JPS6428912A - Wafer handling device - Google Patents
Wafer handling deviceInfo
- Publication number
- JPS6428912A JPS6428912A JP18481087A JP18481087A JPS6428912A JP S6428912 A JPS6428912 A JP S6428912A JP 18481087 A JP18481087 A JP 18481087A JP 18481087 A JP18481087 A JP 18481087A JP S6428912 A JPS6428912 A JP S6428912A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette
- arm
- held
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To obtain a wafer handling device where a wafer loading error is hardly caused by a method wherein a first handling arm and a second handling arm are installed at a wafer handling mechanism and a stopper abutting on a periphery of a wafer or the periphery of the wafer displaced from a held state is installed on the side supported by the first arm of the second arm. CONSTITUTION:If a held wafer 7 is detached from a suction chuck hole 2 due to a counteraction from another wafer 7 whose outer diameter is brought into contact with an inner wall face of a cassette when the wafer 7 is loaded into cassettes 4, 5 on the side of an unloader, a periphery of the wafer 7 abuts on a wafer stopper 2d as a second arm 2b advances, and the wafer does not retreat any more; accordingly, the wafer 7 is held by a shelf part on the side of the cassette and by this wafer stopper 2d, and the wafer can be pushed to the side of an unloader cassette. If the wafer is pushed to a certain extent, it is held by the shelf on the side of the cassette; the wafer cannot be dropped from the cassette.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18481087A JPS6428912A (en) | 1987-07-24 | 1987-07-24 | Wafer handling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18481087A JPS6428912A (en) | 1987-07-24 | 1987-07-24 | Wafer handling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6428912A true JPS6428912A (en) | 1989-01-31 |
Family
ID=16159685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18481087A Pending JPS6428912A (en) | 1987-07-24 | 1987-07-24 | Wafer handling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6428912A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006026765A (en) * | 2004-07-13 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | Device for machining perimeter of disk-shaped workpiece |
| US8231322B2 (en) | 2001-07-02 | 2012-07-31 | Brooks Automation, Inc. | Fast swap dual substrate transport for load lock |
| CN109904103A (en) * | 2019-03-27 | 2019-06-18 | 苏州新美光纳米科技有限公司 | A kind of silicon dice transfer device and silicon test device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57159534A (en) * | 1981-02-13 | 1982-10-01 | Ramu Research Corp | Load lock |
| JPS59182046A (en) * | 1983-04-01 | 1984-10-16 | Hitachi Ltd | Conveying device in vacuum |
| JPS61121890A (en) * | 1985-02-07 | 1986-06-09 | 新明和工業株式会社 | Industrial robot |
| JPS61273441A (en) * | 1985-05-23 | 1986-12-03 | Canon Inc | Wafer transfer device |
| JPS6293112A (en) * | 1985-10-18 | 1987-04-28 | Kazuo Kimata | Conveying device |
| EP0219826A2 (en) * | 1985-10-24 | 1987-04-29 | Texas Instruments Incorporated | Vacuum processing system |
-
1987
- 1987-07-24 JP JP18481087A patent/JPS6428912A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57159534A (en) * | 1981-02-13 | 1982-10-01 | Ramu Research Corp | Load lock |
| JPS59182046A (en) * | 1983-04-01 | 1984-10-16 | Hitachi Ltd | Conveying device in vacuum |
| JPS61121890A (en) * | 1985-02-07 | 1986-06-09 | 新明和工業株式会社 | Industrial robot |
| JPS61273441A (en) * | 1985-05-23 | 1986-12-03 | Canon Inc | Wafer transfer device |
| JPS6293112A (en) * | 1985-10-18 | 1987-04-28 | Kazuo Kimata | Conveying device |
| EP0219826A2 (en) * | 1985-10-24 | 1987-04-29 | Texas Instruments Incorporated | Vacuum processing system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8231322B2 (en) | 2001-07-02 | 2012-07-31 | Brooks Automation, Inc. | Fast swap dual substrate transport for load lock |
| JP2006026765A (en) * | 2004-07-13 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | Device for machining perimeter of disk-shaped workpiece |
| CN109904103A (en) * | 2019-03-27 | 2019-06-18 | 苏州新美光纳米科技有限公司 | A kind of silicon dice transfer device and silicon test device |
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