KR930006275Y1 - Wafer tweezer and carring apparatus - Google Patents

Wafer tweezer and carring apparatus Download PDF

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Publication number
KR930006275Y1
KR930006275Y1 KR2019900013995U KR900013995U KR930006275Y1 KR 930006275 Y1 KR930006275 Y1 KR 930006275Y1 KR 2019900013995 U KR2019900013995 U KR 2019900013995U KR 900013995 U KR900013995 U KR 900013995U KR 930006275 Y1 KR930006275 Y1 KR 930006275Y1
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KR
South Korea
Prior art keywords
wafer
holder
carring
handle
present
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Application number
KR2019900013995U
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Korean (ko)
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KR920007029U (en
Inventor
권병조
Original Assignee
금성일렉트론 주식회사
문정환
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Priority to KR2019900013995U priority Critical patent/KR930006275Y1/en
Publication of KR920007029U publication Critical patent/KR920007029U/en
Application granted granted Critical
Publication of KR930006275Y1 publication Critical patent/KR930006275Y1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

내용 없음.No content.

Description

웨이퍼 집게 겸 운반구Wafer tongs

제1도는 종래 웨이퍼 집게의 구성도.1 is a block diagram of a conventional wafer tongs.

제2도는 본고안의 웨이퍼 집게 겸 운반구의 종단면도.2 is a longitudinal sectional view of the wafer tongs and carrier of the present article.

제3도는 본고안의 평면도.3 is a plan view of the present draft.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 웨이퍼 2 : 홀더1: wafer 2: holder

3 : 손잡이 4 : 잠금부3: handle 4: lock

5 : 스프링5: spring

본 고안은 웨이퍼를 한장씩 집거나 운반시 안전하게 운반할 수 있게한 웨이퍼 집게 겸 운반구에 관한 것이다.The present invention relates to a wafer tongs and carriers that can safely transport the wafers one by one or during transportation.

종래에는 웨이퍼 운반시 제1도에 도시된 바와 같이 사용자가 집게(6)를 사용하여 웨이퍼(1)를 집어 운반하므로 사용자가 힘을 가하게되어 웨이퍼(1)가 손상되기 쉬웠으며, 웨이퍼 운반시 별도의 카세트에 웨이퍼를 넣어 운반해야 하는 불편함이 있었다.Conventionally, as illustrated in FIG. 1, when the wafer is transported, the user picks up and transports the wafer 1 using the tongs 6 so that the user is forced to damage the wafer 1, and when the wafer is transported, There was an inconvenience to put the wafer in the cassette.

본 고안은 이와 같은 종래의 결점을 감안하여 안출한 것으로 웨이퍼를 집거나 운반하기에 용이하도록 웨이퍼 집게 및 운반구를 일체로 형성하고자 하는데 그 목적이 있다.The present invention has been made in view of the above-mentioned drawbacks, and an object thereof is to integrally form a wafer clip and a conveying port so as to easily pick up or transport a wafer.

이하에서 본 고안은 첨부된 도면을 참고로하여 상술하면 다음과 같다.Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

본고안은 웨이퍼(1)가 끼워져 고정될 수 있는 웨이퍼 가이드용홀더(2)와, 웨이퍼 운반시 사용되는 손잡이(3)와, 상기 홀더(2) 및 손잡이(3) 사이에 설치되어 홀더(2)에 끼워진 웨이퍼(1)를 고정하거나 해제할 수 있는 잠금부(4)를 일체로 구성하여서 이루어진 것이다.The subject of the present invention is a wafer guide holder (2) into which the wafer (1) can be inserted and fixed, a handle (3) used for transporting the wafer, and a holder (2) installed between the holder (2) and the handle (3). It is made by integrally configuring the locking portion (4) capable of fixing or releasing the wafer (1) inserted in the).

