JPS60110328U - Wafer feeding device - Google Patents

Wafer feeding device

Info

Publication number
JPS60110328U
JPS60110328U JP20230483U JP20230483U JPS60110328U JP S60110328 U JPS60110328 U JP S60110328U JP 20230483 U JP20230483 U JP 20230483U JP 20230483 U JP20230483 U JP 20230483U JP S60110328 U JPS60110328 U JP S60110328U
Authority
JP
Japan
Prior art keywords
cassettes
feeding device
wafer feeding
elm
screw shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20230483U
Other languages
Japanese (ja)
Other versions
JPH0242674Y2 (en
Inventor
安男 和田
本岡　健一郎
Original Assignee
株式会社　東京精密
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社　東京精密 filed Critical 株式会社　東京精密
Priority to JP20230483U priority Critical patent/JPS60110328U/en
Publication of JPS60110328U publication Critical patent/JPS60110328U/en
Application granted granted Critical
Publication of JPH0242674Y2 publication Critical patent/JPH0242674Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • De-Stacking Of Articles (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案において取り扱うウェハ収容カセットの
説明図、第２図は本考案の構成を示す概要図、第３図は
本考案の正面図。 １：カセット、２，３；棚、４：ウェハ、５：押出板、
７，８：載置テーブル、９：ねじ軸、１０：回転検出器
、１２：遅閉板、１４，１５：発光、受光素子、１７：
ナツト。FIG. 1 is an explanatory diagram of a wafer storage cassette used in the present invention, FIG. 2 is a schematic diagram showing the configuration of the present invention, and FIG. 3 is a front view of the present invention. 1: Cassette, 2, 3: Shelf, 4: Wafer, 5: Extrusion plate,
7, 8: Placement table, 9: Screw shaft, 10: Rotation detector, 12: Slow closing plate, 14, 15: Light emitting, light receiving element, 17:
Natsuto.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェハを収容するカセットを複数段保持するエレベータ
において、前記カセットを昇降させるねじ軸にその回転
検出信号発信位置を調整可能とする機構を設けて一つの
カセットのウェハの送す出し位置を調整可能とし、ニレ
段−夕の他の段のカセットにおいてはねじ軸の上下動ナ
ツトとカセット載置テーブルの関係を固定あるいは解除
可能とする機構を設けてカセット載置テーブルの停止位
置の調整を可能としたウェハの送り出し装置。In an elevator that holds multiple stages of cassettes containing wafers, a screw shaft for raising and lowering the cassettes is provided with a mechanism that allows adjustment of the rotation detection signal transmission position, so that the delivery position of the wafers of one cassette can be adjusted. For the cassettes in the other tiers of elm and elm, a mechanism was provided to fix or release the relationship between the vertical movement nut of the screw shaft and the cassette mounting table, making it possible to adjust the stopping position of the cassette mounting table. Wafer feeding device.
JP20230483U 1983-12-27 1983-12-27 Wafer feeding device Granted JPS60110328U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20230483U JPS60110328U (en) 1983-12-27 1983-12-27 Wafer feeding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20230483U JPS60110328U (en) 1983-12-27 1983-12-27 Wafer feeding device

Publications (2)

Publication Number Publication Date
JPS60110328U true JPS60110328U (en) 1985-07-26
JPH0242674Y2 JPH0242674Y2 (en) 1990-11-14

Family

ID=30764754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20230483U Granted JPS60110328U (en) 1983-12-27 1983-12-27 Wafer feeding device

Country Status (1)

Country Link
JP (1) JPS60110328U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011079612A (en) * 2009-10-05 2011-04-21 Daifuku Co Ltd Liftable article carrying device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011079612A (en) * 2009-10-05 2011-04-21 Daifuku Co Ltd Liftable article carrying device

Also Published As

Publication number Publication date
JPH0242674Y2 (en) 1990-11-14

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