JPS6489520A - Dry etching - Google Patents

Dry etching

Info

Publication number
JPS6489520A
JPS6489520A JP24676287A JP24676287A JPS6489520A JP S6489520 A JPS6489520 A JP S6489520A JP 24676287 A JP24676287 A JP 24676287A JP 24676287 A JP24676287 A JP 24676287A JP S6489520 A JPS6489520 A JP S6489520A
Authority
JP
Japan
Prior art keywords
species
etching
ions
perpendicularly
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24676287A
Other languages
English (en)
Inventor
Makoto Sekine
Haruo Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP24676287A priority Critical patent/JPS6489520A/ja
Publication of JPS6489520A publication Critical patent/JPS6489520A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP24676287A 1987-09-30 1987-09-30 Dry etching Pending JPS6489520A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24676287A JPS6489520A (en) 1987-09-30 1987-09-30 Dry etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24676287A JPS6489520A (en) 1987-09-30 1987-09-30 Dry etching

Publications (1)

Publication Number Publication Date
JPS6489520A true JPS6489520A (en) 1989-04-04

Family

ID=17153284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24676287A Pending JPS6489520A (en) 1987-09-30 1987-09-30 Dry etching

Country Status (1)

Country Link
JP (1) JPS6489520A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220445A (ja) * 1988-02-29 1989-09-04 Tel Sagami Ltd プラズマ処理装置
JPH0499289A (ja) * 1990-08-08 1992-03-31 Sumitomo Metal Ind Ltd エッチング方法
KR100253274B1 (ko) * 1996-11-25 2000-04-15 김영환 플라즈마 식각장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220445A (ja) * 1988-02-29 1989-09-04 Tel Sagami Ltd プラズマ処理装置
JPH0499289A (ja) * 1990-08-08 1992-03-31 Sumitomo Metal Ind Ltd エッチング方法
KR100253274B1 (ko) * 1996-11-25 2000-04-15 김영환 플라즈마 식각장치

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