이와 같이 구성된 본 고안은 웨이퍼를 집을때 잠금부(4)를 누른 상태에서 홀더(2)에 웨이퍼(1)를 끼우며, 이때 잠금부(4) 밑면에 설치된 스프링(5)은 압축된다.The present invention configured as described above inserts the wafer 1 into the holder 2 while pressing the locking portion 4 when picking up the wafer, and the spring 5 installed on the bottom of the locking portion 4 is compressed.

상기와 같이 웨이퍼(1)를 홀더(2)에 끼운 후 누르고있던 잠금부(4)를 놓으면 스프링(5)이 원상복귀되면서 잠금부(4)의 돌기가 홀더(2)내에 끼워진 웨이퍼(1)를 눌러 웨이퍼(1)가 움직이지 않게 된다.After the wafer 1 is inserted into the holder 2 as described above, when the locking part 4 held down is released, the spring 5 returns to its original position, and the protrusion of the locking part 4 is inserted into the holder 2. Press to stop the wafer 1 from moving.

이 상태에서 손잡이(3)를 잡고 웨이퍼(1)를 안전하게 운반할 수 있으며 운반된 웨이퍼(1)를 내려놓을 때에는 다시 잠금부(4)를 눌러 웨이퍼(1)를 용이하게 내려놓을 수 있다.In this state, it is possible to safely carry the wafer 1 by holding the handle 3, and when lowering the conveyed wafer 1, the locking part 4 can be pressed again to easily lower the wafer 1.

이상과 같은 본 고안은 웨이퍼(1)를 개별 운반시 종래와 같이 카세트에 담아 운반해야하는 불편함을 해소하여 단지 손잡이(3)를 잡고 잠금부(4)를 누르고 놓는 수단에 의하여 홀더(2)에 웨이퍼(1)를 안전하게 고정시킬 수 있어 웨이퍼(1)를 집기가 편리함은 물론 운반 또는 용이하며, 특히 웨이퍼(1)가 홀더(2)에 평면접촉되므로 웨이퍼(1)의 손상을 방지할 수 있는 효과가 있다.The present invention as described above solves the inconvenience of having to carry the wafer 1 in a cassette in the case of individual transport, so as to hold the handle 3 and press and release the locking part 4 to the holder 2 by the means. Since the wafer 1 can be securely fixed, the wafer 1 can be easily picked up as well as transported or easy, and in particular, since the wafer 1 is in flat contact with the holder 2, damage to the wafer 1 can be prevented. It works.

Claims (1)

웨이퍼(1)가 끼워질 수 있는 웨이퍼 가이드용 홀더(2)와, 웨이퍼(1)를 잡거나 운반시 사용되는 손잡이(3)와, 상기 홀더(2)와 손잡이(3) 사이에 설치되어 홀더(2)에 끼워진 웨이퍼(1)를 고정하거나 해제할 수 있는 잠금부(4)를 일체로 구성함을 특징으로 하는 웨이퍼 집게 겸 운반구.A wafer guide holder 2 into which the wafer 1 can be fitted, a handle 3 used to hold or transport the wafer 1, and a holder (2) installed between the holder 2 and the handle 3. A wafer clamping and carrying tool, characterized in that the locking portion (4) which can fix or release the wafer (1) inserted in the 2) is integrally formed.
KR2019900013995U 1990-09-10 1990-09-10 Wafer tweezer and carring apparatus KR930006275Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900013995U KR930006275Y1 (en) 1990-09-10 1990-09-10 Wafer tweezer and carring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900013995U KR930006275Y1 (en) 1990-09-10 1990-09-10 Wafer tweezer and carring apparatus

Publications (2)

Publication Number Publication Date
KR920007029U KR920007029U (en) 1992-04-22
KR930006275Y1 true KR930006275Y1 (en) 1993-09-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900013995U KR930006275Y1 (en) 1990-09-10 1990-09-10 Wafer tweezer and carring apparatus

Country Status (1)

Country Link
KR (1) KR930006275Y1 (en)

Also Published As

Publication number Publication date
KR920007029U (en) 1992-04-22

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