JPS61121890A - Industrial robot - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an industrial robot, and particularly to an industrial robot that can be used while maintaining a clean atmosphere.

(Conventional technology) For example, on a line that manufactures printed circuit boards.

In the process of bonding copper foil to a plastic substrate, the process must be carried out in a clean atmosphere as dust is not allowed to adhere to the process. For this reason, although there has been a demand for automation, the current situation is that industrial robots have no choice but to rely on manual work, as the use of industrial robots may scatter dust.

In particular, if the drive devices that drive each rotating member of an industrial robot and their wiring are exposed outside, it will cause dust generation, but if they are installed inside, each rotating member Since there is a demand for disposing the drive device in the connecting portion, there are problems in terms of sealing performance and wiring of the drive device.

(Object of the Invention) An object of the present invention is to provide an industrial robot that can be used efficiently while maintaining a clean atmosphere.

(Disclosure of the Invention) The present invention relates to an improvement of an industrial robot configured by connecting a number of movable members (at least a rotating member or a rotating member) according to the degree of freedom required for a supporting member.

This invention has a connecting portion in which the base end of the rotating member is inserted into the distal end of another member and connected via an airtight seal, and the base end of the rotating member is closed at the connecting portion, and
It is characterized by having a drive device on one side and an opening on the other side.

(Example) Embodiments of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, the industrial robot 1 of the present invention includes:
A linear motion member 3, a first rotation member 4, a second rotation member 5, and a rotation member 6 are sequentially connected to the support member 2. The support member 2 has a first space 2a inside, the linear motion member 3 has a first hollow part 3a and a second space 3b, and the first rotating member 4 has a second hollow part 4a and a second hollow part 4b. A third hollow portion 5a is formed inside the rotating member 5, and a fourth hollow portion 6a is formed inside the rotating member 6.

The support member 2 has an inner tube 2b and an outer tube 2c extending upward, while the linear motion member 3 has an inner tube 3c and an outer tube 3d extending downward. The outer cylinder 3d of the linear motion member 3 is fitted into the outer cylinder 2c of the support member 2 so as to be able to move forward and backward in the vertical direction, and a first airtight seal 7a is interposed between the two outer cylinders 2c and 3d. A first connecting portion 7 is configured that isolates the space portion 2a and the first hollow portion 3a from the outside air and communicates with each other.

On the other hand, the inner cylinder 3c of the linear motion member 3 is loosely fitted into the inner cylinder 2b of the support member 2 with a gap. A first drive device 12 and two guide devices 13 are arranged at intervals of 120 degrees in the first hollow portion 3a between the inner tube 2b and the outer tube 3d. The first drive device 12 is a motor 1 fixed to the inner cylinder 2b.
2a is directly connected to this motor 12a and its rotation angle information (
That is, a shaft encoder 12b that outputs vertical position information of the linear motion member 3), a ball screw 12c directly connected to the output shaft of the motor 12a, and a pole nut 12b provided on the outer cylinder 3d and movably screwed into the ball screw 12c. It is configured. On the other hand, the guide device 13
1 is a guide cylinder 1 in which a rod 13a provided on an outer cylinder 3d and a rod 13a provided on an inner cylinder 2b are fitted so as to be vertically movable.
3b.

A wire cable insertion port 3e and an intake port 3f are opened near the lower end of the inner cylinder 3c, while a wire pipe 2d, a main intake pipe 2e, and a sub intake pipe 2f are attached to the side of the support member 2.
A first flexible tube 14 communicates between the electrical conduit 2d and the electrical wire/cable insertion port 3e, and a second flexible tube 15 communicates between the main intake pipe 2e and the intake port 3f. In addition, the first
And the first flexible tubes 14 and 15 have sufficient length, and the first flexible tubes 14 and 15 have sufficient length.
They are arranged spirally within the space 2a.

