JPS6489520A - Dry etching - Google Patents
Dry etchingInfo
- Publication number
- JPS6489520A JPS6489520A JP24676287A JP24676287A JPS6489520A JP S6489520 A JPS6489520 A JP S6489520A JP 24676287 A JP24676287 A JP 24676287A JP 24676287 A JP24676287 A JP 24676287A JP S6489520 A JPS6489520 A JP S6489520A
- Authority
- JP
- Japan
- Prior art keywords
- species
- etching
- ions
- perpendicularly
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24676287A JPS6489520A (en) | 1987-09-30 | 1987-09-30 | Dry etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24676287A JPS6489520A (en) | 1987-09-30 | 1987-09-30 | Dry etching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6489520A true JPS6489520A (en) | 1989-04-04 |
Family
ID=17153284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24676287A Pending JPS6489520A (en) | 1987-09-30 | 1987-09-30 | Dry etching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6489520A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01220445A (ja) * | 1988-02-29 | 1989-09-04 | Tel Sagami Ltd | プラズマ処理装置 |
JPH0499289A (ja) * | 1990-08-08 | 1992-03-31 | Sumitomo Metal Ind Ltd | エッチング方法 |
KR100253274B1 (ko) * | 1996-11-25 | 2000-04-15 | 김영환 | 플라즈마 식각장치 |
-
1987
- 1987-09-30 JP JP24676287A patent/JPS6489520A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01220445A (ja) * | 1988-02-29 | 1989-09-04 | Tel Sagami Ltd | プラズマ処理装置 |
JPH0499289A (ja) * | 1990-08-08 | 1992-03-31 | Sumitomo Metal Ind Ltd | エッチング方法 |
KR100253274B1 (ko) * | 1996-11-25 | 2000-04-15 | 김영환 | 플라즈마 식각장치 |
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