JPS6484633A - Wafer storing jig - Google Patents
Wafer storing jigInfo
- Publication number
- JPS6484633A JPS6484633A JP62240994A JP24099487A JPS6484633A JP S6484633 A JPS6484633 A JP S6484633A JP 62240994 A JP62240994 A JP 62240994A JP 24099487 A JP24099487 A JP 24099487A JP S6484633 A JPS6484633 A JP S6484633A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- slider
- storing jig
- wafer storing
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To prevent reliably the fall of wafers at the time of conveyance of a wafer storing jig by a method wherein a slider is provided at a carrying-in part or carrying-out part for the wafers. CONSTITUTION:When a wafer storing jig is being moved in a space, a slider 13 is pushed down downward by a spring 23 and a protrusion 15 is in a state that it is abutted on a stopper 17. At this time, the lower end surface 13a of the slider 13 and the bottom surface 20a of the main body of the wafer storing jig roughly coincide with each other. In this state, a notch 14 of the slider 13 and a wafer housing groove 11 of the wafer storing jig do not coincide with each other, a conveying port for a wafer 26 is blocked and the fall of the wafer 26 can be prevented. Then, the wafer storing jig is set at a prescribed position on a stage 24. That is, when the lower end surface of the slider 13 is abutted on a protrusion 25 on the stage 24, the slider 13 is pushed up against the pressingdown force of the spring 23. Whereupon, the wafer 26 is carried out of the wafer storing jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62240994A JPS6484633A (en) | 1987-09-28 | 1987-09-28 | Wafer storing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62240994A JPS6484633A (en) | 1987-09-28 | 1987-09-28 | Wafer storing jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6484633A true JPS6484633A (en) | 1989-03-29 |
Family
ID=17067742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62240994A Pending JPS6484633A (en) | 1987-09-28 | 1987-09-28 | Wafer storing jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6484633A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313955A (en) * | 1988-06-13 | 1989-12-19 | Tokyo Electron Ltd | Carrier |
| JP3014870U (en) * | 1995-02-17 | 1995-08-22 | 株式会社三ツ矢 | Wafer ring rack |
| US7500564B2 (en) | 2004-08-16 | 2009-03-10 | Dongbu Electronics Co., Ltd. | Wafer carrying apparatus |
| JP2010109039A (en) * | 2008-10-29 | 2010-05-13 | Toppan Printing Co Ltd | Cassette for substrate |
| WO2012077821A1 (en) * | 2010-12-08 | 2012-06-14 | 株式会社ニックス | Board material accommodation frame |
| JP2013157381A (en) * | 2012-01-27 | 2013-08-15 | Disco Abrasive Syst Ltd | Wafer processing apparatus |
| WO2016158983A1 (en) * | 2015-03-31 | 2016-10-06 | 株式会社デンソー | Magazine rack for industrial use |
-
1987
- 1987-09-28 JP JP62240994A patent/JPS6484633A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313955A (en) * | 1988-06-13 | 1989-12-19 | Tokyo Electron Ltd | Carrier |
| JP3014870U (en) * | 1995-02-17 | 1995-08-22 | 株式会社三ツ矢 | Wafer ring rack |
| US7500564B2 (en) | 2004-08-16 | 2009-03-10 | Dongbu Electronics Co., Ltd. | Wafer carrying apparatus |
| JP2010109039A (en) * | 2008-10-29 | 2010-05-13 | Toppan Printing Co Ltd | Cassette for substrate |
| WO2012077821A1 (en) * | 2010-12-08 | 2012-06-14 | 株式会社ニックス | Board material accommodation frame |
| JP2013157381A (en) * | 2012-01-27 | 2013-08-15 | Disco Abrasive Syst Ltd | Wafer processing apparatus |
| WO2016158983A1 (en) * | 2015-03-31 | 2016-10-06 | 株式会社デンソー | Magazine rack for industrial use |
| JP2016190662A (en) * | 2015-03-31 | 2016-11-10 | 株式会社デンソー | Industrial magazine rack |
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