JPS5677381A - Exhaust system of dry etching unit - Google Patents

Exhaust system of dry etching unit

Info

Publication number
JPS5677381A
JPS5677381A JP15606279A JP15606279A JPS5677381A JP S5677381 A JPS5677381 A JP S5677381A JP 15606279 A JP15606279 A JP 15606279A JP 15606279 A JP15606279 A JP 15606279A JP S5677381 A JPS5677381 A JP S5677381A
Authority
JP
Japan
Prior art keywords
rotary oil
suction port
pump
etching chamber
oil pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15606279A
Other languages
Japanese (ja)
Other versions
JPS627269B2 (en
Inventor
Katsuzo Ukai
Tsutomu Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP15606279A priority Critical patent/JPS5677381A/en
Publication of JPS5677381A publication Critical patent/JPS5677381A/en
Publication of JPS627269B2 publication Critical patent/JPS627269B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE: To prevent the deterioration of a rotary oil pump, by connecting the suction port of a Roots pump to the dry etching chamber, and by connecting the suction port of a rotary oil pump to the exhaust port of the Roots pump through a cooling trap.
CONSTITUTION: The suction port of a Roots pump 3 is connected through a valve 2 to an etching chamber 1, and to exhaust port of the Roots pump 3 is connected the suction port of a rotary oil pump 7 through a cooling trap 6 which has valves 4, 5 respectively on its suction side and exhaust side, hereby an exhaust system A is constituted. The etching chamber 1 is evacuated with the exhaust system A while introducing etching gas into the etching chamber 1 with a gas introducing system 14. Because the Roots pump 3 has no slide friction surfaces, it is hardly affected by the dissociated molecules. The rotary oil pump 7 is prevented from being deteriorated because the cooling trap 6 captures the dissociated molecules. The cooling trap 6 is equipped in it with a heater 15, release valves 16, 17. When cooling is suspended, it is heated by the heater 15 with the valves 4, 5 closed, compressed air being sent through the release valve 17, and dissociated molecules being released through the release valve 16.
COPYRIGHT: (C)1981,JPO&Japio
JP15606279A 1979-11-30 1979-11-30 Exhaust system of dry etching unit Granted JPS5677381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15606279A JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15606279A JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Publications (2)

Publication Number Publication Date
JPS5677381A true JPS5677381A (en) 1981-06-25
JPS627269B2 JPS627269B2 (en) 1987-02-16

Family

ID=15619467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15606279A Granted JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Country Status (1)

Country Link
JP (1) JPS5677381A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433654U (en) * 1990-07-09 1992-03-19
CN110499430A (en) * 2019-08-23 2019-11-26 攀钢集团攀枝花钢铁研究院有限公司 7.5 tons of I type furnaces produce titanium sponge vacuum system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433654U (en) * 1990-07-09 1992-03-19
CN110499430A (en) * 2019-08-23 2019-11-26 攀钢集团攀枝花钢铁研究院有限公司 7.5 tons of I type furnaces produce titanium sponge vacuum system
CN110499430B (en) * 2019-08-23 2022-03-22 攀钢集团攀枝花钢铁研究院有限公司 Vacuum system for producing titanium sponge by 7.5 ton I-type furnace

Also Published As

Publication number Publication date
JPS627269B2 (en) 1987-02-16

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