JPS6459821A - Method and apparatus for removing organic polymer film - Google Patents
Method and apparatus for removing organic polymer filmInfo
- Publication number
- JPS6459821A JPS6459821A JP21508087A JP21508087A JPS6459821A JP S6459821 A JPS6459821 A JP S6459821A JP 21508087 A JP21508087 A JP 21508087A JP 21508087 A JP21508087 A JP 21508087A JP S6459821 A JPS6459821 A JP S6459821A
- Authority
- JP
- Japan
- Prior art keywords
- organic polymer
- mask layer
- processed
- substrate structure
- polymer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To remove a substance adhered to the surface or on a side wall of a mask layer by a method wherein the organic polymer material mask layer is formed on an object to be processed, the object to be processed is processed by making use of an organic polymer material as a mask and a plasma treatment is executed while the surface of a substrate structure containing the organic polymer mask layer is faced downward. CONSTITUTION:While the surface of a substrate structure containing an organic polymer mask layer 3 is faced downward, the substrate structure 4 is mounted on a supporting structure 5. Then, a plasma treatment using oxygen gas is executed; a foreign substance 6 adhered to the organic high-polymer mask layer 3 falls due to gravity combined with its lift-off effect; it can be removed without coming into contact with the surface of a material 2 to be processed and discharged to the outside through an exhaust port of a chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21508087A JPS6459821A (en) | 1987-08-31 | 1987-08-31 | Method and apparatus for removing organic polymer film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21508087A JPS6459821A (en) | 1987-08-31 | 1987-08-31 | Method and apparatus for removing organic polymer film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6459821A true JPS6459821A (en) | 1989-03-07 |
Family
ID=16666421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21508087A Pending JPS6459821A (en) | 1987-08-31 | 1987-08-31 | Method and apparatus for removing organic polymer film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6459821A (en) |
-
1987
- 1987-08-31 JP JP21508087A patent/JPS6459821A/en active Pending
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