JPS6083245U - Thin piece detection device for cassette type thin piece loading/unloading - Google Patents
Thin piece detection device for cassette type thin piece loading/unloadingInfo
- Publication number
- JPS6083245U JPS6083245U JP17708483U JP17708483U JPS6083245U JP S6083245 U JPS6083245 U JP S6083245U JP 17708483 U JP17708483 U JP 17708483U JP 17708483 U JP17708483 U JP 17708483U JP S6083245 U JPS6083245 U JP S6083245U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- thin piece
- detection device
- thin
- type thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Controlling Sheets Or Webs (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図はウェハ送り出し部の一部切欠斜視図、第2図は
従来例を説明するための、ウェハ送り出□ し部の側断
面図、第3図は本考案の実施例で、第2図のA−A断面
に該当する断面図を示し、第4図は第3図の要部側面図
を示す。
2・・・ウェハ、3・・・カセット、8・・・投光部、
9・・・受光部。Fig. 1 is a partially cutaway perspective view of the wafer delivery unit, Fig. 2 is a side sectional view of the wafer delivery unit for explaining a conventional example, and Fig. 3 is an embodiment of the present invention. A sectional view corresponding to the AA section in the figure is shown, and FIG. 4 is a side view of the main part of FIG. 3. 2... Wafer, 3... Cassette, 8... Light projecting section,
9... Light receiving section.
Claims (2)
される上下動可能なエレベータテーブルと、該エレベー
タテーブル上に載置されたカセットに対向し、当該エレ
ベータテーブルの上下動と共動して薄片をカセットに給
排する一対の゛ 搬送ベルトとから構成されたカセット
式薄片搬出人装置において、カセット下部内側面に近接
して対向させた、一対の投光部及び受光部から成る透過
センサーを、投光部からの光ビームがカセット内の最下
位に収納された薄片によってのみ遮断されるように配置
したカセット式薄片搬出入用薄片検知装置。(1) A vertically movable elevator table on which cassettes capable of storing a plurality of thin slices at equal intervals are placed; In the cassette-type thin film conveyor device, which is composed of a pair of conveyor belts that supply and discharge thin films to and from the cassette, a transmission sensor consisting of a pair of light emitting part and light receiving part is disposed close to and facing the inner surface of the lower part of the cassette. A cassette type thin piece detection device for carrying in and out of thin pieces, which is arranged so that the light beam from the light projecting part is blocked only by the thin piece stored at the lowest position in the cassette.
ズに応じて変更可能にした実用新案登録請求の範囲第1
項に記載のカセット式薄片搬出入用薄片検知装置。(2) Claim 1 of the utility model registration that allows the installation position of the light emitting part or the light receiving part to be changed according to the size of the flake
The cassette type thin piece detection device for carrying in and out of thin pieces described in 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17708483U JPS6083245U (en) | 1983-11-15 | 1983-11-15 | Thin piece detection device for cassette type thin piece loading/unloading |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17708483U JPS6083245U (en) | 1983-11-15 | 1983-11-15 | Thin piece detection device for cassette type thin piece loading/unloading |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6083245U true JPS6083245U (en) | 1985-06-08 |
JPH0128683Y2 JPH0128683Y2 (en) | 1989-08-31 |
Family
ID=30384811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17708483U Granted JPS6083245U (en) | 1983-11-15 | 1983-11-15 | Thin piece detection device for cassette type thin piece loading/unloading |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6083245U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6382248A (en) * | 1986-09-26 | 1988-04-13 | Canon Inc | Conveyor system for water or the like |
JP2846957B2 (en) * | 1993-03-29 | 1999-01-13 | イェノプティック ゲーエムベーハー | Device for operating disk-shaped objects on the operating surface of a local clean room |
JP2018177516A (en) * | 2017-04-21 | 2018-11-15 | 株式会社日本キャリア工業 | Food tray transportation device having tray detecting function |
-
1983
- 1983-11-15 JP JP17708483U patent/JPS6083245U/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6382248A (en) * | 1986-09-26 | 1988-04-13 | Canon Inc | Conveyor system for water or the like |
JP2846957B2 (en) * | 1993-03-29 | 1999-01-13 | イェノプティック ゲーエムベーハー | Device for operating disk-shaped objects on the operating surface of a local clean room |
JP2018177516A (en) * | 2017-04-21 | 2018-11-15 | 株式会社日本キャリア工業 | Food tray transportation device having tray detecting function |
Also Published As
Publication number | Publication date |
---|---|
JPH0128683Y2 (en) | 1989-08-31 |
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