランジスタの製造方法 | |
US7473994B2 (en) | Method of producing insulator thin film, insulator thin film, method of manufacturing semiconductor device, and semiconductor device | |
JP4277268B2 (ja) | 金属化合物薄膜の製造方法、ならびに当該金属化合物薄膜を含む半導体装置の製造方法 | |
US20100096707A1 (en) | Method for Forming Insulation Film | |
JP4742867B2 (ja) | Mis型電界効果トランジスタを備える半導体装置 | |
JP3593340B2 (ja) | 集積回路デバイスの製造方法 | |
JP2003297826A (ja) | 半導体装置の製造方法及び半導体装置 | |
JP3399413B2 (ja) | 酸窒化膜およびその形成方法 | |
US7160818B2 (en) | Semiconductor device and method for fabricating same | |
US7358198B2 (en) | Semiconductor device and method for fabricating same | |
JP2008072001A (ja) | 半導体装置及びその製造方法 | |
KR20120131813A (ko) | 반도체 소자의 제조 방법 | |
JP4190175B2 (ja) | 高誘電率金属酸化物膜を有する半導体装置の製造方法 | |
KR100530149B1 (ko) | 반도체 소자의 게이트 전극 제조 방법 | |
JP2005285805A (ja) | 半導体装置の製造方法 | |
JP2005328072A (ja) | 半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060517 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070423 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20100223 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110111 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110314 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110412 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110425 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140520 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4742867 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S131 | Request for trust registration of transfer of right |
Free format text: JAPANESE INTERMEDIATE CODE: R313135 |
|
SZ02 | Written request for trust registration |
Free format text: JAPANESE INTERMEDIATE CODE: R313Z02 |
|
S131 | Request for trust registration of transfer of right |
Free format text: JAPANESE INTERMEDIATE CODE: R313135 |
|
SZ02 | Written request for trust registration |
Free format text: JAPANESE INTERMEDIATE CODE: R313Z02 |
|
S631 | Written request for registration of reclamation of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313631 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S131 | Request for trust registration of transfer of right |
Free format text: JAPANESE INTERMEDIATE CODE: R313135 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |