JPS6488306A - Method and device for measuring pattern width - Google Patents

Method and device for measuring pattern width

Info

Publication number
JPS6488306A
JPS6488306A JP62247384A JP24738487A JPS6488306A JP S6488306 A JPS6488306 A JP S6488306A JP 62247384 A JP62247384 A JP 62247384A JP 24738487 A JP24738487 A JP 24738487A JP S6488306 A JPS6488306 A JP S6488306A
Authority
JP
Japan
Prior art keywords
pattern
fet
saw
irradiated
tooth wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62247384A
Other languages
Japanese (ja)
Other versions
JPH0643886B2 (en
Inventor
Kiyofumi Yamada
Yuichiro Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62247384A priority Critical patent/JPH0643886B2/en
Publication of JPS6488306A publication Critical patent/JPS6488306A/en
Publication of JPH0643886B2 publication Critical patent/JPH0643886B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To accurately measure the width of a pattern even if the pattern is charged up by being irradiated with an electron beam EB by scanning the EB on a sample in the vicinity of both breadthwise side edge parts of the sample. CONSTITUTION:A saw-tooth wave generating circuit 21 outputs a saw-tooth wave as shown in a figure A and the wave is applied to an FET 23 through an operational amplifier 22. A control signal shown in a figure B is applied to the gate of the FET 23 from a gate area control part 24 to turn on and off the FET 23, and a saw-tooth wave whose center part is absent is obtained on its output side. This is supplied as a current i0 to an X-directional scanning coil 26 through an operational amplifier 25. Consequently, only both breadthwise edge parts 13a and 13a of the pattern are irradiated with the EB and the center part is never irradiated. Therefore, even if the pattern 13 is formed of an electric insulating material, or even if the pattern surface is stained, the pattern is not charged up and secondary electron radiation from the pattern is never affected by the charging-up operation.
JP62247384A 1987-09-30 1987-09-30 Electrostatic material pattern width measuring method and apparatus Expired - Fee Related JPH0643886B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62247384A JPH0643886B2 (en) 1987-09-30 1987-09-30 Electrostatic material pattern width measuring method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62247384A JPH0643886B2 (en) 1987-09-30 1987-09-30 Electrostatic material pattern width measuring method and apparatus

Publications (2)

Publication Number Publication Date
JPS6488306A true JPS6488306A (en) 1989-04-03
JPH0643886B2 JPH0643886B2 (en) 1994-06-08

Family

ID=17162629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62247384A Expired - Fee Related JPH0643886B2 (en) 1987-09-30 1987-09-30 Electrostatic material pattern width measuring method and apparatus

Country Status (1)

Country Link
JP (1) JPH0643886B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59218906A (en) * 1983-05-27 1984-12-10 Jeol Ltd Measuring method by electronic beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59218906A (en) * 1983-05-27 1984-12-10 Jeol Ltd Measuring method by electronic beam

Also Published As

Publication number Publication date
JPH0643886B2 (en) 1994-06-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees