EP0321925A3 - Apparatus for analysis employing electron - Google Patents
Apparatus for analysis employing electron Download PDFInfo
- Publication number
- EP0321925A3 EP0321925A3 EP88121303A EP88121303A EP0321925A3 EP 0321925 A3 EP0321925 A3 EP 0321925A3 EP 88121303 A EP88121303 A EP 88121303A EP 88121303 A EP88121303 A EP 88121303A EP 0321925 A3 EP0321925 A3 EP 0321925A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- purge gas
- pump
- evacuated
- oil
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP324009/87 | 1987-12-23 | ||
JP62324009A JP2607572B2 (en) | 1987-12-23 | 1987-12-23 | Analysis device and method using charged particles |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0321925A2 EP0321925A2 (en) | 1989-06-28 |
EP0321925A3 true EP0321925A3 (en) | 1990-04-11 |
EP0321925B1 EP0321925B1 (en) | 1997-03-26 |
Family
ID=18161110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP88121303A Expired - Lifetime EP0321925B1 (en) | 1987-12-23 | 1988-12-20 | Apparatus for analysis employing electron |
Country Status (4)
Country | Link |
---|---|
US (1) | US4889995A (en) |
EP (1) | EP0321925B1 (en) |
JP (1) | JP2607572B2 (en) |
DE (1) | DE3855843T2 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0348759A (en) * | 1989-07-18 | 1991-03-01 | Nec Corp | Fluorescent x-ray analysis apparatus |
DE4136950A1 (en) * | 1991-11-11 | 1993-05-13 | Pfeiffer Vakuumtechnik | MULTI-STAGE VACUUM PUMP SYSTEM |
DE10032607B4 (en) * | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Particle beam device with a particle source to be operated in ultra-high vacuum and a cascade-shaped pump arrangement for such a particle beam device |
EP1515359A1 (en) * | 2003-09-12 | 2005-03-16 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Chamber with low electron stimulated desorption |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
US7112803B2 (en) * | 2004-07-23 | 2006-09-26 | Applied Materials, Israel, Ltd. | Beam directing system and method for use in a charged particle beam column |
JP5016988B2 (en) * | 2007-06-19 | 2012-09-05 | 株式会社日立ハイテクノロジーズ | Charged particle beam apparatus and vacuum startup method thereof |
US8987664B2 (en) * | 2013-02-07 | 2015-03-24 | Shimadzu Corporation | Mass spectrometry device |
JP6207344B2 (en) * | 2013-10-30 | 2017-10-04 | 日本電子株式会社 | Charged particle beam equipment |
WO2016056096A1 (en) * | 2014-10-09 | 2016-04-14 | 株式会社日立ハイテクノロジーズ | Charged particle beam device, electron microscope and sample observation method |
DE112015006315B4 (en) | 2015-04-15 | 2021-09-23 | Hitachi High-Tech Corporation | Charged particle beam device and evacuation method therefor |
DE102016114983A1 (en) * | 2016-08-12 | 2018-02-15 | Pfeiffer Vacuum Gmbh | vacuum system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63285924A (en) * | 1987-05-19 | 1988-11-22 | Hitachi Ltd | Device for manufacturing semiconductor |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3385102A (en) * | 1966-04-21 | 1968-05-28 | Nat Res Corp | Rapid cycle leak detection of plural test pieces |
NL7010108A (en) * | 1969-09-30 | 1971-04-01 |
-
1987
- 1987-12-23 JP JP62324009A patent/JP2607572B2/en not_active Expired - Fee Related
-
1988
- 1988-12-20 EP EP88121303A patent/EP0321925B1/en not_active Expired - Lifetime
- 1988-12-20 DE DE3855843T patent/DE3855843T2/en not_active Expired - Fee Related
- 1988-12-20 US US07/286,848 patent/US4889995A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63285924A (en) * | 1987-05-19 | 1988-11-22 | Hitachi Ltd | Device for manufacturing semiconductor |
Non-Patent Citations (2)
Title |
---|
JAPANESE JOURNAL OF APPLIED PHYSICS, Suppl. 2, pt. 1, 1974, pages 249-252, Tokyo, JP; N. YOSHIMURA et al.: "A new vacuum system for an electron microscope" * |
THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, vol. 8, no. 1, 1971, pages 299-307, American Institute of Physics, New York, US; D.J. SANTELER: "The use of diffusion pumps for obtaining ultraclean vacuum environments" * |
Also Published As
Publication number | Publication date |
---|---|
JPH01166457A (en) | 1989-06-30 |
DE3855843D1 (en) | 1997-04-30 |
US4889995A (en) | 1989-12-26 |
DE3855843T2 (en) | 1997-11-06 |
EP0321925B1 (en) | 1997-03-26 |
EP0321925A2 (en) | 1989-06-28 |
JP2607572B2 (en) | 1997-05-07 |
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