JPS6428912A - Wafer handling device - Google Patents

Wafer handling device

Info

Publication number
JPS6428912A
JPS6428912A JP18481087A JP18481087A JPS6428912A JP S6428912 A JPS6428912 A JP S6428912A JP 18481087 A JP18481087 A JP 18481087A JP 18481087 A JP18481087 A JP 18481087A JP S6428912 A JPS6428912 A JP S6428912A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
wafer
cassette
side
arm
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18481087A
Inventor
Tsutomu Nakadai
Tsunemi Fukushima
Original Assignee
Hitachi Electr Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE:To obtain a wafer handling device where a wafer loading error is hardly caused by a method wherein a first handling arm and a second handling arm are installed at a wafer handling mechanism and a stopper abutting on a periphery of a wafer or the periphery of the wafer displaced from a held state is installed on the side supported by the first arm of the second arm. CONSTITUTION:If a held wafer 7 is detached from a suction chuck hole 2 due to a counteraction from another wafer 7 whose outer diameter is brought into contact with an inner wall face of a cassette when the wafer 7 is loaded into cassettes 4, 5 on the side of an unloader, a periphery of the wafer 7 abuts on a wafer stopper 2d as a second arm 2b advances, and the wafer does not retreat any more; accordingly, the wafer 7 is held by a shelf part on the side of the cassette and by this wafer stopper 2d, and the wafer can be pushed to the side of an unloader cassette. If the wafer is pushed to a certain extent, it is held by the shelf on the side of the cassette; the wafer cannot be dropped from the cassette.
JP18481087A 1987-07-24 1987-07-24 Wafer handling device Pending JPS6428912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18481087A JPS6428912A (en) 1987-07-24 1987-07-24 Wafer handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18481087A JPS6428912A (en) 1987-07-24 1987-07-24 Wafer handling device

Publications (1)

Publication Number Publication Date
JPS6428912A true true JPS6428912A (en) 1989-01-31

Family

ID=16159685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18481087A Pending JPS6428912A (en) 1987-07-24 1987-07-24 Wafer handling device

Country Status (1)

Country Link
JP (1) JPS6428912A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006026765A (en) * 2004-07-13 2006-02-02 Nakamura Tome Precision Ind Co Ltd Device for machining perimeter of disk-shaped workpiece
US8231322B2 (en) 2001-07-02 2012-07-31 Brooks Automation, Inc. Fast swap dual substrate transport for load lock

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159534A (en) * 1981-02-13 1982-10-01 Ramu Research Corp Load lock
JPS59182046A (en) * 1983-04-01 1984-10-16 Hitachi Ltd Conveying device in vacuum
JPS61121890A (en) * 1985-02-07 1986-06-09 Shin Meiwa Ind Co Ltd Industrial robot
JPS61273441A (en) * 1985-05-23 1986-12-03 Canon Inc Wafer transfer device
JPS6293112A (en) * 1985-10-18 1987-04-28 Kazuo Kimata Conveying device
EP0219826A2 (en) * 1985-10-24 1987-04-29 Texas Instruments Incorporated Vacuum processing system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159534A (en) * 1981-02-13 1982-10-01 Ramu Research Corp Load lock
JPS59182046A (en) * 1983-04-01 1984-10-16 Hitachi Ltd Conveying device in vacuum
JPS61121890A (en) * 1985-02-07 1986-06-09 Shin Meiwa Ind Co Ltd Industrial robot
JPS61273441A (en) * 1985-05-23 1986-12-03 Canon Inc Wafer transfer device
JPS6293112A (en) * 1985-10-18 1987-04-28 Kazuo Kimata Conveying device
EP0219826A2 (en) * 1985-10-24 1987-04-29 Texas Instruments Incorporated Vacuum processing system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8231322B2 (en) 2001-07-02 2012-07-31 Brooks Automation, Inc. Fast swap dual substrate transport for load lock
JP2006026765A (en) * 2004-07-13 2006-02-02 Nakamura Tome Precision Ind Co Ltd Device for machining perimeter of disk-shaped workpiece

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