The closed base end of the first swing member 4 is inserted into the distal end of the translation member 3, and is supported by a bearing 8b so as to be able to rotate around a vertical axis, and the space between the translation member 3 and the first swing member 4 is A second airtight seal 8a is interposed between the second hollow part 4a and the second space part 3b of the linear motion member 3 through the lower opening at the base end of the first rotating member 4 to isolate the second space part 3b from the outside air and connect the second hollow part 4a to the second space part 3b of the linear motion member 3. A second connecting portion 8 is configured. Furthermore, a second
A drive device 16 is provided. The second drive device 16 includes a motor 16a attached to the linear motion member 3, and a motor 16a attached to the linear motion member 3.
The shaft encoder 16b is directly connected to the shaft encoder 16b and outputs its rotation angle information (that is, the rotation angle information of the first rotation member 4 with respect to the linear motion member 3).

Timing pulley 1 fixed to the output shaft of the motor 16a
6c, a high reduction ratio reducer 16d that is interposed between the linear motion member 3 and the first rotating member 4 and whose input shaft is pivotally supported above the base end of the linear motion member 3; an input of this reduction gear 16d; Timing pulley 16e and timing pulley 16 fixed to the shaft
Timing belt 16f wrapped between c and 16e
It is composed of. Note that the upper part of the linear motion member 3 is covered with a cover 3g.

The base end of the second rotating member 4 is inserted into the distal end of the first rotating member 4, and is supported by a bearing 9b (cross roller bearing) so as to be able to rotate around a vertical axis. A third airtight seal 9a is interposed between the member 5 and the third connecting portion 9 that communicates with the second and third hollow portions 4a and 5a while blocking the outside air.

The upper opening at the base end of the second rotating member 4 is closed by a closing plate 5c, and a chain sprocket 18f, which will be described later, is disposed above the closed base end, and its center hole 18k is used for wiring such as a drive device and for suction. Therefore, it becomes an opening that communicates the rain hollow parts 4a and 5a, and the reducer 17 of the third drive device 17 is installed on the lower side.
d is provided.

The third drive device 17 includes a second space portion 3b and a second hollow portion 4a.
It is arranged throughout the interior. The third drive device 17 includes a motor 17a provided on the arm 4b that is integrated with the first rotating member 4 so as to be substantially coaxial with the reducer 16d, and is directly connected to the motor 17a and has rotation angle information ( In other words, the turning angle information of the second turning member 5 with respect to the first turning member 4)
a shaft encoder 17b that outputs a , a timing pulley 17c fixed to the output shaft of the motor 17a, a reducer 17cl whose input shaft is pivotally supported by the first rotating member 4 and interposed between it and the second rotating member 5; The second hollow portion 4a of the first rotating member 4 is configured with a timing pulley 17e fixed to the input shaft of the reducer 17d and a timing belt 17f wound between the timing pulleys 17c and 17e. The upper and lower openings are the covers 40 and 4d.
covered by.

A rotating member 6 is rotatably supported around a vertical axis by a bearing 10b at the tip of the second rotating member 5, and a fourth airtight seal 10a is provided between the second rotating member 5 and the third rotating member 6. A fourth connecting portion 10 is interposed therebetween, which isolates the third and fourth hollow portions 5a and 6a from the outside air and allows them to communicate with each other.

A fourth drive device 18 is disposed across the second hollow section 4a and the third hollow section 5a. The fourth drive device 18 is a motor 18a fixed to the first rotating member 4, and is directly connected to the motor 18a and outputs rotation angle information (that is, rotation angle information of the rotating member 6 with respect to the first rotating member 4). A shaft encoder 18b, a reducer 18d to which rotational force is transmitted from the motor 18a through engagement of a bevel gear 18c, and a chain sprocket 1 provided on the output side of the reducer 18d.
8e, two-stage chain sprocket 18f1 rotating member 6 supported by the second rotating member 5 on the same axis as the reducer 17d
A chain sprocket 18g, which is integrally formed with the 2-stage chain sprocket 18f and has the same number of teeth as the 2-stage chain sprocket 18f, a chain sprocket 18e, and a 2-stage chain sprocket 18f.
an endless chain 18h wound between the two-stage chain sprocket 18f and the chain sprocket 18g, and a tension provided on the second rotating member 5 to adjust the tension of the endless chain 18i. It is composed of a chain sprocket 18j. Note that the upper opening of the second rotating member 5 is connected to the cover 5.
covered by b.

