JPS6489340A - Method and apparatus for surface treatment - Google Patents
Method and apparatus for surface treatmentInfo
- Publication number
- JPS6489340A JPS6489340A JP24359787A JP24359787A JPS6489340A JP S6489340 A JPS6489340 A JP S6489340A JP 24359787 A JP24359787 A JP 24359787A JP 24359787 A JP24359787 A JP 24359787A JP S6489340 A JPS6489340 A JP S6489340A
- Authority
- JP
- Japan
- Prior art keywords
- film
- sample
- generated
- oxide film
- spontaneous oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title 1
- 238000004381 surface treatment Methods 0.000 title 1
- 230000002269 spontaneous effect Effects 0.000 abstract 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 229920000642 polymer Polymers 0.000 abstract 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 abstract 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 150000008282 halocarbons Chemical class 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
- Local Oxidation Of Silicon (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24359787A JPH0719773B2 (ja) | 1987-09-30 | 1987-09-30 | 表面処理方法およびその装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24359787A JPH0719773B2 (ja) | 1987-09-30 | 1987-09-30 | 表面処理方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6489340A true JPS6489340A (en) | 1989-04-03 |
| JPH0719773B2 JPH0719773B2 (ja) | 1995-03-06 |
Family
ID=17106183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24359787A Expired - Lifetime JPH0719773B2 (ja) | 1987-09-30 | 1987-09-30 | 表面処理方法およびその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719773B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06169018A (ja) * | 1992-11-30 | 1994-06-14 | Nec Corp | 半導体装置の製造方法 |
-
1987
- 1987-09-30 JP JP24359787A patent/JPH0719773B2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06169018A (ja) * | 1992-11-30 | 1994-06-14 | Nec Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719773B2 (ja) | 1995-03-06 |
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