The rotary member 6 is provided with a suction cup 19 as an end effector of the industrial robot 1 at its lower part, and the fourth hollow portion 6a of the rotary member 6 is configured to also serve as an intake pipe of the suction cup 19.

Each of the airtight seals 7a, 8a, 9a, and 10a is made of tetrafluoroethylene-based rubber that is wear-resistant and dust-free.

Electric wire cables and shaft encoders 12b for supplying power and control signals to each of the motors 12a, 16a, 17a and 18a.

Electric wire cables (all not shown) for extracting output signals from the electric wire cable tubes 16b, 17b, and 18b are connected to the electric wire cable tube 2d, the first flexible tube 14. The wires are branched from the inner tube 3b to the above-mentioned necessary locations via the wire/cable insertion port 3e, and are connected and wired. Note that wiring to the motor 16a and shaft encoder 16b is performed by passing electric wire cables through the inner cylinder 3c while maintaining sealing properties near the upper end thereof.

Further, the electric wire cables are installed with a sufficient margin so that there is no problem even when the linear motion member 3 moves up and down.

Suction sides of exhaust pumps lla and llb serving as exhaust means 11 are communicated with the main intake pipe 2e and the auxiliary intake pipe 2f, respectively. In addition, the exhaust pumps 11a and llb are motor l
lc, lid, each exhaust pump lla,
'llb discharge air is discharged outside the working room. and,
When the exhaust pump Lla is operated by the motor llc, the air sucked from the suction cup 19 flows through the fourth hollow part 6a, the third hollow part 5a, and the second hollow part 4 as shown by arrows (solid lines).
a and the second space 3b, the workpiece is suctioned and exhausted by the exhaust pump lla, and the suction cup 19 suctions and holds the conveyed object, and the dust generated at each of these passing points is also suctioned, so that the working chamber is free of dust. Stays clean without scattering. To release the object to be transported, the motor llc may be stopped. Note that this suction force is possible, for example, at a gauge pressure of about 0° and 4 atmospheres.

Furthermore, when the translational member 3 is moved up and down, the air pressure in the first space 2a and the first hollow portion 3a changes, so the translational member 3
The capacity of the exhaust pump Ilb is determined so that the pressure in the first space part 2a and the first hollow part 3a does not become higher than, for example, the outside pressure even if the pressure drops at the maximum speed. Then, by the action of this pump 11b, a second drive device for the direct-acting member 3!
The dust in the installation space 16, the first space 2a, and the first hollow part 3a is sucked and exhausted as shown by the arrow (dotted chain line), and is kept clean without being scattered inside the work chamber.

The fourth rotating member 6, the second and first rotating member 5°4
, the first suction passage formed by the third and second hollow parts 6a, 5a+4a is connected to the second intermediate part 3b of the linear motion member 3.
The first hollow part 3a of the linear motion member 3 forms the first hollow part 3a of the support member 2.
The second pump is connected to the exhaust pump llb via the space 2a.
The first suction passage is independent from the suction passage, so that the first suction passage is not affected by pressure fluctuations that occur in the second suction passage due to changes in volume caused by the forward and backward movements of the translational member 3. Note that the linear member 3 moves up and down to open the intake port 3f.
Even if the main intake pipe 2. e and the second flexible tube 15
Since it is connected by , there is no problem with the passage of intake air.

The industrial robot 1 is configured to be controlled by a play pack system by a computer (not shown). That is, in the first drive device 12, the pole nut 12d moves up and down due to the rotation of the ball screw 12c, and the translation member 3 moves translationally in the up and down direction. Also, the second
In the drive device 16, the first rotating member 4 is the linear member 3
Rotate in a horizontal plane against. Further, the third drive device 17
In this case, the second turning member 5 turns in a horizontal plane. Further, the rotating member 6 rotates about the vertical axis.

Note that even if the second rotating member 5 rotates, the rotation angle of the rotating member 6 with respect to the first rotating member 4 remains unchanged.

In this way, the industrial robot 1 is configured as a transport robot with four degrees of freedom. In addition, in FIGS. 2 and 3, the movable range of the industrial robot 1 is shown surrounded by a two-dot chain line and hatched.

This invention is not limited to the above-mentioned embodiments, but
For example l) In the above-described embodiment, the base end of the pivoting member 5, 4 is applied to the connected connecting portion 9, 8 inserted into the distal end of another pivoting member 4 or the linear member 3. Although the present invention has only been described, it can be similarly applied to a connecting portion in which the base end of the pivoting member is inserted into the distal end of a support member or other member.

n) The industrial robot may not be for transportation but may be for other purposes, and in addition to the horizontally rotating articulated robot as in the above embodiment, it may also be a vertically rotating multi-joint robot, a polar coordinate robot, a cylindrical coordinate robot, or a vertically rotating multi-joint robot. The same applies to Cartesian coordinate robots, etc.; (in) The degrees of freedom of industrial robots are not limited to 4 degrees of freedom; they may also have other numbers of degrees of freedom; ) If a suction cup is provided as the end effector as in the above embodiment, the suction and exhaust for operating the suction cup and the suction and exhaust for sucking the dust inside the robot can be made common. .

In addition to such a suction cup, the end effector may be provided with an electromagnetic suction device or other gripping device. In the connecting part inserted into the tip of another member, a driving device is provided on one side and an opening is provided on the other side, so that the rotating member can be efficiently rotated by the driving device and can also be rotated through the opening. The wiring of drive devices, etc. can be easily wired, and they can be connected without compromising sealing performance, and dust generated from various devices inside the robot will not leak into the work chamber.

The work room can be kept clean.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a vertical sectional side view showing an industrial robot, and FIG. 2 is a schematic diagram thereof. FIG. 3 is a schematic plan view of the same. DESCRIPTION OF SYMBOLS 1...Industrial robot, 2...Supporting member, 3...-Linear motion member, 4...First rotating member, 5...・Second turning member, 6... Rotating member, 8... Second connecting part, 9... Third connecting part, 9a... Third Airtight seal, 17...
...Third drive device, 18k...Center hole. Condolences 3 @ 6 Procedures subject to amendment Amendment Book 3/1933 Display of case 1 Industrial robot 3 Person making the amendment Relationship to the case Patent applicant address No. J/Ozone-cho, Nishinomiya City, Hyogo Prefecture No. 26 name (
235) ShinMaywa Industries Co., Ltd. Representative Susumu Tamagawa 4 Agent Postal code 650 Address 1-3-11 Sannomiya-cho, Chuo-ku, Kobe-shi, Hyogo (1)
) Column for detailed explanation of the invention in the specification (2) Contents of amendment in column 7 for brief explanation of drawings in the specification (1) Change "Yoshishi" to "Yoi" on page 1, line 73 of the specification. ” is corrected. (2) Add "aspects" next to "synopsis" on page 1j, line 2 of the specification. that's all

Claims (1)

[Claims] (1) An industrial robot configured by connecting at least a rotating member or a rotating member to a support member, wherein the base end of the rotating member is inserted into the tip of another member and connected via an airtight seal. It has a connecting part, the proximal end of the rotating member is closed in the connecting part, and a drive device is provided on one side.
An industrial robot characterized by having an opening on the other side.